WO2006014247A3 - Interferometric modulators with thin film transistors and manufacturing method thereof - Google Patents

Interferometric modulators with thin film transistors and manufacturing method thereof Download PDF

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Publication number
WO2006014247A3
WO2006014247A3 PCT/US2005/022592 US2005022592W WO2006014247A3 WO 2006014247 A3 WO2006014247 A3 WO 2006014247A3 US 2005022592 W US2005022592 W US 2005022592W WO 2006014247 A3 WO2006014247 A3 WO 2006014247A3
Authority
WO
WIPO (PCT)
Prior art keywords
thin film
manufacturing
film transistors
interferometric modulators
interferometric
Prior art date
Application number
PCT/US2005/022592
Other languages
French (fr)
Other versions
WO2006014247A2 (en
Inventor
Clarence Chui
Stephen Zee
Original Assignee
Idc Llc
Clarence Chui
Stephen Zee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idc Llc, Clarence Chui, Stephen Zee filed Critical Idc Llc
Priority to CN200580021873.XA priority Critical patent/CN1977206B/en
Priority to EP05763492A priority patent/EP1774393A2/en
Priority to AU2005270186A priority patent/AU2005270186A1/en
Priority to BRPI0512810-2A priority patent/BRPI0512810A/en
Publication of WO2006014247A2 publication Critical patent/WO2006014247A2/en
Publication of WO2006014247A3 publication Critical patent/WO2006014247A3/en
Priority to IL179983A priority patent/IL179983A0/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Abstract

A modulator has a transparent substrate with a first surface. At least one interferometric modulator element resides on the first surface. At least one thin film circuit component electrically connected to the element resides on the surface. When more than one interferometric element resides on the first surface, there is at least one thin film circuit component corresponding to each element residing on the first surface.
PCT/US2005/022592 2004-07-02 2005-06-24 Interferometric modulators with thin film transistors and manufacturing method thereof WO2006014247A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN200580021873.XA CN1977206B (en) 2004-07-02 2005-06-24 Interferometric modulators with thin film transistors
EP05763492A EP1774393A2 (en) 2004-07-02 2005-06-24 Interferometric modulators with thin film transistors and manufacturing method thereof
AU2005270186A AU2005270186A1 (en) 2004-07-02 2005-06-24 Interferometric modulators with thin film transistors and manufacturing method thereof
BRPI0512810-2A BRPI0512810A (en) 2004-07-02 2005-06-24 interferometric modulators with thin film transistors
IL179983A IL179983A0 (en) 2004-07-02 2006-12-11 Interferometric modulators with thin film transistors

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/883,902 US7256922B2 (en) 2004-07-02 2004-07-02 Interferometric modulators with thin film transistors
US10/883,902 2004-07-02

Publications (2)

Publication Number Publication Date
WO2006014247A2 WO2006014247A2 (en) 2006-02-09
WO2006014247A3 true WO2006014247A3 (en) 2006-05-18

Family

ID=35056906

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/022592 WO2006014247A2 (en) 2004-07-02 2005-06-24 Interferometric modulators with thin film transistors and manufacturing method thereof

Country Status (8)

Country Link
US (2) US7256922B2 (en)
EP (2) EP1774393A2 (en)
CN (1) CN1977206B (en)
AU (1) AU2005270186A1 (en)
BR (1) BRPI0512810A (en)
IL (1) IL179983A0 (en)
TW (1) TWI279919B (en)
WO (1) WO2006014247A2 (en)

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US7601571B2 (en) 2009-10-13
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