WO2005124289A3 - Encoder scale error compensation employing comparison among multiple detectors - Google Patents
Encoder scale error compensation employing comparison among multiple detectors Download PDFInfo
- Publication number
- WO2005124289A3 WO2005124289A3 PCT/US2005/019390 US2005019390W WO2005124289A3 WO 2005124289 A3 WO2005124289 A3 WO 2005124289A3 US 2005019390 W US2005019390 W US 2005019390W WO 2005124289 A3 WO2005124289 A3 WO 2005124289A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- scale
- encoder
- calculated
- values
- position error
- Prior art date
Links
- 238000011065 in-situ storage Methods 0.000 abstract 2
- 238000005259 measurement Methods 0.000 abstract 2
- 230000003287 optical effect Effects 0.000 abstract 1
- 230000000737 periodic effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/867,096 | 2004-06-14 | ||
US10/867,096 US7126109B2 (en) | 2004-06-14 | 2004-06-14 | Encoder scale error compensation employing comparison among multiple detectors |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005124289A2 WO2005124289A2 (en) | 2005-12-29 |
WO2005124289A3 true WO2005124289A3 (en) | 2006-05-04 |
Family
ID=35459537
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/019390 WO2005124289A2 (en) | 2004-06-14 | 2005-06-02 | Encoder scale error compensation employing comparison among multiple detectors |
Country Status (2)
Country | Link |
---|---|
US (1) | US7126109B2 (en) |
WO (1) | WO2005124289A2 (en) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8882657B2 (en) * | 2003-03-07 | 2014-11-11 | Intuitive Surgical Operations, Inc. | Instrument having radio frequency identification systems and methods for use |
JP4768248B2 (en) * | 2004-10-13 | 2011-09-07 | 株式会社ミツトヨ | Encoder output signal correction apparatus and method |
US7476843B2 (en) * | 2005-12-23 | 2009-01-13 | Delphi Technologies, Inc. | Method for determining the position of a first moving component relative to a second component and device for applying said method |
CN101356623B (en) | 2006-01-19 | 2012-05-09 | 株式会社尼康 | Moving body drive method, moving body drive system, pattern formation method, pattern formation device, exposure method, exposure device, and device fabrication method |
US7865038B2 (en) * | 2006-04-04 | 2011-01-04 | Synaptics Incorporated | Resolution and sensitivity balance metric |
CN101636638B (en) * | 2006-06-19 | 2013-06-05 | 杰斯集团公司 | Optical position transducer systems and methods employing reflected illumination |
US8013982B2 (en) * | 2006-08-31 | 2011-09-06 | Nikon Corporation | Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method |
TWI653511B (en) * | 2006-08-31 | 2019-03-11 | 日商尼康股份有限公司 | Exposure apparatus, exposure method, and component manufacturing method |
CN104460241B (en) | 2006-08-31 | 2017-04-05 | 株式会社尼康 | Movable body drive system and method, patterning device and method, exposure device and method, assembly manufacture method |
TWI596656B (en) | 2006-09-01 | 2017-08-21 | 尼康股份有限公司 | Moving body driving method and moving body driving system, pattern forming method and apparatus, exposure method and apparatus, element manufacturing method, and correction method |
KR101452524B1 (en) | 2006-09-01 | 2014-10-21 | 가부시키가이샤 니콘 | Mobile body driving method, mobile body driving system, pattern forming method and apparatus, exposure method and apparatus and device manufacturing method |
US7619207B2 (en) * | 2006-11-08 | 2009-11-17 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
EP1923670B1 (en) * | 2006-11-17 | 2010-03-17 | AMO Automatisierung Messtechnik Optik GmbH | Position measuring device |
JP4276270B2 (en) * | 2007-02-20 | 2009-06-10 | ファナック株式会社 | Machine tool with workpiece reference position setting function by contact detection |
US7999912B2 (en) * | 2007-05-08 | 2011-08-16 | Asml Netherlands B.V. | Lithographic apparatus and sensor calibration method |
JP4824635B2 (en) * | 2007-06-15 | 2011-11-30 | 株式会社 ソキア・トプコン | Angle correction method for rotary encoder |
US7840372B2 (en) | 2007-07-06 | 2010-11-23 | The University Of British Columbia | Self-calibration method and apparatus for on-axis rotary encoders |
US7852969B2 (en) * | 2007-07-30 | 2010-12-14 | Mitutoyo Corporation | System and method for dynamic calibration of a quadrature encoder |
NL1036474A1 (en) * | 2008-02-08 | 2009-08-11 | Asml Netherlands Bv | Lithographic apparatus and calibration method. |
US7898763B2 (en) * | 2009-01-13 | 2011-03-01 | International Business Machines Corporation | Servo pattern architecture to uncouple position error determination from linear position information |
US8493572B2 (en) | 2010-05-05 | 2013-07-23 | Mitutoyo Corporation | Optical encoder having contamination and defect resistant signal processing |
JP5932285B2 (en) * | 2011-10-14 | 2016-06-08 | キヤノン株式会社 | Encoder and device equipped with the same |
GB201207800D0 (en) * | 2012-05-03 | 2012-06-13 | Phase Focus Ltd | Improvements in providing image data |
EP2904453B1 (en) | 2012-10-01 | 2022-11-02 | ASML Netherlands B.V. | A method for calibration of an encoder scale and a lithographic apparatus |
JP6207208B2 (en) * | 2013-04-12 | 2017-10-04 | キヤノン株式会社 | Position detection means |
JP5822008B1 (en) * | 2014-08-08 | 2015-11-24 | 日本精工株式会社 | Angle detection device, motor equipped with this angle detection device, torque sensor, electric power steering device, and automobile |
CN114894238A (en) * | 2022-05-06 | 2022-08-12 | 微传智能科技(常州)有限公司 | Calibration compensation device, system and method for plate-level magnetic encoding |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4580046A (en) * | 1981-04-13 | 1986-04-01 | Tokyo Kogaku Kikai Kabushiki Kaisha | Displacement measuring device utilizing an incremental code |
US5066129A (en) * | 1989-08-30 | 1991-11-19 | Kabushiki Kaisha Okuma Tekkosho | Optical linear encoder with light quantity calabration |
US5438330A (en) * | 1991-10-28 | 1995-08-01 | Nikon Corporation | Absolute encoder |
US6828783B2 (en) * | 2001-11-16 | 2004-12-07 | Dr. Johannes Heidenhain Gmbh | Angle measuring instrument for a rotating shaft |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4631520A (en) | 1984-06-08 | 1986-12-23 | Dynamics Research Corporation | Position encoder compensation system |
US6029363A (en) | 1998-04-03 | 2000-02-29 | Mitutoyo Corporation | Self-calibrating position transducer system and method |
US6686585B2 (en) | 2001-09-19 | 2004-02-03 | Microe Systems Corporation | Position encoder with scale calibration |
ATE401244T1 (en) | 2001-11-02 | 2008-08-15 | Gsi Group Corp | ENCODER SELF-CALIBRATION APPARATUS AND METHOD |
-
2004
- 2004-06-14 US US10/867,096 patent/US7126109B2/en not_active Expired - Fee Related
-
2005
- 2005-06-02 WO PCT/US2005/019390 patent/WO2005124289A2/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4580046A (en) * | 1981-04-13 | 1986-04-01 | Tokyo Kogaku Kikai Kabushiki Kaisha | Displacement measuring device utilizing an incremental code |
US5066129A (en) * | 1989-08-30 | 1991-11-19 | Kabushiki Kaisha Okuma Tekkosho | Optical linear encoder with light quantity calabration |
US5438330A (en) * | 1991-10-28 | 1995-08-01 | Nikon Corporation | Absolute encoder |
US6828783B2 (en) * | 2001-11-16 | 2004-12-07 | Dr. Johannes Heidenhain Gmbh | Angle measuring instrument for a rotating shaft |
Also Published As
Publication number | Publication date |
---|---|
US7126109B2 (en) | 2006-10-24 |
WO2005124289A2 (en) | 2005-12-29 |
US20050274878A1 (en) | 2005-12-15 |
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