WO2007077353A3 - Microsystem, more particularly a microgyro, with at least two mechanically coupled oscillating masses - Google Patents

Microsystem, more particularly a microgyro, with at least two mechanically coupled oscillating masses Download PDF

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Publication number
WO2007077353A3
WO2007077353A3 PCT/FR2006/002846 FR2006002846W WO2007077353A3 WO 2007077353 A3 WO2007077353 A3 WO 2007077353A3 FR 2006002846 W FR2006002846 W FR 2006002846W WO 2007077353 A3 WO2007077353 A3 WO 2007077353A3
Authority
WO
WIPO (PCT)
Prior art keywords
oscillating masses
microsystem
suspension springs
microgyro
mechanically coupled
Prior art date
Application number
PCT/FR2006/002846
Other languages
French (fr)
Other versions
WO2007077353A2 (en
Inventor
Bernard Diem
Original Assignee
Commissariat Energie Atomique
Bernard Diem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique, Bernard Diem filed Critical Commissariat Energie Atomique
Priority to EP06847117.6A priority Critical patent/EP1963783B1/en
Priority to JP2008546525A priority patent/JP2009520970A/en
Priority to US12/086,495 priority patent/US8011244B2/en
Publication of WO2007077353A2 publication Critical patent/WO2007077353A2/en
Publication of WO2007077353A3 publication Critical patent/WO2007077353A3/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02338—Suspension means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Abstract

The microsystem (1) is made in a planar substrate and includes two oscillating masses (2a, 2b) that are connected to the substrate via suspension springs (3a, 3b). The oscillating masses (2a, 2b) are coupled by a rigid coupling bar (11) so as to make said oscillating masses (2a, 2b) move in phase opposition when they are excited in a predetermined excitation direction (Ox). The coupling bar (11) is connected to intermediate zones of the corresponding suspension springs (3a, 3b), which are located on opposite sides (7a, 7b) of the oscillating masses (2a, 2b). The intermediate zones are located between a first end of the suspension springs (3a, 3b), which is fastened to the corresponding oscillating mass (2a, 2b), and a second end of the suspension springs (3a, 3b), which is fastened to the substrate by a corresponding anchoring point (4a, 4b).
PCT/FR2006/002846 2005-12-23 2006-12-22 Microsystem, more particularly a microgyro, with at least two mechanically coupled oscillating masses WO2007077353A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP06847117.6A EP1963783B1 (en) 2005-12-23 2006-12-22 Microsystem, more particularly a microgyro, with at least two mechanically coupled oscillating masses
JP2008546525A JP2009520970A (en) 2005-12-23 2006-12-22 Microsystem comprising at least two mechanically coupled vibrating masses, and more particularly a microgyro
US12/086,495 US8011244B2 (en) 2005-12-23 2006-12-22 Microsystem, and more particularly a microgyrometer, includes at least two mechanically coupled oscillating masses

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0513215 2005-12-23
FR0513215A FR2895501B1 (en) 2005-12-23 2005-12-23 MICROSYSTEM, ESPECIALLY MICROGYROMETER, WITH AT LEAST TWO OSCILLATING MASSESM MECHANICALLY COUPLED

Publications (2)

Publication Number Publication Date
WO2007077353A2 WO2007077353A2 (en) 2007-07-12
WO2007077353A3 true WO2007077353A3 (en) 2007-08-23

Family

ID=36796205

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2006/002846 WO2007077353A2 (en) 2005-12-23 2006-12-22 Microsystem, more particularly a microgyro, with at least two mechanically coupled oscillating masses

Country Status (5)

Country Link
US (1) US8011244B2 (en)
EP (1) EP1963783B1 (en)
JP (1) JP2009520970A (en)
FR (1) FR2895501B1 (en)
WO (1) WO2007077353A2 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2905457B1 (en) 2006-09-01 2008-10-17 Commissariat Energie Atomique MICROSYSTEM, ESPECIALLY MICROGYROMETER, WITH DETECTION ELEMENT WITH CAPACITIVE ELECTRODES.
DE102007030120B4 (en) * 2007-06-29 2010-04-08 Litef Gmbh Yaw rate sensor
DE102007057042A1 (en) * 2007-09-10 2009-03-12 Continental Teves Ag & Co. Ohg Micromechanical rotation rate sensor with coupling bars and suspension elements for quadrature suppression
DE102008064900B3 (en) 2008-09-25 2021-09-30 Robert Bosch Gmbh Coupling structure for a rotation rate sensor device, rotation rate sensor device and manufacturing method
DE102008042369B4 (en) 2008-09-25 2018-05-24 Robert Bosch Gmbh Coupling structure for a rotation rate sensor device, rotation rate sensor device and manufacturing method
DE102009000345A1 (en) * 2009-01-21 2010-07-22 Robert Bosch Gmbh Yaw rate sensor
FI20095201A0 (en) * 2009-03-02 2009-03-02 Vti Technologies Oy Oscillating micromechanical angular velocity sensor
DE102009045431A1 (en) * 2009-10-07 2011-04-14 Robert Bosch Gmbh Micromechanical structure and method for operating a micromechanical structure
FI124020B (en) * 2011-03-04 2014-02-14 Murata Electronics Oy Spring structure, resonator, resonator array and sensor
DE102011057032B4 (en) * 2011-12-23 2019-09-19 Hanking Electronics, Ltd. Micro gyroscope and method for operating a micro gyroscope
DE102012210144A1 (en) * 2012-06-15 2013-12-19 Robert Bosch Gmbh Method for operating and / or measuring a micromechanical device and micromechanical device
JP6344033B2 (en) 2014-04-22 2018-06-20 セイコーエプソン株式会社 Angular velocity sensor, electronic device and moving object
KR101679592B1 (en) * 2015-05-12 2016-11-25 주식회사 신성씨앤티 Symmetrical z-axis MEMS gyroscopes
US20160370180A1 (en) * 2015-06-17 2016-12-22 Freescale Semiconductor, Inc. Inertial sensor with couple spring for common mode rejection
KR101776583B1 (en) * 2015-07-01 2017-09-11 주식회사 신성씨앤티 MEMS link mechanism used for MEMS gyroscopes
JP6819216B2 (en) * 2016-10-26 2021-01-27 セイコーエプソン株式会社 Gyro sensor, manufacturing method of gyro sensor, electronic device and mobile body

Citations (5)

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Publication number Priority date Publication date Assignee Title
US5635638A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Coupling for multiple masses in a micromachined device
FR2809174A1 (en) * 2000-05-16 2001-11-23 Commissariat Energie Atomique Micro-machined vibrating structure for capacitive gyrometer has at least two coupled oscillators, and coupling has flexible attachments linked to flexible arm of oscillator
US20040154397A1 (en) * 2003-02-07 2004-08-12 Platt William P. Methods and systems for controlling movement within MEMS structures
US20050072231A1 (en) * 2003-09-25 2005-04-07 Kionix, Inc. Z-axis angular rate sensor
US20050229705A1 (en) * 2004-04-14 2005-10-20 Geen John A Inertial sensor with a linear array of sensor elements

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US5241861A (en) 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
DE4428405A1 (en) 1994-08-11 1996-02-15 Karlsruhe Forschzent Yaw rate sensor
DE4442033C2 (en) * 1994-11-25 1997-12-18 Bosch Gmbh Robert Yaw rate sensor
DE19530007C2 (en) 1995-08-16 1998-11-26 Bosch Gmbh Robert Yaw rate sensor
JP2001174265A (en) * 1999-12-21 2001-06-29 Mitsubishi Electric Corp Angular velocity sensor
DE10108196A1 (en) 2001-02-21 2002-10-24 Bosch Gmbh Robert Yaw rate sensor
JP4392246B2 (en) * 2002-02-06 2009-12-24 アナログ・デバイスズ・インク Micromachined gyroscope
FR2846740B1 (en) 2002-11-05 2005-02-04 Thales Sa MICRO-FACTORY GYROMETRIC SENSOR, DETECTION IN PLATE PLATE
JP2006119001A (en) * 2004-10-22 2006-05-11 Sony Corp Angular velocity detector, and manufacturing method therefor
US7421897B2 (en) * 2005-04-14 2008-09-09 Analog Devices, Inc. Cross-quad and vertically coupled inertial sensors

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5635638A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Coupling for multiple masses in a micromachined device
FR2809174A1 (en) * 2000-05-16 2001-11-23 Commissariat Energie Atomique Micro-machined vibrating structure for capacitive gyrometer has at least two coupled oscillators, and coupling has flexible attachments linked to flexible arm of oscillator
US20040154397A1 (en) * 2003-02-07 2004-08-12 Platt William P. Methods and systems for controlling movement within MEMS structures
US20050072231A1 (en) * 2003-09-25 2005-04-07 Kionix, Inc. Z-axis angular rate sensor
US20050229705A1 (en) * 2004-04-14 2005-10-20 Geen John A Inertial sensor with a linear array of sensor elements

Also Published As

Publication number Publication date
WO2007077353A2 (en) 2007-07-12
FR2895501B1 (en) 2008-02-29
US8011244B2 (en) 2011-09-06
JP2009520970A (en) 2009-05-28
US20100154543A1 (en) 2010-06-24
EP1963783B1 (en) 2020-06-17
EP1963783A2 (en) 2008-09-03
FR2895501A1 (en) 2007-06-29

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