WO2005103504A3 - High pressure capillary micro-fluidic valve device and a method of fabricating same - Google Patents

High pressure capillary micro-fluidic valve device and a method of fabricating same Download PDF

Info

Publication number
WO2005103504A3
WO2005103504A3 PCT/US2005/013306 US2005013306W WO2005103504A3 WO 2005103504 A3 WO2005103504 A3 WO 2005103504A3 US 2005013306 W US2005013306 W US 2005013306W WO 2005103504 A3 WO2005103504 A3 WO 2005103504A3
Authority
WO
WIPO (PCT)
Prior art keywords
housing
valve
high pressure
valve device
valve body
Prior art date
Application number
PCT/US2005/013306
Other languages
French (fr)
Other versions
WO2005103504A2 (en
Inventor
Robert W Crocker
Pamela F Caton
Geoff C Gerhardt
Original Assignee
Waters Investments Ltd
Robert W Crocker
Pamela F Caton
Geoff C Gerhardt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Waters Investments Ltd, Robert W Crocker, Pamela F Caton, Geoff C Gerhardt filed Critical Waters Investments Ltd
Priority to JP2007509568A priority Critical patent/JP4909887B2/en
Priority to DE200511000923 priority patent/DE112005000923A5/en
Priority to GB0623198A priority patent/GB2431712B/en
Publication of WO2005103504A2 publication Critical patent/WO2005103504A2/en
Publication of WO2005103504A3 publication Critical patent/WO2005103504A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C1/00—Circuit elements having no moving parts
    • F15C1/02—Details, e.g. special constructional devices for circuits with fluid elements, such as resistances, capacitive circuit elements; devices preventing reaction coupling in composite elements ; Switch boards; Programme devices
    • F15C1/04—Means for controlling fluid streams to fluid devices, e.g. by electric signals or other signals, no mixing taking place between the signal and the flow to be controlled
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0021—No-moving-parts valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0044—Electric operating means therefor using thermo-electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D3/00—Devices using other cold materials; Devices using cold-storage bodies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/1624—Destructible or deformable element controlled
    • Y10T137/1797—Heat destructible or fusible
    • Y10T137/1812—In fluid flow path
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/218—Means to regulate or vary operation of device
    • Y10T137/2191—By non-fluid energy field affecting input [e.g., transducer]
    • Y10T137/2196—Acoustical or thermal energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4456—With liquid valves or liquid trap seals
    • Y10T137/4643—Liquid valves

Abstract

A freeze-thaw valve and a method of micro-machining the freeze-thaw valve is provided and includes a valve housing, wherein the valve housing defines a housing cavity and includes a housing inlet, a housing vent, a capillary tubing inlet and a capillary tubing outlet. A valve body is provided, at least a portion of which is lithographically constructed, wherein the valve body includes a refrigerant inlet, a refrigerant outlet and an expansion chamber. The expansion chamber is disposed to communicate the refrigerant inlet with the refrigerant outlet and includes a restriction region having a flow restriction. Additionally, the valve body is disposed within the housing cavity to form an insulating channel between the valve housing and the valve body.
PCT/US2005/013306 2004-04-21 2005-04-19 High pressure capillary micro-fluidic valve device and a method of fabricating same WO2005103504A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007509568A JP4909887B2 (en) 2004-04-21 2005-04-19 High pressure capillary microfluidic valve device and manufacturing method thereof
DE200511000923 DE112005000923A5 (en) 2004-04-21 2005-04-19 Microfluidic high-pressure capillary valve device and a method for producing this device
GB0623198A GB2431712B (en) 2004-04-21 2005-04-19 High pressure capillary micro-fluidic valve device and a method of fabricating same

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US56425604P 2004-04-21 2004-04-21
US60/564,256 2004-04-21
US10/941,216 US7204264B2 (en) 2004-04-21 2004-09-15 High pressure capillary micro-fluidic valve device and a method of fabricating same
US10/941,216 2004-09-15

Publications (2)

Publication Number Publication Date
WO2005103504A2 WO2005103504A2 (en) 2005-11-03
WO2005103504A3 true WO2005103504A3 (en) 2007-06-07

Family

ID=35135239

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/013306 WO2005103504A2 (en) 2004-04-21 2005-04-19 High pressure capillary micro-fluidic valve device and a method of fabricating same

Country Status (5)

Country Link
US (1) US7204264B2 (en)
JP (1) JP4909887B2 (en)
DE (1) DE112005000923A5 (en)
GB (1) GB2431712B (en)
WO (1) WO2005103504A2 (en)

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US7716945B2 (en) * 2005-04-07 2010-05-18 Thermo Fisher Scientific (Asheville) Llc Pressure equalization port apparatus and method for a refrigeration unit
WO2007021810A2 (en) * 2005-08-11 2007-02-22 Eksigent Technologies, Llc Microfluidic methods and apparatuses for fluid mixing and valving
US8145429B2 (en) 2009-01-09 2012-03-27 Baker Hughes Incorporated System and method for sampling and analyzing downhole formation fluids
US9764323B2 (en) 2014-09-18 2017-09-19 Waters Technologies Corporation Device and methods using porous media in fluidic devices
US11002262B2 (en) * 2018-02-26 2021-05-11 Valco Instruments Company, L.P. Pump for liquid chromatography with pressure sensor
CN112169851B (en) * 2020-10-13 2022-03-29 中国科学院微电子研究所 Micro-channel inlet cover plate and preparation and use methods thereof
CN113846000A (en) * 2021-08-16 2021-12-28 向化英 Plant chlorophyll body extraction equipment based on freeze thawing method

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US7004184B2 (en) * 2000-07-24 2006-02-28 The Reagents Of The University Of Michigan Compositions and methods for liquid metering in microchannels

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Also Published As

Publication number Publication date
WO2005103504A2 (en) 2005-11-03
GB2431712A (en) 2007-05-02
JP2007533936A (en) 2007-11-22
GB2431712B (en) 2009-03-04
GB0623198D0 (en) 2006-12-27
DE112005000923A5 (en) 2011-11-10
JP4909887B2 (en) 2012-04-04
US20050236055A1 (en) 2005-10-27
US7204264B2 (en) 2007-04-17

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