WO2006083581A3 - Microscope system for testing semiconductors - Google Patents

Microscope system for testing semiconductors Download PDF

Info

Publication number
WO2006083581A3
WO2006083581A3 PCT/US2006/002109 US2006002109W WO2006083581A3 WO 2006083581 A3 WO2006083581 A3 WO 2006083581A3 US 2006002109 W US2006002109 W US 2006002109W WO 2006083581 A3 WO2006083581 A3 WO 2006083581A3
Authority
WO
WIPO (PCT)
Prior art keywords
microscope system
testing semiconductors
testing
semiconductors
probe
Prior art date
Application number
PCT/US2006/002109
Other languages
French (fr)
Other versions
WO2006083581A2 (en
Inventor
Peter Andrews
David Hess
Robert New
Original Assignee
Cascade Microtech Inc
Peter Andrews
David Hess
Robert New
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cascade Microtech Inc, Peter Andrews, David Hess, Robert New filed Critical Cascade Microtech Inc
Priority to EP06719077A priority Critical patent/EP1849038A2/en
Priority to DE202006020618U priority patent/DE202006020618U1/en
Priority to JP2007553145A priority patent/JP2008529304A/en
Publication of WO2006083581A2 publication Critical patent/WO2006083581A2/en
Publication of WO2006083581A3 publication Critical patent/WO2006083581A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

A system that includes an imaging device for effectively positioning a probe for testing a semiconductor wafer.
PCT/US2006/002109 2005-01-31 2006-01-19 Microscope system for testing semiconductors WO2006083581A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP06719077A EP1849038A2 (en) 2005-01-31 2006-01-19 Microscope system for testing semiconductors
DE202006020618U DE202006020618U1 (en) 2005-01-31 2006-01-19 Microscope system for testing semiconductors
JP2007553145A JP2008529304A (en) 2005-01-31 2006-01-19 Microscope system for semiconductor testing

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US64895105P 2005-01-31 2005-01-31
US64874705P 2005-01-31 2005-01-31
US64895205P 2005-01-31 2005-01-31
US60/648,747 2005-01-31
US60/648,952 2005-01-31
US60/648,951 2005-01-31

Publications (2)

Publication Number Publication Date
WO2006083581A2 WO2006083581A2 (en) 2006-08-10
WO2006083581A3 true WO2006083581A3 (en) 2007-07-05

Family

ID=36777745

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/002109 WO2006083581A2 (en) 2005-01-31 2006-01-19 Microscope system for testing semiconductors

Country Status (5)

Country Link
EP (1) EP1849038A2 (en)
JP (1) JP2008529304A (en)
DE (1) DE202006020618U1 (en)
TW (1) TWI304625B (en)
WO (1) WO2006083581A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI418818B (en) * 2012-10-29 2013-12-11 King Yuan Electronics Co Ltd Improved press bar of a testing socket and a testing equipment using the same
TWI548876B (en) * 2015-01-13 2016-09-11 京元電子股份有限公司 Semiconductor testing device and testing apparatus thereof
JP7240913B2 (en) * 2019-03-18 2023-03-16 株式会社キーエンス Image measuring device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4757550A (en) * 1984-05-21 1988-07-12 Disco Abrasive Systems, Ltd. Automatic accurate alignment system
US5051825A (en) * 1989-04-07 1991-09-24 Pressco, Inc. Dual image video inspection apparatus
US5880772A (en) * 1994-10-11 1999-03-09 Daimlerchrysler Corporation Machine vision image data acquisition system
US6469746B1 (en) * 1992-12-28 2002-10-22 Sanyo Electric Co., Ltd. Multi-vision screen adapter
US6693518B2 (en) * 2000-05-23 2004-02-17 Sharp Kabushiki Kaisha Surround surveillance system for mobile body, and mobile body, car, and train using the same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345170A (en) 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
JPH09186917A (en) * 1995-12-29 1997-07-15 Kokusai Electric Co Ltd Image pickup device
JP2001284416A (en) * 2000-03-30 2001-10-12 Nagase & Co Ltd Low temperature test device
JP2002335435A (en) * 2001-05-11 2002-11-22 Fujitsu Ltd Vide photographing device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4757550A (en) * 1984-05-21 1988-07-12 Disco Abrasive Systems, Ltd. Automatic accurate alignment system
US5051825A (en) * 1989-04-07 1991-09-24 Pressco, Inc. Dual image video inspection apparatus
US6469746B1 (en) * 1992-12-28 2002-10-22 Sanyo Electric Co., Ltd. Multi-vision screen adapter
US5880772A (en) * 1994-10-11 1999-03-09 Daimlerchrysler Corporation Machine vision image data acquisition system
US6693518B2 (en) * 2000-05-23 2004-02-17 Sharp Kabushiki Kaisha Surround surveillance system for mobile body, and mobile body, car, and train using the same

Also Published As

Publication number Publication date
TWI304625B (en) 2008-12-21
EP1849038A2 (en) 2007-10-31
WO2006083581A2 (en) 2006-08-10
DE202006020618U1 (en) 2009-03-12
JP2008529304A (en) 2008-07-31
TW200703535A (en) 2007-01-16

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Legal Events

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