WO2005098984A3 - Piezoelectric devices and methods and circuits for driving same - Google Patents
Piezoelectric devices and methods and circuits for driving same Download PDFInfo
- Publication number
- WO2005098984A3 WO2005098984A3 PCT/US2005/011579 US2005011579W WO2005098984A3 WO 2005098984 A3 WO2005098984 A3 WO 2005098984A3 US 2005011579 W US2005011579 W US 2005011579W WO 2005098984 A3 WO2005098984 A3 WO 2005098984A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- circuit
- piezoelectric actuator
- drive
- charge packets
- circuits
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/802—Drive or control circuitry or methods for piezoelectric or electrostrictive devices not otherwise provided for
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/816,000 US7287965B2 (en) | 2004-04-02 | 2004-04-02 | Piezoelectric devices and methods and circuits for driving same |
US10/816,000 | 2004-04-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005098984A2 WO2005098984A2 (en) | 2005-10-20 |
WO2005098984A3 true WO2005098984A3 (en) | 2007-07-12 |
Family
ID=35059897
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/011579 WO2005098984A2 (en) | 2004-04-02 | 2005-04-04 | Piezoelectric devices and methods and circuits for driving same |
Country Status (2)
Country | Link |
---|---|
US (3) | US7287965B2 (en) |
WO (1) | WO2005098984A2 (en) |
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JP6908137B2 (en) * | 2018-01-30 | 2021-07-21 | 株式会社村田製作所 | Drive device and fluid control device |
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US11730058B2 (en) * | 2018-09-20 | 2023-08-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated heater (and related method) to recover degraded piezoelectric device performance |
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-
2004
- 2004-04-02 US US10/816,000 patent/US7287965B2/en not_active Expired - Fee Related
-
2005
- 2005-04-04 WO PCT/US2005/011579 patent/WO2005098984A2/en active Application Filing
-
2007
- 2007-09-24 US US11/902,580 patent/US7969064B2/en not_active Expired - Fee Related
-
2010
- 2010-12-23 US US12/929,045 patent/US20110256004A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4939405A (en) * | 1987-12-28 | 1990-07-03 | Misuzuerie Co. Ltd. | Piezo-electric vibrator pump |
US6071088A (en) * | 1997-04-15 | 2000-06-06 | Face International Corp. | Piezoelectrically actuated piston pump |
US6104127A (en) * | 1997-05-14 | 2000-08-15 | Honda Giken Kogyo Kabushiki Kaisha | Piezoelectric type actuator having stable resonance frequency |
Also Published As
Publication number | Publication date |
---|---|
US20080018200A1 (en) | 2008-01-24 |
US7287965B2 (en) | 2007-10-30 |
US20110256004A1 (en) | 2011-10-20 |
WO2005098984A2 (en) | 2005-10-20 |
US20050225202A1 (en) | 2005-10-13 |
US7969064B2 (en) | 2011-06-28 |
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