WO2007103184A3 - System and method for controlled mixing of fluids and multiplexing setpoints - Google Patents

System and method for controlled mixing of fluids and multiplexing setpoints Download PDF

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Publication number
WO2007103184A3
WO2007103184A3 PCT/US2007/005377 US2007005377W WO2007103184A3 WO 2007103184 A3 WO2007103184 A3 WO 2007103184A3 US 2007005377 W US2007005377 W US 2007005377W WO 2007103184 A3 WO2007103184 A3 WO 2007103184A3
Authority
WO
WIPO (PCT)
Prior art keywords
fluids
setpoints
multiplexing
controlled mixing
mixture
Prior art date
Application number
PCT/US2007/005377
Other languages
French (fr)
Other versions
WO2007103184A2 (en
Inventor
J Karl Niermeyer
Robert F Mcloughlin
Joseph E Smith
Original Assignee
Entegris Inc
J Karl Niermeyer
Robert F Mcloughlin
Joseph E Smith
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/365,395 external-priority patent/US7684446B2/en
Application filed by Entegris Inc, J Karl Niermeyer, Robert F Mcloughlin, Joseph E Smith filed Critical Entegris Inc
Priority to EP07752100A priority Critical patent/EP1991347A4/en
Priority to JP2008557400A priority patent/JP2009528631A/en
Publication of WO2007103184A2 publication Critical patent/WO2007103184A2/en
Publication of WO2007103184A3 publication Critical patent/WO2007103184A3/en
Priority to US12/350,688 priority patent/US7946751B2/en
Priority to US13/092,581 priority patent/US20110194373A1/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/80—Forming a predetermined ratio of the substances to be mixed
    • B01F35/83—Forming a predetermined ratio of the substances to be mixed by controlling the ratio of two or more flows, e.g. using flow sensing or flow controlling devices
    • B01F35/831—Forming a predetermined ratio of the substances to be mixed by controlling the ratio of two or more flows, e.g. using flow sensing or flow controlling devices using one or more pump or other dispensing mechanisms for feeding the flows in predetermined proportion, e.g. one of the pumps being driven by one of the flows
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/135—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/16—Controlling mixing ratio of fluids having different temperatures, e.g. by sensing the temperature of a mixture of fluids having different viscosities
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/01—Control of temperature without auxiliary power
    • G05D23/13—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures
    • G05D23/1393—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures characterised by the use of electric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
    • B01F2101/58—Mixing semiconducting materials, e.g. during semiconductor or wafer manufacturing processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0329—Mixing of plural fluids of diverse characteristics or conditions

Abstract

Embodiments of the present invention provide a system (100, 300, 500) and method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. Additionally, embodiments of the present invention provide a system (900, 1100) and method for multiplexing analog setpoints.
PCT/US2007/005377 2006-03-01 2007-02-28 System and method for controlled mixing of fluids and multiplexing setpoints WO2007103184A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP07752100A EP1991347A4 (en) 2006-03-01 2007-02-28 System and method for controlled mixing of fluids and multiplexing setpoints
JP2008557400A JP2009528631A (en) 2006-03-01 2007-02-28 System and method for controlled fluid mixing and setpoint multiplexing
US12/350,688 US7946751B2 (en) 2006-03-01 2009-01-08 Method for controlled mixing of fluids via temperature
US13/092,581 US20110194373A1 (en) 2006-03-01 2011-04-22 Method for controlled mixing of fluids via temperature

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US11/365,395 US7684446B2 (en) 2006-03-01 2006-03-01 System and method for multiplexing setpoints
US11/365,395 2006-03-01
US11/386,427 2006-03-22
US11/386,427 US7494265B2 (en) 2006-03-01 2006-03-22 System and method for controlled mixing of fluids via temperature

Publications (2)

Publication Number Publication Date
WO2007103184A2 WO2007103184A2 (en) 2007-09-13
WO2007103184A3 true WO2007103184A3 (en) 2008-07-31

Family

ID=38475413

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/005377 WO2007103184A2 (en) 2006-03-01 2007-02-28 System and method for controlled mixing of fluids and multiplexing setpoints

Country Status (6)

Country Link
US (3) US7494265B2 (en)
EP (1) EP1991347A4 (en)
JP (1) JP2009528631A (en)
KR (1) KR20080100379A (en)
CN (1) CN102339078A (en)
WO (1) WO2007103184A2 (en)

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CN102339078A (en) 2012-02-01
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KR20080100379A (en) 2008-11-17
US20070206436A1 (en) 2007-09-06
JP2009528631A (en) 2009-08-06
EP1991347A4 (en) 2012-04-11
US20090116334A1 (en) 2009-05-07
US20110194373A1 (en) 2011-08-11
US7494265B2 (en) 2009-02-24
US7946751B2 (en) 2011-05-24

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