WO2005100961A3 - Imaging semiconductor strucutures using solid state illumination - Google Patents
Imaging semiconductor strucutures using solid state illumination Download PDFInfo
- Publication number
- WO2005100961A3 WO2005100961A3 PCT/US2005/013448 US2005013448W WO2005100961A3 WO 2005100961 A3 WO2005100961 A3 WO 2005100961A3 US 2005013448 W US2005013448 W US 2005013448W WO 2005100961 A3 WO2005100961 A3 WO 2005100961A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- solid state
- strucutures
- state illumination
- imaging semiconductor
- imaging
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
- G01N21/9505—Wafer internal defects, e.g. microcracks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Landscapes
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05745456.3A EP1738156A4 (en) | 2004-04-19 | 2005-04-19 | Imaging semiconductor strucutures using solid state illumination |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US56385604P | 2004-04-19 | 2004-04-19 | |
US60/563,856 | 2004-04-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005100961A2 WO2005100961A2 (en) | 2005-10-27 |
WO2005100961A3 true WO2005100961A3 (en) | 2007-02-08 |
Family
ID=35150586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/013448 WO2005100961A2 (en) | 2004-04-19 | 2005-04-19 | Imaging semiconductor strucutures using solid state illumination |
Country Status (4)
Country | Link |
---|---|
US (1) | US8077305B2 (en) |
EP (1) | EP1738156A4 (en) |
TW (1) | TWI302756B (en) |
WO (1) | WO2005100961A2 (en) |
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- 2005-04-19 EP EP05745456.3A patent/EP1738156A4/en not_active Withdrawn
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- 2005-04-19 TW TW094112503A patent/TWI302756B/en not_active IP Right Cessation
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US8496356B2 (en) | 2002-05-08 | 2013-07-30 | Phoseon Technology, Inc. | High efficiency solid-state light source and methods of use and manufacture |
US8637332B2 (en) | 2004-03-18 | 2014-01-28 | Phoseon Technology, Inc. | Micro-reflectors on a substrate for high-density LED array |
Also Published As
Publication number | Publication date |
---|---|
TW200539489A (en) | 2005-12-01 |
US20050231713A1 (en) | 2005-10-20 |
WO2005100961A2 (en) | 2005-10-27 |
TWI302756B (en) | 2008-11-01 |
EP1738156A2 (en) | 2007-01-03 |
EP1738156A4 (en) | 2017-09-27 |
US8077305B2 (en) | 2011-12-13 |
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