WO2005104140A1 - Low dielectric constant porous films - Google Patents
Low dielectric constant porous films Download PDFInfo
- Publication number
- WO2005104140A1 WO2005104140A1 PCT/US2005/007408 US2005007408W WO2005104140A1 WO 2005104140 A1 WO2005104140 A1 WO 2005104140A1 US 2005007408 W US2005007408 W US 2005007408W WO 2005104140 A1 WO2005104140 A1 WO 2005104140A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- film
- dielectric film
- porous dielectric
- silicon based
- based film
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02203—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being porous
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02343—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a liquid
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
- H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
- H01L21/31695—Deposition of porous oxides or porous glassy oxides or oxide based porous glass
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/7682—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing the dielectric comprising air gaps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Formation Of Insulating Films (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/808,231 | 2004-03-23 | ||
US10/808,231 US7060638B2 (en) | 2004-03-23 | 2004-03-23 | Method of forming low dielectric constant porous films |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005104140A1 true WO2005104140A1 (en) | 2005-11-03 |
Family
ID=34990572
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/007408 WO2005104140A1 (en) | 2004-03-23 | 2005-03-07 | Low dielectric constant porous films |
Country Status (3)
Country | Link |
---|---|
US (1) | US7060638B2 (en) |
TW (1) | TWI296125B (en) |
WO (1) | WO2005104140A1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7466534B2 (en) * | 2006-06-06 | 2008-12-16 | International Business Machines Corporation | High capacitance density vertical natural capacitors |
RU2468458C2 (en) * | 2006-12-15 | 2012-11-27 | Дженерал Электрик Компани | Nonlinear dielectrics used as electric insulating material |
US8399349B2 (en) | 2006-04-18 | 2013-03-19 | Air Products And Chemicals, Inc. | Materials and methods of forming controlled void |
RU2544646C2 (en) * | 2012-10-31 | 2015-03-20 | Общество с ограниченной ответственностью "Спецкомпозит" | High-frequency composite dielectric |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
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US20050260420A1 (en) * | 2003-04-01 | 2005-11-24 | Collins Martha J | Low dielectric materials and methods for making same |
US20060092963A1 (en) * | 2004-10-28 | 2006-05-04 | Ajay Bakre | Architecture and method for efficient application of QoS in a WLAN |
US7297376B1 (en) | 2006-07-07 | 2007-11-20 | Applied Materials, Inc. | Method to reduce gas-phase reactions in a PECVD process with silicon and organic precursors to deposit defect-free initial layers |
JP5026008B2 (en) * | 2006-07-14 | 2012-09-12 | 東京応化工業株式会社 | Film-forming composition |
WO2008091900A1 (en) * | 2007-01-26 | 2008-07-31 | Applied Materials, Inc. | Uv curing of pecvd-deposited sacrificial polymer films for air-gap ild |
WO2008094792A1 (en) * | 2007-01-29 | 2008-08-07 | Applied Materials, Inc. | Novel air gap integration scheme |
US9337054B2 (en) * | 2007-06-28 | 2016-05-10 | Entegris, Inc. | Precursors for silicon dioxide gap fill |
US7879683B2 (en) * | 2007-10-09 | 2011-02-01 | Applied Materials, Inc. | Methods and apparatus of creating airgap in dielectric layers for the reduction of RC delay |
US20090093100A1 (en) * | 2007-10-09 | 2009-04-09 | Li-Qun Xia | Method for forming an air gap in multilevel interconnect structure |
US11792918B2 (en) | 2021-01-28 | 2023-10-17 | Unimicron Technology Corp. | Co-axial via structure |
Citations (3)
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WO2003088344A1 (en) * | 2002-04-10 | 2003-10-23 | Honeywell International, Inc. | Low metal porous silica dielectric for integral circuit applications |
WO2003088343A1 (en) * | 2002-04-10 | 2003-10-23 | Honeywell International, Inc. | New porogens for porous silica dielectric for integral circuit applications |
EP1416501A2 (en) * | 2002-10-29 | 2004-05-06 | Samsung Electronics Co., Ltd. | Composition for preparing porous dielectric thin film containing saccharides porogen |
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US5324683A (en) * | 1993-06-02 | 1994-06-28 | Motorola, Inc. | Method of forming a semiconductor structure having an air region |
US5470801A (en) * | 1993-06-28 | 1995-11-28 | Lsi Logic Corporation | Low dielectric constant insulation layer for integrated circuit structure and method of making same |
US6652922B1 (en) * | 1995-06-15 | 2003-11-25 | Alliedsignal Inc. | Electron-beam processed films for microelectronics structures |
US6380105B1 (en) * | 1996-11-14 | 2002-04-30 | Texas Instruments Incorporated | Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates |
JPH10256363A (en) * | 1997-03-13 | 1998-09-25 | Sony Corp | Semiconductor device and its manufacture |
AU7831498A (en) * | 1997-06-09 | 1998-12-30 | E.I. Du Pont De Nemours And Company | Low density silica particles and method for their preparation |
KR19990030660A (en) * | 1997-10-02 | 1999-05-06 | 윤종용 | Method of forming interlayer insulating film of semiconductor device using electron beam |
US6147009A (en) * | 1998-06-29 | 2000-11-14 | International Business Machines Corporation | Hydrogenated oxidized silicon carbon material |
US6312793B1 (en) * | 1999-05-26 | 2001-11-06 | International Business Machines Corporation | Multiphase low dielectric constant material |
US6528153B1 (en) * | 1999-09-30 | 2003-03-04 | Novellus Systems, Inc. | Low dielectric constant porous materials having improved mechanical strength |
US6541367B1 (en) * | 2000-01-18 | 2003-04-01 | Applied Materials, Inc. | Very low dielectric constant plasma-enhanced CVD films |
US6582777B1 (en) * | 2000-02-17 | 2003-06-24 | Applied Materials Inc. | Electron beam modification of CVD deposited low dielectric constant materials |
US6559070B1 (en) * | 2000-04-11 | 2003-05-06 | Applied Materials, Inc. | Mesoporous silica films with mobile ion gettering and accelerated processing |
US6495479B1 (en) * | 2000-05-05 | 2002-12-17 | Honeywell International, Inc. | Simplified method to produce nanoporous silicon-based films |
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US6441491B1 (en) * | 2000-10-25 | 2002-08-27 | International Business Machines Corporation | Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device containing the same |
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US6790789B2 (en) * | 2000-10-25 | 2004-09-14 | International Business Machines Corporation | Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device made |
US6583048B2 (en) * | 2001-01-17 | 2003-06-24 | Air Products And Chemicals, Inc. | Organosilicon precursors for interlayer dielectric films with low dielectric constants |
US6780499B2 (en) * | 2001-05-03 | 2004-08-24 | International Business Machines Corporation | Ordered two-phase dielectric film, and semiconductor device containing the same |
US6605549B2 (en) * | 2001-09-29 | 2003-08-12 | Intel Corporation | Method for improving nucleation and adhesion of CVD and ALD films deposited onto low-dielectric-constant dielectrics |
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US6846515B2 (en) * | 2002-04-17 | 2005-01-25 | Air Products And Chemicals, Inc. | Methods for using porogens and/or porogenated precursors to provide porous organosilica glass films with low dielectric constants |
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-
2004
- 2004-03-23 US US10/808,231 patent/US7060638B2/en active Active
-
2005
- 2005-03-07 WO PCT/US2005/007408 patent/WO2005104140A1/en active Application Filing
- 2005-03-11 TW TW094107531A patent/TWI296125B/en active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003088344A1 (en) * | 2002-04-10 | 2003-10-23 | Honeywell International, Inc. | Low metal porous silica dielectric for integral circuit applications |
WO2003088343A1 (en) * | 2002-04-10 | 2003-10-23 | Honeywell International, Inc. | New porogens for porous silica dielectric for integral circuit applications |
EP1416501A2 (en) * | 2002-10-29 | 2004-05-06 | Samsung Electronics Co., Ltd. | Composition for preparing porous dielectric thin film containing saccharides porogen |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8399349B2 (en) | 2006-04-18 | 2013-03-19 | Air Products And Chemicals, Inc. | Materials and methods of forming controlled void |
US8846522B2 (en) | 2006-04-18 | 2014-09-30 | Air Products And Chemicals, Inc. | Materials and methods of forming controlled void |
US7466534B2 (en) * | 2006-06-06 | 2008-12-16 | International Business Machines Corporation | High capacitance density vertical natural capacitors |
US7643268B2 (en) | 2006-06-06 | 2010-01-05 | International Business Machines Corporation | High capacitance density vertical natural capacitors |
US7866015B2 (en) | 2006-06-06 | 2011-01-11 | International Business Machines Corporation | High capacitance density vertical natural capacitors |
RU2468458C2 (en) * | 2006-12-15 | 2012-11-27 | Дженерал Электрик Компани | Nonlinear dielectrics used as electric insulating material |
RU2544646C2 (en) * | 2012-10-31 | 2015-03-20 | Общество с ограниченной ответственностью "Спецкомпозит" | High-frequency composite dielectric |
Also Published As
Publication number | Publication date |
---|---|
TWI296125B (en) | 2008-04-21 |
US7060638B2 (en) | 2006-06-13 |
US20050215065A1 (en) | 2005-09-29 |
TW200534374A (en) | 2005-10-16 |
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