WO2007120464A8 - Interferometric optical display system with broadband characteristics - Google Patents

Interferometric optical display system with broadband characteristics

Info

Publication number
WO2007120464A8
WO2007120464A8 PCT/US2007/008089 US2007008089W WO2007120464A8 WO 2007120464 A8 WO2007120464 A8 WO 2007120464A8 US 2007008089 W US2007008089 W US 2007008089W WO 2007120464 A8 WO2007120464 A8 WO 2007120464A8
Authority
WO
WIPO (PCT)
Prior art keywords
layer
over
depositing
transparent substrate
germanium
Prior art date
Application number
PCT/US2007/008089
Other languages
French (fr)
Other versions
WO2007120464A1 (en
Inventor
Evgeni Gousev
Gang Xu
Marek Mienko
Original Assignee
Qualcomm Inc
Evgeni Gousev
Gang Xu
Marek Mienko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Inc, Evgeni Gousev, Gang Xu, Marek Mienko filed Critical Qualcomm Inc
Priority to EP07754589A priority Critical patent/EP2005237A1/en
Priority to JP2009505386A priority patent/JP4723670B2/en
Priority to CN2007800128681A priority patent/CN101443691B/en
Priority to BRPI0710270-4A priority patent/BRPI0710270A2/en
Priority to CA002647634A priority patent/CA2647634A1/en
Publication of WO2007120464A1 publication Critical patent/WO2007120464A1/en
Publication of WO2007120464A8 publication Critical patent/WO2007120464A8/en
Priority to KR1020087027146A priority patent/KR101344484B1/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.

Abstract

Broad band white color can be achieved in MEMS display devices by incorporating a material having an extinction coefficient (k) below a threshold value for wavelength of light within an operative optical range of the interf erometric modulator. One embodiment provides a method of making the MEMS display device comprising depositing said material (23) over at least a portion of a transparent substrate (20), depositing a dielectric layer (24) over the layer of material, forming a sacrificial layer over the dielectric, depositing an electrically conductive layer (14) on the sacrificial layer, and forming a cavity (19) by removing at least a portion of the sacrificial layer. The suitable material may comprise germanium, germanium alloy of various compositions, doped germanium or doped germanium -containing alloys, and may be deposited over the transparent substrate, incorporated within the transparent substrate or the dielectric layer.
PCT/US2007/008089 2006-04-10 2007-04-02 Interferometric optical display system with broadband characteristics WO2007120464A1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
EP07754589A EP2005237A1 (en) 2006-04-10 2007-04-02 Interferometric optical display system with broadband characteristics
JP2009505386A JP4723670B2 (en) 2006-04-10 2007-04-02 Interferometric optical display system with broadband characteristics
CN2007800128681A CN101443691B (en) 2006-04-10 2007-04-02 Interferometric optical display system with broadband characteristics
BRPI0710270-4A BRPI0710270A2 (en) 2006-04-10 2007-04-02 mems, interferometric and optical display devices and their production methods
CA002647634A CA2647634A1 (en) 2006-04-10 2007-04-02 Interferometric optical display system with broadband characteristics
KR1020087027146A KR101344484B1 (en) 2006-04-10 2008-11-05 Interferometric optical display system with broadband characteristics

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/401,023 US7643203B2 (en) 2006-04-10 2006-04-10 Interferometric optical display system with broadband characteristics
US11/401,023 2006-04-10

Publications (2)

Publication Number Publication Date
WO2007120464A1 WO2007120464A1 (en) 2007-10-25
WO2007120464A8 true WO2007120464A8 (en) 2007-12-27

Family

ID=38515534

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/008089 WO2007120464A1 (en) 2006-04-10 2007-04-02 Interferometric optical display system with broadband characteristics

Country Status (10)

Country Link
US (3) US7643203B2 (en)
EP (1) EP2005237A1 (en)
JP (2) JP4723670B2 (en)
KR (1) KR101344484B1 (en)
CN (2) CN101443691B (en)
BR (1) BRPI0710270A2 (en)
CA (1) CA2647634A1 (en)
RU (2) RU2452987C2 (en)
TW (1) TWI443372B (en)
WO (1) WO2007120464A1 (en)

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