WO2005124289A3 - Encoder scale error compensation employing comparison among multiple detectors - Google Patents

Encoder scale error compensation employing comparison among multiple detectors Download PDF

Info

Publication number
WO2005124289A3
WO2005124289A3 PCT/US2005/019390 US2005019390W WO2005124289A3 WO 2005124289 A3 WO2005124289 A3 WO 2005124289A3 US 2005019390 W US2005019390 W US 2005019390W WO 2005124289 A3 WO2005124289 A3 WO 2005124289A3
Authority
WO
WIPO (PCT)
Prior art keywords
scale
encoder
calculated
values
position error
Prior art date
Application number
PCT/US2005/019390
Other languages
French (fr)
Other versions
WO2005124289A2 (en
Inventor
Andrew Goldman
William G Thorburn
Original Assignee
Gsi Lumonics Corp
Andrew Goldman
William G Thorburn
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gsi Lumonics Corp, Andrew Goldman, William G Thorburn filed Critical Gsi Lumonics Corp
Publication of WO2005124289A2 publication Critical patent/WO2005124289A2/en
Publication of WO2005124289A3 publication Critical patent/WO2005124289A3/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses
    • G01D5/38Forming the light into pulses by diffraction gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses

Abstract

An encoder calculates position error values and applies compensation values to encoder position measurements in-situ. The encoder includes a scale and a multi-section detector for detecting a spatially periodic pattern, such as an optical interference pattern, produced by the scale. The detector includes spatially separated first and second sections. A signal processor estimates respective phase values from detector sections and calculates a phase difference reflecting a spatial position error in the scale. A compensation value is calculated from the phase difference and included in the estimate of the scale position to compensate for this spatial position error. The compensation values may be calculated and used on the fly, or calculated and saved during an in-situ calibration operation and then utilized during normal operation to compensate uncorrected measurements.
PCT/US2005/019390 2004-06-14 2005-06-02 Encoder scale error compensation employing comparison among multiple detectors WO2005124289A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/867,096 2004-06-14
US10/867,096 US7126109B2 (en) 2004-06-14 2004-06-14 Encoder scale error compensation employing comparison among multiple detectors

Publications (2)

Publication Number Publication Date
WO2005124289A2 WO2005124289A2 (en) 2005-12-29
WO2005124289A3 true WO2005124289A3 (en) 2006-05-04

Family

ID=35459537

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/019390 WO2005124289A2 (en) 2004-06-14 2005-06-02 Encoder scale error compensation employing comparison among multiple detectors

Country Status (2)

Country Link
US (1) US7126109B2 (en)
WO (1) WO2005124289A2 (en)

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US8882657B2 (en) * 2003-03-07 2014-11-11 Intuitive Surgical Operations, Inc. Instrument having radio frequency identification systems and methods for use
JP4768248B2 (en) * 2004-10-13 2011-09-07 株式会社ミツトヨ Encoder output signal correction apparatus and method
US7476843B2 (en) * 2005-12-23 2009-01-13 Delphi Technologies, Inc. Method for determining the position of a first moving component relative to a second component and device for applying said method
SG2014011563A (en) 2006-01-19 2014-05-29 Nippon Kogaku Kk Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method
US7865038B2 (en) * 2006-04-04 2011-01-04 Synaptics Incorporated Resolution and sensitivity balance metric
US7820956B2 (en) * 2006-06-19 2010-10-26 Gsi Group Corporation Optical position transducer systems and methods employing reflected illumination for limited rotation motor systems
EP2988320B1 (en) 2006-08-31 2019-04-10 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
TWI510870B (en) * 2006-08-31 2015-12-01 尼康股份有限公司 Exposure method and exposure apparatus, and component manufacturing method
KR101529845B1 (en) * 2006-08-31 2015-06-17 가부시키가이샤 니콘 Mobile body drive method and mobile body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
KR101511929B1 (en) 2006-09-01 2015-04-13 가부시키가이샤 니콘 Mobile object driving method, mobile object driving system, pattern forming method and apparatus, exposure method and apparatus, device manufacturing method and calibration method
KR101892410B1 (en) 2006-09-01 2018-08-27 가부시키가이샤 니콘 Mobile body driving method, mobile body driving system, pattern forming method and apparatus, exposure method and apparatus and device manufacturing method
US7619207B2 (en) * 2006-11-08 2009-11-17 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
EP1923670B1 (en) * 2006-11-17 2010-03-17 AMO Automatisierung Messtechnik Optik GmbH Position measuring device
JP4276270B2 (en) * 2007-02-20 2009-06-10 ファナック株式会社 Machine tool with workpiece reference position setting function by contact detection
US7999912B2 (en) * 2007-05-08 2011-08-16 Asml Netherlands B.V. Lithographic apparatus and sensor calibration method
JP4824635B2 (en) * 2007-06-15 2011-11-30 株式会社 ソキア・トプコン Angle correction method for rotary encoder
US7840372B2 (en) 2007-07-06 2010-11-23 The University Of British Columbia Self-calibration method and apparatus for on-axis rotary encoders
US7852969B2 (en) * 2007-07-30 2010-12-14 Mitutoyo Corporation System and method for dynamic calibration of a quadrature encoder
NL1036474A1 (en) * 2008-02-08 2009-08-11 Asml Netherlands Bv Lithographic apparatus and calibration method.
US7898763B2 (en) * 2009-01-13 2011-03-01 International Business Machines Corporation Servo pattern architecture to uncouple position error determination from linear position information
US8493572B2 (en) 2010-05-05 2013-07-23 Mitutoyo Corporation Optical encoder having contamination and defect resistant signal processing
JP5932285B2 (en) * 2011-10-14 2016-06-08 キヤノン株式会社 Encoder and device equipped with the same
GB201207800D0 (en) * 2012-05-03 2012-06-13 Phase Focus Ltd Improvements in providing image data
US9606458B2 (en) 2012-10-01 2017-03-28 Asml Netherlands B.V. Method for calibration of an encoder scale and a lithographic apparatus
JP6207208B2 (en) * 2013-04-12 2017-10-04 キヤノン株式会社 Position detection means
JP5822008B1 (en) * 2014-08-08 2015-11-24 日本精工株式会社 Angle detection device, motor equipped with this angle detection device, torque sensor, electric power steering device, and automobile
CN114894238A (en) * 2022-05-06 2022-08-12 微传智能科技(常州)有限公司 Calibration compensation device, system and method for plate-level magnetic encoding

Citations (4)

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Publication number Priority date Publication date Assignee Title
US4580046A (en) * 1981-04-13 1986-04-01 Tokyo Kogaku Kikai Kabushiki Kaisha Displacement measuring device utilizing an incremental code
US5066129A (en) * 1989-08-30 1991-11-19 Kabushiki Kaisha Okuma Tekkosho Optical linear encoder with light quantity calabration
US5438330A (en) * 1991-10-28 1995-08-01 Nikon Corporation Absolute encoder
US6828783B2 (en) * 2001-11-16 2004-12-07 Dr. Johannes Heidenhain Gmbh Angle measuring instrument for a rotating shaft

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US4631520A (en) * 1984-06-08 1986-12-23 Dynamics Research Corporation Position encoder compensation system
US6029363A (en) * 1998-04-03 2000-02-29 Mitutoyo Corporation Self-calibrating position transducer system and method
US6686585B2 (en) * 2001-09-19 2004-02-03 Microe Systems Corporation Position encoder with scale calibration
EP1712467B1 (en) 2001-11-02 2008-07-16 GSI Group Corporation Encoder self-calibration apparatus and method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4580046A (en) * 1981-04-13 1986-04-01 Tokyo Kogaku Kikai Kabushiki Kaisha Displacement measuring device utilizing an incremental code
US5066129A (en) * 1989-08-30 1991-11-19 Kabushiki Kaisha Okuma Tekkosho Optical linear encoder with light quantity calabration
US5438330A (en) * 1991-10-28 1995-08-01 Nikon Corporation Absolute encoder
US6828783B2 (en) * 2001-11-16 2004-12-07 Dr. Johannes Heidenhain Gmbh Angle measuring instrument for a rotating shaft

Also Published As

Publication number Publication date
WO2005124289A2 (en) 2005-12-29
US20050274878A1 (en) 2005-12-15
US7126109B2 (en) 2006-10-24

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