WO2007117977A3 - Memory cell with reduced size and standby current - Google Patents

Memory cell with reduced size and standby current Download PDF

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Publication number
WO2007117977A3
WO2007117977A3 PCT/US2007/064952 US2007064952W WO2007117977A3 WO 2007117977 A3 WO2007117977 A3 WO 2007117977A3 US 2007064952 W US2007064952 W US 2007064952W WO 2007117977 A3 WO2007117977 A3 WO 2007117977A3
Authority
WO
WIPO (PCT)
Prior art keywords
tunnel window
standby current
substrate
reduced
gate
Prior art date
Application number
PCT/US2007/064952
Other languages
French (fr)
Other versions
WO2007117977A2 (en
Inventor
Bohumil Lojek
Original Assignee
Atmel Corp
Bohumil Lojek
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atmel Corp, Bohumil Lojek filed Critical Atmel Corp
Publication of WO2007117977A2 publication Critical patent/WO2007117977A2/en
Publication of WO2007117977A3 publication Critical patent/WO2007117977A3/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
    • H10B41/35—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region with a cell select transistor, e.g. NAND
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/942—Masking
    • Y10S438/947—Subphotolithographic processing

Abstract

A present invention is a method, and resulting device, for fabricating memory cells with an extremely small area and reduced standby current. The small area is accomplished by a judicious use of spacers (109) which allows a tunnel window (113) of a storage device to be fabricated in close proximity to an associated select gate (11982) and with a reduced gate width (120) compared to typical devices. The tunnel window is recessed within an upper surface of a substrate (101). The tunnel window recess is made possible by selective etching of the substrate and oxides {103, 105, 107} covering the substrate. A substantial reduction in the size of a tunnel window means device scaling is possible far beyond what is attainable with standard photolithography. Standby current is reduced significantly by fabricating a select device with complementary material types for the gate compared with the adjacent source/drain regions.
PCT/US2007/064952 2006-04-06 2007-03-26 Memory cell with reduced size and standby current WO2007117977A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/399,137 US7253057B1 (en) 2006-04-06 2006-04-06 Memory cell with reduced size and standby current
US11/399,137 2006-04-06

Publications (2)

Publication Number Publication Date
WO2007117977A2 WO2007117977A2 (en) 2007-10-18
WO2007117977A3 true WO2007117977A3 (en) 2008-10-30

Family

ID=38324315

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/064952 WO2007117977A2 (en) 2006-04-06 2007-03-26 Memory cell with reduced size and standby current

Country Status (3)

Country Link
US (2) US7253057B1 (en)
TW (1) TW200807640A (en)
WO (1) WO2007117977A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5998512B2 (en) * 2012-02-16 2016-09-28 ローム株式会社 Semiconductor device and manufacturing method of semiconductor device
FR3012672B1 (en) 2013-10-31 2017-04-14 Stmicroelectronics Rousset MEMORY CELL COMPRISING NON-SELF-ALIGNED HORIZONTAL AND VERTICAL CONTROL GRIDS
CN104810370B (en) 2014-01-26 2018-04-13 中芯国际集成电路制造(上海)有限公司 A kind of semiconductor devices and its manufacture method and electronic device
FR3017746B1 (en) 2014-02-18 2016-05-27 Stmicroelectronics Rousset VERTICAL MEMORY CELL HAVING NON-SELF-ALIGNED FLOATING DRAIN-SOURCE IMPLANT
CN105514107B (en) * 2014-09-22 2018-07-24 中芯国际集成电路制造(上海)有限公司 Nonvolatile memory and preparation method thereof
CN107978601B (en) * 2016-10-21 2022-02-22 联华电子股份有限公司 Single-layer polysilicon electronic erasing type rewritable read-only memory

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5516713A (en) * 1994-09-06 1996-05-14 United Microelectronics Corporation Method of making high coupling ratio NAND type flash memory
US5756385A (en) * 1994-03-30 1998-05-26 Sandisk Corporation Dense flash EEPROM cell array and peripheral supporting circuits formed in deposited field oxide with the use of spacers
US6506646B1 (en) * 2000-01-25 2003-01-14 Oki Electric Industry Co., Ltd. Method for manufacturing a semiconductor memory
US6579808B2 (en) * 2001-10-15 2003-06-17 Hynix Semiconductor Inc. Method of fabricating a semiconductor device
US7205197B2 (en) * 2005-02-16 2007-04-17 Oki Electric Industry Co., Ltd. Method of fabricating a nonvolatile semiconductor memory

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH081933B2 (en) * 1989-12-11 1996-01-10 株式会社東芝 Nonvolatile semiconductor memory device
US7071060B1 (en) 1996-02-28 2006-07-04 Sandisk Corporation EEPROM with split gate source side infection with sidewall spacers
US5313421A (en) 1992-01-14 1994-05-17 Sundisk Corporation EEPROM with split gate source side injection
US5712180A (en) 1992-01-14 1998-01-27 Sundisk Corporation EEPROM with split gate source side injection
US5972752A (en) * 1997-12-29 1999-10-26 United Semiconductor Corp. Method of manufacturing a flash memory cell having a tunnel oxide with a long narrow top profile
EP1172856A1 (en) * 2000-07-03 2002-01-16 Matsushita Electric Industrial Co., Ltd. Nonvolatile semiconductor memory device and method for fabricating the same
KR20040061616A (en) * 2002-12-31 2004-07-07 동부전자 주식회사 method for manufacturing a non-voltage memory device
US7132329B1 (en) * 2005-06-29 2006-11-07 Freescale Semiconductor, Inc. Source side injection storage device with spacer gates and method therefor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5756385A (en) * 1994-03-30 1998-05-26 Sandisk Corporation Dense flash EEPROM cell array and peripheral supporting circuits formed in deposited field oxide with the use of spacers
US5516713A (en) * 1994-09-06 1996-05-14 United Microelectronics Corporation Method of making high coupling ratio NAND type flash memory
US6506646B1 (en) * 2000-01-25 2003-01-14 Oki Electric Industry Co., Ltd. Method for manufacturing a semiconductor memory
US6579808B2 (en) * 2001-10-15 2003-06-17 Hynix Semiconductor Inc. Method of fabricating a semiconductor device
US7205197B2 (en) * 2005-02-16 2007-04-17 Oki Electric Industry Co., Ltd. Method of fabricating a nonvolatile semiconductor memory

Also Published As

Publication number Publication date
US20070257298A1 (en) 2007-11-08
WO2007117977A2 (en) 2007-10-18
US7253057B1 (en) 2007-08-07
TW200807640A (en) 2008-02-01

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