WO2006096646A3 - Control of fluid conditions in bulk fluid delivery systems - Google Patents

Control of fluid conditions in bulk fluid delivery systems Download PDF

Info

Publication number
WO2006096646A3
WO2006096646A3 PCT/US2006/007928 US2006007928W WO2006096646A3 WO 2006096646 A3 WO2006096646 A3 WO 2006096646A3 US 2006007928 W US2006007928 W US 2006007928W WO 2006096646 A3 WO2006096646 A3 WO 2006096646A3
Authority
WO
WIPO (PCT)
Prior art keywords
fluid
bulk
control
delivery systems
conditions
Prior art date
Application number
PCT/US2006/007928
Other languages
French (fr)
Other versions
WO2006096646A2 (en
Inventor
David Gerken
Original Assignee
Boc Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Inc filed Critical Boc Group Inc
Priority to CN200680006460.9A priority Critical patent/CN101193815B/en
Priority to JP2007558324A priority patent/JP5024882B2/en
Priority to EP20060737143 priority patent/EP1858795B1/en
Priority to KR1020077020104A priority patent/KR101273008B1/en
Publication of WO2006096646A2 publication Critical patent/WO2006096646A2/en
Priority to IL185291A priority patent/IL185291A/en
Publication of WO2006096646A3 publication Critical patent/WO2006096646A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/06—Details or accessories
    • B67D7/08—Arrangements of devices for controlling, indicating, metering or registering quantity or price of liquid transferred
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F1/00—Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped
    • F04F1/02—Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped using both positively and negatively pressurised fluid medium, e.g. alternating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0266—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid
    • B67D7/0272—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/06—Details or accessories
    • B67D7/72—Devices for applying air or other gas pressure for forcing liquid to delivery point
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2496—Self-proportioning or correlating systems
    • Y10T137/2559—Self-controlled branched flow systems
    • Y10T137/2564—Plural inflows
    • Y10T137/2567—Alternate or successive inflows
    • Y10T137/2569—Control by depletion of source
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2496—Self-proportioning or correlating systems
    • Y10T137/27—Liquid level responsive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3127—With gas maintenance or application

Abstract

An improved bulk fluid distribution for supplying process fluids to semiconductor process tools. The improved system having an alternating pressure vessel engine substantially eliminates pressure fluctuations in the bulk fluid supply line due to head losses from the changing weight of the fluid in the dispensing vessels. The system also enables flexible control of the flow conditions of the fluid in the fluid supply line.
PCT/US2006/007928 2005-03-04 2006-03-06 Control of fluid conditions in bulk fluid delivery systems WO2006096646A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN200680006460.9A CN101193815B (en) 2005-03-04 2006-03-06 Control of fluid conditions in bulk fluid delivery systems
JP2007558324A JP5024882B2 (en) 2005-03-04 2006-03-06 Control of fluid status in a mass fluid delivery system
EP20060737143 EP1858795B1 (en) 2005-03-04 2006-03-06 Control of fluid conditions in bulk fluid delivery systems
KR1020077020104A KR101273008B1 (en) 2005-03-04 2006-03-06 Method for controlling fluid conditions in bulk fluid delivery systems
IL185291A IL185291A (en) 2005-03-04 2007-08-15 Control of fluid conditions in bulk fluid delivery systems

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US65904705P 2005-03-04 2005-03-04
US60/659,047 2005-03-04
US11/367,140 2006-03-03
US11/367,140 US7810516B2 (en) 2005-03-04 2006-03-03 Control of fluid conditions in bulk fluid distribution systems

Publications (2)

Publication Number Publication Date
WO2006096646A2 WO2006096646A2 (en) 2006-09-14
WO2006096646A3 true WO2006096646A3 (en) 2007-10-04

Family

ID=36943151

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/007928 WO2006096646A2 (en) 2005-03-04 2006-03-06 Control of fluid conditions in bulk fluid delivery systems

Country Status (7)

Country Link
US (1) US7810516B2 (en)
EP (1) EP1858795B1 (en)
JP (1) JP5024882B2 (en)
KR (1) KR101273008B1 (en)
IL (1) IL185291A (en)
TW (1) TWI356805B (en)
WO (1) WO2006096646A2 (en)

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US7640876B2 (en) * 2007-12-03 2010-01-05 Cnh Canada, Ltd. Bin level sensor for use with a product dispensing agricultural implement
US8037894B1 (en) * 2007-12-27 2011-10-18 Intermolecular, Inc. Maintaining flow rate of a fluid
US8220502B1 (en) 2007-12-28 2012-07-17 Intermolecular, Inc. Measuring volume of a liquid dispensed into a vessel
JP5231028B2 (en) * 2008-01-21 2013-07-10 東京エレクトロン株式会社 Coating liquid supply device
US8215329B2 (en) * 2008-02-01 2012-07-10 Woodward, Inc. Digital closed loop proportional hydraulic pressure controller
US8646493B2 (en) * 2009-03-02 2014-02-11 Envirotower Inc. Method and apparatus for changeover of container in a fluid dispenser
TW201117888A (en) * 2009-11-25 2011-06-01 Hon Hai Prec Ind Co Ltd Continuous paint supply system and method for continuous paint
KR101138403B1 (en) * 2010-09-02 2012-04-26 씨앤지하이테크 주식회사 Apparatus for supplying slurry for semiconductor having means for preventing clogging pipe
FR2972504B1 (en) * 2011-03-09 2014-06-27 Olaer Ind Sa INSTALLATION COMPRISING AT LEAST ONE HYDROPNEUMATIC ACCUMULATOR WITH AUTOMATED MAINTENANCE
US9623165B2 (en) 2012-12-13 2017-04-18 Gambro Lundia Ab Cassette for pumping a treatment solution through a dialyzer
US9223319B2 (en) * 2012-12-21 2015-12-29 Intermolecular, Inc. High dilution ratio by successively preparing and diluting chemicals
US9770804B2 (en) 2013-03-18 2017-09-26 Versum Materials Us, Llc Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture
ES2527968B1 (en) * 2013-08-02 2016-02-26 Eulen, S.A. MUD TRANSFER EQUIPMENT, CONTINUOUS WORK CYCLE.
KR101610646B1 (en) * 2014-06-26 2016-04-11 한국생명공학연구원 A multi-channel flow rate controller
US10030674B2 (en) * 2015-04-22 2018-07-24 C. Anthony Cox Sterile liquid pump with single use elements
US9765769B2 (en) * 2015-04-22 2017-09-19 C. Anthony Cox Sterile liquid pump with single use elements
US20170016458A1 (en) * 2015-07-15 2017-01-19 Materials and Technologies, Corp. Simple Positive Displacement Pump Suitable for Pharmaceutical, Chemical, Biological, Viscous, Dense, Particulate Laden Fluids and Other Demanding Applications
US10184496B2 (en) * 2016-12-06 2019-01-22 Airgas, Inc. Automatic pressure and vacuum clearing skid method
JP2019129243A (en) * 2018-01-25 2019-08-01 株式会社Ｓｃｒｅｅｎホールディングス Substrate processing device and substrate processing method
US11761582B2 (en) * 2019-09-05 2023-09-19 Dhf America, Llc Pressure regulation system and method for a fluidic product having particles
AU2020210306B2 (en) * 2020-07-31 2023-04-06 Solidsvac Pty Ltd Constant flow solids pump

Citations (1)

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Publication number Priority date Publication date Assignee Title
US5330072A (en) * 1990-09-17 1994-07-19 Applied Chemical Solutions Process and apparatus for electronic control of the transfer and delivery of high purity chemicals

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Patent Citations (1)

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Also Published As

Publication number Publication date
IL185291A (en) 2011-05-31
US7810516B2 (en) 2010-10-12
TW200710016A (en) 2007-03-16
JP2008531426A (en) 2008-08-14
KR20070116805A (en) 2007-12-11
EP1858795B1 (en) 2013-05-08
EP1858795A4 (en) 2012-02-01
EP1858795A2 (en) 2007-11-28
WO2006096646A2 (en) 2006-09-14
US20060196884A1 (en) 2006-09-07
JP5024882B2 (en) 2012-09-12
KR101273008B1 (en) 2013-06-10
IL185291A0 (en) 2008-02-09
TWI356805B (en) 2012-01-21

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