WO2006012509A3 - Methods of operating microvalve assemblies and related structures and related devices - Google Patents

Methods of operating microvalve assemblies and related structures and related devices Download PDF

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Publication number
WO2006012509A3
WO2006012509A3 PCT/US2005/026029 US2005026029W WO2006012509A3 WO 2006012509 A3 WO2006012509 A3 WO 2006012509A3 US 2005026029 W US2005026029 W US 2005026029W WO 2006012509 A3 WO2006012509 A3 WO 2006012509A3
Authority
WO
WIPO (PCT)
Prior art keywords
chamber
electro
statically actuated
actuated valve
chambers
Prior art date
Application number
PCT/US2005/026029
Other languages
French (fr)
Other versions
WO2006012509A2 (en
WO2006012509A9 (en
Inventor
William O Teach
Paul W Gibson
Kevin R Douglas
Donald C Harris
Scott H Goodwin
David E Dausch
Wayne D Dettloff
Original Assignee
Afa Controls Llc
William O Teach
Paul W Gibson
Kevin R Douglas
Donald C Harris
Scott H Goodwin
David E Dausch
Wayne D Dettloff
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Afa Controls Llc, William O Teach, Paul W Gibson, Kevin R Douglas, Donald C Harris, Scott H Goodwin, David E Dausch, Wayne D Dettloff filed Critical Afa Controls Llc
Priority to JP2007522801A priority Critical patent/JP2008507673A/en
Priority to CA 2571829 priority patent/CA2571829A1/en
Priority to EP20050778141 priority patent/EP1789707A2/en
Publication of WO2006012509A2 publication Critical patent/WO2006012509A2/en
Publication of WO2006012509A3 publication Critical patent/WO2006012509A3/en
Publication of WO2006012509A9 publication Critical patent/WO2006012509A9/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0007—Lift valves of cantilever type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0028—Valves having multiple inlets or outlets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0051—Electric operating means therefor using electrostatic means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0694—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means or flow sources of very small size, e.g. microfluidics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y10T137/0491—Valve or valve element assembling, disassembling, or replacing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y10T137/0491—Valve or valve element assembling, disassembling, or replacing
    • Y10T137/0497—Fluid actuated or retarded
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/218—Means to regulate or vary operation of device
    • Y10T137/2202—By movable element
    • Y10T137/2213—Electrically-actuated element [e.g., electro-mechanical transducer]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/2224—Structure of body of device
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86558—Plural noncommunicating flow paths
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87169—Supply and exhaust
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87169—Supply and exhaust
    • Y10T137/87217—Motor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87169—Supply and exhaust
    • Y10T137/87217—Motor
    • Y10T137/87225—Fluid motor

Abstract

A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port. The first electro-statically actuated valve may be provided between the first and second chambers, and the first electro-statically actuated valve may allow or substantially block fluid communication between the first chamber and the second chamber responsive to a first electrical signal. The second electro-statically actuated valve may be provided between the second and third chambers, and the second electro-statically actuated valve may allow or substantially block fluid communication between the second chamber and the third chamber responsive to a second electrical signal. Related methods are also discussed.
PCT/US2005/026029 2004-07-23 2005-07-22 Methods of operating microvalve assemblies and related structures and related devices WO2006012509A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007522801A JP2008507673A (en) 2004-07-23 2005-07-22 Method of operating microvalve assembly and related structure and related device
CA 2571829 CA2571829A1 (en) 2004-07-23 2005-07-22 Methods of operating microvalve assemblies and related structures and related devices
EP20050778141 EP1789707A2 (en) 2004-07-23 2005-07-22 Methods of operating microvalve assemblies and related structures and related devices

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US59048304P 2004-07-23 2004-07-23
US59066904P 2004-07-23 2004-07-23
US60/590,669 2004-07-23
US60/590,483 2004-07-23

Publications (3)

Publication Number Publication Date
WO2006012509A2 WO2006012509A2 (en) 2006-02-02
WO2006012509A3 true WO2006012509A3 (en) 2006-04-06
WO2006012509A9 WO2006012509A9 (en) 2006-06-29

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/US2005/026030 WO2006012510A1 (en) 2004-07-23 2005-07-22 Microvalve assemblies and related methods
PCT/US2005/026029 WO2006012509A2 (en) 2004-07-23 2005-07-22 Methods of operating microvalve assemblies and related structures and related devices

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/US2005/026030 WO2006012510A1 (en) 2004-07-23 2005-07-22 Microvalve assemblies and related methods

Country Status (5)

Country Link
US (5) US7753072B2 (en)
EP (2) EP1792088A1 (en)
JP (3) JP2008507673A (en)
CA (2) CA2571829A1 (en)
WO (2) WO2006012510A1 (en)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7753072B2 (en) * 2004-07-23 2010-07-13 Afa Controls Llc Valve assemblies including at least three chambers and related methods
JP4732876B2 (en) * 2005-11-30 2011-07-27 株式会社日立製作所 Actuator, actuator module, and actuator module manufacturing method
JP2009542222A (en) * 2006-06-29 2009-12-03 ジーイー・ヘルスケア・バイオサイエンス・アクチボラグ Chamber device
JP4994947B2 (en) 2007-05-21 2012-08-08 三菱重工業株式会社 Wind power generator and yaw rotation drive method for wind power generator
CN101680548A (en) * 2007-06-19 2010-03-24 株式会社开滋 Shaft sealing device, and valve structure using the device
SE533065C2 (en) 2008-10-22 2010-06-22 Nanospace Ab Pressure relief valve
MX2011004330A (en) 2008-10-27 2011-08-03 Mueller Int Llc Infrastructure monitoring system and method.
AU2010249499B2 (en) 2009-05-22 2015-01-29 Mueller International Llc Infrastructure monitoring devices, systems, and methods
ATE556296T1 (en) * 2009-05-25 2012-05-15 Agisco S R L DEVICE FOR DIFFERENTIAL MEASURING ALTITUDE
US8424766B2 (en) 2009-11-04 2013-04-23 Hand Held Products, Inc. Support assembly for terminal
US9456508B2 (en) * 2010-05-28 2016-09-27 Apple Inc. Methods for assembling electronic devices by internally curing light-sensitive adhesive
US8479580B2 (en) 2011-02-18 2013-07-09 Schneider Electric Buildings, Llc Pressure transducer arrangement
KR101259442B1 (en) * 2011-07-01 2013-05-31 지에스나노텍 주식회사 Method for packaging thin film cells and apparatus for packaging thin film cells
US9644761B2 (en) 2011-09-30 2017-05-09 General Electric Company Desalination system with energy recovery and related pumps, valves and controller
US9387440B2 (en) 2011-09-30 2016-07-12 General Electric Company Desalination system with energy recovery and related pumps, valves and controller
US9266310B2 (en) 2011-12-16 2016-02-23 Apple Inc. Methods of joining device structures with adhesive
JP5641374B2 (en) * 2012-05-31 2014-12-17 セメス株式会社ＳＥＭＥＳ ＣＯ．， Ｌｔｄ Substrate processing equipment
US9387731B2 (en) 2012-09-19 2016-07-12 Stemco Lp Central tire inflation system pressure regulator
US9897080B2 (en) 2012-12-04 2018-02-20 General Electric Company Rotary control valve for reverse osmosis feed water pump with energy recovery
US9638179B2 (en) 2012-12-04 2017-05-02 General Electric Company Hydraulic control system for a reverse osmosis hydraulic pump
US9085455B2 (en) * 2013-03-14 2015-07-21 Taiwan Semiconductor Manufacturing Company, Ltd. MEMS devices and methods for forming same
US9040334B2 (en) 2013-03-14 2015-05-26 Taiwan Semiconductor Manufacturing Company, Ltd. MEMS integrated pressure sensor devices and methods of forming same
US9469527B2 (en) 2013-03-14 2016-10-18 Taiwan Semiconductor Manufacturing Company, Ltd. MEMS pressure sensor and microphone devices having through-vias and methods of forming same
US8802473B1 (en) 2013-03-14 2014-08-12 Taiwan Semiconductor Manufacturing Company, Ltd. MEMS integrated pressure sensor devices having isotropic cavities and methods of forming same
US9187317B2 (en) 2013-03-14 2015-11-17 Taiwan Semiconductor Manufacturing Company, Ltd. MEMS integrated pressure sensor and microphone devices and methods of forming same
MX353378B (en) * 2013-03-15 2018-01-10 Mueller Int Llc Systems for measuring properties of water in a water distribution system.
CN105805412B (en) * 2014-12-30 2019-04-16 浙江盾安人工环境股份有限公司 Based on the piezoelectric actuated two blade type lock microvalve device of PZT
CN104676375A (en) * 2015-02-11 2015-06-03 深圳市华星光电技术有限公司 Backlight module and liquid crystal display device comprising same
US11041839B2 (en) 2015-06-05 2021-06-22 Mueller International, Llc Distribution system monitoring
US10288191B2 (en) * 2015-12-23 2019-05-14 University Of Louisville Research Foundation, Inc. Bilayer microvalve arrays for pneumatic and fluidic applications
KR102508368B1 (en) * 2015-12-29 2023-03-08 엘지디스플레이 주식회사 Backlight unit and autostereoscopic 3d display device including the same
CN106224597A (en) * 2016-08-23 2016-12-14 余姚市丰瑞电器有限公司 Combined digital proportional control electromagnetic valve
IT201800003552A1 (en) * 2018-03-14 2019-09-14 St Microelectronics Srl PIEZOELECTRIC VALVE MODULE, METHOD OF MANUFACTURE OF THE VALVE MODULE, METHOD OF OPERATION OF THE VALVE MODULE AND BREATHING AID DEVICE INCLUDING ONE OR MORE VALVE MODULES
MX2020012074A (en) 2018-05-11 2021-03-09 Matthews Int Corp Systems and methods for sealing micro-valves for use in jetting assemblies.
CA3099749A1 (en) 2018-05-11 2019-11-14 Matthews International Corporation Electrode structures for micro-valves for use in jetting assemblies
US11794476B2 (en) 2018-05-11 2023-10-24 Matthews International Corporation Micro-valves for use in jetting assemblies
WO2019215672A1 (en) 2018-05-11 2019-11-14 Matthews International Corporation Systems and methods for controlling operation of micro-valves for use in jetting assemblies
US11639057B2 (en) 2018-05-11 2023-05-02 Matthews International Corporation Methods of fabricating micro-valves and jetting assemblies including such micro-valves
JP7148323B2 (en) * 2018-08-24 2022-10-05 アズビルＴａｃｏ株式会社 CROSS-FLOW TYPE DUAL VALVE AND METHOD FOR MANUFACTURING CASING OF CROSS-FLOW TYPE DUAL VALVE
US11725366B2 (en) 2020-07-16 2023-08-15 Mueller International, Llc Remote-operated flushing system
CN216407869U (en) * 2021-06-22 2022-04-29 科际精密股份有限公司 Air pressure adjusting device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040124384A1 (en) * 2002-12-30 2004-07-01 Biegelsen David K. Pneumatic actuator with elastomeric membrane and low-power electrostatic flap valve arrangement

Family Cites Families (164)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE538344A (en) 1954-06-03
US2927255A (en) * 1954-07-02 1960-03-01 Erdco Inc Electrostatic controls
US2942077A (en) * 1954-07-02 1960-06-21 Erdco Inc Electrostatic controls
US3038449A (en) * 1959-06-03 1962-06-12 Gen Dynamics Corp Hydraulic control system
US3796976A (en) 1971-07-16 1974-03-12 Westinghouse Electric Corp Microwave stripling circuits with selectively bondable micro-sized switches for in-situ tuning and impedance matching
US3772537A (en) 1972-10-27 1973-11-13 Trw Inc Electrostatically actuated device
US3989357A (en) 1974-02-01 1976-11-02 Kalt Charles G Electro-static device with rolling electrode
US4336536A (en) * 1979-12-17 1982-06-22 Kalt Charles G Reflective display and method of making same
DE3006231A1 (en) 1980-02-20 1981-08-27 Daimler-Benz Ag, 7000 Stuttgart Axial collar on hydraulic valve piston - provides main seal for valve assembly to stop flow of liq.
US4317611A (en) * 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
DE3130056C2 (en) 1981-07-30 1983-11-17 Festo-Maschinenfabrik Gottlieb Stoll, 7300 Esslingen Control valve arrangement for a pressure medium working cylinder
US4554519A (en) 1983-10-17 1985-11-19 Westinghouse Electric Corp. Magnetostatic wave delay line
US4585209A (en) * 1983-10-27 1986-04-29 Harry E. Aine Miniature valve and method of making same
US4516091A (en) 1983-12-19 1985-05-07 Motorola, Inc. Low RCS RF switch and phase shifter using such a switch
JPS60142369A (en) * 1983-12-29 1985-07-27 Fuji Xerox Co Ltd Developing device of electrophotographic copying machine
JPS60154674A (en) * 1984-01-25 1985-08-14 Hitachi Ltd Manufacture of electronic device
US4581624A (en) * 1984-03-01 1986-04-08 Allied Corporation Microminiature semiconductor valve
US4598585A (en) 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
JPS60154674U (en) * 1984-03-23 1985-10-15 株式会社　小金井製作所 electronic valve
US4530317A (en) * 1984-04-20 1985-07-23 Eaton Corporation Variable displacement free piston engine
JPS6116429A (en) 1984-06-29 1986-01-24 オムロン株式会社 Drive circuit of 2 layer bonded electrostrictive element
JPS6132668A (en) * 1984-07-24 1986-02-15 Canon Inc Image pickup device
US4710732A (en) 1984-07-31 1987-12-01 Texas Instruments Incorporated Spatial light modulator and method
US4794370A (en) 1984-08-21 1988-12-27 Bos-Knox Ltd. Peristaltic electrostatic binary device
US4736202A (en) 1984-08-21 1988-04-05 Bos-Knox, Ltd. Electrostatic binary switching and memory devices
US5061049A (en) 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US4662746A (en) * 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
JPS61136005A (en) * 1984-12-04 1986-06-23 Shoketsu Kinzoku Kogyo Co Ltd Buffer of cylinder
US4756508A (en) 1985-02-21 1988-07-12 Ford Motor Company Silicon valve
JPS61280104A (en) 1985-06-05 1986-12-10 Murata Mfg Co Ltd Dielectric resonator device
US5172262A (en) 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
JPS62127583A (en) * 1985-11-29 1987-06-09 Fujikura Rubber Ltd Diaphragm type pilot operational direction selector valve
DE3608550A1 (en) * 1986-03-14 1987-09-17 Festo Kg Piezoelectrically actuated valve
US4747670A (en) 1986-03-17 1988-05-31 Display Science, Inc. Electrostatic device and terminal therefor
JPS6360777A (en) * 1986-09-01 1988-03-16 Fujitsu Ltd Automatic teller machine
JPS6383473A (en) * 1986-09-26 1988-04-14 Ube Ind Ltd Piezoelectric driven valve and its driving method
US4789803A (en) 1987-08-04 1988-12-06 Sarcos, Inc. Micropositioner systems and methods
US4971106A (en) 1987-09-30 1990-11-20 Toto, Ltd. Automatically operating valve for regulating water flow and faucet provided with said valve
JPH07117158B2 (en) * 1987-10-22 1995-12-18 本田技研工業株式会社 Hydraulic servo cylinder device
US5016072A (en) 1988-01-13 1991-05-14 The Charles Stark Draper Laboratory, Inc. Semiconductor chip gyroscopic transducer
US5065978A (en) 1988-04-27 1991-11-19 Dragerwerk Aktiengesellschaft Valve arrangement of microstructured components
US4826131A (en) 1988-08-22 1989-05-02 Ford Motor Company Electrically controllable valve etched from silicon substrates
CH677136A5 (en) 1988-11-01 1991-04-15 Univ Neuchatel Electrostatically operated medical micro-valve - has integrated structure with channels and components formed in engraved layers
FR2642812B1 (en) 1989-02-08 1991-05-31 Crouzet Sa PIEZOELECTRIC OPTICALLY CONTROLLED FLUID SWITCHING DEVICE
DE3917396A1 (en) 1989-05-29 1990-12-06 Buerkert Gmbh MICRO VALVE
US5097354A (en) * 1989-07-27 1992-03-17 Omron Corporation Beam scanner
US5082242A (en) 1989-12-27 1992-01-21 Ulrich Bonne Electronic microvalve apparatus and fabrication
US5473945A (en) 1990-02-14 1995-12-12 The Charles Stark Draper Laboratory, Inc. Micromechanical angular accelerometer with auxiliary linear accelerometer
US5043043A (en) * 1990-06-22 1991-08-27 Massachusetts Institute Of Technology Method for fabricating side drive electrostatic micromotor
US5083857A (en) * 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
US5051643A (en) 1990-08-30 1991-09-24 Motorola, Inc. Electrostatically switched integrated relay and capacitor
JP3111319B2 (en) 1990-08-31 2000-11-20 ウエストンブリッジ・インターナショナル・リミテッド Valve with position detector and micropump incorporating said valve
US5408119A (en) 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5344454A (en) * 1991-07-24 1994-09-06 Baxter International Inc. Closed porous chambers for implanting tissue in a host
DE4035852A1 (en) 1990-11-10 1992-05-14 Bosch Gmbh Robert MULTI-LAYER MICROVALVE
US5205171A (en) 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
US5233459A (en) 1991-03-06 1993-08-03 Massachusetts Institute Of Technology Electric display device
US5260596A (en) 1991-04-08 1993-11-09 Motorola, Inc. Monolithic circuit with integrated bulk structure resonator
US5203208A (en) 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5164688A (en) 1991-05-31 1992-11-17 Hughes Aircraft Company Miniature microwave and millimeter wave tuner
US5168249A (en) 1991-06-07 1992-12-01 Hughes Aircraft Company Miniature microwave and millimeter wave tunable circuit
CA2072199C (en) 1991-06-24 1997-11-11 Fumihiro Kasano Electrostatic relay
US5176358A (en) * 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
US5635639A (en) 1991-09-11 1997-06-03 The Charles Stark Draper Laboratory, Inc. Micromechanical tuning fork angular rate sensor
AT396392B (en) * 1991-09-30 1993-08-25 Hoerbiger Fluidtechnik Gmbh PIEZO VALVE
US5258591A (en) 1991-10-18 1993-11-02 Westinghouse Electric Corp. Low inductance cantilever switch
EP0539889A3 (en) 1991-10-30 1993-07-28 Steinbichler, Hans, Dr. Micromechanical actuator
US5202785A (en) 1991-12-20 1993-04-13 Texas Instruments Incorporated Method and device for steering light
US5212582A (en) 1992-03-04 1993-05-18 Texas Instruments Incorporated Electrostatically controlled beam steering device and method
US5408877A (en) 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5268696A (en) 1992-04-06 1993-12-07 Westinghouse Electric Corp. Slotline reflective phase shifting array element utilizing electrostatic switches
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5179499A (en) * 1992-04-14 1993-01-12 Cornell Research Foundation, Inc. Multi-dimensional precision micro-actuator
DE4235593A1 (en) 1992-04-16 1993-10-21 Technologie Plattform Thuering Two=dimensional micro-mechanical on=chip mirror deflection system - has mirror frame attached to frame by diametric conductive tracks orthogonal to tracks connected to frame
US5311360A (en) 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
JP2953196B2 (en) * 1992-05-15 1999-09-27 日本電気株式会社 Nonvolatile semiconductor memory device
US6057814A (en) * 1993-05-24 2000-05-02 Display Science, Inc. Electrostatic video display drive circuitry and displays incorporating same
US5353656A (en) 1992-08-18 1994-10-11 Satcon Technology Corporation Electrostatically controlled micromechanical gyroscope
JPH0697185A (en) * 1992-09-17 1994-04-08 Hitachi Ltd Semiconductor device
US5441597A (en) * 1992-12-01 1995-08-15 Honeywell Inc. Microstructure gas valve control forming method
JP3402642B2 (en) 1993-01-26 2003-05-06 松下電工株式会社 Electrostatic drive type relay
US5479042A (en) 1993-02-01 1995-12-26 Brooktree Corporation Micromachined relay and method of forming the relay
US5555765A (en) 1993-02-10 1996-09-17 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
WO1994019819A1 (en) 1993-02-18 1994-09-01 Siemens Aktiengesellschaft Micromechanical relay with hybrid actuator
JP3123301B2 (en) * 1993-04-16 2001-01-09 株式会社村田製作所 Angular velocity sensor
FR2704357B1 (en) * 1993-04-20 1995-06-02 Thomson Csf Integrated electronic elements with variable electrical characteristics, in particular for microwave frequencies.
GB9309327D0 (en) 1993-05-06 1993-06-23 Smith Charles G Bi-stable memory element
US5536988A (en) 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5673139A (en) 1993-07-19 1997-09-30 Medcom, Inc. Microelectromechanical television scanning device and method for making the same
US5367136A (en) 1993-07-26 1994-11-22 Westinghouse Electric Corp. Non-contact two position microeletronic cantilever switch
US5619061A (en) 1993-07-27 1997-04-08 Texas Instruments Incorporated Micromechanical microwave switching
US5552925A (en) 1993-09-07 1996-09-03 John M. Baker Electro-micro-mechanical shutters on transparent substrates
JPH0783345A (en) * 1993-09-14 1995-03-28 Nippon Steel Corp Motor-driven control valve driving device
US5629790A (en) 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US5367584A (en) 1993-10-27 1994-11-22 General Electric Company Integrated microelectromechanical polymeric photonic switching arrays
US5460202A (en) * 1993-11-22 1995-10-24 Landis & Gyr Powers, Inc. Three-way piezoelectric valve
US5492596A (en) * 1994-02-04 1996-02-20 The Charles Stark Draper Laboratory, Inc. Method of making a micromechanical silicon-on-glass tuning fork gyroscope
DE4417251A1 (en) 1994-05-17 1995-11-23 Bosch Gmbh Robert Pressure balancing micro=valve
US5530342A (en) * 1994-09-30 1996-06-25 Rockwell International Corporation Micromachined rate sensor comb drive device and method
DE4437261C1 (en) * 1994-10-18 1995-10-19 Siemens Ag Micromechanical electrostatic relay
DE4437259C1 (en) 1994-10-18 1995-10-19 Siemens Ag Micro-mechanical electrostatic relay with spiral contact spring bars
US5616864A (en) 1995-02-22 1997-04-01 Delco Electronics Corp. Method and apparatus for compensation of micromachined sensors
US5644177A (en) * 1995-02-23 1997-07-01 Wisconsin Alumni Research Foundation Micromechanical magnetically actuated devices
US5656778A (en) * 1995-04-24 1997-08-12 Kearfott Guidance And Navigation Corporation Micromachined acceleration and coriolis sensor
US5635640A (en) 1995-06-06 1997-06-03 Analog Devices, Inc. Micromachined device with rotationally vibrated masses
US5635638A (en) 1995-06-06 1997-06-03 Analog Devices, Inc. Coupling for multiple masses in a micromachined device
US5661592A (en) 1995-06-07 1997-08-26 Silicon Light Machines Method of making and an apparatus for a flat diffraction grating light valve
US5578976A (en) 1995-06-22 1996-11-26 Rockwell International Corporation Micro electromechanical RF switch
US5640133A (en) 1995-06-23 1997-06-17 Cornell Research Foundation, Inc. Capacitance based tunable micromechanical resonators
US5862003A (en) * 1995-06-23 1999-01-19 Saif; Muhammad T. A. Micromotion amplifier
DE19522806C2 (en) 1995-06-23 1997-06-12 Karlsruhe Forschzent Method of manufacturing a micro diaphragm valve
JP3611637B2 (en) * 1995-07-07 2005-01-19 ヒューレット・パッカード・カンパニー Electrical connection structure of circuit members
US5652374A (en) * 1995-07-10 1997-07-29 Delco Electronics Corp. Method and apparatus for detecting failure in vibrating sensors
JP3106389B2 (en) 1995-08-18 2000-11-06 株式会社村田製作所 Variable capacitance capacitor
US5696662A (en) 1995-08-21 1997-12-09 Honeywell Inc. Electrostatically operated micromechanical capacitor
US5759870A (en) * 1995-08-28 1998-06-02 Bei Electronics, Inc. Method of making a surface micro-machined silicon pressure sensor
EP0826109B1 (en) * 1995-09-15 1998-12-09 Hahn-Schickard-Gesellschaft Für Angewandte Forschung E.V. Fluid pump without non-return valves
JPH09113200A (en) * 1995-10-10 1997-05-02 Yasuji Nakajima Setting method for explosion by rod-form charge
GB2334000B (en) 1995-10-26 1999-10-27 Hewlett Packard Co Method of fabricating a valve assembly for controlling fluid flow within an ink-jet pen
US5638946A (en) 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
ATE294461T1 (en) * 1996-02-10 2005-05-15 Fraunhofer Ges Forschung BISTABLE MICRO DRIVE WITH COUPLED MEMBRANES
US5810325A (en) * 1996-06-25 1998-09-22 Bcam International, Inc. Microvalve
DE19626428A1 (en) * 1996-07-01 1998-01-15 Heinzl Joachim Droplet cloud generator
US5785295A (en) * 1996-08-27 1998-07-28 Industrial Technology Research Institute Thermally buckling control microvalve
US5897097A (en) * 1996-09-06 1999-04-27 Xerox Corporation Passively addressable fluid valves having S-shaped blocking films
DE19637878C2 (en) 1996-09-17 1998-08-06 Fraunhofer Ges Forschung Micro valve with preloaded valve flap structure
US6038449A (en) * 1996-11-20 2000-03-14 Telefonaktiebolaget L M Ericsson Method and apparatus for inter-exchange hand-off taking into account the service capabilities of the candidate cell
DE19648730C2 (en) 1996-11-25 1998-11-19 Fraunhofer Ges Forschung Piezo-electrically operated micro valve
US6116863A (en) 1997-05-30 2000-09-12 University Of Cincinnati Electromagnetically driven microactuated device and method of making the same
US5914553A (en) 1997-06-16 1999-06-22 Cornell Research Foundation, Inc. Multistable tunable micromechanical resonators
US6055114A (en) 1997-06-18 2000-04-25 Nikon Corporation Zoom lens optical system
US5975485A (en) 1997-10-16 1999-11-02 Industrial Technology Research Institute Integrated micro thermistor type flow control module
TW370678B (en) 1997-10-16 1999-09-21 Ind Tech Res Inst Integrated micro-type pressure-resist flow control module
US5921280A (en) * 1997-10-31 1999-07-13 Pro-Mark, Inc. Remotely controllable programmable controller for irrigation
US6036597A (en) * 1998-02-11 2000-03-14 Agco Corporation Combine harvester rotor load control
US6127908A (en) 1997-11-17 2000-10-03 Massachusetts Institute Of Technology Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same
US6098661A (en) * 1997-12-19 2000-08-08 Xerox Corporation Unstable flap valve for fluid flow control
US6126140A (en) 1997-12-29 2000-10-03 Honeywell International Inc. Monolithic bi-directional microvalve with enclosed drive electric field
US6032923A (en) * 1998-01-08 2000-03-07 Xerox Corporation Fluid valves having cantilevered blocking films
US6089534A (en) * 1998-01-08 2000-07-18 Xerox Corporation Fast variable flow microelectromechanical valves
KR100642025B1 (en) * 1998-05-08 2006-11-06 훼스토 악티엔 게젤샤프트 운트 코 A microvalve array
DE19821638C2 (en) 1998-05-14 2000-07-06 Festo Ag & Co Microvalve
US6032689A (en) * 1998-10-30 2000-03-07 Industrial Technology Research Institute Integrated flow controller module
US6223088B1 (en) * 1998-11-09 2001-04-24 Katecho, Incorporated Electrode and connector assembly and method for using same
US6067183A (en) * 1998-12-09 2000-05-23 Eastman Kodak Company Light modulator with specific electrode configurations
DE29822959U1 (en) 1998-12-23 1999-05-12 Buerkert Werke Gmbh & Co Control for fluid
US6236491B1 (en) 1999-05-27 2001-05-22 Mcnc Micromachined electrostatic actuator with air gap
US6229683B1 (en) * 1999-06-30 2001-05-08 Mcnc High voltage micromachined electrostatic switch
JP2001060114A (en) * 1999-08-24 2001-03-06 Smc Corp Pressure controller
US6179586B1 (en) * 1999-09-15 2001-01-30 Honeywell International Inc. Dual diaphragm, single chamber mesopump
US6229684B1 (en) * 1999-12-15 2001-05-08 Jds Uniphase Inc. Variable capacitor and associated fabrication method
ATE284490T1 (en) 2000-05-25 2004-12-15 Festo Ag & Co VALVE DEVICE
US6730072B2 (en) * 2000-05-30 2004-05-04 Massachusetts Institute Of Technology Methods and devices for sealing microchip reservoir devices
US6646364B1 (en) * 2000-07-11 2003-11-11 Honeywell International Inc. MEMS actuator with lower power consumption and lower cost simplified fabrication
US6590267B1 (en) * 2000-09-14 2003-07-08 Mcnc Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
ES2190393T3 (en) 2000-11-20 2003-08-01 Festo Ag & Co PIEZOELECTRIC VALVE.
US6694860B2 (en) * 2001-12-10 2004-02-24 Caterpillar Inc Hydraulic control system with regeneration
US6621141B1 (en) * 2002-07-22 2003-09-16 Palo Alto Research Center Incorporated Out-of-plane microcoil with ground-plane structure
US7241420B2 (en) * 2002-08-05 2007-07-10 Palo Alto Research Center Incorporated Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal
DE10302304B3 (en) * 2003-01-22 2004-01-29 Festo Ag & Co. Electronic microvalve and method for its operation
KR100512185B1 (en) * 2003-07-07 2005-09-05 엘지전자 주식회사 Flux-controlling valve
US7753072B2 (en) 2004-07-23 2010-07-13 Afa Controls Llc Valve assemblies including at least three chambers and related methods
US7402271B2 (en) * 2004-12-01 2008-07-22 Acushnet Company Castable liquid rubber compositions for golf balls

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040124384A1 (en) * 2002-12-30 2004-07-01 Biegelsen David K. Pneumatic actuator with elastomeric membrane and low-power electrostatic flap valve arrangement

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
JIE WU: "Inductive links with integrated receiving coils for mems and implantable applications", 30 September 2003, UNIVERSITY OF NOTRE DAME, NOTRE DAME, INDIANA, USA, XP002357543 *
PAUL B KOENEMAN ET AL.: "Feasability of Micro Power Suplies for MEMS", JOURNAL OF MICROMECHANICAL SYSTEMS, vol. 6, no. 4, 4 December 1997 (1997-12-04), XP002354504 *
THOMAS LISEC ET AL.: "A bistable pneumatic microswitch for driving fluidic components", INTERNATIONAL CONFERENCE ON SOLIDE-STATE SENSORS AND ACTUATORS, no. 8, 26 June 1995 (1995-06-26) - 29 June 1995 (1995-06-29), Stockholm, Sweden, pages 309 - 312, XP002354505 *

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