WO2005010955A3 - Method and apparatus for real-time in-situ ion implantation with closed loop control - Google Patents
Method and apparatus for real-time in-situ ion implantation with closed loop control Download PDFInfo
- Publication number
- WO2005010955A3 WO2005010955A3 PCT/US2004/023420 US2004023420W WO2005010955A3 WO 2005010955 A3 WO2005010955 A3 WO 2005010955A3 US 2004023420 W US2004023420 W US 2004023420W WO 2005010955 A3 WO2005010955 A3 WO 2005010955A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- real
- time
- implantation
- ion implantation
- closed loop
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US48893503P | 2003-07-21 | 2003-07-21 | |
US60/488,935 | 2003-07-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005010955A2 WO2005010955A2 (en) | 2005-02-03 |
WO2005010955A3 true WO2005010955A3 (en) | 2005-08-11 |
Family
ID=34102806
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2004/023420 WO2005010955A2 (en) | 2003-07-21 | 2004-07-20 | Method and apparatus for real-time in-situ ion implantation with closed loop control |
Country Status (3)
Country | Link |
---|---|
US (1) | US7160742B2 (en) |
TW (1) | TW200507149A (en) |
WO (1) | WO2005010955A2 (en) |
Families Citing this family (11)
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US20060114478A1 (en) * | 2004-11-26 | 2006-06-01 | Applied Materials, Inc. | Evaluating effects of tilt angle in ion implantation |
US20070187844A1 (en) | 2006-02-10 | 2007-08-16 | Wintec Industries, Inc. | Electronic assembly with detachable components |
US7928591B2 (en) * | 2005-02-11 | 2011-04-19 | Wintec Industries, Inc. | Apparatus and method for predetermined component placement to a target platform |
JP4875886B2 (en) * | 2005-11-22 | 2012-02-15 | 株式会社日立ハイテクノロジーズ | Charged particle beam equipment |
US7816152B2 (en) * | 2007-04-11 | 2010-10-19 | WaferMaster, Inc. | In situ, ex situ and inline process monitoring, optimization and fabrication |
KR101588654B1 (en) * | 2007-08-10 | 2016-01-27 | 퀀텀 글로벌 테크놀로지스, 엘엘씨 | Methods and apparatus for ex situ seasoning of electronic device manufacturing process components |
US7724003B1 (en) * | 2007-09-07 | 2010-05-25 | Kla-Tencor Corporation | Substrate conditioning for corona charge control |
FR2941816B1 (en) * | 2009-02-05 | 2011-04-01 | Commissariat Energie Atomique | METHOD OF CHARACTERIZING A METHOD FOR ION IMPLANTATION |
US9704714B2 (en) * | 2015-04-16 | 2017-07-11 | Taiwan Semiconductor Manufacturing Co., Ltd | Method for controlling surface charge on wafer surface in semiconductor fabrication |
CA2987315A1 (en) | 2015-05-28 | 2016-12-01 | Basf Se | Polyurethanes with reduced aldehyde emission |
US11264205B2 (en) | 2019-12-06 | 2022-03-01 | Applied Materials, Inc. | Techniques for determining and correcting for expected dose variation during implantation of photoresist-coated substrates |
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US6157199A (en) * | 1997-12-26 | 2000-12-05 | Samsung Electronics Co., Ltd. | Method of monitoring ion-implantation process using photothermal response from ion-implanted sample, and monitoring apparatus of ion-implantation process |
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-
2004
- 2004-07-19 US US10/894,357 patent/US7160742B2/en not_active Expired - Fee Related
- 2004-07-20 WO PCT/US2004/023420 patent/WO2005010955A2/en active Application Filing
- 2004-07-21 TW TW093121775A patent/TW200507149A/en unknown
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4633138A (en) * | 1984-09-10 | 1986-12-30 | Hitachi, Ltd. | Ion implanter |
JPH04334859A (en) * | 1991-05-10 | 1992-11-20 | Hitachi Ltd | Scanning velocity control method for ion implantation |
EP0686995A1 (en) * | 1994-06-10 | 1995-12-13 | Eaton Corporation | An ion implantation device |
US5811823A (en) * | 1996-02-16 | 1998-09-22 | Eaton Corporation | Control mechanisms for dosimetry control in ion implantation systems |
EP0795888A2 (en) * | 1996-03-15 | 1997-09-17 | Applied Materials, Inc. | Scanning method for an ion implanter and apparatus therefor |
US5804981A (en) * | 1996-05-07 | 1998-09-08 | Advanced Micro Devices, Inc. | Method of detecting heavy metal impurities introduced into a silicon wafer during ion implantation |
US6157199A (en) * | 1997-12-26 | 2000-12-05 | Samsung Electronics Co., Ltd. | Method of monitoring ion-implantation process using photothermal response from ion-implanted sample, and monitoring apparatus of ion-implantation process |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 017, no. 183 (E - 1348) 9 April 1993 (1993-04-09) * |
Also Published As
Publication number | Publication date |
---|---|
US7160742B2 (en) | 2007-01-09 |
US20050074909A1 (en) | 2005-04-07 |
WO2005010955A2 (en) | 2005-02-03 |
TW200507149A (en) | 2005-02-16 |
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