WO2006133042A3 - Method and apparatus to fabricate polymer arrays on patterned wafers using electrochemical synthesis - Google Patents
Method and apparatus to fabricate polymer arrays on patterned wafers using electrochemical synthesis Download PDFInfo
- Publication number
- WO2006133042A3 WO2006133042A3 PCT/US2006/021650 US2006021650W WO2006133042A3 WO 2006133042 A3 WO2006133042 A3 WO 2006133042A3 US 2006021650 W US2006021650 W US 2006021650W WO 2006133042 A3 WO2006133042 A3 WO 2006133042A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- wafer
- dies
- patterned wafers
- electrochemical synthesis
- polymer arrays
- Prior art date
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0046—Sequential or parallel reactions, e.g. for the synthesis of polypeptides or polynucleotides; Apparatus and devices for combinatorial chemistry or for making molecular arrays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00277—Apparatus
- B01J2219/00497—Features relating to the solid phase supports
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00277—Apparatus
- B01J2219/00497—Features relating to the solid phase supports
- B01J2219/005—Beads
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00277—Apparatus
- B01J2219/00497—Features relating to the solid phase supports
- B01J2219/00527—Sheets
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00277—Apparatus
- B01J2219/0054—Means for coding or tagging the apparatus or the reagents
- B01J2219/00572—Chemical means
- B01J2219/00574—Chemical means radioactive
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00277—Apparatus
- B01J2219/0054—Means for coding or tagging the apparatus or the reagents
- B01J2219/00572—Chemical means
- B01J2219/00576—Chemical means fluorophore
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00583—Features relative to the processes being carried out
- B01J2219/00585—Parallel processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00583—Features relative to the processes being carried out
- B01J2219/00596—Solid-phase processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00583—Features relative to the processes being carried out
- B01J2219/00603—Making arrays on substantially continuous surfaces
- B01J2219/00653—Making arrays on substantially continuous surfaces the compounds being bound to electrodes embedded in or on the solid supports
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00583—Features relative to the processes being carried out
- B01J2219/00603—Making arrays on substantially continuous surfaces
- B01J2219/00659—Two-dimensional arrays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00583—Features relative to the processes being carried out
- B01J2219/00603—Making arrays on substantially continuous surfaces
- B01J2219/00659—Two-dimensional arrays
- B01J2219/00662—Two-dimensional arrays within two-dimensional arrays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00583—Features relative to the processes being carried out
- B01J2219/00603—Making arrays on substantially continuous surfaces
- B01J2219/00675—In-situ synthesis on the substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00583—Features relative to the processes being carried out
- B01J2219/00603—Making arrays on substantially continuous surfaces
- B01J2219/00677—Ex-situ synthesis followed by deposition on the substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/0068—Means for controlling the apparatus of the process
- B01J2219/00686—Automatic
- B01J2219/00689—Automatic using computers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00709—Type of synthesis
- B01J2219/00713—Electrochemical synthesis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00718—Type of compounds synthesised
- B01J2219/0072—Organic compounds
- B01J2219/00722—Nucleotides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00718—Type of compounds synthesised
- B01J2219/0072—Organic compounds
- B01J2219/00725—Peptides
Abstract
A wafer having a plurality of dies (also called array chips) on the wafer, the die having an electrode to generate a deprotecting reagent, a working electrode to electrochemically synthesize a material, a confinement electrode adjacent to the working electrode to confine reactive reagents, and a die pad, wherein die pads of the plurality of dies are interconnected on the wafer to electrochemically synthesize the material in parallel on a plurality of working electrodes is disclosed. Also, a method for wafer-scale manufacturing of a plurality of dies and a method for electrochemically synthesizing a material in parallel on a plurality of dies on a wafer are disclosed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2006800199945A CN101257966B (en) | 2005-06-06 | 2006-06-02 | Method and apparatus to fabricate polymer arrays on patterned wafers using electrochemical synthesis |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/144,679 US8053774B2 (en) | 2005-06-06 | 2005-06-06 | Method and apparatus to fabricate polymer arrays on patterned wafers using electrochemical synthesis |
US11/144,679 | 2005-06-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006133042A2 WO2006133042A2 (en) | 2006-12-14 |
WO2006133042A3 true WO2006133042A3 (en) | 2007-02-01 |
Family
ID=37397367
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2006/021650 WO2006133042A2 (en) | 2005-06-06 | 2006-06-02 | Method and apparatus to fabricate polymer arrays on patterned wafers using electrochemical synthesis |
Country Status (3)
Country | Link |
---|---|
US (3) | US8053774B2 (en) |
CN (1) | CN101257966B (en) |
WO (1) | WO2006133042A2 (en) |
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US8940143B2 (en) | 2007-06-29 | 2015-01-27 | Intel Corporation | Gel-based bio chip for electrochemical synthesis and electrical detection of polymers |
US9632073B2 (en) | 2012-04-02 | 2017-04-25 | Lux Bio Group, Inc. | Apparatus and method for molecular separation, purification, and sensing |
US20130256144A1 (en) * | 2012-04-02 | 2013-10-03 | Lux Bio Group, Inc. | Apparatus and method for molecular separation, purification, and sensing |
US7638034B2 (en) | 2006-09-21 | 2009-12-29 | Los Alamos National Security, Llc | Electrochemical detection of single molecules using abiotic nanopores having electrically tunable dimensions |
US7923237B2 (en) * | 2006-12-28 | 2011-04-12 | Intel Corporation | Method and apparatus for combined electrochemical synthesis and detection of analytes |
US8999724B2 (en) | 2006-12-28 | 2015-04-07 | Intel Corporation | Method and apparatus for match quality analysis of analyte binding |
US8614086B2 (en) * | 2006-12-28 | 2013-12-24 | Intel Corporation | Quality control methods for the manufacture of polymer arrays |
WO2009070124A1 (en) * | 2007-11-28 | 2009-06-04 | Agency For Science, Technology And Research | A low temperature method of bonding substrates having at least one surface that includes a layer of su8 |
US8697605B2 (en) | 2008-06-30 | 2014-04-15 | Intel Corporation | Polymer co-location in surface-attached biopolymers and arrays of biopolymers |
US10464811B2 (en) * | 2009-04-06 | 2019-11-05 | Nanyang Technological University | Method of forming a particulate porous metal oxide or metalloid oxide |
ES2574056T3 (en) | 2010-03-31 | 2016-06-14 | Agency For Science, Technology And Research | Linear amphiphilic peptide / peptoid and hydrogel comprising the same |
CN109061128A (en) * | 2012-04-02 | 2018-12-21 | 力士生物集团公司 | Device and method for molecule separation, purifying and detection |
US9732384B2 (en) | 2012-04-02 | 2017-08-15 | Lux Bio Group, Inc. | Apparatus and method for molecular separation, purification, and sensing |
US10179178B2 (en) | 2012-08-27 | 2019-01-15 | Nanyang Technology University | Nanoparticulate contrast agent |
US20160030603A1 (en) | 2013-03-15 | 2016-02-04 | Westfaelische Wilhelms-Universitaet Muenster | Detection of acute renal allograft rejection |
WO2015187858A1 (en) * | 2014-06-03 | 2015-12-10 | Vomaris Innovations, Inc. | Methods and devices for surgical pre-treatment |
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CN109715824A (en) * | 2016-05-09 | 2019-05-03 | 哈佛学院董事及会员团体 | Enzymatic nucleic acid synthesis |
US10704088B2 (en) * | 2018-06-29 | 2020-07-07 | Intel Corporation | Massively parallel integrated circuit-based DNA synthesis devices, systems, and methods |
US11584956B2 (en) * | 2018-12-21 | 2023-02-21 | Microsoft Technology Licensing, Llc | Selectively controllable cleavable linkers |
US11738995B2 (en) * | 2019-06-21 | 2023-08-29 | International Business Machines Corporation | Manipulation of a molecule using dipole moments |
US11773422B2 (en) * | 2019-08-16 | 2023-10-03 | Microsoft Technology Licensing, Llc | Regulation of polymerase using cofactor oxidation states |
US11896945B2 (en) | 2019-10-09 | 2024-02-13 | Microsoft Technology Licensing, Llc | High surface area coatings for solid-phase synthesis |
US11702683B2 (en) | 2020-05-28 | 2023-07-18 | Microsoft Technology Licensing, Llc | De novo polynucleotide synthesis with substrate-bound polymerase |
CN112662660B (en) * | 2020-12-11 | 2022-09-16 | 复旦大学 | Electrode array device for gene sequence synthesis and control method thereof |
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2005
- 2005-06-06 US US11/144,679 patent/US8053774B2/en not_active Expired - Fee Related
-
2006
- 2006-06-02 CN CN2006800199945A patent/CN101257966B/en not_active Expired - Fee Related
- 2006-06-02 WO PCT/US2006/021650 patent/WO2006133042A2/en active Application Filing
-
2011
- 2011-09-23 US US13/242,127 patent/US8278121B2/en active Active
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2012
- 2012-05-16 US US13/473,338 patent/US9085461B2/en not_active Expired - Fee Related
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WO1993022678A2 (en) * | 1992-04-23 | 1993-11-11 | Massachusetts Institute Of Technology | Optical and electrical methods and apparatus for molecule detection |
US20030059929A1 (en) * | 1993-11-01 | 2003-03-27 | Nanogen, Inc. | Methods for electronic synthesis of complex structures |
US6251595B1 (en) * | 1998-06-18 | 2001-06-26 | Agilent Technologies, Inc. | Methods and devices for carrying out chemical reactions |
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Also Published As
Publication number | Publication date |
---|---|
US9085461B2 (en) | 2015-07-21 |
US8278121B2 (en) | 2012-10-02 |
WO2006133042A2 (en) | 2006-12-14 |
US20120225512A1 (en) | 2012-09-06 |
CN101257966B (en) | 2012-03-21 |
US20060275927A1 (en) | 2006-12-07 |
US8053774B2 (en) | 2011-11-08 |
US20120070930A1 (en) | 2012-03-22 |
CN101257966A (en) | 2008-09-03 |
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