WO2008067383A3 - Composite substrate sealing methods and resulting devices - Google Patents

Composite substrate sealing methods and resulting devices Download PDF

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Publication number
WO2008067383A3
WO2008067383A3 PCT/US2007/085768 US2007085768W WO2008067383A3 WO 2008067383 A3 WO2008067383 A3 WO 2008067383A3 US 2007085768 W US2007085768 W US 2007085768W WO 2008067383 A3 WO2008067383 A3 WO 2008067383A3
Authority
WO
WIPO (PCT)
Prior art keywords
composite substrate
substrate sealing
sealing methods
resulting devices
methods
Prior art date
Application number
PCT/US2007/085768
Other languages
French (fr)
Other versions
WO2008067383A2 (en
Inventor
Jian Gu
Chia-Fu Chou
Frederic Zenhausern
Qihuo Wei
Original Assignee
Univ Arizona
Jian Gu
Chia-Fu Chou
Frederic Zenhausern
Qihuo Wei
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Arizona, Jian Gu, Chia-Fu Chou, Frederic Zenhausern, Qihuo Wei filed Critical Univ Arizona
Publication of WO2008067383A2 publication Critical patent/WO2008067383A2/en
Publication of WO2008067383A3 publication Critical patent/WO2008067383A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00055—Grooves
    • B81C1/00071—Channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/051—Micromixers, microreactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers

Abstract

The present invention provides composite substrates and methods for using them for substrate sealing and production of fluidic devices.
PCT/US2007/085768 2006-11-28 2007-11-28 Composite substrate sealing methods and resulting devices WO2008067383A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US86130906P 2006-11-28 2006-11-28
US60/861,309 2006-11-28

Publications (2)

Publication Number Publication Date
WO2008067383A2 WO2008067383A2 (en) 2008-06-05
WO2008067383A3 true WO2008067383A3 (en) 2008-12-31

Family

ID=39468682

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/085768 WO2008067383A2 (en) 2006-11-28 2007-11-28 Composite substrate sealing methods and resulting devices

Country Status (1)

Country Link
WO (1) WO2008067383A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104591073A (en) * 2014-12-05 2015-05-06 上海交通大学 Microchannel structure and method for generating microchannel

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991016966A1 (en) * 1990-05-10 1991-11-14 Pharmacia Biosensor Ab Microfluidic structure and process for its manufacture
WO1999019717A1 (en) * 1997-10-15 1999-04-22 Aclara Biosciences, Inc. Laminate microstructure device and method for making same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991016966A1 (en) * 1990-05-10 1991-11-14 Pharmacia Biosensor Ab Microfluidic structure and process for its manufacture
WO1999019717A1 (en) * 1997-10-15 1999-04-22 Aclara Biosciences, Inc. Laminate microstructure device and method for making same

Also Published As

Publication number Publication date
WO2008067383A2 (en) 2008-06-05

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