WO2007044208A3 - Ampoule splash guard apparatus - Google Patents

Ampoule splash guard apparatus Download PDF

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Publication number
WO2007044208A3
WO2007044208A3 PCT/US2006/037217 US2006037217W WO2007044208A3 WO 2007044208 A3 WO2007044208 A3 WO 2007044208A3 US 2006037217 W US2006037217 W US 2006037217W WO 2007044208 A3 WO2007044208 A3 WO 2007044208A3
Authority
WO
WIPO (PCT)
Prior art keywords
ampoule
splash guard
gas
precursor
gas outlet
Prior art date
Application number
PCT/US2006/037217
Other languages
French (fr)
Other versions
WO2007044208A2 (en
Inventor
Wei Ti Lee
Steve H Chiao
Original Assignee
Applied Materials Inc
Wei Ti Lee
Steve H Chiao
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc, Wei Ti Lee, Steve H Chiao filed Critical Applied Materials Inc
Publication of WO2007044208A2 publication Critical patent/WO2007044208A2/en
Publication of WO2007044208A3 publication Critical patent/WO2007044208A3/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • C23C16/4482—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material by bubbling of carrier gas through liquid source material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S261/00—Gas and liquid contact apparatus
    • Y10S261/65—Vaporizers

Abstract

Embodiments of the invention provide an apparatus for generating a precursor gas used in a vapor deposition process system. The apparatus contains a canister or an ampoule for containing a chemical precursor and a splash guard contained within the ampoule. The splash guard is positioned to obstruct the chemical precursor in a liquid state from being bumped or splashed into a gas outlet during the introduction of a carrier gas into the ampoule. The carrier gas is usually directed into the ampoule through a gas inlet and combines with the vaporized chemical precursor to form a precursor gas. The splash guard is also positioned to permit the passage of the precursor gas from the gas outlet. In one example, the gas outlet contains a stem with a tapered tip and the splash guard is positioned at an angle parallel to the plane of the tapered tip.
PCT/US2006/037217 2005-10-07 2006-09-26 Ampoule splash guard apparatus WO2007044208A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/246,890 2005-10-07
US11/246,890 US7464917B2 (en) 2005-10-07 2005-10-07 Ampoule splash guard apparatus

Publications (2)

Publication Number Publication Date
WO2007044208A2 WO2007044208A2 (en) 2007-04-19
WO2007044208A3 true WO2007044208A3 (en) 2007-11-22

Family

ID=37910065

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/037217 WO2007044208A2 (en) 2005-10-07 2006-09-26 Ampoule splash guard apparatus

Country Status (3)

Country Link
US (2) US7464917B2 (en)
TW (1) TW200718803A (en)
WO (1) WO2007044208A2 (en)

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US7464917B2 (en) 2008-12-16
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US7699295B2 (en) 2010-04-20
TW200718803A (en) 2007-05-16

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