WO2004088394A3 - High-speed silicon-based electro-optic modulator - Google Patents

High-speed silicon-based electro-optic modulator Download PDF

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Publication number
WO2004088394A3
WO2004088394A3 PCT/US2004/008814 US2004008814W WO2004088394A3 WO 2004088394 A3 WO2004088394 A3 WO 2004088394A3 US 2004008814 W US2004008814 W US 2004008814W WO 2004088394 A3 WO2004088394 A3 WO 2004088394A3
Authority
WO
WIPO (PCT)
Prior art keywords
region
gate
relatively thin
dielectric
optic modulator
Prior art date
Application number
PCT/US2004/008814
Other languages
French (fr)
Other versions
WO2004088394A2 (en
Inventor
Robert Keith Montgomery
Margaret Ghiron
Prakash Gothoskar
Vipulkumar Patel
Kalpendu Shastri
Soham Pathak
Katherine A Yanushefski
Original Assignee
Sioptical Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sioptical Inc filed Critical Sioptical Inc
Priority to CA2519672A priority Critical patent/CA2519672C/en
Priority to JP2005518912A priority patent/JP4820649B2/en
Priority to EP04758207.7A priority patent/EP1613991B1/en
Publication of WO2004088394A2 publication Critical patent/WO2004088394A2/en
Publication of WO2004088394A3 publication Critical patent/WO2004088394A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G02F1/2257—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure the optical waveguides being made of semiconducting material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12142—Modulator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12159—Interferometer

Abstract

A silicon-based electro-optic modulator (30) is based on forming a gate region of a first conductivity to partially overly a body region of a second conductivity type, with a relatively thin dielectric layer (10) interposed between the contiguous portions of the gate and body regions (12, 10). The modulator may be formed on an SOI platform, with the body region formed in the relatively thin silicon surface layer of the SOI structure and the gate region formed of a relatively thin silicon layer (10) overlying the SOI structure. The doping in the gate and body regions is controlled to form lightly doped regions above and below the dielectric, thus defining the active region (16) of the device. Advantageously, the optical electric field essentially coincides with the free carrier concentration area in this active device region. The application of a modulation signal thus causes the simultaneous accumulation, depletion or inversion of free carriers on both sides of the dielectric at the same time, resulting in high speed operation.
PCT/US2004/008814 2003-03-25 2004-03-23 High-speed silicon-based electro-optic modulator WO2004088394A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CA2519672A CA2519672C (en) 2003-03-25 2004-03-23 High-speed silicon-based electro-optic modulator
JP2005518912A JP4820649B2 (en) 2003-03-25 2004-03-23 High-speed silicon-based electro-optic modulator
EP04758207.7A EP1613991B1 (en) 2003-03-25 2004-03-23 High-speed silicon-based electro-optic modulator

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US45724203P 2003-03-25 2003-03-25
US60/457,242 2003-03-25
US10/795,748 2004-03-08
US10/795,748 US6845198B2 (en) 2003-03-25 2004-03-08 High-speed silicon-based electro-optic modulator

Publications (2)

Publication Number Publication Date
WO2004088394A2 WO2004088394A2 (en) 2004-10-14
WO2004088394A3 true WO2004088394A3 (en) 2005-03-31

Family

ID=33135050

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/008814 WO2004088394A2 (en) 2003-03-25 2004-03-23 High-speed silicon-based electro-optic modulator

Country Status (7)

Country Link
US (1) US6845198B2 (en)
EP (1) EP1613991B1 (en)
JP (1) JP4820649B2 (en)
KR (1) KR100808305B1 (en)
CN (1) CN100359367C (en)
CA (1) CA2519672C (en)
WO (1) WO2004088394A2 (en)

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KR20050114696A (en) 2005-12-06
CA2519672C (en) 2012-11-13

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