WO2006077515A3 - Actuator and its manufacturing method - Google Patents

Actuator and its manufacturing method Download PDF

Info

Publication number
WO2006077515A3
WO2006077515A3 PCT/IB2006/050144 IB2006050144W WO2006077515A3 WO 2006077515 A3 WO2006077515 A3 WO 2006077515A3 IB 2006050144 W IB2006050144 W IB 2006050144W WO 2006077515 A3 WO2006077515 A3 WO 2006077515A3
Authority
WO
WIPO (PCT)
Prior art keywords
electromagnetic
glue
sheet metal
coils
rectangular sheet
Prior art date
Application number
PCT/IB2006/050144
Other languages
French (fr)
Other versions
WO2006077515A2 (en
Inventor
Nunen Bartholomeus Van
Martin Brinkhuis
Original Assignee
Koninkl Philips Electronics Nv
Nunen Bartholomeus Van
Martin Brinkhuis
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv, Nunen Bartholomeus Van, Martin Brinkhuis filed Critical Koninkl Philips Electronics Nv
Publication of WO2006077515A2 publication Critical patent/WO2006077515A2/en
Publication of WO2006077515A3 publication Critical patent/WO2006077515A3/en

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/006—Interconnection of transducer parts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/005—Impregnating or encapsulating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type 
    • H01F17/04—Fixed inductances of the signal type  with magnetic core
    • H01F2017/048—Fixed inductances of the signal type  with magnetic core with encapsulating core, e.g. made of resin and magnetic powder
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets

Abstract

In semiconductor equipments, actuators are, for instance, rectangular sheet metal boxes (12) where magnetic or electromagnetic radiation sources (11) such as electromagnetic coils have been inserted. The coils are positioned by filling the rectangular sheet metal box with a glue or moulding compound (13). By switching on the electromagnetic coils, a stage makes linear X- and Y-motions. However, the electromagnetic fields induced by the electromagnetic coils can disturb the object on the stage. The actuator 10 according to the invention solves this problem by using ferromagnetic particles in the glue or moulding compound to shield off the unwanted electromagnetic fields. If required, the rectangular sheet metal boxes can be removed after hardening of the glue or moulding compound.
PCT/IB2006/050144 2005-01-19 2006-01-16 Actuator and its manufacturing method WO2006077515A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP05300043.6 2005-01-19
EP05300043 2005-01-19

Publications (2)

Publication Number Publication Date
WO2006077515A2 WO2006077515A2 (en) 2006-07-27
WO2006077515A3 true WO2006077515A3 (en) 2007-01-25

Family

ID=36692606

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2006/050144 WO2006077515A2 (en) 2005-01-19 2006-01-16 Actuator and its manufacturing method

Country Status (1)

Country Link
WO (1) WO2006077515A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10998116B2 (en) 2018-02-23 2021-05-04 Hamilton Sundstrand Corporation VDT with high permeability shield

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61136753A (en) * 1984-12-04 1986-06-24 Omron Tateisi Electronics Co Linear motor
US6309748B1 (en) * 1997-12-16 2001-10-30 David S. Lashmore Ferromagnetic powder for low core loss parts
US20020163256A1 (en) * 2000-03-30 2002-11-07 Satoru Tajima Linear direct current motor
GB2379558A (en) * 2001-09-11 2003-03-12 Baker R Electromagnetic component and its method of manufacture
US20030173833A1 (en) * 2000-04-21 2003-09-18 Hazelton Andrew J. Wafer stage with magnetic bearings

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61136753A (en) * 1984-12-04 1986-06-24 Omron Tateisi Electronics Co Linear motor
US6309748B1 (en) * 1997-12-16 2001-10-30 David S. Lashmore Ferromagnetic powder for low core loss parts
US20020163256A1 (en) * 2000-03-30 2002-11-07 Satoru Tajima Linear direct current motor
US20030173833A1 (en) * 2000-04-21 2003-09-18 Hazelton Andrew J. Wafer stage with magnetic bearings
GB2379558A (en) * 2001-09-11 2003-03-12 Baker R Electromagnetic component and its method of manufacture

Also Published As

Publication number Publication date
WO2006077515A2 (en) 2006-07-27

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