WO2007067344A3 - System and method for operation of a pump - Google Patents

System and method for operation of a pump Download PDF

Info

Publication number
WO2007067344A3
WO2007067344A3 PCT/US2006/044985 US2006044985W WO2007067344A3 WO 2007067344 A3 WO2007067344 A3 WO 2007067344A3 US 2006044985 W US2006044985 W US 2006044985W WO 2007067344 A3 WO2007067344 A3 WO 2007067344A3
Authority
WO
WIPO (PCT)
Prior art keywords
pump
profile
operating
points
values
Prior art date
Application number
PCT/US2006/044985
Other languages
French (fr)
Other versions
WO2007067344A2 (en
Inventor
George Gonnella
James Cedrone
Original Assignee
Entegris Inc
George Gonnella
James Cedrone
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/292,559 external-priority patent/US7850431B2/en
Application filed by Entegris Inc, George Gonnella, James Cedrone filed Critical Entegris Inc
Priority to CN200680051448XA priority Critical patent/CN101495754B/en
Priority to EP06844456.1A priority patent/EP1960670B1/en
Priority to KR1020087015803A priority patent/KR101290958B1/en
Priority to JP2008543344A priority patent/JP5241506B2/en
Publication of WO2007067344A2 publication Critical patent/WO2007067344A2/en
Publication of WO2007067344A3 publication Critical patent/WO2007067344A3/en

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00Pumps specially modified to deliver fixed or variable measured quantities
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B1/00Multi-cylinder machines or pumps characterised by number or arrangement of cylinders
    • F04B1/04Multi-cylinder machines or pumps characterised by number or arrangement of cylinders having cylinders in star- or fan-arrangement
    • F04B1/06Control
    • F04B1/08Control regulated by delivery pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00Pumping installations or systems
    • F04B23/04Combinations of two or more pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00Pumping installations or systems
    • F04B23/04Combinations of two or more pumps
    • F04B23/06Combinations of two or more pumps the pumps being all of reciprocating positive-displacement type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00Pumping installations or systems specially adapted for elastic fluids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06Combinations of two or more pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/08Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/088Machines, pumps, or pumping installations having flexible working members having tubular flexible members with two or more tubular flexible members in series
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06Control using electricity
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06Control using electricity
    • F04B49/065Control using electricity and making use of computers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/08Regulating by delivery pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/10Other safety measures
    • F04B49/103Responsive to speed
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00Testing machines, pumps, or pumping installations
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00Motor parameters
    • F04B2203/02Motor parameters of rotating electric motors
    • F04B2203/0209Rotational speed
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00Fluid parameters
    • F04B2205/01Pressure before the pump inlet
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00Fluid parameters
    • F04B2205/03Pressure in the compression chamber
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00Fluid parameters
    • F04B2205/04Pressure in the outlet chamber

Abstract

Systems and methods for operating a pump are disclosed. Pressure readings in a pump can be compared to a set point or profile to adjust motor speed to control pressure during various stages of operation. According to other embodiments, a baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. The values of the baseline profile and the operating profile may then be compared at one or more points or sets of points.
PCT/US2006/044985 2005-12-02 2006-11-20 System and method for operation of a pump WO2007067344A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN200680051448XA CN101495754B (en) 2005-12-02 2006-11-20 System and method for operation of a pump
EP06844456.1A EP1960670B1 (en) 2005-12-02 2006-11-20 System and method for operation of a pump
KR1020087015803A KR101290958B1 (en) 2005-12-02 2006-11-20 System and method for operation of a pump
JP2008543344A JP5241506B2 (en) 2005-12-02 2006-11-20 System and method for operation of a pump

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US11/292,559 US7850431B2 (en) 2005-12-02 2005-12-02 System and method for control of fluid pressure
US11/292,559 2005-12-02
US11/364,286 2006-02-28
US11/364,286 US7878765B2 (en) 2005-12-02 2006-02-28 System and method for monitoring operation of a pump

Publications (2)

Publication Number Publication Date
WO2007067344A2 WO2007067344A2 (en) 2007-06-14
WO2007067344A3 true WO2007067344A3 (en) 2009-04-23

Family

ID=38123369

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/044985 WO2007067344A2 (en) 2005-12-02 2006-11-20 System and method for operation of a pump

Country Status (7)

Country Link
US (3) US7878765B2 (en)
EP (1) EP1960670B1 (en)
JP (3) JP5241506B2 (en)
KR (1) KR101290958B1 (en)
CN (1) CN101495754B (en)
TW (1) TWI402422B (en)
WO (1) WO2007067344A2 (en)

Families Citing this family (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8172546B2 (en) * 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
US8292598B2 (en) 2004-11-23 2012-10-23 Entegris, Inc. System and method for a variable home position dispense system
EP1952022B1 (en) 2005-11-21 2014-11-12 Entegris, Inc. System and method for a pump with reduced form factor
US8753097B2 (en) * 2005-11-21 2014-06-17 Entegris, Inc. Method and system for high viscosity pump
CN101495756B (en) * 2005-12-02 2012-07-04 恩特格里公司 System and method for correcting for pressure variations using a motor
CN101356488B (en) * 2005-12-02 2012-05-16 恩特格里公司 I/O systems, methods and devices for interfacing a pump controller
US7850431B2 (en) 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
US8025486B2 (en) * 2005-12-02 2011-09-27 Entegris, Inc. System and method for valve sequencing in a pump
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
CN102705209B (en) * 2005-12-02 2015-09-30 恩特格里公司 For system and method pressure compensated in pump
WO2007067360A2 (en) * 2005-12-05 2007-06-14 Entegris, Inc. Error volume system and method for a pump
US7477997B2 (en) * 2005-12-19 2009-01-13 Siemens Healthcare Diagnostics Inc. Method for ascertaining interferants in small liquid samples in an automated clinical analyzer
TWI402423B (en) * 2006-02-28 2013-07-21 Entegris Inc System and method for operation of a pump
US7684446B2 (en) * 2006-03-01 2010-03-23 Entegris, Inc. System and method for multiplexing setpoints
US7494265B2 (en) * 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
US20080039820A1 (en) * 2006-08-10 2008-02-14 Jeff Sommers Medical Device With Septum
US7843548B2 (en) * 2006-11-13 2010-11-30 Asml Netherlands B.V. Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit system
US8425469B2 (en) * 2007-04-23 2013-04-23 Jacobson Technologies, Llc Systems and methods for controlled substance delivery network
US8220502B1 (en) * 2007-12-28 2012-07-17 Intermolecular, Inc. Measuring volume of a liquid dispensed into a vessel
JP5210147B2 (en) 2008-01-24 2013-06-12 株式会社荏原製作所 Water supply equipment
US8561627B1 (en) * 2008-09-26 2013-10-22 Intermolecular, Inc. Calibration of a chemical dispense system
JP4900361B2 (en) 2008-10-21 2012-03-21 ソニー株式会社 Image processing apparatus, image processing method, and program
JP2010106748A (en) * 2008-10-30 2010-05-13 Seiko Epson Corp Fluid ejection system, method for driving fluid ejection system, and surgical apparatus
JP6062246B2 (en) * 2009-07-15 2017-01-18 インテグレイテッド・デザインズ・リミテッド・パートナーシップIntegrated Designs,L.P. Regulator circuit and method for determining pump pressure based on motor current
US8684705B2 (en) * 2010-02-26 2014-04-01 Entegris, Inc. Method and system for controlling operation of a pump based on filter information in a filter information tag
US8727744B2 (en) * 2010-02-26 2014-05-20 Entegris, Inc. Method and system for optimizing operation of a pump
US8579599B2 (en) * 2010-03-26 2013-11-12 Schlumberger Technology Corporation System, apparatus, and method for rapid pump displacement configuration
WO2011144219A1 (en) * 2010-05-18 2011-11-24 Aktiebolaget Electrolux Drink dispensing system and method thereof
TWI563351B (en) 2010-10-20 2016-12-21 Entegris Inc Method and system for pump priming
US8671733B2 (en) 2011-12-13 2014-03-18 Intermolecular, Inc. Calibration procedure considering gas solubility
KR102014785B1 (en) * 2012-02-27 2019-08-27 마그나 파워트레인 오브 아메리카, 인크. Electric motor-driven pump
CH706231B1 (en) * 2012-03-05 2016-07-29 Ateliers Busch Sa pumping system and method for controlling such an installation.
US9777612B2 (en) * 2012-04-24 2017-10-03 Edwards Japan Limited Deposit detection device for exhaust pump and exhaust pump
US10132309B2 (en) 2013-03-15 2018-11-20 Integrated Designs, L.P. Apparatus and method for the remote monitoring, viewing and control of a semiconductor process tool
MX2015014398A (en) * 2013-04-12 2016-08-03 Pentair Pump Group Inc Water booster control system and method.
JP6144527B2 (en) * 2013-04-16 2017-06-07 エドワーズ株式会社 Magnetic bearing device and vacuum pump equipped with the magnetic bearing device
EP2881582A1 (en) * 2013-12-04 2015-06-10 Parker Hannifin Corporation Pump condition monitoring and recording
WO2015166298A1 (en) * 2014-04-30 2015-11-05 Anthony George Hurter Supercritical water used fuel oil purification apparatus and process
SG11201609910XA (en) 2014-05-28 2016-12-29 Entegris Inc Anti-backlash mechanism for motor-driven components in precision systems and applications
US10155208B2 (en) * 2014-09-30 2018-12-18 Taiwan Semiconductor Manufacturing Co., Ltd. Liquid mixing system for semiconductor fabrication
CN105840669B (en) * 2015-01-29 2020-03-27 斯凯孚公司 System for mounting an annular component on a shaft
US10121685B2 (en) * 2015-03-31 2018-11-06 Tokyo Electron Limited Treatment solution supply method, non-transitory computer-readable storage medium, and treatment solution supply apparatus
DE102015206589A1 (en) 2015-04-14 2016-10-20 Continental Automotive Gmbh A method of determining a temperature of a diaphragm of a pump
US10371142B2 (en) * 2015-07-27 2019-08-06 Bristol, Inc. Methods and apparatus for pairing rod pump controller position and load values
WO2017106995A1 (en) * 2015-12-21 2017-06-29 Intel Corporation Offline sensor calibration
DE102016110136B3 (en) * 2016-06-01 2017-08-10 Andreas Hofer Hochdrucktechnik Gmbh Pressure monitoring device
JP6739286B2 (en) * 2016-08-24 2020-08-12 株式会社Screenホールディングス Pump device and substrate processing device
RU2753092C2 (en) 2016-11-14 2021-08-11 Флюид Хэндлинг ЭлЭлСи Pump control based on cloud technologies and personalized hydraulic system components
USD880530S1 (en) 2017-05-16 2020-04-07 Enerpac Tool Corp. Pump
USD890815S1 (en) 2017-05-16 2020-07-21 Enerpac Tool Group Corp. Pump
EP3635251B1 (en) 2017-05-16 2023-09-20 Enerpac Tool Group Corp. Hydraulic pump
JP6920133B2 (en) 2017-08-23 2021-08-18 株式会社Screenホールディングス Processing liquid supply device
JP6966260B2 (en) 2017-08-30 2021-11-10 株式会社Screenホールディングス Pump equipment, processing liquid supply equipment and substrate processing equipment
JP6966265B2 (en) 2017-08-31 2021-11-10 株式会社Screenホールディングス Pump equipment, processing liquid supply equipment, substrate processing equipment, liquid draining method and liquid replacement method
US20190249651A1 (en) * 2018-02-13 2019-08-15 The Lee Company Dual pump system and control thereof
ES2940784T3 (en) 2018-11-13 2023-05-11 Enerpac Tool Group Corp Hydraulic power system and method for controlling the same
DE102019212831A1 (en) * 2019-08-27 2021-03-04 Robert Bosch Gmbh Method for operating a pump and SCR supply system with such a pump
US11772234B2 (en) 2019-10-25 2023-10-03 Applied Materials, Inc. Small batch polishing fluid delivery for CMP
GB202205883D0 (en) * 2022-04-22 2022-06-08 Cytiva Sweden Ab Pump for a bioprocessing system
US20230418314A1 (en) * 2022-06-24 2023-12-28 Abb Schweiz Ag Pump manifold with redundancy for gas extraction system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6474950B1 (en) * 2000-07-13 2002-11-05 Ingersoll-Rand Company Oil free dry screw compressor including variable speed drive
US6742993B2 (en) * 1999-10-18 2004-06-01 Integrated Designs, L.P. Method and apparatus for dispensing fluids

Family Cites Families (209)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US269626A (en) 1882-12-26 brauee
US826018A (en) 1904-11-21 1906-07-17 Isaac Robert Concoff Hose-coupling.
US1664125A (en) 1926-11-10 1928-03-27 John R Lowrey Hose coupling
US2153664A (en) 1937-03-08 1939-04-11 Dayton Rubber Mfg Co Strainer
US2215505A (en) 1938-06-13 1940-09-24 Byron Jackson Co Variable capacity pumping apparatus
US2328468A (en) 1940-12-07 1943-08-31 Laffly Edmond Gabriel Coupling device for the assembly of tubular elements
US2457384A (en) 1947-02-17 1948-12-28 Ace Glass Inc Clamp for spherical joints
GB661522A (en) 1949-03-31 1951-11-21 Eureka Williams Corp Improvements in or relating to oil burners
US2631538A (en) 1949-11-17 1953-03-17 Wilford C Thompson Diaphragm pump
US2673522A (en) 1951-04-10 1954-03-30 Bendix Aviat Corp Diaphragm pump
US2757966A (en) 1952-11-06 1956-08-07 Samiran David Pipe coupling
US3072058A (en) * 1961-08-18 1963-01-08 Socony Mobil Oil Co Inc Pipe line control system
US3227279A (en) 1963-05-06 1966-01-04 Conair Hydraulic power unit
US3250225A (en) 1964-07-13 1966-05-10 John F Taplin Mechanical system comprising feed pump having a rolling diaphragm
US3327635A (en) 1965-12-01 1967-06-27 Texsteam Corp Pumps
DE1910093A1 (en) 1969-02-28 1970-09-10 Wagner Josef Fa Paint spraying system
US3741298A (en) 1971-05-17 1973-06-26 L Canton Multiple well pump assembly
JPS4971508A (en) 1972-11-13 1974-07-10
US3895748A (en) 1974-04-03 1975-07-22 George R Klingenberg No drip suck back units for glue or other liquids either separately installed with or incorporated into no drip suck back liquid applying and control apparatus
US3977255A (en) 1975-08-18 1976-08-31 Control Process, Incorporated Evaluating pressure profile of material flowing to mold cavity
US4023592A (en) 1976-03-17 1977-05-17 Addressograph Multigraph Corporation Pump and metering device
US4093403A (en) 1976-09-15 1978-06-06 Outboard Marine Corporation Multistage fluid-actuated diaphragm pump with amplified suction capability
US4705461A (en) 1979-09-19 1987-11-10 Seeger Corporation Two-component metering pump
SE416889B (en) 1979-12-27 1981-02-16 Imo Industri Ab PROCEDURE FOR MIXING TWO VARIETIES WITH DIFFERENT VISCOSITY AND THE IMPLEMENTATION PROCEDURE
US4483665A (en) 1982-01-19 1984-11-20 Tritec Industries, Inc. Bellows-type pump and metering system
JPS59177929A (en) 1983-03-28 1984-10-08 Canon Inc Suck back pump
JPS6067790A (en) * 1983-09-21 1985-04-18 Tokyo Rika Kikai Kk High pressure constant volume pump for liquid chromatography
US4541455A (en) 1983-12-12 1985-09-17 Tritec Industries, Inc. Automatic vent valve
US4614438A (en) 1984-04-24 1986-09-30 Kabushiki Kaisha Kokusai Technicals Method of mixing fuel oils
JPH0437274Y2 (en) * 1984-10-19 1992-09-02
US4601409A (en) 1984-11-19 1986-07-22 Tritec Industries, Inc. Liquid chemical dispensing system
JPH0135027Y2 (en) 1985-01-29 1989-10-25
JPS61178582A (en) * 1985-02-01 1986-08-11 Jeol Ltd Liquid feeding pump apparatus
US4597721A (en) 1985-10-04 1986-07-01 Valco Cincinnati, Inc. Double acting diaphragm pump with improved disassembly means
JPS62131987A (en) 1985-12-05 1987-06-15 Takeshi Hoya Doubly connected pressure feeding device
SE451153B (en) 1986-01-20 1987-09-07 Dominator Ab SET TO CHANGE PRESSURE IN PNEUMATIC OR HYDRAULIC SYSTEM AND DEVICE TO PERFORM THE SET
US4690621A (en) 1986-04-15 1987-09-01 Advanced Control Engineering Filter pump head assembly
DE3631984C1 (en) 1986-09-19 1987-12-17 Hans Ing Kern Dosing pump
US4966646A (en) 1986-09-24 1990-10-30 Board Of Trustees Of Leland Stanford University Method of making an integrated, microminiature electric-to-fluidic valve
US4943032A (en) 1986-09-24 1990-07-24 Stanford University Integrated, microminiature electric to fluidic valve and pressure/flow regulator
US4821997A (en) 1986-09-24 1989-04-18 The Board Of Trustees Of The Leland Stanford Junior University Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator
US4824073A (en) 1986-09-24 1989-04-25 Stanford University Integrated, microminiature electric to fluidic valve
US4797834A (en) * 1986-09-30 1989-01-10 Honganen Ronald E Process for controlling a pump to account for compressibility of liquids in obtaining steady flow
JP2604362B2 (en) * 1986-10-22 1997-04-30 株式会社日立製作所 Low pulsation pump
JPS63173866A (en) * 1987-01-09 1988-07-18 Hitachi Ltd Controlling system for nonpulsation pump
JP2713401B2 (en) * 1987-01-17 1998-02-16 日本分光株式会社 Reciprocating pump
JP2824575B2 (en) * 1987-08-11 1998-11-11 株式会社日立製作所 Low pulsating flow pump
US5246347A (en) 1988-05-17 1993-09-21 Patients Solutions, Inc. Infusion device with disposable elements
US4952386A (en) 1988-05-20 1990-08-28 Athens Corporation Method and apparatus for purifying hydrogen fluoride
JPH0291485A (en) * 1988-09-27 1990-03-30 Teijin Ltd Liquid quantitative supply device
US4950134A (en) 1988-12-27 1990-08-21 Cybor Corporation Precision liquid dispenser
JP2633005B2 (en) 1989-02-15 1997-07-23 日本電子株式会社 Flow meter for constant flow pump
US5167837A (en) 1989-03-28 1992-12-01 Fas-Technologies, Inc. Filtering and dispensing system with independently activated pumps in series
US4981418A (en) 1989-07-25 1991-01-01 Osmonics, Inc. Internally pressurized bellows pump
US5062770A (en) 1989-08-11 1991-11-05 Systems Chemistry, Inc. Fluid pumping apparatus and system with leak detection and containment
DE3943585C2 (en) 1989-08-31 1995-04-27 Wagner Gmbh J Diaphragm pump
US5135031A (en) 1989-09-25 1992-08-04 Vickers, Incorporated Power transmission
JP2803859B2 (en) 1989-09-29 1998-09-24 株式会社日立製作所 Fluid supply device and control method thereof
US5061574A (en) 1989-11-28 1991-10-29 Battelle Memorial Institute Thick, low-stress films, and coated substrates formed therefrom
US5316181A (en) 1990-01-29 1994-05-31 Integrated Designs, Inc. Liquid dispensing system
US5098261A (en) 1990-05-04 1992-03-24 Brandel Corporation Peristaltic pump and method for adjustable flow regulation
US5061156A (en) 1990-05-18 1991-10-29 Tritec Industries, Inc. Bellows-type dispensing pump
JPH0816563B2 (en) * 1990-07-06 1996-02-21 株式会社荏原製作所 Surge detector for turbo refrigerator
JP2963514B2 (en) 1990-09-20 1999-10-18 克郎 神谷 Infusion control device
US5262068A (en) 1991-05-17 1993-11-16 Millipore Corporation Integrated system for filtering and dispensing fluid having fill, dispense and bubble purge strokes
US5230445A (en) 1991-09-30 1993-07-27 City Of Hope Micro delivery valve
US5527161A (en) 1992-02-13 1996-06-18 Cybor Corporation Filtering and dispensing system
US5312233A (en) 1992-02-25 1994-05-17 Ivek Corporation Linear liquid dispensing pump for dispensing liquid in nanoliter volumes
US5380019A (en) 1992-07-01 1995-01-10 Furon Company Spring seal
US5336884A (en) 1992-07-01 1994-08-09 Rockwell International Corporation High resolution optical hybrid absolute incremental position encoder
US5344195A (en) 1992-07-29 1994-09-06 General Electric Company Biased fluid coupling
US5261442A (en) 1992-11-04 1993-11-16 Bunnell Plastics, Inc. Diaphragm valve with leak detection
US5490765A (en) 1993-05-17 1996-02-13 Cybor Corporation Dual stage pump system with pre-stressed diaphragms and reservoir
US6190565B1 (en) 1993-05-17 2001-02-20 David C. Bailey Dual stage pump system with pre-stressed diaphragms and reservoir
US6203759B1 (en) 1996-05-31 2001-03-20 Packard Instrument Company Microvolume liquid handling system
US5511797A (en) 1993-07-28 1996-04-30 Furon Company Tandem seal gasket assembly
JPH0727150U (en) 1993-10-07 1995-05-19 大日本スクリーン製造株式会社 Silica-based coating liquid ejector
US5350200A (en) 1994-01-10 1994-09-27 General Electric Company Tube coupling assembly
US5407102A (en) 1994-02-15 1995-04-18 Freudinger; Mark J. Apparatus for dispensing a quantity of flowable material
US5434774A (en) 1994-03-02 1995-07-18 Fisher Controls International, Inc. Interface apparatus for two-wire communication in process control loops
DE4412668C2 (en) 1994-04-13 1998-12-03 Knf Flodos Ag pump
US5476004A (en) 1994-05-27 1995-12-19 Furon Company Leak-sensing apparatus
US5447287A (en) 1994-06-24 1995-09-05 Robertshaw Controls Company Fuel control device and methods of making the same
JP3583809B2 (en) * 1994-07-07 2004-11-04 兵神装備株式会社 High pressure type single axis eccentric screw pump device
US5580103A (en) 1994-07-19 1996-12-03 Furon Company Coupling device
JPH0861246A (en) * 1994-08-23 1996-03-08 Kawamoto Seisakusho:Kk Variable speed pump device
US5599100A (en) 1994-10-07 1997-02-04 Mobil Oil Corporation Multi-phase fluids for a hydraulic system
US5546009A (en) 1994-10-12 1996-08-13 Raphael; Ian P. Detector system using extremely low power to sense the presence or absence of an inert or hazardous fuild
US5784573A (en) * 1994-11-04 1998-07-21 Texas Instruments Incorporated Multi-protocol local area network controller
US5575311A (en) 1995-01-13 1996-11-19 Furon Company Three-way poppet valve apparatus
US5653251A (en) 1995-03-06 1997-08-05 Reseal International Limited Partnership Vacuum actuated sheath valve
US5846056A (en) * 1995-04-07 1998-12-08 Dhindsa; Jasbir S. Reciprocating pump system and method for operating same
JPH08300020A (en) * 1995-04-28 1996-11-19 Nisshin Steel Co Ltd Method for controlling flow rate of viscous liquid dispersed with lubricant for hot rolling of stainless steel
US5652391A (en) 1995-05-12 1997-07-29 Furon Company Double-diaphragm gauge protector
DE19525557A1 (en) 1995-07-13 1997-01-16 Knf Flodos Ag Dosing pump
US5641270A (en) * 1995-07-31 1997-06-24 Waters Investments Limited Durable high-precision magnetostrictive pump
US5645301A (en) 1995-11-13 1997-07-08 Furon Company Fluid transport coupling
US5991279A (en) 1995-12-07 1999-11-23 Vistar Telecommunications Inc. Wireless packet data distributed communications system
US5895570A (en) 1996-02-09 1999-04-20 United States Filter Corporation Modular filtering system
US5793754A (en) 1996-03-29 1998-08-11 Eurotherm Controls, Inc. Two-way, two-wire analog/digital communication system
US5839828A (en) 1996-05-20 1998-11-24 Glanville; Robert W. Static mixer
US6378907B1 (en) 1996-07-12 2002-04-30 Mykrolis Corporation Connector apparatus and system including connector apparatus
US6131766A (en) 1996-08-12 2000-10-17 Restaurant Automation Development Inc. System for dispensing controlled amounts of flowable material from a flexible container
JPH10169566A (en) * 1996-12-05 1998-06-23 Toyo Koatsu:Kk Pump with wide delivery speed range and capable of delivery at constant pressure
US5947702A (en) 1996-12-20 1999-09-07 Beco Manufacturing High precision fluid pump with separating diaphragm and gaseous purging means on both sides of the diaphragm
JP3854691B2 (en) 1997-01-14 2006-12-06 キヤノン株式会社 Wireless communication system and wireless communication apparatus
DE69814710T2 (en) 1997-03-03 2004-03-18 Tokyo Electron Ltd. Coating device and method
JP3940854B2 (en) 1997-03-25 2007-07-04 Smc株式会社 Suck back valve
US5967173A (en) 1997-07-14 1999-10-19 Furon Corporation Diaphragm valve with leak detection
JP3919896B2 (en) 1997-09-05 2007-05-30 テルモ株式会社 Centrifugal liquid pump device
US6033302A (en) 1997-11-07 2000-03-07 Siemens Building Technologies, Inc. Room pressure control apparatus having feedforward and feedback control and method
US5848605A (en) 1997-11-12 1998-12-15 Cybor Corporation Check valve
US6151640A (en) 1998-01-23 2000-11-21 Schneider Automation Inc. Control I/O module having the ability to interchange bus protocols for bus networks independent of the control I/O module
CN1154896C (en) * 1998-04-27 2004-06-23 迪吉多电子股份有限公司 Control system, display, host computer for control, and data transmitting method
JP3929185B2 (en) * 1998-05-20 2007-06-13 株式会社荏原製作所 Vacuum exhaust apparatus and method
AU4428399A (en) 1998-06-19 2000-01-05 Gateway, Inc. Communication system and method for interfacing differing communication standards
US6045331A (en) * 1998-08-10 2000-04-04 Gehm; William Fluid pump speed controller
US6390780B1 (en) 1998-09-24 2002-05-21 Rule Industries, Inc. Pump and controller system and method
JP4011210B2 (en) 1998-10-13 2007-11-21 株式会社コガネイ Chemical supply method and chemical supply device
US7029238B1 (en) 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
US8172546B2 (en) * 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
ATE268867T1 (en) 1998-11-23 2004-06-15 Mykrolis Corp PUMP CONTROL DEVICE FOR HIGH-PRECISION DOSING PUMP
US6203288B1 (en) 1999-01-05 2001-03-20 Air Products And Chemicals, Inc. Reciprocating pumps with linear motor driver
EP1146967A4 (en) 1999-01-20 2009-05-20 Entegris Inc Flow controller
US6575264B2 (en) 1999-01-29 2003-06-10 Dana Corporation Precision electro-hydraulic actuator positioning system
US6298941B1 (en) 1999-01-29 2001-10-09 Dana Corp Electro-hydraulic power steering system
JP2000265949A (en) 1999-03-18 2000-09-26 Toyota Autom Loom Works Ltd Variable capacity compressor
US6464464B2 (en) 1999-03-24 2002-10-15 Itt Manufacturing Enterprises, Inc. Apparatus and method for controlling a pump system
US6319317B1 (en) 1999-04-19 2001-11-20 Tokyo Electron Limited Coating film forming method and coating apparatus
DE29909100U1 (en) 1999-05-25 1999-08-12 Arge Meibes Pleuger Pipe arrangement with filter
US6210745B1 (en) 1999-07-08 2001-04-03 National Semiconductor Corporation Method of quality control for chemical vapor deposition
DE19933202B4 (en) * 1999-07-15 2006-04-06 Institut für Luft- und Kältetechnik gemeinnützige Gesellschaft mbH Method for operating multistage compressors
US6330517B1 (en) 1999-09-17 2001-12-11 Rosemount Inc. Interface for managing process
US6250502B1 (en) 1999-09-20 2001-06-26 Daniel A. Cote Precision dispensing pump and method of dispensing
JP2001098908A (en) 1999-09-29 2001-04-10 Mitsubishi Electric Corp Valve timing adjusting device
DE19950222A1 (en) 1999-10-19 2001-04-26 Bosch Gmbh Robert Procedure for diagnosis of fuel supply system of IC engine has recording of variation of fuel pressure in system, formation of frequency spectrum of fuel pressure variation and analysis thereof
JP3361300B2 (en) 1999-10-28 2003-01-07 株式会社イワキ Tube flam pump
US6325932B1 (en) 1999-11-30 2001-12-04 Mykrolis Corporation Apparatus and method for pumping high viscosity fluid
US7247245B1 (en) 1999-12-02 2007-07-24 Entegris, Inc. Filtration cartridge and process for filtering a slurry
US6348124B1 (en) 1999-12-14 2002-02-19 Applied Materials, Inc. Delivery of polishing agents in a wafer processing system
US6497680B1 (en) 1999-12-17 2002-12-24 Abbott Laboratories Method for compensating for pressure differences across valves in cassette type IV pump
US6332362B1 (en) * 2000-04-18 2001-12-25 Lg Electronics Inc. Device and method for detecting anomaly of air conditioner by using acoustic emission method
US6925072B1 (en) 2000-08-03 2005-08-02 Ericsson Inc. System and method for transmitting control information between a control unit and at least one sub-unit
US6618628B1 (en) 2000-10-05 2003-09-09 Karl A. Davlin Distributed input/output control systems and methods
US6520520B2 (en) 2000-10-31 2003-02-18 Durrell U. Howard Steering stabilizer with trimming accumulator
WO2002040160A1 (en) 2000-11-17 2002-05-23 Tecan Trading Ag Device and method for separating samples from a liquid
US6708239B1 (en) 2000-12-08 2004-03-16 The Boeing Company Network device interface for digitally interfacing data channels to a controller via a network
US6540265B2 (en) 2000-12-28 2003-04-01 R. W. Beckett Corporation Fluid fitting
WO2002057860A1 (en) * 2001-01-22 2002-07-25 Tokyo Electron Limited System for enhanginc apparatus productivity and method thereof
US6554579B2 (en) 2001-03-29 2003-04-29 Integrated Designs, L.P. Liquid dispensing system with enhanced filter
US6767877B2 (en) 2001-04-06 2004-07-27 Akrion, Llc Method and system for chemical injection in silicon wafer processing
US6805841B2 (en) 2001-05-09 2004-10-19 The Provost Fellows And Scholars Of The College Of The Holy And Undivided Trinity Of Queen Elizabeth Near Dublin Liquid pumping system
US6697701B2 (en) * 2001-08-09 2004-02-24 Lincoln Global, Inc. Welding system and methodology providing multiplexed cell control interface
US6823283B2 (en) * 2001-08-14 2004-11-23 National Instruments Corporation Measurement system including a programmable hardware element and measurement modules that convey interface information
US7457732B2 (en) 2001-08-17 2008-11-25 General Electric Company System and method for measuring quality of baseline modeling techniques
KR100711687B1 (en) * 2001-10-01 2007-05-02 엔테그리스, 아이엔씨. Apparatus for conditioning the temperature of a fluid
US6640999B2 (en) 2001-11-13 2003-11-04 Unilever Home & Personal Care Usa, Division Of Conopco, Inc. Dose dispensing pump for dispensing two or more materials
US20030114942A1 (en) 2001-12-17 2003-06-19 Varone John J. Remote display module
GB0130602D0 (en) 2001-12-21 2002-02-06 Johnson Electric Sa Brushless D.C. motor
GB2384947B (en) 2002-02-01 2006-01-18 Sendo Int Ltd Enabling and/or inhibiting an operation of a wireless communicatons unit
AU2003210872A1 (en) 2002-02-07 2003-09-02 Pall Corporation Liquids dispensing systems and methods
US6766810B1 (en) * 2002-02-15 2004-07-27 Novellus Systems, Inc. Methods and apparatus to control pressure in a supercritical fluid reactor
US6914543B2 (en) 2002-06-03 2005-07-05 Visteon Global Technologies, Inc. Method for initializing position with an encoder
US6837484B2 (en) 2002-07-10 2005-01-04 Saint-Gobain Performance Plastics, Inc. Anti-pumping dispense valve
DE10233127C1 (en) 2002-07-20 2003-12-11 Porsche Ag Supply line or cable gland for automobile assembled from 2 coupling halves with holder securing first coupling halves of at least 2 glands together to provide installation module
JP3792624B2 (en) 2002-08-08 2006-07-05 核燃料サイクル開発機構 Method for producing ferritic oxide dispersion strengthened steel with coarse grain structure and excellent high temperature creep strength
JP3809406B2 (en) 2002-08-29 2006-08-16 キヤノン株式会社 Recording apparatus and recording apparatus control method
US7013223B1 (en) 2002-09-25 2006-03-14 The Board Of Trustees Of The University Of Illinois Method and apparatus for analyzing performance of a hydraulic pump
US7175397B2 (en) 2002-09-27 2007-02-13 Pulsafeeder, Inc. Effervescent gas bleeder apparatus
US20040072450A1 (en) 2002-10-15 2004-04-15 Collins Jimmy D. Spin-coating methods and apparatuses for spin-coating, including pressure sensor
JP2004143960A (en) 2002-10-22 2004-05-20 Smc Corp Pump apparatus
US7156115B2 (en) * 2003-01-28 2007-01-02 Lancer Partnership, Ltd Method and apparatus for flow control
JP4392474B2 (en) 2003-02-21 2010-01-06 兵神装備株式会社 Material supply system
US20040193330A1 (en) * 2003-03-26 2004-09-30 Ingersoll-Rand Company Method and system for controlling compressors
JP2004293443A (en) 2003-03-27 2004-10-21 Katsutoshi Masuda Fluid discharge pumping device
US7735685B2 (en) 2003-05-09 2010-06-15 Intellipack Dispensing system with in line chemical pump system
FR2854667B1 (en) * 2003-05-09 2006-07-28 Cit Alcatel PRESSURE CONTROL IN THE CHAMBER OF PROCESSES BY VARIATION OF PUMPS SPEED, CONTROL VALVE AND INJECTION OF NEUTRAL GAS
JP4206308B2 (en) * 2003-08-01 2009-01-07 株式会社日立ハイテクノロジーズ Liquid chromatograph pump
JP4377639B2 (en) * 2003-09-18 2009-12-02 株式会社日立ハイテクノロジーズ Pumps and liquid pumps for chromatography
US7210771B2 (en) 2004-01-08 2007-05-01 Eastman Kodak Company Ink delivery system with print cartridge, container and reservoir apparatus and method
US20050173463A1 (en) 2004-02-09 2005-08-11 Wesner John A. Dispensing pump having linear and rotary actuators
JP4319105B2 (en) 2004-02-18 2009-08-26 三菱電機株式会社 Manufacturing system, gateway device, gateway program, and control method of controlled device
DE102004014793A1 (en) 2004-03-24 2005-10-20 Bosch Rexroth Ag Method for data transmission
US7272452B2 (en) 2004-03-31 2007-09-18 Siemens Vdo Automotive Corporation Controller with configurable connections between data processing components
EP1602826B1 (en) 2004-06-04 2007-06-27 Société Industrielle de Sonceboz S.A. Pump drive
US7648792B2 (en) 2004-06-25 2010-01-19 Ultracell Corporation Disposable component on a fuel cartridge and for use with a portable fuel cell system
US7363195B2 (en) * 2004-07-07 2008-04-22 Sensarray Corporation Methods of configuring a sensor network
US20060083259A1 (en) 2004-10-18 2006-04-20 Metcalf Thomas D Packet-based systems and methods for distributing data
US8292598B2 (en) 2004-11-23 2012-10-23 Entegris, Inc. System and method for a variable home position dispense system
US7477960B2 (en) 2005-02-16 2009-01-13 Tokyo Electron Limited Fault detection and classification (FDC) using a run-to-run controller
US20080089361A1 (en) 2005-10-06 2008-04-17 Metcalf Thomas D System and method for transferring data
US8753097B2 (en) * 2005-11-21 2014-06-17 Entegris, Inc. Method and system for high viscosity pump
EP1952022B1 (en) 2005-11-21 2014-11-12 Entegris, Inc. System and method for a pump with reduced form factor
US8025486B2 (en) 2005-12-02 2011-09-27 Entegris, Inc. System and method for valve sequencing in a pump
CN101356488B (en) * 2005-12-02 2012-05-16 恩特格里公司 I/O systems, methods and devices for interfacing a pump controller
CN101495756B (en) 2005-12-02 2012-07-04 恩特格里公司 System and method for correcting for pressure variations using a motor
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
JP5302002B2 (en) * 2005-12-02 2013-10-02 インテグリス・インコーポレーテッド Low-profile mounting parts and mounting part assemblies without O-rings
CN102705209B (en) 2005-12-02 2015-09-30 恩特格里公司 For system and method pressure compensated in pump
US7850431B2 (en) 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
WO2007067360A2 (en) * 2005-12-05 2007-06-14 Entegris, Inc. Error volume system and method for a pump
TWI402423B (en) * 2006-02-28 2013-07-21 Entegris Inc System and method for operation of a pump
US7684446B2 (en) 2006-03-01 2010-03-23 Entegris, Inc. System and method for multiplexing setpoints
US7494265B2 (en) * 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
US20070254092A1 (en) 2006-04-28 2007-11-01 Applied Materials, Inc. Systems and Methods for Detecting Abnormal Dispense of Semiconductor Process Fluids
US7443483B2 (en) 2006-08-11 2008-10-28 Entegris, Inc. Systems and methods for fluid flow control in an immersion lithography system
CN101918746A (en) 2007-11-02 2010-12-15 诚实公司 O-ringless seal couplings
JP5059821B2 (en) 2009-08-28 2012-10-31 ルネサスエレクトロニクス株式会社 Optical disk device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6742993B2 (en) * 1999-10-18 2004-06-01 Integrated Designs, L.P. Method and apparatus for dispensing fluids
US6474950B1 (en) * 2000-07-13 2002-11-05 Ingersoll-Rand Company Oil free dry screw compressor including variable speed drive

Also Published As

Publication number Publication date
WO2007067344A2 (en) 2007-06-14
TW200726915A (en) 2007-07-16
JP2009521636A (en) 2009-06-04
JP2015092079A (en) 2015-05-14
US20110098864A1 (en) 2011-04-28
JP6018159B2 (en) 2016-11-02
KR101290958B1 (en) 2013-07-30
JP2013100825A (en) 2013-05-23
EP1960670B1 (en) 2019-09-11
US20070128047A1 (en) 2007-06-07
US20130004340A1 (en) 2013-01-03
US8662859B2 (en) 2014-03-04
EP1960670A4 (en) 2011-07-27
US8382444B2 (en) 2013-02-26
JP5241506B2 (en) 2013-07-17
US7878765B2 (en) 2011-02-01
KR20080071622A (en) 2008-08-04
CN101495754A (en) 2009-07-29
JP5738906B2 (en) 2015-06-24
EP1960670A2 (en) 2008-08-27
TWI402422B (en) 2013-07-21
CN101495754B (en) 2013-05-29

Similar Documents

Publication Publication Date Title
WO2007067344A3 (en) System and method for operation of a pump
WO2008057177A3 (en) Method and system for controlling machine power
WO2008066589A3 (en) System and method for operation of a pump
WO2010025133A3 (en) Control system and method for braking a hydrostatic drive machine
WO2007109038A3 (en) Methods and apparatus for pressure control in electronic device manufacturing systems
WO2008073329A3 (en) Priming protection
WO2005069849A3 (en) Fermentation processes
WO2005123460A3 (en) Method for determining a decision for triggering retaining means in a motor vehicle
WO2009075295A1 (en) Steering control device
WO2010117666A3 (en) Methods and apparatus to limit a change of a drive value in an electro-pneumatic controller
EP2055550A3 (en) Method and apparatus to produce a smooth input speed profile in mode for a hybrid powertrain system
WO2010037516A3 (en) Gas generator, method for the production thereof and module having a gas generator
WO2005055694A3 (en) Pump control system and method
EP2113444A3 (en) Systems and methods involving torque disturbance rejection
MX2007002550A (en) Methods and systems for emulating an induction motor utilizing an electronically commutated motor.
EP1555433A3 (en) Dosing pump system and method of operating a dosing pump
WO2009088822A3 (en) Active stabilizer bar system for a vehicle chassis
WO2006086991A3 (en) Image processing
WO2008000459A8 (en) Device and method for performing a functional test on a control element of a turbo engine
WO2006018741A3 (en) A method for improving efficiency of a manufacturing process such as a semiconductor fab process
DE502005009052D1 (en) ACTIVE GEARBOX DRIVEN GEAR AND HYDROSTATIC DRIVE
WO2008090284A3 (en) Method for correcting the geometry of a traced curve
WO2007048960A3 (en) Method and system for limiting an aircraft control surface steering angle
WO2013185761A3 (en) Variable torque angle for electric motor
WO2012069915A3 (en) Driving operation evaluation apparatus and driving operation evaluation method

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200680051448.X

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2008543344

Country of ref document: JP

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 2006844456

Country of ref document: EP

Ref document number: 1020087015803

Country of ref document: KR