WO2005081940A3 - Magnetically enhanced, inductively coupled plasma source for a focused ion beam system - Google Patents

Magnetically enhanced, inductively coupled plasma source for a focused ion beam system Download PDF

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Publication number
WO2005081940A3
WO2005081940A3 PCT/US2005/005643 US2005005643W WO2005081940A3 WO 2005081940 A3 WO2005081940 A3 WO 2005081940A3 US 2005005643 W US2005005643 W US 2005005643W WO 2005081940 A3 WO2005081940 A3 WO 2005081940A3
Authority
WO
WIPO (PCT)
Prior art keywords
ion beam
inductively coupled
coupled plasma
plasma source
focused ion
Prior art date
Application number
PCT/US2005/005643
Other languages
French (fr)
Other versions
WO2005081940A2 (en
Inventor
John Keller
Noel Smith
Roderick Boswell
Scipioni Lawrence
Christine Charles
Orson Sutherland
Original Assignee
Fei Co
Univ Australian
John Keller
Noel Smith
Roderick Boswell
Scipioni Lawrence
Christine Charles
Orson Sutherland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fei Co, Univ Australian, John Keller, Noel Smith, Roderick Boswell, Scipioni Lawrence, Christine Charles, Orson Sutherland filed Critical Fei Co
Priority to JP2006554300A priority Critical patent/JP5172154B2/en
Priority to EP05713954A priority patent/EP1725697A4/en
Publication of WO2005081940A2 publication Critical patent/WO2005081940A2/en
Publication of WO2005081940A3 publication Critical patent/WO2005081940A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H01J37/3211—Antennas, e.g. particular shapes of coils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H01J37/32669—Particular magnets or magnet arrangements for controlling the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0815—Methods of ionisation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

The present invention provides an inductively coupled, magnetically enhanced ion beam source (10), suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source (10).
PCT/US2005/005643 2004-02-20 2005-02-18 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system WO2005081940A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006554300A JP5172154B2 (en) 2004-02-20 2005-02-18 Magnetically amplified inductively coupled plasma source for focused ion beam systems
EP05713954A EP1725697A4 (en) 2004-02-20 2005-02-18 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US54614204P 2004-02-20 2004-02-20
US60/546,142 2004-02-20
US10/988,745 US7241361B2 (en) 2004-02-20 2004-11-13 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system
US10/988,745 2004-11-13

Publications (2)

Publication Number Publication Date
WO2005081940A2 WO2005081940A2 (en) 2005-09-09
WO2005081940A3 true WO2005081940A3 (en) 2007-07-12

Family

ID=34864552

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/005643 WO2005081940A2 (en) 2004-02-20 2005-02-18 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system

Country Status (4)

Country Link
US (5) US7241361B2 (en)
EP (1) EP1725697A4 (en)
JP (1) JP5172154B2 (en)
WO (1) WO2005081940A2 (en)

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Also Published As

Publication number Publication date
US20100294648A1 (en) 2010-11-25
US9640367B2 (en) 2017-05-02
US7241361B2 (en) 2007-07-10
US8168957B2 (en) 2012-05-01
US20150130348A1 (en) 2015-05-14
US20080017319A1 (en) 2008-01-24
EP1725697A4 (en) 2009-11-25
WO2005081940A2 (en) 2005-09-09
US7670455B2 (en) 2010-03-02
JP5172154B2 (en) 2013-03-27
US20120319000A1 (en) 2012-12-20
US20050183667A1 (en) 2005-08-25
JP2007529091A (en) 2007-10-18
US8829468B2 (en) 2014-09-09
EP1725697A2 (en) 2006-11-29

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