WO2006060116A3 - Multi-bit nanocrystal memory - Google Patents
Multi-bit nanocrystal memory Download PDFInfo
- Publication number
- WO2006060116A3 WO2006060116A3 PCT/US2005/040151 US2005040151W WO2006060116A3 WO 2006060116 A3 WO2006060116 A3 WO 2006060116A3 US 2005040151 W US2005040151 W US 2005040151W WO 2006060116 A3 WO2006060116 A3 WO 2006060116A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- trench
- nanocrystal
- gate structure
- bit
- trenches
- Prior art date
Links
- 239000002159 nanocrystal Substances 0.000 title abstract 7
- 239000000758 substrate Substances 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28114—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor characterised by the sectional shape, e.g. T, inverted-T
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28123—Lithography-related aspects, e.g. sub-lithography lengths; Isolation-related aspects, e.g. to solve problems arising at the crossing with the side of the device isolation; Planarisation aspects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42324—Gate electrodes for transistors with a floating gate
- H01L29/42332—Gate electrodes for transistors with a floating gate with the floating gate formed by two or more non connected parts, e.g. multi-particles flating gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42372—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out
- H01L29/42376—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out characterised by the length or the sectional shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0408—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
- G11C16/0441—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing multiple floating gate devices, e.g. separate read-and-write FAMOS transistors with connected floating gates
- G11C16/0458—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing multiple floating gate devices, e.g. separate read-and-write FAMOS transistors with connected floating gates comprising two or more independent floating gates which store independent data
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2216/00—Indexing scheme relating to G11C16/00 and subgroups, for features not directly covered by these groups
- G11C2216/02—Structural aspects of erasable programmable read-only memories
- G11C2216/06—Floating gate cells in which the floating gate consists of multiple isolated silicon islands, e.g. nanocrystals
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05817129A EP1820213A4 (en) | 2004-12-02 | 2005-11-07 | Multi-bit nanocrystal memory |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/001,936 US7170128B2 (en) | 2004-12-02 | 2004-12-02 | Multi-bit nanocrystal memory |
US11/001,936 | 2004-12-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006060116A2 WO2006060116A2 (en) | 2006-06-08 |
WO2006060116A3 true WO2006060116A3 (en) | 2007-03-08 |
Family
ID=36565492
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/040151 WO2006060116A2 (en) | 2004-12-02 | 2005-11-07 | Multi-bit nanocrystal memory |
Country Status (5)
Country | Link |
---|---|
US (2) | US7170128B2 (en) |
EP (1) | EP1820213A4 (en) |
CN (1) | CN101194355A (en) |
TW (1) | TW200629484A (en) |
WO (1) | WO2006060116A2 (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7170128B2 (en) * | 2004-12-02 | 2007-01-30 | Atmel Corporation | Multi-bit nanocrystal memory |
US20090039417A1 (en) * | 2005-02-17 | 2009-02-12 | National University Of Singapore | Nonvolatile Flash Memory Device and Method for Producing Dielectric Oxide Nanodots on Silicon Dioxide |
US8129242B2 (en) * | 2006-05-12 | 2012-03-06 | Macronix International Co., Ltd. | Method of manufacturing a memory device |
TW200812074A (en) * | 2006-07-04 | 2008-03-01 | Nxp Bv | Non-volatile memory and-array |
US7687360B2 (en) * | 2006-12-22 | 2010-03-30 | Spansion Llc | Method of forming spaced-apart charge trapping stacks |
US8486782B2 (en) * | 2006-12-22 | 2013-07-16 | Spansion Llc | Flash memory devices and methods for fabricating the same |
US7927987B2 (en) * | 2007-03-27 | 2011-04-19 | Texas Instruments Incorporated | Method of reducing channeling of ion implants using a sacrificial scattering layer |
WO2008147710A1 (en) * | 2007-05-23 | 2008-12-04 | Nanosys, Inc. | Gate electrode for a nonvolatile memory cell |
US7846793B2 (en) * | 2007-10-03 | 2010-12-07 | Applied Materials, Inc. | Plasma surface treatment for SI and metal nanocrystal nucleation |
CN102446726B (en) * | 2010-10-13 | 2013-10-09 | 中芯国际集成电路制造(上海)有限公司 | Method for forming metal gate |
TWI594420B (en) * | 2015-01-13 | 2017-08-01 | Xinnova Tech Ltd | Non-volatile memory components and methods of making the same |
US10319675B2 (en) | 2016-01-13 | 2019-06-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Capacitor embedded with nanocrystals |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6913984B2 (en) * | 2002-12-23 | 2005-07-05 | Samsung Electronics Co., Ltd. | Method of manufacturing memory with nano dots |
US6949788B2 (en) * | 1999-12-17 | 2005-09-27 | Sony Corporation | Nonvolatile semiconductor memory device and method for operating the same |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4648937A (en) * | 1985-10-30 | 1987-03-10 | International Business Machines Corporation | Method of preventing asymmetric etching of lines in sub-micrometer range sidewall images transfer |
US5278439A (en) | 1991-08-29 | 1994-01-11 | Ma Yueh Y | Self-aligned dual-bit split gate (DSG) flash EEPROM cell |
US5541130A (en) | 1995-06-07 | 1996-07-30 | International Business Machines Corporation | Process for making and programming a flash memory array |
US6225201B1 (en) * | 1998-03-09 | 2001-05-01 | Advanced Micro Devices, Inc. | Ultra short transistor channel length dictated by the width of a sidewall spacer |
KR100271211B1 (en) | 1998-07-15 | 2000-12-01 | 윤덕용 | Method for fabricating a non-volatile memory device using nano-crystal dots |
US6248633B1 (en) | 1999-10-25 | 2001-06-19 | Halo Lsi Design & Device Technology, Inc. | Process for making and programming and operating a dual-bit multi-level ballistic MONOS memory |
US6744082B1 (en) * | 2000-05-30 | 2004-06-01 | Micron Technology, Inc. | Static pass transistor logic with transistors with multiple vertical gates |
KR100476924B1 (en) * | 2002-06-14 | 2005-03-17 | 삼성전자주식회사 | Method Of Forming Fine Pattern Of Semiconductor Device |
US7259984B2 (en) | 2002-11-26 | 2007-08-21 | Cornell Research Foundation, Inc. | Multibit metal nanocrystal memories and fabrication |
US6816414B1 (en) * | 2003-07-31 | 2004-11-09 | Freescale Semiconductor, Inc. | Nonvolatile memory and method of making same |
US7170128B2 (en) * | 2004-12-02 | 2007-01-30 | Atmel Corporation | Multi-bit nanocrystal memory |
-
2004
- 2004-12-02 US US11/001,936 patent/US7170128B2/en not_active Expired - Fee Related
-
2005
- 2005-11-07 WO PCT/US2005/040151 patent/WO2006060116A2/en active Application Filing
- 2005-11-07 EP EP05817129A patent/EP1820213A4/en not_active Withdrawn
- 2005-11-07 CN CNA200580041548XA patent/CN101194355A/en active Pending
- 2005-11-23 TW TW094141115A patent/TW200629484A/en unknown
-
2007
- 2007-01-12 US US11/622,774 patent/US20070111442A1/en not_active Abandoned
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6949788B2 (en) * | 1999-12-17 | 2005-09-27 | Sony Corporation | Nonvolatile semiconductor memory device and method for operating the same |
US6913984B2 (en) * | 2002-12-23 | 2005-07-05 | Samsung Electronics Co., Ltd. | Method of manufacturing memory with nano dots |
Also Published As
Publication number | Publication date |
---|---|
US7170128B2 (en) | 2007-01-30 |
TW200629484A (en) | 2006-08-16 |
US20060121673A1 (en) | 2006-06-08 |
US20070111442A1 (en) | 2007-05-17 |
CN101194355A (en) | 2008-06-04 |
EP1820213A2 (en) | 2007-08-22 |
EP1820213A4 (en) | 2008-09-17 |
WO2006060116A2 (en) | 2006-06-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2006060116A3 (en) | Multi-bit nanocrystal memory | |
SG144931A1 (en) | Method for forming high-k charge storage device | |
TW200627631A (en) | Non-volatile memory and manufacturing method and operating method thereof | |
TW200629574A (en) | Non-volatile memory cells, memory arrays including the same and methods of operating cells and arrays | |
TW200721492A (en) | Non-volatile memory and manufacturing method and operation method thereof | |
TW200701236A (en) | Non-volatile memory cells, memory arrays including the same and methods of operating cells and arrays | |
TW200701440A (en) | Non-volatile memory and manufacturing method and operating method thereof | |
TW200701442A (en) | Method of forming gloating-gate tip for split-gate flosh memory | |
WO2004057661A3 (en) | Non-volatile memory cell and method of fabrication | |
EP1179839A3 (en) | Process for manufacturing a non-volatile memory cell | |
WO2009032530A3 (en) | Thickened sidewall dielectric for memory cell | |
TW200620482A (en) | Memory cell with reduced DIBL and VSS resistance | |
WO2003067639A3 (en) | Method for producing a memory cell | |
TW200514256A (en) | Non-volatile memory device and method of manufacturing the same | |
TWI257150B (en) | Non-volatile memory and fabricating method and operating method thereof | |
CN101325157A (en) | Memory construction and preparation method thereof | |
TW200629479A (en) | Semiconductor device having step gates and method for fabricating the same | |
TW200419783A (en) | Flash memory with selective gate within a substrate and method of fabricating the same | |
EP1139426A3 (en) | Nonvolatile semiconductor memory and method of manufacturing the same | |
TW200727496A (en) | Non-volatile floating gate memory cells and fabrication methods thereof | |
TW200713513A (en) | Memory structure with high coupling ratio and forming method thereof | |
TW200713518A (en) | Non-volatile memory and the fabricating method thereof | |
TW200633140A (en) | Method of fabricating a non-volatile memory | |
CN109273449B (en) | Memory and manufacturing method thereof | |
TW200607080A (en) | Flash memory cell and fabricating method thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200580041548.X Country of ref document: CN |
|
AK | Designated states |
Kind code of ref document: A2 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KM KN KP KR KZ LC LK LR LS LT LU LV LY MA MD MG MK MN MW MX MZ NA NG NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SM SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LT LU LV MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
DPE1 | Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101) | ||
WWE | Wipo information: entry into national phase |
Ref document number: 2005817129 Country of ref document: EP |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWP | Wipo information: published in national office |
Ref document number: 2005817129 Country of ref document: EP |