WO2006091904B1 - Methods and apparatus for spatial light modulation - Google Patents

Methods and apparatus for spatial light modulation

Info

Publication number
WO2006091904B1
WO2006091904B1 PCT/US2006/006761 US2006006761W WO2006091904B1 WO 2006091904 B1 WO2006091904 B1 WO 2006091904B1 US 2006006761 W US2006006761 W US 2006006761W WO 2006091904 B1 WO2006091904 B1 WO 2006091904B1
Authority
WO
WIPO (PCT)
Prior art keywords
light
display apparatus
reflective
array
modulators
Prior art date
Application number
PCT/US2006/006761
Other languages
French (fr)
Other versions
WO2006091904A2 (en
WO2006091904A3 (en
WO2006091904A9 (en
Inventor
Nesbitt W Hagood
Roger Barton
Original Assignee
Pixtronix Inc
Nesbitt W Hagood
Roger Barton
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pixtronix Inc, Nesbitt W Hagood, Roger Barton filed Critical Pixtronix Inc
Priority to KR1020147018813A priority Critical patent/KR101458477B1/en
Priority to CA2598825A priority patent/CA2598825C/en
Priority to BRPI0607881-8A priority patent/BRPI0607881A2/en
Priority to EP06736143A priority patent/EP1855986B1/en
Priority to KR1020127028610A priority patent/KR101323307B1/en
Priority to JP2007556435A priority patent/JP5748387B2/en
Priority to CN200680005842XA priority patent/CN101151207B/en
Priority to KR1020127028601A priority patent/KR101324300B1/en
Priority to KR1020107017265A priority patent/KR101242504B1/en
Priority to KR1020127028603A priority patent/KR101324304B1/en
Priority to KR1020127028608A priority patent/KR101365130B1/en
Priority to KR1020127028605A priority patent/KR101410401B1/en
Priority to AT06736143T priority patent/ATE513785T1/en
Priority to KR1020127028607A priority patent/KR101355523B1/en
Priority to KR1020147002066A priority patent/KR101484646B1/en
Priority to KR1020127028599A priority patent/KR101324299B1/en
Publication of WO2006091904A2 publication Critical patent/WO2006091904A2/en
Publication of WO2006091904A3 publication Critical patent/WO2006091904A3/en
Publication of WO2006091904A9 publication Critical patent/WO2006091904A9/en
Publication of WO2006091904B1 publication Critical patent/WO2006091904B1/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0033—Means for improving the coupling-out of light from the light guide
    • G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
    • G02B6/004—Scattering dots or dot-like elements, e.g. microbeads, scattering particles, nanoparticles
    • G02B6/0043—Scattering dots or dot-like elements, e.g. microbeads, scattering particles, nanoparticles provided on the surface of the light guide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0075—Arrangements of multiple light guides
    • G02B6/0078—Side-by-side arrangements, e.g. for large area displays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0033—Means for improving the coupling-out of light from the light guide
    • G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
    • G02B6/0045—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it by shaping at least a portion of the light guide
    • G02B6/0046—Tapered light guide, e.g. wedge-shaped light guide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0033—Means for improving the coupling-out of light from the light guide
    • G02B6/0058—Means for improving the coupling-out of light from the light guide varying in density, size, shape or depth along the light guide
    • G02B6/0061—Means for improving the coupling-out of light from the light guide varying in density, size, shape or depth along the light guide to provide homogeneous light output intensity

Abstract

Improved apparatus and methods for spatial light modulation are disclosed which utilize optical cavities having both front and rear reflective surfaces. Light-transmissive regions are formed in the front reflective surface for spatially modulating light.

Claims

AMENDED CLAIMS received by the International Bureau on 15 November 2006 (15.11.06)
1. A spatial light modulator comprising: a first reflective surface defining a plurality of light-transmissive regions, a second reflective surface, at least partially facing the first reflective surface, for reflecting light towards the plurality of light-transmissive regions.
2. The spatial light modulator of claim 1, comprising an array of light modulators for selectively obstructing the plurality of light- transmissive regions.
3. The spatial light modulator of claim 1, wherein one of the reflective surfaces is formed from one of a mirror, a dielectric mirror, and a metallic film.
4. The spatial light modulator of claim 1, wherein at least one of the light- transmissive regions comprises an aperture.
5. The spatial light modulator of claim 1, wherein at least one of the light- transmissive regions comprises a filter.
6. The spatial light modulator of claim 1, wherein at least one of the light- transmissive regions comprises a liquid crystal component.
7. The spatial light modulator of claim 2, wherein the light modulators in the array of light modulators are one of independently and collectively controllable.
8. The spatial light modulator of claim 2, wherein the array of light modulators comprises a plurality of MEMS-based shutters assemblies.
9. The spatial light modulator of claim 8, wherein the MEMS-based shutter assemblies are bi-stable shutter assemblies.
10. The spatial light modulator of claim 8, wherein the MEMS-based shutter assemblies comprise shutters at least partially coated in a reflective film for reflecting light impinging on the shutters, reflected from the second reflective surface, back towards the second reflective surface.
11. The spatial light modulator of claim 8, wherein the MEMS-based shutter assemblies comprise shutters at least partially coated in a light-absorbing film to absorb ambient light or roughened surface.
12. The spatial light modulator of claim 1, wherein the space between the first and second reflective surfaces defines a substantially transparent cavity.
13. The spatial light modulator of claim 1, wherein the first reflective surface is substantially parallel to, and opposes the second reflective surface.
14. The spatial light modulator of claim I5 wherein the first reflective surface is at least partially transverse with respect to the second reflective surface.
15. The spatial light modulator of claim 2, wherein the array of light modulators comprises a plurality of shutters arranged in a plane, at least one of the shutters having a first position substantially in the plane allowing the passage of light through a corresponding one of the plurality of light-transmissive regions and a second position substantially in the plane to obstruct light reflected from second reflective surface.
16. The spatial light modulator of claim 2, wherein the array of light modulators . comprises a plurality of shutters arranged in a plane, atleast one of the shutters having a first position substantially in the plane to obstruct light reflected from the second reflective surface and a second position in which at least part of the shutter is substantially out of the plane to allow the passage - of light through the corresponding one of the plurality of light-transmissive regions.
17. The spatial light modulator of claim 1, comprising a light guide for distributing light substantially throughout a cavity formed between the first and second reflective surfaces.
18. The spatial light modulator of claim 17, wherein the first reflective surface is disposed on the surface of the light guide.
19. The spatial light modulator of claim 18, comprising a substrate on which the array of light modulators is disposed.
20. The spatial light modulator of claim 19, wherein the substrate is substantially transparent.
21. The spatial light modulator of claim 19, wherein: the substrate is substantially opaque; and the substrate defines a plurality of apertures corresponding to the plurality of light-transmissive regions in the first reflective surface.
22. The spatial light modulator of claim 19, comprising a spacer for keeping the light guide and the substrate a predetermined distance apart from one another, thereby forming a gap.
23. The spatial light modulator of claim 19, wherein the light guide is coupled to the substrate.
24. The spatial light modulator of claim 17, comprising a substrate upon which the first reflective surface and the array of light modulators are disposed.
25. The spatial light modulator of claim 24, wherein the first reflective surface comprises a reflective film.
26. The spatial light modulator of claim 24, comprising an optical diffuser positioned between the light guide and the substrate.
27. The spatial light modulator of claim 24, comprising an optical prism positioned between the light guide and the substrate.
28. The spatial light modulator of claim 17, wherein the second reflective surface is disposed on a side of the light guide which is opposite to a side of the light guide nearest the first reflective surface.
29. The spatial light modulator of claim 17, wherein the light guide comprises a plurality of scattering points for redirecting light out of the light guide.
30. The spatial light modulator of claim 2, wherein the array of light modulators comprises liquid crystal component.
31. The spatial light modulator of claim 12, comprising a light source for introducing light into the substantially transparent cavity.
32. The spatial light modulator of claim 31, wherein the light source comprises a light emitting diode.
33. The spatial light modulator of claim 31, comprising an array of light modulators for selectively obstructing light from passing through at least one .of the light-transmissive regions.
34. The spatial light modulator of claim 33, wherein the array of light modulators comprises an array of MEMS-based shutter assemblies.
35. A method of forming an image, comprising: introducing light into a reflective optical cavity including a plurality of light-transmissive regions through which light can escape the reflective optical cavity; forming an image by allowing the introduced light to escape the reflective optical cavity through at least one of the light-transmissive regions.
36. The method of claim 33, comprising distributing the introduced light substantially evenly throughout the reflective cavity.
37. The method of claim 35, wherein introducing the light comprises alternately illuminating a plurality different colored light sources.
38. The method of claim 35, comprising selectively obstructing at least one light-transmissive region to prevent light from escaping the reflective cavity through the at least one light-transmissive region.
39. The method of claim 38, wherein the selectively obstructing comprises altering a voltage applied to a light modulator.
40. The method of claim 39, wherein the light modulator comprises a MEMS- based shutter assembly.
41. The method of claim 39, wherein the light modulator comprises a liquid crystal component.
42. The method of claim 35, wherein allowing the introduced light to escape the reflective cavity comprises removing at least one obstruction preventing the introduced light from escaping the reflective cavity through corresponding ones of the light-transmissive regions.
43. The method of claim 42, comprising selectively reflecting ambient light impinging on the corresponding ones of the light-transmissive regions through which the introduced light is allowed to escape.
44. The method of claim 35, wherein at least one light-transmissive region comprises an aperture.
45. The method of claim 35, wherein at least one light-transmissive region comprises a filter.
46. The method of claim 35, wherein at least one light-transmissive region comprises a liquid crystal component.
47. The method of claim 35, wherein the reflective cavity comprises a first reflective surface including the plurality of light-transmissive regions and a second reflective surface at least partially facing the first reflective surface.
48. The method of claim 35, comprising introducing the introduced light into a light guide substantially contained within the reflective cavity.
49. A method of forming an image, comprising: receiving ambient light; positioning a plurality of shutters on at least one substrate to selectively reflect the received ambient light to form the image.
50. A method of manufacturing a spatial light modulator comprising: forming a substantially transparent cavity having first and second opposing sides into which light can be introduced; coupling a first reflective surface to the first side of the transparent cavity such that the first reflective surface faces the interior of the transparent cavity; forming a plurality of light-transmissive regions in the first reflective surface; and coupling a second reflective surface to the second side of the transparent cavity such that the second reflective surface faces the interior transparent cavity.
51. A display apparatus comprising: an array of light modulators for selectively reflecting light towards a viewer to form an image; an array of reflective light funnels disposed between the array of light modulators and the viewer, for concentrating light on respective ones of the light modulators in the array of light modulators.
52. The display apparatus of claim 51, wherein one of the reflective light funnels in the array of reflective light funnels comprises a first optical opening directed towards the viewer, a second, smaller optical opening directed towards a respective one of the light modulators, and a reflective wall connecting the first optical opening to the second optical opening.
53. The display apparatus of claim 52, wherein the reflective wall comprises a reflective material deposited on the interior of the reflective light funnel.
54. The display apparatus of claim 52, wherein the reflective wall comprises a substantially transparent interior coated by a reflective material.
55. The display apparatus of claim 52, wherein the wall is generally conical in shape.
56. The display apparatus of claim 52, wherein the wall has a hexagonal cross section.
57. The display apparatus of claim 52, wherein the wall has a rectangular cross section.
58. The display apparatus of claim 52, wherein the wall comprises a polygonal cross section.
59. The display apparatus of claim 51, wherein height of the reflective light funnel is smaller than the diameter of the first optical opening.
60. The display apparatus of claim 51, wherein the height of the reflective light funnel is greater than the diameter of the first optical opening,
61. The display apparatus of claim 51, wherein one of the light modulators in the array of light modulators comprises a MEMS-based light modulator.
62. The display apparatus of claim 61, wherein the one light modulator comprises a shutter.
63. The display apparatus of claim 62, wherein the shutter comprises a reflective material for reflecting light towards the viewer.
64. The display apparatus of claim 63, wherein the shutter selectively obstructs light from impinging on a light-absorbing material disposed behind the shutter in relation to the viewer.
65. The display apparatus of claim 62, wherein the shutter comprises a light- absorbing material.
66. The display apparatus of claim 65, wherein the shutter selectively obstructs light from impacting a reflective surface located behind the shutter in relation to the viewer.
67. The display apparatus of claim 61, wherein the one light modulator comprises two shutters.
68. The display apparatus of claim 67, wherein one of the two shutters is larger than the other of the two shutters.
69. The display apparatus of claim 67, wherein the two shutters selectively obstruct light from reflecting off a reflective surface towards the viewer.
70. .The display apparatus of the claim 67, wherein the two shutters reflect light towards the viewer.
71. The display apparatus of claim 70, wherein the two shutters selectively allow light to impact a light absorbing surface located behind the two shutters in relation to the viewer.
72. The display apparatus of claim 51, comprising an array of color filters corresponding to respective ones of the light modulators.
73. The display apparatus of claim 67, wherein the array of color filters includes a plurality of red filters, green filters, and blue filters.
74. The display apparatus of claim 73, wherein the array of color filters includes a plurality of white filters.
75. A display apparatus comprising: an array of MEMS-based light modulators for selectively modulating light to form an image; and an array of reflective light funnels disposed between the array of MEMS- based light modulators and a viewer, for concentrating light on respective ones of the light modulators in the array of light modulators.
76. The display apparatus of claim 75, comprising a backlight.
77. The display apparatus of claim 76, wherein the MEMS-based light modulators selectively transmit light from the backlight towards the viewer and selectively reflect light originating from the direction of the viewer.
78. The display of claim 75, comprising a front light.
79. The display of claim 75, wherein the MEMS-based light modulators modulate light by reflecting light towards the viewer.
80. The display apparatus of claim 75, wherein one of the MEMS-based light modulators comprises a shutter.
81. The display apparatus of claim 80, wherein the shutter comprises a reflective material for reflecting light towards the viewer.
82. The display apparatus of claim 81, wherein the shutter selectively obstructs light from impacting a light-absorbing surface behind the shutter with respect to the viewer.
83. The display apparatus of claim 75, wherein the shutter comprises a light- absorbing material.
84. The display apparatus of claim 83, wherein the shutter selectively obstructs light from impacting a reflective surface behind the shutter with respect to the viewer.
85. The display apparatus of claim 80, wherein the one MEMS-based light modulator comprises a second shutter.
86. The display apparatus of claim 85, wherein the first shutter covers a larger area surface than the second shutter.
87. The display apparatus of claim 75, comprising an array of color filters corresponding to respective ones of the light modulators.
88. The display apparatus of claim 87, wherein the array of color filters includes a plurality of red filter, green filters, and blue filters.
89. A display apparatus comprising: an array of MEMS-based light modulators for selectively modulating light to form an image; and an array of reflective light funnels disposed between a backlight and the array of MEMS-based light modulators for increasing the fraction of - light generated by the backlight that is modulated by the MEMS- based light modulators.
90. The display apparatus of claim 89, wherein the MEMS-based light modulators selectively transmit light generated in the backlight toward a viewer.
91. A method of manufacturing a display apparatus comprising: forming an array of reflective light modulators; forming an array of reflective light funnels by forming an array of depressions in a sheet of a substantially transparent material, each depressions having a top, a bottom, and a wall; depositing a reflective film on the walls of the depressions; and forming optical openings at the bottom of the depressions such that the optical openings have a diameter which is smaller than the diameter of the top of the depression.
92. A method of manufacturing a display apparatus comprising: forming an array of reflective light modulators; forming an array of reflective light funnels by providing a substantially transparent layer of material; removing material from the substantially transparent layer of material, leaving a plurality of solid cones formed from the material, each cone having a tip; depositing a reflective coating on a surface of the cones; forming optical opening at the cone tips; and depositing a back fill material on top of the reflective coating.
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93. The spatial light modulator of claim 17, comprising a low index layer deposited on the light guide and having a refractive index sufficiently low to lead to a condition of total internal reflection within the light guide.
94. The spatial light modulator of claim 2, wherein the array of light modulators are positioned proximate to the plurality of light-transmissive regions.
95. The spatial light modulator of claim 94, wherein the array of light modulators are positioned less than about 100 microns away from the plurality of light-transmissive regions.
96. The spatial light modulator of claim 94, wherein the array of light modulators are positioned less than about 10 microns away from the plurality of light-transmissive regions.
97. The spatial light modulator of claim 94, wherein the array of light modulators are positioned less than about 1 micron away from the plurality of light-transmissive regions.
98. The spatial light modulator of claim 2, wherein the first reflective surface is positioned within 0.5 mm of the array of light modulators.
99. The spatial light modulator of claim 2, wherein the array of light modulators has a light modulator pitch, and a distance between the first reflective surface and the array of light modulators is less than the light modulator pitch.
100. The spatial light modulator of claim 2, wherein the array of light modulators is formed on a substrate, and a distance between the first reflective layer and the array of light modulators is less than a thickness of the substrate.
101. The spatial light modulator of claim 2, wherein each of the respective light- transmissive regions of the plurality of light-transmissive regions is associated with at least one respective light modulator of the array of light modulators.
102. A display apparatus comprising: a layer of reflective material;
81 an array of MEMS-based light modulators positioned proximate the layer of reflective material, wherein each of the MEMS-based light modulators includes a modulation element and an actuator for moving the modulation element relative to the layer of reflective material.
103. The display apparatus of claim 102, comprising a plurality of apertures formed in the layer of reflective material for allowing light to pass through the layer of reflective material.
104. The display apparatus of claim 103, wherein the modulation element comprises a shutter for selectively obstructing at least one of the plurality of apertures.
105. The display apparatus of claim 103, wherein the each aperture of the plurality of apertures corresponds to one of the MEMS-based light modulators.
106. The display apparatus of claim 103, comprising a spacer disposed between the layer of reflective material and the array to keep the modulation elements about a predetermined distance from the layer of reflective material.
107. The display apparatus of claim 102, wherein the modulation elements of the MEMS-based light modulators are maintained less than about 100 away from the layer of reflective material.
108. The display apparatus of claim 102, wherein the modulation elements of the MEMS-based light modulators are maintained less than about 10 microns away from the layer of reflective material.
109. The display apparatus of claim 102, wherein the modulation elements of the MEMS-based light modulators are maintained less than about 1 micron away from the layer of reflective material.
110. The display apparatus of claim 102, wherein the layer of reflective material reflects light impinging on a surface of the layer of reflective material facing away from the array of MEMS-based light modulators.
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111. The display apparatus of claim 110, wherein the layer of reflective material absorbs light impinging on a surface of the layer of reflective material facing towards from the array of MEMS-based light modulators.
112. The display apparatus of claim 1 10, comprising a second layer of reflective material positioned on an opposite side of the layer of reflective material from the MEMS-based light modulators, and facing towards the layer of reflective materials.
113. The display apparatus of claim 112, comprising a light guide positioned between the layer of reflective material and the second layer of reflective material.
114. The display apparatus of claim 102, comprising a liquid located at least between the modulation elements and the layer of reflective material.
115. The display apparatus of claim 114, wherein the liquid is a lubricant.
116. The display apparatus of claim 102, wherein the layer of reflective material comprises a dielectric mirror.
117. The display apparatus of claim 102, wherein the layer of reflective material comprises a metal.
118. A display apparatus comprising: an array of MEMS-based light modulators; a liquid in which the array of MEMS-based light modulators is at least partially immersed.
119. The display apparatus of claim 118, comprising a transparent substrate on which the array of MEMS-based light modulators are formed.
120. The display apparatus of claim 119, wherein the liquid is sealed into a cavity formed between the substrate and a transparent body.
121. The display apparatus of claim 120, wherein the transparent substrate is spaced away from and opposite to the transparent body and the fluid fills a gap existing between the MEMS-based light modulators and the transparent body.
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122. The display apparatus of claim 120, wherein the transparent body comprises a cover plate.
123. The display apparatus of claim 122, wherein the liquid has a first index of refraction, the substrate has a second index of refraction, and wherein the first index of refraction substantially matches the second index of refraction.
124. The display apparatus of claim 120, wherein the liquid has a first index of refraction, the transparent body has a second index of refraction, and wherein the first index of refraction substantially matches the second index of refraction.
125. The display apparatus of claim 124, wherein the transparent body comprises a light guide.
126. This display apparatus of claim 118, wherein the liquid has an index of refraction of less than about 1.5.
127. The display apparatus of claim 118, wherein the liquid has a dielectric constant of above about 2.0.
128. The display apparatus of claim 118, wherein the liquid is a lubricant.
129. The display apparatus of claim 118, wherein the liquid has a viscosity below about 10 centipoise.
130. The display apparatus of claim 118, wherein the liquid has a dielectric breakdown strength above about 104 V/cm.
131. The display apparatus of claim 118, wherein the liquid reduces stiction between surfaces of the MEMS-based light modulators when the surfaces are in contact.
132. The display apparatus of claim 118, wherein the liquid comprises one of de-ionized water, methanol, ethanol, silicone oils, fluorinated silicone oils, dimethylsiloxane, polydimethylsiloxane, hexamethyldisiloxane, and diethylbenzene.
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133. The display apparatus of claim 118, wherein the MEMS-based light modulators in the array of MEMS-based light modulators comprises shutters.
134. The display apparatus of claim 133, comprising an aperture layer having a plurality of apertures formed therein positioned proximate the array of MEMS-based light modulators.
135. The display apparatus of claim 134, wherein the aperture layer comprises a reflective material.
136. The display apparatus of claim 134, wherein the aperture layer comprises one of a dielectric mirror and a metal.
137. The display apparatus of claim 134, wherein the shutters are positioned less than about 100 microns from the aperture layer.
138. The display apparatus of claim 134, wherein the shutters are positioned less than about 10 microns from the aperture layer.
139. A display apparatus comprising: a light guide; a substrate having a front surface facing an intended viewer and a rear surface facing the light guide, wherein the substrate is separated from the light guide by a gap; and an array of MEMS-based light modulators formed on the rear substrate of the substrate.
140. The display apparatus of claim 139, comprising an aperture layer having a plurality of apertures formed therein positioned between the light guide and the substrate.
141. The display apparatus of claim 140, wherein the aperture layer comprises one of a dielectric mirror and a metal.
142. The display apparatus of claim 140, wherein the aperture layer is deposited on a front surface of the light guide.
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143. The display apparatus of claim 140, wherein a side of the aperture layer facing the light guide is reflective.
144. The display apparatus of claim 143, comprising a second reflective layer facing the light guide positioned on a side of the light guide opposite the aperture layer.
145. The display apparatus of claim 140, comprising a plurality of spacers for keeping the substrate about a predetermined distance from the aperture layer.
146. The display apparatus of claim 145, wherein the spacers keep portions of the MEMS-based light modulators less than about 100 microns from the aperture layer.
147. The display apparatus of claim 145, wherein the spacers keep portions of the MEMS-based light modulators less than about 10 microns from the aperture layer.
148. The display apparatus of claim 140, wherein the array includes one MEMS- based light modulator corresponding to each aperture in the aperture layer.
149. The display apparatus of claim 140, wherein the MEMS-based light modulators comprise shutters and actuators for moving the shutters to selectively obstruct the apertures in the aperture layer.
150. The display apparatus of claim 149, wherein the actuators move the shutters substantially transversely with respect to the apertures.
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PCT/US2006/006761 2005-02-23 2006-02-23 Methods and apparatus for spatial light modulation WO2006091904A2 (en)

Priority Applications (16)

Application Number Priority Date Filing Date Title
KR1020147018813A KR101458477B1 (en) 2005-02-23 2006-02-23 Methods and apparatus for spatial light modulation
CA2598825A CA2598825C (en) 2005-02-23 2006-02-23 Methods and apparatus for spatial light modulation
BRPI0607881-8A BRPI0607881A2 (en) 2005-02-23 2006-02-23 display device and method for forming the image
EP06736143A EP1855986B1 (en) 2005-02-23 2006-02-23 Methods and apparatus for spatial light modulation
KR1020127028610A KR101323307B1 (en) 2005-02-23 2006-02-23 Methods and apparatus for spatial light modulation
JP2007556435A JP5748387B2 (en) 2005-02-23 2006-02-23 Method and apparatus for spatial light modulation
CN200680005842XA CN101151207B (en) 2005-02-23 2006-02-23 Display device and method of image formation
KR1020127028601A KR101324300B1 (en) 2005-02-23 2006-02-23 Methods and apparatus for spatial light modulation
KR1020107017265A KR101242504B1 (en) 2005-02-23 2006-02-23 Methods and apparatus for spatial light modulation
KR1020127028603A KR101324304B1 (en) 2005-02-23 2006-02-23 Methods and apparatus for spatial light modulation
KR1020127028608A KR101365130B1 (en) 2005-02-23 2006-02-23 Methods and apparatus for spatial light modulation
KR1020127028605A KR101410401B1 (en) 2005-02-23 2006-02-23 Methods and apparatus for spatial light modulation
AT06736143T ATE513785T1 (en) 2005-02-23 2006-02-23 METHOD AND APPARATUS FOR SPATIAL LIGHT MODULATION
KR1020127028607A KR101355523B1 (en) 2005-02-23 2006-02-23 Methods and apparatus for spatial light modulation
KR1020147002066A KR101484646B1 (en) 2005-02-23 2006-02-23 Methods and apparatus for spatial light modulation
KR1020127028599A KR101324299B1 (en) 2005-02-23 2006-02-23 Methods and apparatus for spatial light modulation

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US65582705P 2005-02-23 2005-02-23
US60/655,827 2005-02-23
US67605305P 2005-04-29 2005-04-29
US60/676,053 2005-04-29
US11/218,690 2005-09-02
US11/218,690 US7417782B2 (en) 2005-02-23 2005-09-02 Methods and apparatus for spatial light modulation

Publications (4)

Publication Number Publication Date
WO2006091904A2 WO2006091904A2 (en) 2006-08-31
WO2006091904A3 WO2006091904A3 (en) 2006-11-16
WO2006091904A9 WO2006091904A9 (en) 2007-01-04
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