WO2007035761A3 - Planarization of metal layer over photoresist - Google Patents

Planarization of metal layer over photoresist Download PDF

Info

Publication number
WO2007035761A3
WO2007035761A3 PCT/US2006/036531 US2006036531W WO2007035761A3 WO 2007035761 A3 WO2007035761 A3 WO 2007035761A3 US 2006036531 W US2006036531 W US 2006036531W WO 2007035761 A3 WO2007035761 A3 WO 2007035761A3
Authority
WO
WIPO (PCT)
Prior art keywords
metal layer
planarization
layer over
over photoresist
planarizing
Prior art date
Application number
PCT/US2006/036531
Other languages
French (fr)
Other versions
WO2007035761A2 (en
Inventor
Anthony Dicarlo
Jingqiu Chen
Yanghua He
James C Baker
David A Rothenbury
Original Assignee
Texas Instruments Inc
Anthony Dicarlo
Jingqiu Chen
Yanghua He
James C Baker
David A Rothenbury
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc, Anthony Dicarlo, Jingqiu Chen, Yanghua He, James C Baker, David A Rothenbury filed Critical Texas Instruments Inc
Priority to CN200680042244XA priority Critical patent/CN101512731B/en
Priority to EP06814963A priority patent/EP1938365B1/en
Publication of WO2007035761A2 publication Critical patent/WO2007035761A2/en
Publication of WO2007035761A3 publication Critical patent/WO2007035761A3/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

The invention provides a method for planarizing a metal layer, and a method for manufacturing a micromirror element. The method for planarizing the metal layer, without limitation, may include the steps of forming a metal layer (710) over a photoresist layer (510), and then planarizing the metal layer using a chemical mechanical polishing process.
PCT/US2006/036531 2005-09-20 2006-09-20 Planarization of metal layer over photoresist WO2007035761A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN200680042244XA CN101512731B (en) 2005-09-20 2006-09-20 Planarization of metal layer over photoresist
EP06814963A EP1938365B1 (en) 2005-09-20 2006-09-20 Method for planarization of metal layer over photoresist and micromirror device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/231,249 US7871931B2 (en) 2005-09-20 2005-09-20 Method for chemical mechanical planarization of a metal layer located over a photoresist layer and a method for manufacturing a micro pixel array using the same
US11/231,249 2005-09-20

Publications (2)

Publication Number Publication Date
WO2007035761A2 WO2007035761A2 (en) 2007-03-29
WO2007035761A3 true WO2007035761A3 (en) 2009-04-23

Family

ID=37884743

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/036531 WO2007035761A2 (en) 2005-09-20 2006-09-20 Planarization of metal layer over photoresist

Country Status (4)

Country Link
US (1) US7871931B2 (en)
EP (1) EP1938365B1 (en)
CN (1) CN101512731B (en)
WO (1) WO2007035761A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9864188B2 (en) * 2014-11-03 2018-01-09 Texas Instruments Incorporated Operation/margin enhancement feature for surface-MEMS structure; sculpting raised address electrode
JP6519284B2 (en) * 2015-04-01 2019-05-29 セイコーエプソン株式会社 Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5638354A (en) * 1993-07-16 1997-06-10 Ricoh Company, Ltd. Optical information recording medium
US20030129782A1 (en) * 2001-12-31 2003-07-10 Robbins Roger A. Method and apparatus for MEMS device nebulizer lubrication system

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06260470A (en) * 1992-12-16 1994-09-16 Texas Instr Inc <Ti> Cleaning prepared of metal layer created on pattern
US5457493A (en) * 1993-09-15 1995-10-10 Texas Instruments Incorporated Digital micro-mirror based image simulation system
JPH07285069A (en) * 1994-04-18 1995-10-31 Shin Etsu Handotai Co Ltd Automatic taper removal polishing method and device of wafer in sheet type polishing
US6053617A (en) * 1994-09-23 2000-04-25 Texas Instruments Incorporated Manufacture method for micromechanical devices
US6962419B2 (en) * 1998-09-24 2005-11-08 Reflectivity, Inc Micromirror elements, package for the micromirror elements, and projection system therefor
US7196740B2 (en) * 2000-08-30 2007-03-27 Texas Instruments Incorporated Projection TV with improved micromirror array
US7023606B2 (en) * 2001-08-03 2006-04-04 Reflectivity, Inc Micromirror array for projection TV
DE60214111T2 (en) * 2001-11-21 2007-02-22 Texas Instruments Inc., Dallas Jocheless digital micromirror device with concealed joint
US6856446B2 (en) * 2001-12-12 2005-02-15 Texas Instruments Incorporated Digital micromirror device having mirror-attached spring tips
US7088486B2 (en) * 2002-01-31 2006-08-08 Texas Instruments Incorporated Yokeless hidden hinge micromirror device with double binge layer
US6528843B1 (en) * 2002-05-03 2003-03-04 Silicon Based Technology Corp. Self-aligned split-gate flash memory cell having a single-side tip-shaped floating-gate structure and its contactless flash memory arrays
US6525369B1 (en) * 2002-05-13 2003-02-25 Ching-Yuan Wu Self-aligned split-gate flash memory cell and its contactless flash memory arrays
US6531734B1 (en) * 2002-05-24 2003-03-11 Silicon Based Technology Corp. Self-aligned split-gate flash memory cell having an integrated source-side erase structure and its contactless flash memory arrays
US6552386B1 (en) * 2002-09-30 2003-04-22 Silicon-Based Technology Corp. Scalable split-gate flash memory cell structure and its contactless flash memory arrays
US6776696B2 (en) * 2002-10-28 2004-08-17 Planar Solutions Llc Continuous chemical mechanical polishing process for polishing multiple conductive and non-conductive layers on semiconductor wafers
US6710396B1 (en) * 2003-01-24 2004-03-23 Silicon-Based Technology Corp. Self-aligned split-gate flash cell structure and its contactless flash memory arrays
US7052972B2 (en) * 2003-12-19 2006-05-30 Micron Technology, Inc. Method for forming sublithographic features during the manufacture of a semiconductor device and a resulting in-process apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5638354A (en) * 1993-07-16 1997-06-10 Ricoh Company, Ltd. Optical information recording medium
US20030129782A1 (en) * 2001-12-31 2003-07-10 Robbins Roger A. Method and apparatus for MEMS device nebulizer lubrication system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1938365A4 *

Also Published As

Publication number Publication date
CN101512731B (en) 2012-03-21
EP1938365A2 (en) 2008-07-02
US20070066063A1 (en) 2007-03-22
WO2007035761A2 (en) 2007-03-29
US7871931B2 (en) 2011-01-18
EP1938365A4 (en) 2011-02-02
EP1938365B1 (en) 2012-11-14
CN101512731A (en) 2009-08-19

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