WO2007130081A1

WO2007130081A1 - Transmission of data between microchips using a particle beam

Info

Publication number: WO2007130081A1
Application number: PCT/US2006/022684
Authority: WO
Inventors: Jonathan Gorrell
Original assignee: Virgin Islands Microsystems, Inc.
Priority date: 2006-05-05
Filing date: 2006-06-09
Publication date: 2007-11-15
Also published as: TW200743323A; US7569836B2; US20070257206A1

Abstract

A device includes first and second chips, each chip containing at least one electronic circuit. The second chip has one or more receivers. A deflection mechanism operationally connected to an electronic circuit of the first chip directs a charged particle beam to different ones of the receivers, based, at least in part, on a data signal provided by the electronic circuit.

Description

TRANSMISSION OF DATA BETWEEN MICROCHIPS USING A PARTICLE

BEAM

COPYRIGHT NOTICE

[0001] A portion of the disclosure of this patent document contains material which is subject to copyright or mask work protection. The copyright or mask work owner has no objection to the facsimile reproduction by anyone of the patent document or the patent disclosure, as it appears in the Patent and Trademark Office patent file or records, but otherwise reserves all copyright or mask work rights whatsoever.

RELATED APPLICATIONS

[0002] The present invention is related to the following co-pending U.S.

Patent applications, each which is commonly owned with the present application at the time of filing, and the entire contents of each of which are incorporated herein by reference:

1. U.S. Application No. 10/917,571, filed on August 13, 2004, entitled "Patterning Thin Metal Film by Dry Reactive Ion Etching"

2. U.S. Application No. 11/203,407, filed August 15, 2005, entitled "Method of Patterning Ultra-Small Structures,"

3. U.S. Application No. 11/243,476, filed October 5, 2005, entitled, "Structure and Methods for Coupling Energy from an Electromagnetic Wave;"

4. U.S. Application No. 11/243,477, filed October 5, 2005, entitled, "Electron Beam Induced Resonance;"

5. U.S. Application No. 11/238,991, filed September 30, 2005, entitled, "Light Emitting Free-Electron Micro-Resonant Structure;"

6. U.S. Application No. 11/302,471, filed December 14, 2005, entitled, "Coupled Nano-Resonating Energy Emitting Structures;"

7. U.S. Application No. 11/325,432, filed January 5, 2006, entitled, "Resonant Structure-Based Display;"

8. U.S. Application No. 11/325,448, filed January 5, 2006, entitled, "Selectable Frequency Light Emitter;"

9. U.S. Application No. 11/325,571, filed January 5, 2006, entitled,. "Switching Micro-Resonant Structures by Modulating a Beam of Charged Particles; and

10. U.S. Application No. 11/325,534, filed January 5, 2006, entitled, "Switching Micro-Resonant Structures Using at Least One Director."

FIELD OF THE INVENTION

[0003] This relates, in general, to microcircuits and, more particularly, to electrically coupled microcircuits.

INTRODUCTION & BACKGROUND

[0004] Semiconductor manufacturers are constantly striving to keep up with the increasing speed and number of signals coupled between microcircuits. For example, a microcircuit, such as a microprocessor, can contain billions of transistors with clock speeds greater than three gigahertz. Typically, the signals are routed between microcircuits using metal tracing or metallization systems that can include a plurality of solder balls, wire bonds, bonding pads and the like. The focus of semiconductor manufacturers has been to decrease gate delays within the microcircuits. As a result, the gate delays are now generally less than the delays contributed by the metallization system including the structures for coupling signals between the microcircuits. Thus, because of an increasing demand for smaller and faster microcircuits, there is a need to improve the structures utilized for signal coupling.

[0005] A component can include a microcircuit contained within an individual package. When mounted on a printed circuit board (PCB), the component generally provides poor utilization of space, because the microcircuits are generally smaller than the packages that contain them. Further, signal delays have occurred due to the relatively large space between the individual microcircuits contained within the package, so multi-chip module (MCM) and/or system in a package (SIP) designs are used to reduce the required space and the signal delays because the microcircuits are not contained within individual packages. For example, FlG. 1 is an enlarged top- view of a portion of a conventional device 10, or multi-chip module, illustrating a substrate 2 having a surface 25, which can harbor a plurality of microcircuits 7. Typically, the MCM or device 10 can comprise a combination of microcircuits of various semiconductor technologies that can be used to optimize the overall performance. The substrate 2 can contain a plurality of conductive layers (not shown) and typical electrical interfaces between the microcircuits and a printed circuit board. Metal connections or wire bonds are normally used to electrically couple a signal or power between the substrate 2 and the plurality of microcircuits 7. For example, a microcircuit 6 can use a wire bond 16 between bonding pads 14 and 15 on the substrate 2 and the microcircuit 6, respectively. Similarly, a microcircuit 8 can be electrically coupled by a wire bond 20 to the connection on a bonding pad 9 on the substrate 2. Hence, any power or signal received or transferred between the microcircuits 6 and 8 is coupled through wire bonds. As the demand for performance continues, the speed and density of the microcircuits will continue to increase, requiring further scaling of devices. Thus, greater demand for electrical coupling between microcircuits is anticipated. [0006] We describe a structure for electrically coupling across a microcircuit or between microcircuits using a charged particle beam. Electrical coupling includes transferring power and/or a data signal on the charged particle beam. The data signal can be coupled by modulating the charged particle beam. Modulation can include pulsing, deflecting or shaping the charged particle beam. The charged particle beam carrying the signal can be deflected or routed to a particular location across or between microcircuits. The structure can be formed on the microcircυit or microcircuits in a final metallization step of the fabrication process.

BRIEF DESCRIPTION OF THE DRAWINGS

[0007] The following description, given with respect to the attached drawings, may be better understood with reference to the non-limiting examples of the drawings, wherein:

[0008] FlG. 1 is an enlarged top- view of a portion of a prior art multi-chip module;

[0009] FlG. 2 is a general overview of a microcircuit;

[00010] FlG. 3 is a portion of FlG. 2 illustrating a modulator;

[00011] FlG. 4 is a general overview of two microcircuits;

[00012] FlG. 5 is a portion of FlG. 4 illustrating a modulator;

[00013] FlG. 6 a general overview of another embodiment of two microcircuits;

[00014] FlG. 7 is a portion of FlG. 6 illustrating yet another modulator;

[00015] FlG. 8 a general overview of two microcircuits;

[00016] FlG. 9 is a portion of FlG. 8 illustrating yet another modulator; and

[00017] FlG. 10 is a general overview of another microcircuit.

DETAILED DESCRIPTION OF THE PRESENTLY PREFERRED EXEMPLARY

EMBODIMENTS [00018] In the following detailed description, taken in conjunction with the accompanying drawing figures, like reference numbers designate like elements. [00019] Generally, a device and method for electrically coupling across a microcircuit or between microcircuits using a charged particle beam is described. The device can be formed on at least one microcircuit of a system in a package, or a multi-chip module. The MCM can comprise a plurality of microcircuits, including first and second microcircuits. An emitter can be formed on the first microcircuit and can generate a charged particle beam along quasi one- dimensional paths. A modulator can be formed on the first microcircuit to couple data onto the charged particle beam. A deflector and collector for routing and receiving the charged particle beam, respectively, can be formed on the first microcircuit or a second microcircuit. The emitter, modulator, collector and the deflector can be formed in a final metallization step in the fabrication of the microcircuit(s).

[00020] As described here, a charged particle beam can include positively or negatively charged ions, electrons and the like. The type of particles is not limiting. For the purposes of this description, the charged particle beam is referred to as an electron beam.

[00021] FlG. 2 illustrates a general overview of a device 100 for coupling a data signal 124 across a microcircuit 102. The microcircuit 102 can be made from a substrate 150 having a surface 104 and is shown formed on a portion of a substrate 101 of a multi-chip module. The device 100 can be formed in a variety of arrangements and is not limiting. For example, the device 100 can include an individual microcircuit 102 formed on a printed circuit board. The microcircuit 102 can include a range of technologies such as CMOS, BiCMOS, bipolar, and the like. The technology and logic family of the microcircuit 102 is not limiting. The substrate 150 can include compound semiconductors, silicon-on-insulator, silicon- on-sapphire, silicon-on-spinel, silicon-on-nitride, silicon-on-oxide, and is not limiting. (As is known in the art, "spinel" refers to magnesium aluminum oxide, MgAl₂O₄.)

[00022] An emitter or source 107 can be formed on the surface 104 in a final process metallization step and includes a cathode 106 and an anode 108 having an aperture or opening 110. The source 107 provides a charged particle beam (generally referred to herein as an electron beam 112). A space 109 above the surface 104 for transferring the electron beam 112) should normally be under a sufficient vacuum to prevent scattering of the electron beam 112. The cathode 106 can be connected to a negative voltage with respect to the anode 108. Here, for example, the cathode 106 is connected to a negative high voltage (-Vω), and the anode 108 is resistively coupled to ground or zero potential. Electrons are emitted from the cathode 106 and a substantial number pass through the opening 110 of the anode 108 to form the electron beam 112, which follows a quasi one- dimensional path 131 (i.e., in the Z-direction).

[00023] A DC-to-DC converter 111 is shown disposed on the surface 104 of the microcircuit 102 and can be used to provide the negative high-voltage (-VM) to the cathode 106. The DC-to-DC converter 111 can receive power from a voltage source negative V_Co The negative high voltage (-Vu) of the DC-to-DC converter 111 can include a range of voltages from about -200 volts to about -3000 volts. The DC-to-DC converter 111 can include fly-back and forward type configurations and is not limiting. In another embodiment, a layer (not shown) within a substrate can be isolated to provide a high-voltage to a cathode. [00024] FlG. 3 is a cross sectional side-view (A-A) of a portion of the device 100 shown in FlG. 2 and illustrates a modulator or metal pad 116 for coupling the data signal 124 onto the electron beam 112. In one embodiment, the metal pad 116 can be formed on the surface 104 in a final metallization step in the fabrication of the microcircuit 102. The metal pad 116, for example, can be formed in a vicinity of the source 107, e.g., within a range of about twenty microns to about one millimeter. The data signal 124 can be coupled to the metal pad 116 by a direct physical connection or by induction. The electron beam 112 is shown passing through the space 109 along the path 131 over the metal pad 116, which is electrically charged by a voltage from the data signal 124. This can cause Coulombic forces to deflect the electron beam 112 and is often referred to in the art as coulomb scattering. For example, the electron beam 112 is shown deflected up or vertically (i.e., in the Y-direction) along a path 128 on applying the data signal 124 to the metal pad 116, which can be negatively charged. The magnitude of the deflection of the electron beam 112 is a function of the charge or the voltage of the data signal 124 applied to the metal pad 116. The data signal 124 can have a voltage above or below a selected threshold voltage to establish a "one" or "zero" logic state, respectively.

[00025] Referring again to FlG. 2, deflectors or routers 118 are shown formed on the surface 104 of the microcircuit 102 between the metal pad 116 and a collector or receiver 120. The routers 118 can include a pair of metal structures or plates separated by a space, and are coupled to a voltage or a control signal 126. An electric field is generated between the plates or routers 118 by the voltage of the control signal 126. The electron beam 112 travels through the electric field between the routers 118. By increasing the voltage or control signal 126 across the routers 118, a force from the electric field can proportionally deflect the electron beam 112. Hence, the electron beam 112, now modulated, can be routed or directed along a path 130 to a particular location. Similar to the metal pad 116, the routers 118 can be formed in a final metallization step. [00026] The receiver 120 and a plurality of other receivers (generally denoted 120A) can be formed on the surface 104 of the microcircuit 102 and are for receiving the electron beam 112. The receivers 120 and 120A, for example, can be coupled to logic gates, operational amplifiers and passive elements of the microcircuit 102. For example, the particular location (above) for directing the electron beam 112 is illustrated in the drawing as the receiver 120. As shown, the signal 126 can be applied to the routers 118 and deflected to route the electron beam 112 to any of the receivers 120 and 120A. The receiver 120 can include collectors such as, e.g., Faraday cups or other structures, to electrically couple an output data signal 125 and power from the electron beam 112, and can be formed in a final metallization step of the fabrication process. The electron beam 112 has the advantage of communicating and/or coupling power across the microcircuit 102 without the use of a metal connection or metallization. [00027] FlG. 4 illustrates a general overview of a device 200 for coupling a data signal 224 between microcircuits 202 and 203. The microcircuits 202 and 203 can be made from respective substrates 250 and 260. The substrates 250 and 260 having respective surfaces 204 and 205 are shown formed on a portion of a substrate 201 of a multi-chip module. The device 200 can be formed in a variety of arrangements and is not limiting. For example, the device 200 can include an individual microcircuit (not shown) formed on a printed circuit board. The microcircuits 202 and 203 can include a range of technologies such as CMOS, BiCMOS, bipolar, and the like. The technology and logic family of the microcircuits 202 and 203 is not limiting. The substrates 250 and 260 can include compound semiconductors, silicon-on-insulator, silicon-on-sapphire, silicon-on- spinel, silicon-on-nitride, silicon-on-oxide and is not limiting. [00028] An emitter or source 207 can be formed on the surface 204 in a final process metallization step and includes a cathode 206 and an anode 208 having an aperture or opening 210. The source 207 provides a charged particle beam (referred to as an electron beam 212). A space 209 between and above the surfaces 204 and 205 for transferring the electron beam 212 should normally be under a sufficient vacuum to prevent scattering or disruption of the electron beam 212. The cathode 206 can be connected to a DC-to-DC converter 211, similarly as discussed with reference to FlG. 2, to provide a negative high-voltage (-Vw) with respect to the anode 208, which can be resistively coupled to ground or zero potential.

[00029] FlG. 5 is a cross sectional side-view (B-B) of a portion of the device 200 shown in FlG. 4 and illustrates a modulator or metal sidewalls 234 for coupling the data signal 224 onto the electron beam 212. A cavity 232 can be formed in the substrate 250 using, for example, an anisotropic reactive ion-etch. A pair of opposite sides of the cavity 232 includes a metal layer that forms the metal sidewalls 234. The orientation of the metal sidewalls 234 is generally parallel to the path 231 of the electron beam 212. The metal sidewalls 234 can be formed in a final metallization step in the processing of the microcircuit 202. The data signal 224 can couple a voltage to the metal sidewalls 234. The cavity 232 and metal sidewalls 234, for example, can be formed in a vicinity of the source 207 within a range of about twenty (20) microns to about one (1) millimeter. With no data signal 224 or voltage applied to the metal sidewalls 234, the electron beam 212 follows the path 231. When a voltage is applied to the sidewalls 234 by the data signal 224, an electric field 241 forms between the sidewalls 234 and in a portion of the space 209 above the cavity 232. The electric field 241 that extends in the portion of the space 209 above the cavity 232 is referred to as a fringing field. By increasing the area of the sidewalls 234 in relation to a distance 236 between the sidewalls 234, the fringing field can be increased. The electric field 241 and particularly the fringing field deflects the electron beam 212 horizontally (i.e., the X-direction as shown) to travel along a path 228. The data signal 224 can be made to vary (e.g., sinusoidally). The electric field 241 is generally a function of the data signal 224 and can change the shape or direction of the electron beam 212. As shown, the electric field 241 deflects the electron beam 212 from side to side. For example, the data signal 224 can be set to oscillate at a primary frequency of 1 megahertz (MHz) to establish a "zero" logic state and at a secondary frequency of 5 MHz to establish a "one" logic state.

[00030] Referring again to FlG. 4, deflectors or routers 218 are shown formed on the microcircuit 202 between the source 207 and a collector or receiver 220. The routers 218 function and can be made similar to the routers 118 shown in FlG. 2. Similar to the device shown in FlG.2, a signal 226 can be applied to the routers 218. The electron beam 212 can be deflected by the routers 218 and channeled or directed along a path 230 to a particular location such as the receiver 220 or to any one of a plurality of receivers 220A on the microcircuit 203. The receiver 220, for example, can include a collector such as, e.g., a Faraday cup or other structures, and can couple an output data signal 225 to logic gates, operational amplifiers and passive elements of the microcircuit 203. Hence, the electron beam 212 can communicate and/or couple power between microcircuits 202 and 203 without the use of a metal connection or metallization. [00031] FlG. 6 illustrates a general overview of a device 300 for coupling a data signal 324 between microcircuits 302 and 303. The microcircuits 302 and 303 can be made from respective substrates 350 and 360. The substrates 350 and 360 having respective surfaces 304 and 305 are shown formed on a portion of a substrate 301 of a multi-chip module. The device 300 can be formed in a variety of arrangements and is not limiting. For example, the device 300 can include an individual microcircuit (not shown) formed on a printed circuit board. The microcircuits 302 and 303 can include a range of technologies such as CMOS, BiCMOS, bipolar, and the like. The technology and logic family of the microcircuits 302 and 303 is not limiting. The substrates 350 and 360 can include compound semiconductors, silicon-on-insulator, silicon-on-sapphire, silicon-on- spinel, silicon-on-nitride, silicon-on-oxide, and is not limiting. [00032] An emitter or source 307 can be formed on the surface 304 in a final process metallization step and includes a cathode 306 and an anode 308 having an aperture or opening 310. The source 307 provides a charged particle beam (referred to as an electron beam 312). A space 309 between and above the surfaces 304 and 305 for transferring the electron beam 312 should normally be under a sufficient vacuum to prevent scattering of the electron beam 312. The cathode 306 can be connected to a DC-to-DC converter 311, (in a manner similar to that described with reference to the devices in FlGS. 2 and 4), to provide a negative high-voltage (-Vj₁;) with respect to the anode 308, which can be resistively coupled to ground or zero potential.

[00033] FlG. 7 is a cross sectional side-view (C-C) of a portion of the device 300 shown in FlG. 6, and illustrates a modulator or metal sidewalls 334 for coupling the data signal 324 onto the electron beam 312. A cavity 332 is formed in the substrate 350 and can be formed similarly (as described with reference to the device of FlG. 5). A pair of opposite sides of the cavity 332 includes a metal layer that forms the metal sidewalls 334. The orientation of the metal sidewalls 334 is generally transverse to the path 328 of the electron beam 312. The metal sidewalls 334 can be formed in a final metallization step in the processing of the US2006/022684

microcircuit 302. The cavity 332 and metal sidewalls 334, for example, can be formed in a vicinity of the source 307 within a range of about twenty (20) microns to about one (1) millimeter. A voltage from the data signal 324 can be coupled to the metal sidewalls 334. As a result, an electric field 341 can extend between the sidewalls 334 and can include a fringing field as discussed with reference to FlG. 5 in a portion of the space 309 above the cavity 332. On traveling over the cavity 332 (i.e., in the Z-direction as shown), the electron beam 312 is generally parallel to the electric field 341. By convention, the direction of the electric field 341 is shown in terms of forces acting on a positive charge. Thus, as shown in FlG. 7, the electrons of the electron beam 312 are accelerated by the electric field 341. A distance 336 across the cavity 332 in relation to the frequency of the data signal 324 can cause electrons of the electron beam 312 to change velocity a plurality of times. A portion of the electrons of the electron beam 312 is sped up and another portion is slowed down. After traveling over the cavity 332, the portion of electrons that were sped up generally overtakes the portion of electrons that were slowed down. This can result in bunching and spreading out of the electrons of the electron beam 312 and is frequently referred to as velocity modulation. For example, the data signal 324 can be set to establish a particular density threshold of the electron beam 312. Detection above or below the density threshold can establish a "one" or "zero" logic state, respectively. [00034] Referring again to FlG. 6, deflectors or routers 318 are shown formed the surface 305 of the microcircuit 303 between the source 307 and a collector or receiver 320. The routers 318 function and can be made in a manner similar to the routers 118 and 218 with reference to the devices shown in FlGS. 2 and 4, respectively. As with the devices of FlGS. 2 and 4, a signal 326 can be applied to the routers 318. The electron beam 312 can be deflected by the routers 318 and channeled or directed along a path 330 to a particular location such as a receiver 320 or to any one of a plurality of receivers 320A on the microcircuit 303. The receiver 320, for example, can include a collector such as, e.g., a Faraday cup or other structures and can couple an output data signal 325 to logic gates, operational amplifiers and passive elements of the microcircuit 303. Hence, the electron beam 312 communicates and/or couples power between the microcircuits 302 and 303 without the use of a metal connection or metallization. [00035] FlG. 8 shows a general overview of one embodiment of a device 400 for coupling a data signal 424 between the microcircuits 402 and 403. The microcircuits 402 and 403 can be made from respective substrates 450 and 460. The substrates 450 and 460 are shown formed on a portion of a substrate 401 of a multi-chip module and have surfaces 404 and 405, respectively. The device 400 can be formed in a variety of arrangements and is not limiting. For example, the device 400 can include an individual microcircuit (not shown) formed on a printed circuit board. The microcircuits 402 and 403 can include a range of technologies such as CMOS, BiCMOS, bipolar, and the like. The technology and logic family of the microcircuits 402 and 403 is not limiting. The substrates 450 and 460 can include compound semiconductors, silicon-on-insulator, silicon-on-sapphire, silicon-on-spinel, silicon-on-nitride, silicon-on-oxide, and is not limiting. [00036] An emitter or source 407 can be formed on the surface 404 in a final metallization step and includes a cathode 406 and an anode 408 having an aperture or opening 410. The source 407 provides a charged particle beam (referred to as an electron beam 412). A space 409 between and above the surfaces 404 and 405 for transferring the electron beam 412 should normally be under a sufficient vacuum to prevent scattering of the electron beam 412. The cathode 406 can be connected to a DC-to-DC converter 411, similarly as discussed with reference to the devices shown in FlGS. 2, 4 and 6 to provide a negative high-voltage (-VM) with respect to the anode 408, which can be resistively coupled to ground or zero potential.

[00037] FlG. 9 is a cross sectional side-view (D-D) of a portion of the device. 400 illustrated in FlG. 8 and shows a modulator or a pair of electrically conductive structures or structures 438 for coupling the data signal 424 onto the electron beam 412. The structures 438 can be formed on the surface 404 in a final metallization step in the processing of the microcircuit 402. The structures 438, for example, can be formed in a vicinity of the source 407 within a range of about 20 microns to about 1 millimeter. The data signal 424 can be applied across the structures 438, thereby establishing an electric field 441 between the structures 438. The electric field 441 can change direction as a function of the data signal 424 applied to the structures 438 and can change the shape or direction of the electron beam 412. As shown, the electric field 441 deflects the electron beam 412 side to side. Similar to the device shown in FlG. 5, the electron beam 412 can be modulated as a sinusoidal function. .

[00038] Now referring again to FlG. 8, deflectors or routers 418 are shown formed on the surface 404 the microcircuit 402. The routers 418 function and can be made similar to the routers 118 and 218, 318 of FlGS. 2, 4, and 6, respectively. In FlG. 8, similar to FlGS. 2, 4 and 6, a signal 426 can be applied to the routers 418. Further, top and bottom deflectors or respective routers 419 and 421 are formed on the surface 405 of the microcircuit 403. The electron beam 412 can be deflected by the routers 418 and directed along paths 433 and 435 to a particular location such as routers 419 and 421, respectively. As shown in FlG. 8, the electron beam 412 can be deflected by the routers 419 and channeled or directed along a path 430 to another particular location such as, e.g., a collector or receiver 420. Further, the electron beam 412 can be directed by routers 419 and 421 (using respective control signals 427 and 429) to any one of a plurality of receivers 420A on the microcircuit 403. The receiver 420, for example, can include a collector such as, e.g., a Faraday cup or the like, and can couple an output data signal 425 to logic gates, operational amplifiers and passive elements of the microcircuit 403. Hence, the electron beam 412 can communicate and/or couple power between microcircuits 402 and 403 without the use of a metal connection or metallization. [00039] FlG. 10 shows a general overview of a device 500 for coupling a data signal 524 across a microcircuit 502. The microcircuit 502 can be made from 22684

a substrate 550. The substrate 550 having a surface 504 is shown formed on a portion of a substrate 501 of a multi-chip module. The device 500 can be formed in a variety of arrangements and is not limiting. For example, the device 500 can include an individual microcircuit (not shown) formed on a printed circuit board. The microcircuit 502 can include a range of technologies such as CMOS₅ BiCMOS, bipolar, and the like. The technology and logic family of the microcircuit 502 is not limiting. The substrate 550 can include compound semiconductors, silicon-on-insulator, silicon-on-sapphire, silicon-on-spinel, silicon-on-nitride, silicon-on-oxide, and is not limiting.

[00040] An emitter or source 507 can be formed on the surface 504 in a final metallization step and includes a cathode 506 and an anode 508 having an aperture or opening 510. The source 507 provides a charged particle beam (referred to as an electron beam 512). A space 509 above the surface 504 for transferring the electron beam 512 should normally be under a sufficient vacuum to prevent scattering of the electron beam 512. The cathode 506 can be connected to a negative high- voltage (-V_hO with respect to the anode 508. Here, for example, the cathode 506 is connected to a voltage (-V_hi), and the anode 508 is resistively coupled to ground or zero potential. Electrons are emitted from the cathode 506 and a substantial number pass through the opening 510 of the anode 508 to form the electron beam 512, which follows a quasi one-dimensional path (i.e., in the z - direction).

[00041] A DC-to-DC converter 511 is shown disposed on the surface 504 of the microcircuit 502 and can be used to provide the negative high- voltage (-V_hO *⁰ the cathode 506. The high voltage of the DC-to-DC converter 511 can include a range of voltages from about -200 volts to about -30000 volts. The DC-to-DC converter 511 can include fly-back and forward type configurations and is not limiting. In another embodiment, a layer (not shown) within the substrate can be isolated to provide the high-voltage to the cathode. [00042] A modulator or switching circuit 516 is coupled to the DC-to-DC 6 022684

converter 511. The data signal 524 can control the duty ratio or cycle of the DC- to-DC converter 511. Thus, the data signal 524 can pulse the output of the DC-to- DC converter 511, thereby modulating the electron beam 512. [00043] Deflectors or routers 518 are formed on the surface 504 of the microcircuit 502 between the source 507 and a collector or receiver 520. The routers 518 can include a pair of metal structures or plates separated by a space, and are connected to a voltage or a control signal 526. Similar, for example, to the device in FlG.2, the routers 518 can channel or direct the electron beam 512 along a path 530 to a particular location such as a receiver 520 and to any one of a plurality of receivers 520A formed on the surface 504. The receivers 520 and 520A can include collectors such as, e.g., Faraday cups or the like formed in a final metallization step during fabrication and are for receiving the electron beam 512. The receiver 520, for example, can couple an output data signal 525 to logic gates, operational amplifiers and passive elements of the microcircuit 503. Hence, the electron beam 512 communicates and/or couples power across the microcircuit 502 without the use of a metal connection or metallization. [00044] In another embodiment (not shown), the electron beam can be pulsed can coupled between transmitting and receiving microcircuits. Further, deflectors can be formed on either the transmitting or receiving microcircuits. [00045] Thus, a device and method for electrically coupling across a micrqcircuit or between microcircuits using a charged particle beam is provided. Electrically coupling can include transferring a data signal and/or power. A final metallization step can be used to form a structure for generating a charged particle beam, which can be modulated to couple a signal within or between microcircuit(s). A collector structure can be formed in the final metallization step for receiving the charged particle beam. This device and method provides the advantage of communicating and/or coupling power without the use of a metal connection. [00046] Those skilled in the art will realize and understand, upon reading this 22684

description, that the source of charged particles may be provided on or apart from the various microcircuits.

[00047] Methods of making a device for detecting an electromagnetic wave as can be employed herein may use, e.g., the techniques described in U.S. Application No. 10/917,571, and/or U.S. Application No. 11/203,407, each of which is described in greater detail above.

[00048] The devices described herein may also employ various similar or different example resonant structures to those described in one or more of the following related applications, each of which is also described in greater detail above: U.S. Applications Nos. 11/243,476; 11/243,477; 11/238,991; 11/302,471; 11/325,432; 11/325,448; 11/325,571; and 11/325,534.

[00049] Various embodiments of the invention are described above. WMIe these descriptions directly describe the above embodiments, it is understood that those skilled in the art may conceive modifications and/or variations to the specific embodiments shown and described herein. Any such modifications or variations that fall within the purview of this description are intended to be included therein as well. Unless specifically noted, it is the intention of the inventor that the words and phrases in the specification and claims be given the ordinary and accustomed meanings to those of ordinary skill in the applicable art(s). The foregoing description of a preferred embodiment and best mode of the invention known to the applicant at the time of filing the application has been presented and is intended for the purposes of illustration and description. It is not intended to be exhaustive or to limit the invention to the precise form disclosed, and many modifications and variations are possible in the light of the above teachings. It is intended that the invention not be limited to the particular embodiments disclosed for carrying out this invention, but that the invention will include all embodiments falling within the scope of the appended claims.

Claims

CLAIMSWhat is claimed is:

1. A method of communicating between a first chip and a second chip, each said chip having at least one microcircuit, the method comprising: providing at least one receiver on said first chip; and causing a beam of charged particles to be directed to said at least one receiver based, at least in part, on a data signal from a microcircuit in said second chip.

2. A method as in claim 1 wherein the beam of charged particles is directed to said at least one receiver.

3. A method as in claim 1 wherein said beam is directed by being deflected by at least one deflection mechanism.

4. A method as in claim 3 wherein the deflection mechanism and said at least one receiver are on different chips.

5. A method as in claim 1 wherein said chips are distinct chips in a multi-chip module (MCM).

6. A method as in claim 3 wherein said at least one deflection mechanism is controlled, at least in part, by said data signal.

7. A method as in claim 3 wherein said charged particles are selected from the group: electrons, protons, positive ions and negative ions.

8. A method as in claim 3 wherein at least two receivers are provided.

9. A method as in claim 1 wherein at least one of said receivers is operationally connected to a circuit to provide signals representing said data thereto.

10. A method as in claim 9 wherein the circuit is a microcircuit in the first chip.

11. A method as in claim 1 further comprising: causing said beam of charged particles to be modulated according to the data signal.

12. A method as in claim 11 wherein said beam of charged particles is modulated by one or more of: pulsing, deflecting, and shaping the charged particle beam.

13. A method as in claim 1 wherein the deflection mechanism is provided on the second chip and wherein at least two receivers are provided on the first chip, distinct from the second chip, and wherein said beam of charged particles is directed to a first one of said receivers to represent a binary one value of said data, and said beam is directed to a second one of said receivers to represent a binary zero value of said data.

14. A device comprising: a first chip and a second chip, each chip containing at least one electronic circuit; at least one receiver on said second chip; a deflection mechanism operationally connected to a first electronic circuit of the first chip and constructed and adapted to direct a charged particle beam to said at least one receiver, based, at least in part, on a data signal provided by the first electronic circuit.

15. A device as in claim 14 wherein first chip and said second chips are distinct chips in a multi-chip module (MCM).

16. A device as in claim 14 further comprising: a source of charged particles for generating said charged particle beam.

17. A device as in claim 14 wherein said charged particles are selected from the group: electrons, protons, positive ions and negative ions.

18. A device as in claim 14 wherein at least two receivers are provided on the second chip.

19. A device as in claim 14 wherein at least one of said receivers is operationally connected to a circuit in the second chip to provide signals representing said data thereto.

20. A device as in claim 14 wherein said beam of charged particles is modulated according to the data signal.

21. A device as in claim 14 wherein at least two receivers are provided on the second chip, and wherein said beam of charged particles is directed to a first one of said receivers to represent a binary one value of said data, and said beam is directed to a second one of said receivers to represent a binary zero value of said data.

22. A device comprising: a first chip and a second chip, each chip containing at least one electronic circuit; at least two receivers on said second chip; a deflection mechanism operationally connected to a first electronic circuit of the first chip and constructed and adapted to direct a charged particle beam to different ones of said at least two receivers, based, at least in part, on a data signal provided by the first electronic circuit, wherein at least one of said receivers is operationally connected to a circuit in the second chip to provide signals representing said data thereto, and wherein said beam of charged particles is directed to a first one of said receivers to represent a binary one value of said data, and said beam is directed to a second one of said receivers to represent a binary zero value of said data.

23. A signal format converter for inter-chip communications, comprising: first and second microchips, the first microchip having information for inter-chip communication to the second microchip; a metal structure carrying the information in an electric signal; a charged particle beam path at the first microchip for receiving a charged particle beam, wherein the charged particle beam passes in the path near the metal structure to cause the information in the electric signal to be encoded into the charged particle beam; and an electron beam director to provide the encoded charged particle beam to the second microchip.