WO2007078433A3 - Electrostatic acoustic transducer based on rolling contact micro actuator - Google Patents

Electrostatic acoustic transducer based on rolling contact micro actuator Download PDF

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Publication number
WO2007078433A3
WO2007078433A3 PCT/US2006/044098 US2006044098W WO2007078433A3 WO 2007078433 A3 WO2007078433 A3 WO 2007078433A3 US 2006044098 W US2006044098 W US 2006044098W WO 2007078433 A3 WO2007078433 A3 WO 2007078433A3
Authority
WO
WIPO (PCT)
Prior art keywords
acoustic transducer
cantilever
counter electrode
rolling contact
micro actuator
Prior art date
Application number
PCT/US2006/044098
Other languages
French (fr)
Other versions
WO2007078433A2 (en
Inventor
Michael Pedersen
Original Assignee
Novusonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Novusonic Corp filed Critical Novusonic Corp
Publication of WO2007078433A2 publication Critical patent/WO2007078433A2/en
Publication of WO2007078433A3 publication Critical patent/WO2007078433A3/en

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers

Abstract

An acoustic transducer is disclosed, which comprises a micro fabricated, sound generating, or receiving, diaphragm, a conductive leaf cantilever actuator, and a counter electrode. In the acoustic transducer, the electrostatic attraction force between the counter electrode and the leaf cantilever due to an imposed electrical potential is utilized to generate a deflection of the diaphragm attached to said cantilever. In operation, the cantilever collapses on to the counter electrode, causing a significant increase in actuator driving force due to the reduction, and partial elimination, of the air gap in the transducer.
PCT/US2006/044098 2005-12-16 2006-11-13 Electrostatic acoustic transducer based on rolling contact micro actuator WO2007078433A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US75100205P 2005-12-16 2005-12-16
US60/751,002 2005-12-16

Publications (2)

Publication Number Publication Date
WO2007078433A2 WO2007078433A2 (en) 2007-07-12
WO2007078433A3 true WO2007078433A3 (en) 2009-04-30

Family

ID=38228686

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/044098 WO2007078433A2 (en) 2005-12-16 2006-11-13 Electrostatic acoustic transducer based on rolling contact micro actuator

Country Status (1)

Country Link
WO (1) WO2007078433A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5548563B2 (en) * 2010-09-14 2014-07-16 ヤマハ株式会社 Nanosheet transducer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5633552A (en) * 1993-06-04 1997-05-27 The Regents Of The University Of California Cantilever pressure transducer
US6140689A (en) * 1996-11-22 2000-10-31 Siemens Aktiengesellschaft Micromechanical sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5633552A (en) * 1993-06-04 1997-05-27 The Regents Of The University Of California Cantilever pressure transducer
US6140689A (en) * 1996-11-22 2000-10-31 Siemens Aktiengesellschaft Micromechanical sensor

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
"The 14th IEEE International Conference on Micro Electro Mechanical Systems, 2001, MEMS 2001, 21-25 January 2001", article HAN ET AL.: "Cheol-Hyun et al, "Fabrication of piezoelectric acoustic transducers built on cantilever-like diaphragm"", pages: 110 - 113 *
LEE, SEUNG S. ET AL.: "Piezoelectric cantilever microphone and microspeaker", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 5, 4 December 1996 (1996-12-04), pages 238 - 242, XP011034721 *

Also Published As

Publication number Publication date
WO2007078433A2 (en) 2007-07-12

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