WO2006099065A3 - Actuator array - Google Patents

Actuator array Download PDF

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Publication number
WO2006099065A3
WO2006099065A3 PCT/US2006/008460 US2006008460W WO2006099065A3 WO 2006099065 A3 WO2006099065 A3 WO 2006099065A3 US 2006008460 W US2006008460 W US 2006008460W WO 2006099065 A3 WO2006099065 A3 WO 2006099065A3
Authority
WO
WIPO (PCT)
Prior art keywords
shape memory
memory element
actuator
actuator array
array
Prior art date
Application number
PCT/US2006/008460
Other languages
French (fr)
Other versions
WO2006099065A2 (en
Inventor
S James Biggs
R Dodge Daverman
Original Assignee
Massachusetts Inst Technology
S James Biggs
R Dodge Daverman
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Massachusetts Inst Technology, S James Biggs, R Dodge Daverman filed Critical Massachusetts Inst Technology
Publication of WO2006099065A2 publication Critical patent/WO2006099065A2/en
Publication of WO2006099065A3 publication Critical patent/WO2006099065A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H37/00—Thermally-actuated switches
    • H01H37/02—Details
    • H01H37/32—Thermally-sensitive members
    • H01H37/323—Thermally-sensitive members making use of shape memory materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H61/01—Details
    • H01H61/0107—Details making use of shape memory materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay

Abstract

An actuator includes a bistable mechanism having a tension beam (106) and a compression beam (108) defined by a relief slit in a flexible substrate (102); and a first shape memory element (110) that upon heating actuates the actuator from a first position to a second position. A heat source can be thermally coupled to actuate the first shape memory element, or the first shape memory element can be heated by passing current through the element. The actuators can be formed in an array. Such arrays can be useful for tactile displays, massagers, and the like. Also included are methods of operation and manufacturing.
PCT/US2006/008460 2005-03-11 2006-03-08 Actuator array WO2006099065A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/078,195 US7665300B2 (en) 2005-03-11 2005-03-11 Thin, flexible actuator array to produce complex shapes and force distributions
US11/078,195 2005-03-11

Publications (2)

Publication Number Publication Date
WO2006099065A2 WO2006099065A2 (en) 2006-09-21
WO2006099065A3 true WO2006099065A3 (en) 2007-01-11

Family

ID=36609413

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/008460 WO2006099065A2 (en) 2005-03-11 2006-03-08 Actuator array

Country Status (2)

Country Link
US (1) US7665300B2 (en)
WO (1) WO2006099065A2 (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4720670B2 (en) * 2006-08-09 2011-07-13 株式会社デンソー Link connection member structure of air conditioner
US8053068B2 (en) * 2007-03-29 2011-11-08 Kazak Composites, Incorporated Shape memory alloy composite material shock and vibration isolator devices
US8733099B2 (en) * 2009-10-05 2014-05-27 Massachusetts Institute Of Technology Flexible actuator based on shape memory alloy sheet
DE102010038070B4 (en) * 2010-08-06 2012-10-11 Phoenix Contact Gmbh & Co. Kg Thermal overload protection device
KR101433120B1 (en) * 2010-08-20 2014-08-22 가부시키가이샤 세이덴샤 Shock-driven actuator
KR101357462B1 (en) * 2011-07-22 2014-02-04 서울대학교산학협력단 smart soft composite actuator
US8853916B2 (en) 2011-09-30 2014-10-07 GM Global Technology Operations LLC Reconfigurable bi-stable device
US9236207B2 (en) * 2011-09-30 2016-01-12 GM Global Technology Operations LLC Composite bi-stable device
US9314885B2 (en) 2012-05-11 2016-04-19 Empire Technology Development Llc Shape memory alloy composite flexible substrates
US9631268B2 (en) 2013-02-26 2017-04-25 The Boeing Company Methods and systems for shape memory alloy structures
US11498307B2 (en) 2016-03-19 2022-11-15 International Business Machines Corporation Shape memory materials with reversible transitions
DE102016108627B4 (en) * 2016-05-10 2022-11-10 Universität des Saarlandes Bistable actuator device with a shape memory element
EP3513490A4 (en) * 2016-09-14 2020-05-13 Smarter Alloys Inc. Shape memory alloy actuator with strain gauge sensor and position estimation and method for manufacturing same
US10828972B2 (en) * 2017-04-23 2020-11-10 Plasan Re'em Ltd. System for bonding a windshield to a windshield frame
DE102018006102B4 (en) * 2018-07-31 2020-06-10 Moritz Hübler Bend inducer with shape memory element and bend actuator
EP3640474A1 (en) * 2018-10-15 2020-04-22 FIPA Holding GmbH Mechanical actuator system and eoat device with such an actuator system
US10753345B1 (en) * 2019-07-18 2020-08-25 Dean Pick Sleeve for shape-memory alloy
US11472325B1 (en) * 2021-03-30 2022-10-18 Toyota Motor Engineering & Manufacturing North America, Inc. Actuator for a support system of a seat
US11460010B1 (en) * 2021-03-30 2022-10-04 Toyota Motor Engineering & Manufacturing North America, Inc. SMC integrated bi-stable strips for remote actuation

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB213602A (en) * 1923-03-31 1924-08-14 Ernst Sachs Improvements in free wheel and back pedalling brake hubs for cycles and the like
US4209675A (en) * 1977-12-07 1980-06-24 Vitale Andrew P Variable duration electric clock timer unit
JPH01147090A (en) * 1987-12-01 1989-06-08 Kubota Ltd Conductor roll for electroplating
JPH03291821A (en) * 1989-11-07 1991-12-24 Fujitsu Ltd Heat-sensitive switch
US5410290A (en) * 1993-08-02 1995-04-25 Cho; Dong-Il Shape memory alloy relays and switches
US5996346A (en) * 1993-07-28 1999-12-07 The Board Of Trustees Of The Leland Stanford Junior University Electrically activated multi-jointed manipulator
US6194066B1 (en) * 1991-04-24 2001-02-27 The United States Of America As Represented By The Secretary Of The Air Force Microscopic tube devices and method of manufacture
EP1143466A1 (en) * 2000-04-05 2001-10-10 Cronos Integrated Microsystems, Inc. Lockable microelectromechanical actuators using thermoplastic materials, and methods of operating same
US6310411B1 (en) * 1999-04-21 2001-10-30 Hewlett-Packard Company Lock assembly for a personal computer enclosure
US20030011450A1 (en) * 2001-05-18 2003-01-16 Jun Shen Mircomagnetic latching switch packaging
US20030156006A1 (en) * 2000-06-19 2003-08-21 Martin Hanke Bistable electric switch and relay with a bistable electrical switch
US20040080239A1 (en) * 2000-03-28 2004-04-29 Vikas Gupta Thin film shape memory alloy actuated microrelay
US20040150491A1 (en) * 2003-01-21 2004-08-05 You Kondoh Multi-substrate liquid metal high-frequency switching device

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2629791A (en) 1951-06-16 1953-02-24 Tourneau Robert G Le Snap switch
US3941953A (en) 1971-08-23 1976-03-02 Hewlett-Packard Company Keyboard having switches with tactile feedback
US4790353A (en) 1982-08-09 1988-12-13 Eaton Corporation Electromagnetic hydraulic valve operator
US4716262A (en) 1983-10-21 1987-12-29 Nena Morse Vandal-resistant telephone keypad switch
US4795458A (en) 1987-07-02 1989-01-03 Regan Barrie F Stent for use following balloon angioplasty
US4822959A (en) 1988-01-25 1989-04-18 Schwab-Koplin Assoc., Inc. Electrical switch having a snap-acting switch element
JPH01241808A (en) 1988-03-24 1989-09-26 Toshiba Corp Winding method
DE3814150A1 (en) * 1988-04-27 1989-11-09 Draegerwerk Ag VALVE ARRANGEMENT MADE FROM MICROSTRUCTURED COMPONENTS
JPH07112500B2 (en) 1989-12-22 1995-12-06 株式会社日創 Sports equipment with a long section
US5561173A (en) 1990-06-19 1996-10-01 Carolyn M. Dry Self-repairing, reinforced matrix materials
US5058856A (en) * 1991-05-08 1991-10-22 Hewlett-Packard Company Thermally-actuated microminiature valve
JPH0515601A (en) 1991-07-16 1993-01-26 Hitachi Cable Ltd Production of catheter
JPH05272446A (en) 1992-01-30 1993-10-19 Terumo Corp Bending-stretching mechanism type actuator
US5624380A (en) 1992-03-12 1997-04-29 Olympus Optical Co., Ltd. Multi-degree of freedom manipulator
JPH07208537A (en) 1994-01-20 1995-08-11 Nippondenso Co Ltd Liquid seal type mounting device
JPH07335039A (en) 1994-06-14 1995-12-22 Hitachi Cable Ltd High voltage refractory cable with shield
US5563458A (en) 1995-03-08 1996-10-08 Ericson; Paul L. Apparatus and method for sensing surface flexure
WO1996036462A1 (en) 1995-05-19 1996-11-21 Mcgill University Deformable structural arrangement
US5799871A (en) 1996-03-13 1998-09-01 Hago Industrial Corp. Spray nozzle with discrete open/close deadband and method therefor
US6072154A (en) 1996-09-05 2000-06-06 Medtronic, Inc. Selectively activated shape memory device
US6133547A (en) 1996-09-05 2000-10-17 Medtronic, Inc. Distributed activator for a two-dimensional shape memory alloy
US5796152A (en) * 1997-01-24 1998-08-18 Roxburgh Ltd. Cantilevered microstructure
US6241691B1 (en) 1997-12-05 2001-06-05 Micrus Corporation Coated superelastic stent
FR2772512B1 (en) * 1997-12-16 2004-04-16 Commissariat Energie Atomique MICROSYSTEM WITH DEFORMABLE ELEMENT UNDER THE EFFECT OF A THERMAL ACTUATOR
US6447478B1 (en) 1998-05-15 2002-09-10 Ronald S. Maynard Thin-film shape memory alloy actuators and processing methods
US6379393B1 (en) * 1998-09-14 2002-04-30 Rutgers, The State University Of New Jersey Prosthetic, orthotic, and other rehabilitative robotic assistive devices actuated by smart materials
DE29816878U1 (en) 1998-09-21 1998-12-24 Schmitz Rode Thomas Dipl Ing D Helix stent that can be manufactured using the cutting process
US6236300B1 (en) * 1999-03-26 2001-05-22 R. Sjhon Minners Bistable micro-switch and method of manufacturing the same
US6483058B2 (en) 2000-09-07 2002-11-19 Itt Manufacturing Enterprises, Inc. Sealed manual reset switch
US6827743B2 (en) 2001-02-28 2004-12-07 Sdgi Holdings, Inc. Woven orthopedic implants
WO2002075824A2 (en) 2001-03-16 2002-09-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for producing adaptronic microsystems
EP1273808B1 (en) 2001-07-02 2006-04-05 Medos International S.a.r.l. Adjustable micro valve and method of setting and actuating it
AU2002309106A1 (en) 2001-07-05 2003-02-24 International Business Machines Coporation Microsystem switches
KR100431828B1 (en) 2001-12-22 2004-05-17 재단법인 포항산업과학연구원 Fabrication method of metal metrix composite reinforced by shape memory alloy
US6705813B2 (en) 2002-02-07 2004-03-16 Pierre P. Schwab Snap disc device
JP3659234B2 (en) 2002-03-07 2005-06-15 住友電気工業株式会社 Fiber optic cable

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB213602A (en) * 1923-03-31 1924-08-14 Ernst Sachs Improvements in free wheel and back pedalling brake hubs for cycles and the like
US4209675A (en) * 1977-12-07 1980-06-24 Vitale Andrew P Variable duration electric clock timer unit
JPH01147090A (en) * 1987-12-01 1989-06-08 Kubota Ltd Conductor roll for electroplating
JPH03291821A (en) * 1989-11-07 1991-12-24 Fujitsu Ltd Heat-sensitive switch
US6194066B1 (en) * 1991-04-24 2001-02-27 The United States Of America As Represented By The Secretary Of The Air Force Microscopic tube devices and method of manufacture
US5996346A (en) * 1993-07-28 1999-12-07 The Board Of Trustees Of The Leland Stanford Junior University Electrically activated multi-jointed manipulator
US5410290A (en) * 1993-08-02 1995-04-25 Cho; Dong-Il Shape memory alloy relays and switches
US6310411B1 (en) * 1999-04-21 2001-10-30 Hewlett-Packard Company Lock assembly for a personal computer enclosure
US20040080239A1 (en) * 2000-03-28 2004-04-29 Vikas Gupta Thin film shape memory alloy actuated microrelay
EP1143466A1 (en) * 2000-04-05 2001-10-10 Cronos Integrated Microsystems, Inc. Lockable microelectromechanical actuators using thermoplastic materials, and methods of operating same
US20030156006A1 (en) * 2000-06-19 2003-08-21 Martin Hanke Bistable electric switch and relay with a bistable electrical switch
US20030011450A1 (en) * 2001-05-18 2003-01-16 Jun Shen Mircomagnetic latching switch packaging
US20040150491A1 (en) * 2003-01-21 2004-08-05 You Kondoh Multi-substrate liquid metal high-frequency switching device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 013, no. 408 (C - 634) 8 September 1989 (1989-09-08) *
PATENT ABSTRACTS OF JAPAN vol. 016, no. 124 (E - 1183) 30 March 1992 (1992-03-30) *

Also Published As

Publication number Publication date
US20060201149A1 (en) 2006-09-14
US7665300B2 (en) 2010-02-23
WO2006099065A2 (en) 2006-09-21

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