WO2005019785A3 - Capacitive sensor - Google Patents

Capacitive sensor Download PDF

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Publication number
WO2005019785A3
WO2005019785A3 PCT/US2004/025825 US2004025825W WO2005019785A3 WO 2005019785 A3 WO2005019785 A3 WO 2005019785A3 US 2004025825 W US2004025825 W US 2004025825W WO 2005019785 A3 WO2005019785 A3 WO 2005019785A3
Authority
WO
WIPO (PCT)
Prior art keywords
plate
capacitive sensor
cavity
diaphragm
conductive layer
Prior art date
Application number
PCT/US2004/025825
Other languages
French (fr)
Other versions
WO2005019785A2 (en
Inventor
John O'dowd
Damien Joseph Mccartney
William Hunt
Eamon Hynes
John M Wynne
Patrick Crowley
John R Martin
Original Assignee
Analog Devices Inc
John O'dowd
Damien Joseph Mccartney
William Hunt
Eamon Hynes
John M Wynne
Patrick Crowley
John R Martin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Analog Devices Inc, John O'dowd, Damien Joseph Mccartney, William Hunt, Eamon Hynes, John M Wynne, Patrick Crowley, John R Martin filed Critical Analog Devices Inc
Priority to EP04780631A priority Critical patent/EP1682859A4/en
Priority to CN2004800247808A priority patent/CN1864054B/en
Priority to JP2006523296A priority patent/JP2007502416A/en
Publication of WO2005019785A2 publication Critical patent/WO2005019785A2/en
Publication of WO2005019785A3 publication Critical patent/WO2005019785A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0069—Electrical connection means from the sensor to its support
    • G01L19/0076—Electrical connection means from the sensor to its support using buried connections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/3025—Electromagnetic shielding

Abstract

A capacitive sensor including a housing having a hermetically sealed cavity, a plate in the cavity, a diaphragm forming a part of the cavity and spaced from the plate, a conductive layer on the first diaphragm, and a second conductive layer on the plate, the first and second conductive layers being the electrodes of a capacitor whose capacitance varies with the position of the diaphragm relative to the plate.
PCT/US2004/025825 2003-08-11 2004-08-10 Capacitive sensor WO2005019785A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP04780631A EP1682859A4 (en) 2003-08-11 2004-08-10 Capacitive sensor
CN2004800247808A CN1864054B (en) 2003-08-11 2004-08-10 Capacitive sensor
JP2006523296A JP2007502416A (en) 2003-08-11 2004-08-10 Capacitive sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US49414703P 2003-08-11 2003-08-11
US60/494,147 2003-08-11

Publications (2)

Publication Number Publication Date
WO2005019785A2 WO2005019785A2 (en) 2005-03-03
WO2005019785A3 true WO2005019785A3 (en) 2006-08-03

Family

ID=34215855

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/025825 WO2005019785A2 (en) 2003-08-11 2004-08-10 Capacitive sensor

Country Status (5)

Country Link
US (1) US7353711B2 (en)
EP (1) EP1682859A4 (en)
JP (1) JP2007502416A (en)
CN (1) CN1864054B (en)
WO (1) WO2005019785A2 (en)

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US20050229710A1 (en) 2005-10-20
WO2005019785A2 (en) 2005-03-03
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EP1682859A4 (en) 2007-08-22
CN1864054B (en) 2012-08-22
US7353711B2 (en) 2008-04-08
CN1864054A (en) 2006-11-15
JP2007502416A (en) 2007-02-08

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