WO2005101280A3 - Controller and method to mediate data collection from smart sensors for fab applications - Google Patents

Controller and method to mediate data collection from smart sensors for fab applications Download PDF

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Publication number
WO2005101280A3
WO2005101280A3 PCT/US2005/011527 US2005011527W WO2005101280A3 WO 2005101280 A3 WO2005101280 A3 WO 2005101280A3 US 2005011527 W US2005011527 W US 2005011527W WO 2005101280 A3 WO2005101280 A3 WO 2005101280A3
Authority
WO
WIPO (PCT)
Prior art keywords
controller
data collection
smart sensors
mediate data
fab
Prior art date
Application number
PCT/US2005/011527
Other languages
French (fr)
Other versions
WO2005101280A2 (en
Inventor
Uzi Lev-Ami
Guenter Sifnatsch
Mark Attwood
Original Assignee
Mks Instr Inc
Uzi Lev-Ami
Guenter Sifnatsch
Mark Attwood
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc, Uzi Lev-Ami, Guenter Sifnatsch, Mark Attwood filed Critical Mks Instr Inc
Publication of WO2005101280A2 publication Critical patent/WO2005101280A2/en
Publication of WO2005101280A3 publication Critical patent/WO2005101280A3/en

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0221—Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32181—Monitor production, assembly apparatus with multiple sensors
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37494—Intelligent sensor, data handling incorporated in sensor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.
PCT/US2005/011527 2004-04-07 2005-04-06 Controller and method to mediate data collection from smart sensors for fab applications WO2005101280A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/819,903 US7146237B2 (en) 2004-04-07 2004-04-07 Controller and method to mediate data collection from smart sensors for fab applications
US10/819,903 2004-04-07

Publications (2)

Publication Number Publication Date
WO2005101280A2 WO2005101280A2 (en) 2005-10-27
WO2005101280A3 true WO2005101280A3 (en) 2006-12-28

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/011527 WO2005101280A2 (en) 2004-04-07 2005-04-06 Controller and method to mediate data collection from smart sensors for fab applications

Country Status (3)

Country Link
US (2) US7146237B2 (en)
TW (1) TWI368930B (en)
WO (1) WO2005101280A2 (en)

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Also Published As

Publication number Publication date
US20050228529A1 (en) 2005-10-13
TWI368930B (en) 2012-07-21
TW200605148A (en) 2006-02-01
US7693687B2 (en) 2010-04-06
WO2005101280A2 (en) 2005-10-27
US7146237B2 (en) 2006-12-05
US20070150235A1 (en) 2007-06-28

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