WO2006073235A1

WO2006073235A1 - Apparatus and method for treating film-shaped polymeric article

Info

Publication number: WO2006073235A1
Application number: PCT/KR2005/004292
Authority: WO
Inventors: Soon Ok Kim
Original assignee: Tescom Co., Ltd
Priority date: 2005-01-03
Filing date: 2005-12-14
Publication date: 2006-07-13
Also published as: KR20060079726A; TW200624255A; KR100649668B1

Abstract

The present invention relates to an apparatus and method for treating a film-shaped polymeric article, and more particularly, to an apparatus and method for treating a film-shaped polymeric article, wherein a plasma sheath is formed to conform to the shape of a film-shaped polymeric article so that the hardness and surface conductivity of the polymeric article to be treated can be improved. The present invention provides an apparatus for treating a film-shaped polymeric article, comprising a generally cylindrical processing chamber capable of defining a hermetic space therein; a main roll disposed at the center of the processing chamber to move the film-shaped polymeric article while the film-shaped polymeric article is wrapped around an outer periphery of the main roll; a radio frequency power supply unit including a radio frequency power supply, a matching box and an antenna, so as to supply radio frequency power for generation of plasma within the processing chamber; a process gas supply unit including a process gas source, a process gas supply passage and a flow rate control means, so as to supply a process gas for constituting the plasma generated within the processing chamber; a pumping unit for reducing pressure in the processing chamber so that the interior of the processing chamber is under a vacuum condition; and a grid unit including a negative voltage generator and a grid so as to focus ions, wherein the antenna and the grid are provided to be spaced apart by a distance of 250 to 400mm from each other.

Description

APPARATUS AND METHOD FOR TREATING FILM-SHAPED

POLYMERIC ARTICLE

Technical Field

[1] The present invention relates to an apparatus and method for treating a film-shaped polymeric article, and more particularly, to an apparatus and method for treating a film-shaped polymeric article, wherein a plasma sheath is formed to conform to the shape of a film-shaped polymeric article so that the hardness and surface conductivity of the polymeric article to be treated can be improved. Background Art

[2] Polymers are materials with a wide variety of uses due to their properties such as their light weight, moldability and processability, transparency, and electrical insulation. According to their uses, such polymers are often required to have improvement of only surface properties without changing the overall properties of the polymers. Since the hydrophilic or hydrophobic property of a surface has a great influence on wettability, printability, colorability, biocompatibility, anti-static property, adhesive property, water-proof property, damp-proof property and the like, there have been used a variety of methods for improving surface properties.

[3] Such surface modification methods for polymers include chemical treatment, corona treatment, plasma treatment, and the like. Among them, plasma treatment is a method for treating polymers using plasma at low pressure.

[4] Plasma is considered as a fourth state of a material and means partially ionized gas.

The components of plasma are electrons, cations, neutral atoms, neutral molecules, and the like. When energy is applied to gas particles, valence electrons escape from their orbits and become free electrons, so that the gas particles can have positive charges. The electrons thus produced and ionized gas maintain an electrically neutral state as a whole. Interactions among the constituent particles emit unique light and activate the particles that in turn have higher reactivity. As compared with corona treatment, plasma treatment using such plasma has advantages in that a reaction gas can be selected and process parameters such as treatment pressure can be controlled.

[5] Conventional plasma treatment methods include techniques for improving surface hardness of a metal or the like using ion beams or plasma nitriding. Recently, there are cases where plasma is applied to metals and polymers by using plasma ion implantation.

[6] However, when ions are implanted into a film-shaped polymeric article in accordance with the prior art, they are not implanted into a side surface or a curved portion of the article. Therefore, there is a problem in that the distribution of surface conductivity of the polymeric article is not uniform. This is because the shape of a plasma sheath is not curved to conform to the surface of the polymeric article.

[7] Further, since ion implantation depth is small, H O is dissociated or bonding forces of a double bond and a network structure are weakened on the surface of the polymeric article. Thus, as time passes or temperature increases, there is a problem in that surface conductivity decreases remarkably. Disclosure of Invention Technical Problem

[8] An object of the present invention is to provide an apparatus for treating a film- shaped polymeric article, wherein a problem of deterioration of surface conductivity does not occur even though a certain period of time passes or temperature is raised.

[9] Another object of the present invention is to provide a method for treating a film- shaped polymeric article, wherein a problem of deterioration of surface conductivity does not occur even though a certain period of time passes or temperature increases, and massive treatment can be carried out. Technical Solution

[10] To achieve these objects, the present invention provides an apparatus for treating a film-shaped polymeric article, comprising a generally cylindrical processing chamber capable of defining a hermetic space therein; a main roll disposed at the center of the processing chamber to move the film- shaped polymeric article while the film- shaped polymeric article is wrapped around an outer periphery of the main roll; a radio frequency power supply unit including a radio frequency power supply, a matching box and an antenna, so as to supply radio frequency power for generation of plasma within the processing chamber; a process gas supply unit including a process gas source, a process gas supply passage and a flow rate control means, so as to supply a process gas for constituting the plasma generated within the processing chamber; a pumping unit for reducing pressure in the processing chamber so that the interior of the processing chamber is under a vacuum condition; and a grid unit including a negative voltage generator and a grid so as to focus ions, wherein the antenna and the grid are provided to be spaced apart by a distance of 250 to 400mm from each other.

[11] In the present invention, it is preferred that the grid unit have a plurality of grids and a distance between adjacent grids be 30 to 90 mm such that plasma cannot be generated in previously generated plasma.

[12] In the present invention, the process gas is preferably a multi-component process gas comprising C H , CH , Ar⁺, N ⁺ and H so that the content of CH ^" is high in plasma. [13] At this time, a composition ratio of the multi-component process gas is preferably C

2 H 2 :H 2 = 80:20, CH 4 :H 2 = 70:30, and Ar⁺:H 2 = 90:10.

[14] In the present invention, the main roll may comprise a water-cooling/heating main roll capable of controlling the temperature of the film-shaped polymeric article that is moved while being wrapped around the outer periphery of the main roll, so that the temperature of the film- shaped polymeric article can be maintained at a temperature most suitable for plasma treatment to keep the best treatment condition.

[15] In the present invention, each of the grids is preferably a semicircular grid spaced apart by a distance of 10 to 100mm from the outer periphery of the main roll, so as to prevent the occurrence of an arc due to potential difference generated on the surface of the film-shaped polymeric article.

[16] In the present invention, the processing chamber comprises a multiple processing chamber including first and second processing chambers, and the first processing chamber treats one surface of the film-shaped polymeric article and the second processing chamber treats the other surface of the film- shaped polymeric article, so that the both surfaces of the film-shaped polymeric article can be treated equally.

[17] In the present invention, a pre-processing chamber is further provided to be connected to the processing chamber;

[18] the pre-processing chamber comprises :

[19] a radio frequency power supply unit including a radio frequency power supply, a matching box and an antenna, so as to supply radio frequency power for generation of plasma within the processing chamber,

[20] a process gas supply unit including a process gas source, a process gas supply passage and a flow rate control means, so as to supply a process gas for constituting the plasma generated within the processing chamber,

[21] a pumping unit for reducing pressure in the processing chamber so that the interior of the processing chamber is under a vacuum condition, and

[22] a grid unit including a negative voltage generator and a grid so as to focus ions; and

[23] the antenna and the grid are a linear antenna and a linear grid,

[24] thereby removing moisture and gas present in a film-shaped polymeric article.

Thus, process time is greatly shortened in the processing chamber and massive treatment can be achieved.

[25] In the present invention, the apparatus preferably further comprises a loading chamber provided to be connected to the pre-processing chamber so as to receive the film-shaped polymeric article from the outside and supply it to the pre-processing chamber; and an unloading chamber provided to be connected to the processing chamber so as to receive the film-shaped polymeric article treated in the processing chamber and deliver it to the outside, wherein the loading chamber and the unloading chamber include a loading roll and an unloading roll disposed at the centers thereof to wind the film-shaped polymeric article thereon, respectively. Thus, a film-shaped polymeric article to be treated can be automatically loaded and unloaded, and also automatically moved at a constant speed between respective processes, thereby ensuring automation of entire processes.

[26] Furthermore, the present invention provides a method for treating a film-shaped polymeric article, comprising the steps of:

[27] 1) introducing the film-shaped polymeric article with a polymer existing on a surface thereof into a loading chamber that is under an atmospheric pressure condition, and establishing a vacuum condition in the loading chamber;

[28] 2) reducing pressure in the loading chamber to be under a vacuum condition, and introducing the film-shaped polymeric article into a pre-processing chamber that is maintained under a vacuum condition;

[29] 3) removing moisture (H O) and gas present in the film-shaped polymeric article by using plasma in the pre-processing chamber;

[30] 4) introducing the film-shaped polymeric article into a processing chamber that is maintained under a vacuum condition;

[31] 5) treating the surface of the film-shaped polymeric article by using plasma in the processing chamber; and

[32] 6) transferring the film-shaped polymeric article to an unloading chamber that is under a vacuum condition, increasing pressure in the unloading chamber to an atmospheric pressure condition, and delivering the film-shaped polymeric article to the outside.

[33] In the present invention, step 3) is preferably a step of performing treatment such that surface conductivity of the film- shaped polymeric article is maintained in a range of 10 to 10 Ω/cm , thereby shortening treatment time in step 5) and facilitating the treatment process.

[34] Further, step 5) preferably performs treatment such that surface conductivity of the film-shaped polymeric article is maintained in a range of 10 to 10 Ω/cm , thereby producing a superconductor.

[35] In the present invention, step 5) comprises a first treatment step of treating one surface of the film-shaped polymeric article and a second treatment step of treating the other surface of the film-shaped polymeric article, so that the both surfaces of the film- shaped polymeric article can be treated equally.

Advantageous Effects

[36] With the apparatus for treating a film-shaped polymeric article according to the present invention, a plasma sheath is generated to conform to the surface contours of a film-shaped polymeric article and a proper ion motion distance is secured. Thus, there is an advantage in that the entire surface of a film- shaped polymeric article can be treated uniformly. [37] Particularly, since ions are deeply implanted into the surface of the film-shaped polymeric article, there is an advantage in that it is possible to obtain a film-shaped polymeric article with superior surface conductivity.

Brief Description of the Drawings [38] Fig. 1 is a sectional view showing the configuration of an apparatus for treating a film-shaped polymeric article according to an embodiment of the present invention. [39] Fig. 2 is a sectional view showing the configuration of a processing chamber according to an embodiment of the present invention. [40] Fig. 3 is a sectional view of the configuration of a processing chamber according to another embodiment of the present invention.

[41] Fig. 4 is a flowchart illustrating respective steps of a method for treating a film- shaped polymeric article according to an embodiment of the present invention. [42] <Explanation of Reference Numerals for Main Parts in the Drawings>

[43] 1: Apparatus for treating a film-shaped polymeric article according to an embodiment of the present invention

[44] 10: Loading chamber 20: Pre-processing chamber

[45] 30: First processing chamber 40: Second processing chamber

[46] 50: Unloading chamber 60: Vacuum pump

[47] 70: Guide roll 12: Loading roll

[48] 14, 54: Opening 15, 56: Gate

[49] 22, 32, 42: Radio frequency power supply unit

[50] 24, 34, 44: Process gas supply unit

[51] 26, 36, 46: Grid unit 38, 48: Main roll

[52] 31, 33: Carbon chain polymer producing unit

Best Mode for Carrying Out the Invention [53] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. [54] An apparatus for treating a film-shaped polymeric article 1 according to an embodiment of the present invention will be first described with reference to Fig. 1.

Fig. 1 is a diagrammatic view showing the configuration of the apparatus for treating a film-shaped polymeric article 1 according to the embodiment of the present invention.

The apparatus 1 of this embodiment comprises a loading chamber, a pre-processing chamber, a processing chamber, and an unloading chamber. Here, there may be two or more processing chambers. This embodiment has a multiple processing chamber con- figuration in which first and second processing chambers are placed close to each other.

[55] Each of the chambers is provided with a vacuum pump 60 for establishing a low degree of vacuum within the chamber. In this embodiment, a rotary pump or a mechanical booster pump is used as the vacuum pump 60. With the use of the rotary pump or mechanical booster pump, pressure in the chamber can reach about 10 Torr. To decrease the pressure in the chamber to about 10 Torr, it is desirable to further provide a turbo or cryo pump. Such a turbo or cryo pump may not be provided at the loading chamber 10 and the unloading chamber 50, and is preferably provided at the pre-processing chamber 20 and the processing chambers 30 and 40 since these chambers require a high degree of vacuum.

[56] In this embodiment, the respective chambers communicate with one another but are partially isolated from one another while spaces except minimum spaces for allowing movement of a film-shaped polymeric article are shut off by means of brackets (not shown).

[57] First, the loading chamber 10 is an element for receiving a film-shaped polymeric article M from the outside and introducing it into the pre-processing chamber 20. That is, the loading chamber 10 receives the film- shaped polymeric article M from the outside while establishing a vacuum condition in the interior thereof, and then supplies the film-shaped polymeric article to the adjacent pre-processing chamber 20. The film- shaped polymeric article M supplied into the loading chamber 10 is wound by and placed on a loading roll 12 and is then introduced into the pre-processing chamber 20 by means of guide rolls 70. At this time, each of the guide rolls 70 is provided with a sensor (not shown in the figure) for sensing tension on the film-shaped polymeric article M. Thus, in a state where the rotational speed of the guide rolls is controlled so that the film-shaped polymeric article can be moved with constant tension, the film- shaped polymeric article M can be moved to the pre-processing chamber 20.

[58] Next, the pre-processing chamber 20 is provided in the vicinity of the loading chamber 10 and receives the film-shaped polymeric article M from the loading chamber 10. The pre-processing chamber is an element for pre-processing the film- shaped polymeric article M by using plasma. Plasma is applied to the film- shaped polymeric article M in the pre-processing chamber 20, so that moisture (H O) and gas present in the film-shaped polymeric article can be removed and the surface conductivity of the film- shaped polymeric article can be maintained in a range of 10 to 10 Ωcm . Therefore, the pre-processing chamber 20 is formed with equipment for generating plasma therein. That is, the pre-processing chamber is provided with a radio frequency power supply unit 22 including a radio frequency power supply 22a, a matching box 22b and an antenna 22c; and a process gas supply unit 24 including a process gas source 24a, a process gas supply passage 24b and a flow rate control means 24c. Further, in order to generate plasma conforming to the shape of a film- shaped polymeric article, the pre-processing chamber is provided with a grid unit 26 including a negative voltage generator 26a and a grid 26b.

[59] Here, the radio frequency power supply 22a preferably supplies RF power of 100 to l,000W to the pre-processing chamber 20. Usually, RF power of l,000W shows the highest ion density. The antenna 22c and the grid 26b are provided as a linear antenna and a linear grid. Here, the term "linear antenna and linear grid" refers to an antenna and a grid in the form of plates with linear cross sections, as shown in Fig. 1. The distance between the antenna 22c and the grid 26b is preferably 250 to 350mm. This is to secure a proper ion motion distance. Plasma refers to a state where energy is applied to gas atoms so that valence electrons of the gas atoms escape from their orbits and become free electrons, thereby producing ions such as cations, anions and electrons. To achieve smooth plasma treatment for a film-shaped polymeric article, the motion distances of such ions are very important. The antenna 22c is disposed close to each of both side surfaces of the pre-processing chamber 20, as shown in Fig. 1. A plurality of grids 26b are disposed between the antennas. At this time, every two of the respective grids are in pair, and each pair of grids has a predetermined space therebetween so that the film-shaped polymeric article can pass through the space.

[60] In this embodiment, the distance between the respective grids 26b is preferably maintained in a range of 30 to 90mm. This is to cause a plasma sheath to be bent and introduced along the contour of the film-shaped polymeric article, as well as to prevent plasma from being generated again in previously generated plasma. Negative- voltage pulse power is applied to the grid 26b in order to inject cations for use in processing the film-shaped polymeric article into the film-shaped polymeric article M.

[61] In this embodiment, the process gas source 24a supplies a multi-component process gas comprising C H , CH , Ar⁺, N ⁺ and H . This is to increase the content of CH in

2 2 4 2 2 4 the generated plasma. At this time, the preferable composition ratio of the multi- component process gas is: C H :H = 80:20, CH :H = 70:30, and Ar⁺:H = 90:10.

[62] The pre-processing chamber 20 is provided with the plurality of guide rolls 70 for guiding the moving path of the film-shaped polymeric article M so that the film-shaped polymeric article can be moved with constant tension. The guide rolls 70 enable the film-shaped polymeric article to pass through the space between a pair of grids while maintaining constant gaps with respect to the grids as shown in Fig. 1, thereby providing a correct moving path and speed of the film-shaped polymeric article.

[63] Next, the configuration and function of the first processing chamber 30 will be described. The first processing chamber 30 generally takes the shape of a cylinder and has a structure in which a hermetic space can be formed therein. The first processing chamber 30 is provided with components that perform the same functions as those of the aforementioned pre-processing chamber 20. That is, a radio frequency power supply unit 32, a process gas supply unit 34, a pumping unit 60c, and a grid unit 36 are provided to be identical with corresponding ones of the pre-processing chamber 20. However, an antenna 32c and a grid 36b are provided as a semicircular antenna and a semicircular grid, contrary to corresponding ones of the pre-processing chamber 20. Here, the term " semicircular antenna and semicircular grid" means an antenna and a grid in the form of semicircles with semicircular cross sections, as shown in Fig. 1. This causes the film-shaped polymeric article to pass through a plasma-generated space for a predetermined period of time so that the surface of the film-shaped polymeric article can be sufficiently treated.

[64] Contrary to the pre-processing chamber 20, the first processing chamber 30 has a main roll 38 disposed at the center thereof. The main roll 38 is an element for placing the film-shaped polymeric article to be treated, so that the film-shaped polymeric article can be properly treated within the first processing chamber 30. That is, as shown in Fig. 1, the main roll is provided in the form of a cylinder at the center of the first processing chamber 30, so that the film-shaped polymeric article M can be moved by the main roll while being wrapped around an outer periphery of the main roll. Therefore, when the film-shaped polymeric article M is moved by the main roll while being wrapped therearound, a surface of the film-shaped polymeric article M is treated. At this time, the distance between the main roll 38 and the grid 36b has a great influence on the degree of treatment of the film-shaped polymeric article. In this embodiment, the grid is disposed such that the distance between the main roll and the grid is 10 to 100mm.

[65] The temperature of the film-shaped polymeric article when it is moved by the main roll 38 while being wrapped therearound is also an important factor of the degree of treatment of the film-shaped polymeric article. That is, if the temperature of the film- shaped polymeric article during treatment is too high or low, plasma treatment may not be made to the film-shaped polymeric article. Thus, it is preferred that a temperature control means capable of controlling the temperature of the film-shaped polymeric article be provided within the main roll 38. In this embodiment, the main roll is constructed into a water-cooling/heating main roll capable of controlling the temperature of the film-shaped polymeric article by means of cold or hot water passing through the interior of the main roll.

[66] It is preferred that the processing chamber 30 according to this embodiment be further provided with a carbon chain polymer producing unit. The carbon chain polymer producing unit functions to supply a specific organic material into the processing chamber so that the material can be ionized within the plasma, thereby producing ions generated from inert gas, and a polymer having a stable carbon chain. The carbon chain polymer thus produced is subjected to ion implantation into the film- shaped polymeric article to improve the surface properties of the film-shaped polymeric article.

[67] In this embodiment, two types of carbon chain polymer producing units will be described.

[68] In a first type of carbon chain polymer producing unit, the carbon chain polymer producing unit comprises an inert gas source, an organic material source, and a sprayer, as shown in Fig. 2. An inert gas and an organic material are supplied into the processing chamber to produce a carbon chain polymer.

[69] Here, the organic material source comprises a bubbler 31b and a vaporizer 31c. The bubbler 31b functions to perform bubbling of a polyhydric organic material filled therein. The vaporizer 31c is connected to a rear end of the bubbler 31b and functions to vaporize the organic material that has been subjected to the bubbling in the bubbler 31b.

[70] The polyhydric organic material thus vaporized is supplied into the processing chamber 30 by means of movement of the inert gas supplied by the inert gas source 31a. Therefore, the inert gas also serves as a carrier gas. Accordingly, the inert gas source 31a is connected to a front end of the bubbler 31b and supplies the inert gas to the bubbler and the vaporizer.

[71] The polyhydric organic material thus vaporized is sprayed into the processing chamber 30, which is maintained under a high vacuum condition (10 Torr), by a particular sprayer (not shown in the figure). The introduced polyhydric organic material and inert gas are ionized by plasma in the processing chamber 30 to produce a polymer with a stable carbon chain. At this time, the supplied organic material is preferably polyhydric alcohol, hexane, or heptane.

[72] The film-shaped polymeric article to be treated in this manner may be a carrier tape, a spacer film, an antistatic sheet, a reflective plate, a diffusive plate, a less reflective film, an LCD protection film, a prism film, a semiconductor tray, an LCD module tray, or the like.

[73] In a second type of carbon chain polymer producing unit, the carbon chain polymer producing unit comprises an inert gas source 33a and an organic metal compound source 33b, as shown in Fig. 3. An inert gas and an organic metal compound are supplied into the processing chamber 30 to produce a stable carbon chain polymer.

[74] Here, the organic metal compound source 33b is provided as a chiller for cooling an organic metal compound to -20 to O⁰C, vaporizing the organic metal compound by vapor pressure, and supplying the vaporized compound into the processing chamber. The inert gas source 33a is provided in front of the chiller 33b and supplies the inert gas to the chiller. Therefore, the organic metal compound vaporized in the chiller is supplied to the processing chamber by mean of the inert gas.

[75] The organic metal compound and inert gas supplied to the processing chamber 30 are sprayed into the processing chamber 30 by a particular sprayer (not shown in the figure). The introduced inorganic metal compound and inert gas are ionized by plasma in the processing chamber 30 to produce a polymer with a stable carbon chain. At this time, the supplied organic metal compound may be Cu(acac) , tetra methyl tin, Cu(hfac) , triethyl aluminum, silver nitrate, nickel(II) acetyl acetonate, indium oxide, iron(II) acetyl acetonate, lithium cobalt(III) oxide, magnesium oxide, methyl silane, polyanilinesulfonic acid, polypyrrole, 1,2,5-triethylpyrrole, triisobuthylsilane, ferrocene, or the like.

[76] The film-shaped polymeric article to be treated in this manner may be a carrier tape, a spacer film, an antistatic sheet, an electromagnetic wave shield film for a vehicle, an antistatic film, an LCD protection film, a reflective plate, a diffusive plate, a total reflection film, a prism film, or the like.

[77] Since the configurations and functions of other elements are the same as those of the aforementioned pre-processing chamber 30, detailed descriptions thereof will be omitted without repeat.

[78] Next, the second processing chamber 40 is an element for performing predetermined treatment on a surface of both the surfaces of the film-shaped polymeric article M, which has not yet been treated in the first processing chamber 30. That is, one of both the surfaces of the film-shaped polymeric article is treated in the first processing chamber, and the other surface is treated in the second processing chamber. Accordingly, both the surfaces of the film-shaped polymeric article are treated while going through the first and second processing chambers.

[79] Since the configuration and function of the second processing chamber 40 is the same as the first processing chamber 30, descriptions thereof will not be made it- eratively herein. However, the second processing chamber 40 is oriented opposite to the first processing chamber 30, as shown in Fig. 1, to treat the other surface of the film-shaped polymeric article.

[80] Finally, an unloading chamber 50 is provided close to the second processing chamber 40. The unloading chamber 50 is an element for receiving the completely treated film-shaped polymeric article M from the second processing chamber 40 and delivering it to the outside. Thus, the unloading chamber 50 has an unloading roll 52 provided at the center thereof to wind the film- shaped polymeric article of which the surfaces have been completely treated. That is, the unloading roll 52 rotates to receive the completely treated film-shaped polymeric article from the second processing chamber 40. At this time, similarly to the loading chamber 10, a plurality of guide rolls 70 are provided in the unloading chamber 50 to control the moving path and speed of the film-shaped polymeric article.

[81] The unloading chamber is provided with a venting portion (not shown in the figures) capable of performing a venting process by which a stable inert gas or the like is injected into the unloading chamber 50 to increase pressure therein when the film- shaped polymeric article has been completely treated and then wound around the unloading roll. One sidewall of the unloading chamber 50 is provided with an opening 54 capable of communicating with the outside, and the opening 54 is formed to be opened or closed by a gate 56.

[82] Hereinafter, a method for treating a film-shaped polymeric article using the aforementioned apparatus 1 according to the embodiment of the present invention will be described.

[83] A step of introducing a film-shaped polymeric article M into the loading chamber

10 under an atmospheric pressure condition is performed (Sl 10). This step is a starting step of the method for treating the film-shaped polymeric article according to this embodiment, wherein the film- shaped polymeric article M is introduced into the loading chamber 10 maintained under an atmospheric pressure condition. In this step, the film-shaped polymeric article M is transferred to the loading chamber 10 by means of a feeding means (not shown in the figure) installed outside the apparatus. When the film-shaped polymeric article M has been introduced into the loading chamber, an opening 14 of the loading chamber, which is in an opened state, is closed by a gate 16 so that the interior of the loading chamber can be isolated from the outside. The film- shaped polymeric article M introduced into the loading chamber is wound and placed on the loading roll 12.

[84] Next, a step of introducing the film-shaped polymeric article M into the preprocessing chamber 20 is performed (S 120). In this step, the film-shaped polymeric article M is to be introduced into the pre-processing chamber 20 that is always maintained under a vacuum condition. Therefore, the interior of the loading chamber 10 should be made to be under a vacuum condition. That is, the vacuum pump 60 installed at the loading chamber 10 is operated to exhaust gas present in the loading chamber 10 so that the interior of the loading chamber can be maintained under a vacuum condition. Then, one end of the film-shaped polymeric article M is introduced into the pre-processing chamber 20 using the guide rolls 70. When the end of the film- shaped polymeric article M has been introduced into the pre-processing chamber 20, the remainder of the film-shaped polymeric article is sequentially moved into the preprocessing chamber.

[85] Next, a pre-treatment step (S 130) is performed. This step is a step of performing predetermined pre-treatment for the film-shaped polymeric article M by generating plasma. In this step, moisture (H O) and gas present in the film-shaped polymeric article are removed. The gas present in the film-shaped polymeric article will be produced with potential energy in a subsequent treatment step performed in the processing chamber. Therefore, the gas should be completely removed in this step. In this embodiment, it is preferred that the surface conductivity of the film- shaped polymeric article be maintained in a range of 10 to 10 Ω/cm in this step so as to shorten subsequent process time.

[86] Then, a step of introducing the film-shaped polymeric article M into the first processing chamber 30 is performed (S 140). In this step, the film-shaped polymeric article M is introduced into the first processing chamber 30 at a constant speed using the plurality of guide rolls 70 provided in the pre-processing chamber 20 and the first processing chamber 30. The film-shaped polymeric article introduced into the first processing chamber is moved while being wound on the main roll 38 provided at the center of the first processing chamber.

[87] Next, a step of treating one surface of the film-shaped polymeric article using plasma in the first processing chamber 30 is performed (S150). In this step, plasma is generated using RF power higher than that used in the pre-treatment step, thereby treating the film-shaped polymeric article using stronger plasma. This step is performed by supplying a multi-component process gas comprising C H , CH , Ar⁺, N and H . At this time, the treatment is carried out to maintain the surface conductivity of the film- shaped polymeric article in a range of 10 to 10 Ω/cm . Thereafter, a step of introducing the film-shaped polymeric article M into the second processing chamber 40 and treating it therein is performed. However, the other surface of both surfaces of the film-shaped polymeric article M, which has not yet been treated in the first processing chamber 30, is subjected to predetermined treatment using plasma.

[88] Then, a step of delivering the film-shaped polymeric article M to the outside is performed (S 160). In this step, the film-shaped polymeric article M is delivered to the unloading chamber 50 at a constant speed using the plurality of guide rolls 70 provided in the second processing chamber 40 and the unloading chamber 50. The delivered film-shaped polymeric article is wound on the unloading roll 52 provided in the unloading chamber 50. When the film-shaped polymeric article M has been completely delivered to the unloading chamber 50, the venting process of increasing pressure in the unloading chamber 50 by injecting a specific gas thereinto is performed. When the pressure in the unloading chamber 50 becomes identical with the atmospheric pressure, the opening 52 through which the unloading chamber can communicate with the outside is opened and the film-shaped polymeric article is delivered to the outside. Accordingly, the film-shaped polymeric article is completely treated.

[89] Several results obtained from treatment of film-shaped polymeric articles using the apparatus and method for treating a film-shaped polymeric article according to the embodiments of the present invention are shown in the following table.

[90] Table 1

[91] From Table 1, it can be seen that the apparatus and method for treating a film- shaped polymeric article according to the embodiments of the present invention enables effective treatment of film-shaped polymeric articles, and particularly, has superior treatment effects in view of surface conductivity. Industrial Applicability

[92] With the apparatus for treating a film-shaped polymeric article according to the present invention, a plasma sheath is generated to conform to the surface contours of a film-shaped polymeric article and a proper ion motion distance is secured. Thus, there is an advantage in that the entire surface of a film- shaped polymeric article can be treated uniformly.

[93] Particularly, since ions are deeply implanted into the surface of the film-shaped polymeric article, there is an advantage in that it is possible to obtain a film-shaped polymeric article with superior surface conductivity.

Claims

[1] An apparatus for treating a film-shaped polymeric article, comprising: a processing chamber capable of defining a hermetic space therein; a main roll disposed at the center of the processing chamber to move the film- shaped polymeric article while the film-shaped polymeric article is wrapped around an outer periphery of the main roll; a radio frequency power supply unit including a radio frequency power supply, a matching box and an antenna, so as to supply radio frequency power for generation of plasma within the processing chamber; a process gas supply unit including a process gas source, a process gas supply passage and a flow rate control means, so as to supply a process gas for constituting the plasma generated within the processing chamber; a pumping unit for reducing pressure in the processing chamber so that the interior of the processing chamber is under a vacuum condition; and a grid unit including a negative voltage generator and a grid so as to focus ions, wherein the antenna and the grid are provided to be spaced apart by a distance of 250 to 400mm from each other.

[2] The apparatus as claimed in claim 1, wherein the grid unit has a plurality of grids, and a distance between adjacent grids is 30 to 90 mm.

[3] The apparatus as claimed in claim 1, wherein the process gas is a multi- component process gas comprising C H , CH , Ar⁺, N ⁺ and H .

[4] The apparatus as claimed in claim 1, wherein a composition ratio of the multi- component process gas is C H :H = 80:20, CH :H = 70:30, and Ar⁺:H = 90:10.

[5] The apparatus as claimed in claim 2, wherein the main roll is a water- cooling/heating main roll capable of controlling the temperature of the film- shaped polymeric article that is moved while being wrapped around the outer periphery of the main roll.

[6] The apparatus as claimed in claim 2, wherein each of the grids is a semicircular grid spaced apart by a distance of 10 to 100mm from the outer periphery of the main roll.

[7] The apparatus as claimed in claim 2, further comprising a carbon chain polymer producing unit including an inert gas source, an organic material source and a sprayer, so as to produce a stable carbon chain polymer by supplying an inert gas and an organic material into the processing chamber.

[8] The apparatus as claimed in claim 7, wherein the organic material source includes a bubbler and a vaporizer.

[9] The apparatus as claimed in claim 8, wherein the organic material is any one selected from the group consisting of polyhydric alcohol, hexane, and heptane.

[10] The apparatus as claimed in claim 9, wherein the film-shaped polymeric article is any one selected from the group consisting of a carrier tape, a spacer film, an antistatic sheet, a reflective plate, a diffusive plate, a less reflective film, an LCD protection film, a prism film, a semiconductor tray, and an LCD module tray.

[11] The apparatus as claimed in claim 2, further comprising a carbon chain polymer producing unit including an inert gas source and an organic metal compound source, so as to produce a stable carbon chain polymer by supplying an inert gas and an organic metal compound into the processing chamber.

[12] The apparatus as claimed in claim 11, wherein the organic metal compound source is a chiller for cooling the organic metal compound, vaporizing the organic metal compound by vapor pressure, and supplying the vaporized compound.

[13] The apparatus as claimed in claim 12, wherein the organic metal compound is any one selected from the group consisting of Cu(acac) , tetra methyl tin, Cu(hfac) , triethyl aluminum, silver nitrate, nickel(II) acetyl acetonate, indium oxide, iron(II) acetyl acetonate, lithium cobalt(III) oxide, magnesium oxide, methyl silane, polyanilinesulfonic acid, polypyrrole, 1,2,5-triethylpyrrole, tri- isobuthylsilane, and ferrocene.

[14] The apparatus as claimed in claim 13, wherein the film-shaped polymeric article is any one selected from the group consisting of a carrier tape, a spacer film, an antistatic sheet, an electromagnetic wave shield film for a vehicle, an antistatic film, an LCD protection film, a reflective plate, a diffusive plate, a total reflection film, and a prism film.

[15] The apparatus as claimed in claim 2, wherein the processing chamber comprises a multiple processing chamber including first and second processing chambers, the first processing chamber treats one surface of the film-shaped polymeric article, and the second processing chamber treats the other surface of the film- shaped polymeric article.

[16] The apparatus as claimed in claim 2, wherein a pre-processing chamber is further provided to be connected to the processing chamber; the pre-processing chamber comprises: a radio frequency power supply unit including a radio frequency power supply, a matching box and an antenna, so as to supply radio frequency power for generation of plasma within the processing chamber, a process gas supply unit including a process gas source, a process gas supply passage and a flow rate control means, so as to supply a process gas for constituting the plasma generated within the processing chamber, a pumping unit for reducing pressure in the processing chamber so that the interior of the processing chamber is under a vacuum condition, and a grid unit including a negative voltage generator and a grid so as to focus ions; and the antenna and the grid are a linear antenna and a linear grid.

[17] The apparatus as claimed in claim 16, further comprising: a loading chamber provided to be connected to the pre-processing chamber so as to receive the film- shaped polymeric article from the outside and supply it to the pre-processing chamber; and an unloading chamber provided to be connected to the processing chamber so as to receive the film-shaped polymeric article treated in the processing chamber and deliver it to the outside, wherein the loading chamber and the unloading chamber include a loading roll and an unloading roll disposed at the centers thereof to wind the film-shaped polymeric article thereon, respectively.

[18] A method for treating a film-shaped polymeric article, comprising the steps of:

1) introducing the film- shaped polymeric article with a polymer existing on a surface thereof into a loading chamber that is under an atmospheric pressure condition, and establishing a vacuum condition in the loading chamber;

2) reducing pressure in the loading chamber to be under a vacuum condition, and introducing the film-shaped polymeric article into a pre-processing chamber that is maintained under a vacuum condition;

3) removing moisture (H O) and gas present in the film-shaped polymeric article by using plasma in the pre-processing chamber;

4) introducing the film-shaped polymeric article into a processing chamber that is maintained under a vacuum condition;

5) treating the surface of the film-shaped polymeric article by using plasma in the processing chamber; and

6) transferring the film-shaped polymeric article to an unloading chamber that is under a vacuum condition, increasing pressure in the unloading chamber to an atmospheric pressure condition, and delivering the film-shaped polymeric article to the outside.

[19] The method as claimed in claim 18, wherein step 3) is a step of performing treatment such that surface conductivity of the film- shaped polymeric article is maintained in a range of 10 to 10 Ω/cm . [20] The method as claimed in claim 18, wherein step 3) and step 5) perform plasma treatment by supplying a process gas consisting of a multi-component process gas comprising C 2 H 2 , CH 4 , Ar⁺, N 2 ⁺ and H 2. [21] The method as claimed in claim 18, wherein step 5) is a step of performing treatment such that surface conductivity of the film- shaped polymeric article is maintained in a range of 10 to 10 Ω/cm . [22] The method as claimed in claim 18, wherein step 5) comprises: a first treatment step of treating one surface of the film-shaped polymeric article, and a second treatment step of treating the other surface of the film-shaped polymeric article.