WO2007067282A3 - Arrayed ultrasonic transducer - Google Patents

Arrayed ultrasonic transducer Download PDF

Info

Publication number
WO2007067282A3
WO2007067282A3 PCT/US2006/042889 US2006042889W WO2007067282A3 WO 2007067282 A3 WO2007067282 A3 WO 2007067282A3 US 2006042889 W US2006042889 W US 2006042889W WO 2007067282 A3 WO2007067282 A3 WO 2007067282A3
Authority
WO
WIPO (PCT)
Prior art keywords
stack
piezoelectric layer
layer
ultrasonic transducer
axis
Prior art date
Application number
PCT/US2006/042889
Other languages
French (fr)
Other versions
WO2007067282A2 (en
WO2007067282A8 (en
Inventor
Marc Lukacs
Stuart F Foster
Jianhua Yin
Guofeng Pang
Richard Garcia
Original Assignee
Visualsonics Corp
Sunnybrook And Women S Collge
Marc Lukacs
Stuart F Foster
Jianhua Yin
Guofeng Pang
Richard Garcia
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Visualsonics Corp, Sunnybrook And Women S Collge, Marc Lukacs, Stuart F Foster, Jianhua Yin, Guofeng Pang, Richard Garcia filed Critical Visualsonics Corp
Priority to CA002627927A priority Critical patent/CA2627927A1/en
Priority to JP2008539043A priority patent/JP4807761B2/en
Priority to EP06827415A priority patent/EP1951445A2/en
Publication of WO2007067282A2 publication Critical patent/WO2007067282A2/en
Publication of WO2007067282A3 publication Critical patent/WO2007067282A3/en
Publication of WO2007067282A8 publication Critical patent/WO2007067282A8/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/064—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface with multiple active layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)

Abstract

An ultrasonic transducer comprises a stack having a first face 102, an opposed second face 104 and a longitudinal axis Ls extending therebetween. The stack comprises a plurality of layers, each layer having a top surface and an opposed bottom surface, wherein the plurality of layers of the stack comprises an upper unpoled piezoelectric layer 126, an underlying lower poled piezoelectric layer 106, and a dielectric layer 108. The dielectric layer 108 is connected to the piezoelectric layer 106 and defines an opening extending a second predetermined length in a direction substantially parallel to the axis of the stack. A plurality of first kerf slots 118 are defined therein the stack, each first kerf slot extending a predetermined depth therein the stack through the upper piezoelectric layer 126 and into the lower piezoelectric layer 106 and a first predetermined length in a direction substantially parallel to the axis.
PCT/US2006/042889 2005-11-02 2006-11-02 Arrayed ultrasonic transducer WO2007067282A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CA002627927A CA2627927A1 (en) 2005-11-02 2006-11-02 Arrayed ultrasonic transducer
JP2008539043A JP4807761B2 (en) 2005-11-02 2006-11-02 Array ultrasonic transducer
EP06827415A EP1951445A2 (en) 2005-11-02 2006-11-02 Arrayed ultrasonic transducer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US73309105P 2005-11-02 2005-11-02
US60/733,091 2005-11-02

Publications (3)

Publication Number Publication Date
WO2007067282A2 WO2007067282A2 (en) 2007-06-14
WO2007067282A3 true WO2007067282A3 (en) 2007-08-16
WO2007067282A8 WO2007067282A8 (en) 2008-10-02

Family

ID=37891998

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/042889 WO2007067282A2 (en) 2005-11-02 2006-11-02 Arrayed ultrasonic transducer

Country Status (5)

Country Link
EP (1) EP1951445A2 (en)
JP (1) JP4807761B2 (en)
CN (1) CN101405090A (en)
CA (1) CA2627927A1 (en)
WO (1) WO2007067282A2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9173047B2 (en) 2008-09-18 2015-10-27 Fujifilm Sonosite, Inc. Methods for manufacturing ultrasound transducers and other components
US9184369B2 (en) 2008-09-18 2015-11-10 Fujifilm Sonosite, Inc. Methods for manufacturing ultrasound transducers and other components
USRE46185E1 (en) 2005-11-02 2016-10-25 Fujifilm Sonosite, Inc. High frequency array ultrasound system

Families Citing this family (25)

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US8207652B2 (en) * 2009-06-16 2012-06-26 General Electric Company Ultrasound transducer with improved acoustic performance
CN101844130A (en) * 2010-05-14 2010-09-29 中国科学技术大学 Array silicon micro-ultrasonic transducer and manufacturing method thereof
JP5695350B2 (en) * 2010-06-10 2015-04-01 国立大学法人東北大学 High frequency vibration piezoelectric element, ultrasonic sensor, and method of manufacturing high frequency vibration piezoelectric element
RU2573443C2 (en) 2010-11-18 2016-01-20 Конинклейке Филипс Электроникс Н.В. Medical device with ultrasonic transducers integrated into flexible film
JP5574051B2 (en) * 2011-11-28 2014-08-20 株式会社村田製作所 Multilayer piezoelectric element and double feed detection sensor
US9180490B2 (en) * 2012-05-22 2015-11-10 General Electric Company Ultrasound transducer and method for manufacturing an ultrasound transducer
JP6273743B2 (en) * 2013-09-30 2018-02-07 セイコーエプソン株式会社 Ultrasonic device and probe, electronic apparatus and ultrasonic imaging apparatus
KR101600445B1 (en) * 2013-12-20 2016-03-07 전자부품연구원 Piezoelectric speaker unit and method of manufacturing the same
DE102015209238A1 (en) * 2015-05-20 2016-11-24 Robert Bosch Gmbh Acoustic sensor for sending and receiving acoustic signals
WO2017069701A1 (en) * 2015-10-21 2017-04-27 Agency For Science, Technology And Research Ultrasound transducer and method of forming the same
CN105232146B (en) * 2015-11-18 2018-01-02 郑州大学 A kind of intervention ablation catheter with localization by ultrasonic function
JP6907539B2 (en) * 2017-01-06 2021-07-21 セイコーエプソン株式会社 Ultrasonic devices, ultrasonic probes, and ultrasonic devices
CN107470116B (en) * 2017-08-14 2019-10-18 太仓宏微电子科技有限公司 A kind of high frequency ultrasound array energy transducer and production method based on MEMS technology
US10356523B2 (en) 2017-12-13 2019-07-16 Nvf Tech Ltd Distributed mode loudspeaker actuator including patterned electrodes
CN109926298B (en) * 2017-12-18 2021-01-05 深圳先进技术研究院 Mode conversion ultrasonic transducer and manufacturing method thereof
US11678865B2 (en) * 2017-12-29 2023-06-20 Fujifilm Sonosite, Inc. High frequency ultrasound transducer
CN108903968B (en) * 2018-05-03 2024-04-23 中国科学院苏州生物医学工程技术研究所 Ultrasonic transducer, ultrasonic imaging system and manufacturing method of ultrasonic transducer
US11109831B2 (en) 2018-07-17 2021-09-07 1929803 Ontario Corp, (o/a FloSonics Medical) Ultrasound patch for detecting fluid flow
EP3918886A4 (en) * 2019-01-29 2022-11-02 Butterfly Network, Inc. Packaging structures and packaging methods for ultrasound-on-chip devices
CN110172566B (en) * 2019-05-10 2020-10-16 北京理工大学 Device and method for reducing and homogenizing residual stress of complex component
CN110000075A (en) * 2019-04-02 2019-07-12 苏州诺莱声科技有限公司 A kind of ultrasonic transducer can reduce oscillation crosswise
WO2021039374A1 (en) * 2019-08-30 2021-03-04 富士フイルム株式会社 Acoustic matching laminate, composition for acoustic matching laminate, acoustic matching sheet, acoustic wave probe, acoustic wave measurement device, and method for manufacturing acoustic wave probe
CN110756418A (en) * 2019-10-29 2020-02-07 海鹰企业集团有限责任公司 Method for adjusting frequency of high-frequency curved surface transducer
WO2022008970A1 (en) 2020-07-06 2022-01-13 1929803 Ontario Corp. D/B/A Flosonics Medical Ultrasound patch with integrated flexible transducer assembly
CN112697075B (en) * 2020-12-03 2022-08-02 中国科学院光电技术研究所 Projection area analysis method for rendezvous and docking laser radar cooperative target

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0227926A1 (en) * 1986-01-03 1987-07-08 International Business Machines Corporation Physical parameter balancing of circuit islands in integrated circuit wafers
DE4142372A1 (en) * 1991-12-20 1993-06-24 Siemens Ag Ultrasound transducer array of elementary transducers arranged in a row e.g. for medical research - has elementary transducers connected to front and back terminals and connected to neighbouring transducers by piezo-ceramic connectors.
US20030036702A1 (en) * 2001-08-14 2003-02-20 Davidsen Richard Edward Scanhead assembly for ultrasonic imaging having an integral beamformer and demountable array
US6664717B1 (en) * 2001-02-28 2003-12-16 Acuson Corporation Multi-dimensional transducer array and method with air separation
EP1382301A1 (en) * 2002-07-19 2004-01-21 Aloka Co. Ltd. Ultrasonic probe and manufacturing method thereof
US6822374B1 (en) * 2000-11-15 2004-11-23 General Electric Company Multilayer piezoelectric structure with uniform electric field

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000050391A (en) * 1998-07-31 2000-02-18 Olympus Optical Co Ltd Ultrasonic transducer and its manufacture

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0227926A1 (en) * 1986-01-03 1987-07-08 International Business Machines Corporation Physical parameter balancing of circuit islands in integrated circuit wafers
DE4142372A1 (en) * 1991-12-20 1993-06-24 Siemens Ag Ultrasound transducer array of elementary transducers arranged in a row e.g. for medical research - has elementary transducers connected to front and back terminals and connected to neighbouring transducers by piezo-ceramic connectors.
US6822374B1 (en) * 2000-11-15 2004-11-23 General Electric Company Multilayer piezoelectric structure with uniform electric field
US6664717B1 (en) * 2001-02-28 2003-12-16 Acuson Corporation Multi-dimensional transducer array and method with air separation
US20030036702A1 (en) * 2001-08-14 2003-02-20 Davidsen Richard Edward Scanhead assembly for ultrasonic imaging having an integral beamformer and demountable array
EP1382301A1 (en) * 2002-07-19 2004-01-21 Aloka Co. Ltd. Ultrasonic probe and manufacturing method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE46185E1 (en) 2005-11-02 2016-10-25 Fujifilm Sonosite, Inc. High frequency array ultrasound system
US9173047B2 (en) 2008-09-18 2015-10-27 Fujifilm Sonosite, Inc. Methods for manufacturing ultrasound transducers and other components
US9184369B2 (en) 2008-09-18 2015-11-10 Fujifilm Sonosite, Inc. Methods for manufacturing ultrasound transducers and other components
US9555443B2 (en) 2008-09-18 2017-01-31 Fujifilm Sonosite, Inc. Methods for manufacturing ultrasound transducers and other components

Also Published As

Publication number Publication date
JP4807761B2 (en) 2011-11-02
CN101405090A (en) 2009-04-08
WO2007067282A2 (en) 2007-06-14
WO2007067282A8 (en) 2008-10-02
EP1951445A2 (en) 2008-08-06
JP2009515439A (en) 2009-04-09
CA2627927A1 (en) 2007-06-14

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