WO2005100961A3 - Imaging semiconductor strucutures using solid state illumination - Google Patents

Imaging semiconductor strucutures using solid state illumination Download PDF

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Publication number
WO2005100961A3
WO2005100961A3 PCT/US2005/013448 US2005013448W WO2005100961A3 WO 2005100961 A3 WO2005100961 A3 WO 2005100961A3 US 2005013448 W US2005013448 W US 2005013448W WO 2005100961 A3 WO2005100961 A3 WO 2005100961A3
Authority
WO
WIPO (PCT)
Prior art keywords
solid state
strucutures
state illumination
imaging semiconductor
imaging
Prior art date
Application number
PCT/US2005/013448
Other languages
French (fr)
Other versions
WO2005100961A2 (en
Inventor
Mark D Owen
Francois Vlach
Steven J Olson
Original Assignee
Phoseon Technology Inc
Mark D Owen
Francois Vlach
Steven J Olson
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Phoseon Technology Inc, Mark D Owen, Francois Vlach, Steven J Olson filed Critical Phoseon Technology Inc
Priority to EP05745456.3A priority Critical patent/EP1738156A4/en
Publication of WO2005100961A2 publication Critical patent/WO2005100961A2/en
Publication of WO2005100961A3 publication Critical patent/WO2005100961A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G01N21/9505—Wafer internal defects, e.g. microcracks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Abstract

The invention consists of a camera, light sources, lenses and software algorithms that are used to image and inspect semiconductor structures, including through infrared radiation. The use of various configurations of solid state lighting and software algorithms enhances the imaging and inspection.
PCT/US2005/013448 2004-04-19 2005-04-19 Imaging semiconductor strucutures using solid state illumination WO2005100961A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP05745456.3A EP1738156A4 (en) 2004-04-19 2005-04-19 Imaging semiconductor strucutures using solid state illumination

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US56385604P 2004-04-19 2004-04-19
US60/563,856 2004-04-19

Publications (2)

Publication Number Publication Date
WO2005100961A2 WO2005100961A2 (en) 2005-10-27
WO2005100961A3 true WO2005100961A3 (en) 2007-02-08

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/013448 WO2005100961A2 (en) 2004-04-19 2005-04-19 Imaging semiconductor strucutures using solid state illumination

Country Status (4)

Country Link
US (1) US8077305B2 (en)
EP (1) EP1738156A4 (en)
TW (1) TWI302756B (en)
WO (1) WO2005100961A2 (en)

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TWI302756B (en) 2008-11-01
EP1738156A4 (en) 2017-09-27
US20050231713A1 (en) 2005-10-20
TW200539489A (en) 2005-12-01
US8077305B2 (en) 2011-12-13
EP1738156A2 (en) 2007-01-03
WO2005100961A2 (en) 2005-10-27

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