WO2006014557A3 - Method and system for a mass flow controller with reduced pressure sensitivity - Google Patents

Method and system for a mass flow controller with reduced pressure sensitivity Download PDF

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Publication number
WO2006014557A3
WO2006014557A3 PCT/US2005/024134 US2005024134W WO2006014557A3 WO 2006014557 A3 WO2006014557 A3 WO 2006014557A3 US 2005024134 W US2005024134 W US 2005024134W WO 2006014557 A3 WO2006014557 A3 WO 2006014557A3
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WO
WIPO (PCT)
Prior art keywords
pressure
mass flow
gas
flow controller
reduced pressure
Prior art date
Application number
PCT/US2005/024134
Other languages
French (fr)
Other versions
WO2006014557A2 (en
Inventor
Kenneth E Tinsley
Faisal Tariq
Original Assignee
Mykrolis Corp
Kenneth E Tinsley
Faisal Tariq
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=35507094&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2006014557(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Mykrolis Corp, Kenneth E Tinsley, Faisal Tariq filed Critical Mykrolis Corp
Publication of WO2006014557A2 publication Critical patent/WO2006014557A2/en
Publication of WO2006014557A3 publication Critical patent/WO2006014557A3/en

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)

Abstract

Mass flow controllers (300) minimize false flow conditions and display a reduced sensitivity to pressure transients. Pressure gradients that exist within the volume (380) of a mass flow control (300) fluid path (310, 320, 380, 360) are minimized in order to limit the potential energy contained in compressed or pressurized process gas. Additionally, process gas pressure may be monitored using a sensor (330). This pressure signal is utilized in conjunction with a control algorithm to cancel the detrimental effect of certain flow components. These mass flow controller (300) may be used as drop in replacements for legacy mass flow controllers and reduce the cost of gas sticks due to elimination of discrete components such as pressure regulators, gas filters, pressure transducers, local pressure displays, isolation valves, seals, etc.
PCT/US2005/024134 2004-07-08 2005-07-07 Method and system for a mass flow controller with reduced pressure sensitivity WO2006014557A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/886,836 2004-07-08
US10/886,836 US7216019B2 (en) 2004-07-08 2004-07-08 Method and system for a mass flow controller with reduced pressure sensitivity

Publications (2)

Publication Number Publication Date
WO2006014557A2 WO2006014557A2 (en) 2006-02-09
WO2006014557A3 true WO2006014557A3 (en) 2006-04-20

Family

ID=35507094

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/024134 WO2006014557A2 (en) 2004-07-08 2005-07-07 Method and system for a mass flow controller with reduced pressure sensitivity

Country Status (3)

Country Link
US (1) US7216019B2 (en)
TW (1) TW200615725A (en)
WO (1) WO2006014557A2 (en)

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Also Published As

Publication number Publication date
TW200615725A (en) 2006-05-16
US20050288825A1 (en) 2005-12-29
WO2006014557A2 (en) 2006-02-09
US7216019B2 (en) 2007-05-08

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