WO2008070635A3 - Method and system for determining a critical dimension of an object - Google Patents

Method and system for determining a critical dimension of an object Download PDF

Info

Publication number
WO2008070635A3
WO2008070635A3 PCT/US2007/086310 US2007086310W WO2008070635A3 WO 2008070635 A3 WO2008070635 A3 WO 2008070635A3 US 2007086310 W US2007086310 W US 2007086310W WO 2008070635 A3 WO2008070635 A3 WO 2008070635A3
Authority
WO
WIPO (PCT)
Prior art keywords
critical dimension
image receiver
gage block
calculate
response
Prior art date
Application number
PCT/US2007/086310
Other languages
French (fr)
Other versions
WO2008070635A2 (en
WO2008070635A9 (en
Inventor
Michael J Mater
Original Assignee
Coherix Inc
Michael J Mater
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Coherix Inc, Michael J Mater filed Critical Coherix Inc
Publication of WO2008070635A2 publication Critical patent/WO2008070635A2/en
Publication of WO2008070635A3 publication Critical patent/WO2008070635A3/en
Publication of WO2008070635A9 publication Critical patent/WO2008070635A9/en

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0006—Industrial image inspection using a design-rule based approach
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/521—Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30164—Workpiece; Machine component

Abstract

The present invention includes systems and method of measuring a critical dimension of an object. The system of the present invention includes a multiwavelength interferometric imaging system having an image receiver that is adapted to receive reflected light and calculate a critical dimension of an object in response thereto. The system can also include a gage block defining a known dimension that is disposed at a predetermined distance from the multiwavelength interferometric imaging system. The gage block can define a surface that at least partially reflects incident light, and can be adapted to hold the object in a predetermined position during an imaging operation. During the imaging operation at least a portion of the light incident on the image receiver is reflected from the gage block, thereby allowing the image receiver to calculate a critical dimension of the object in response to the received image.
PCT/US2007/086310 2006-12-01 2007-12-03 Method and system for determining a critical dimension of an object WO2008070635A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US86812006P 2006-12-01 2006-12-01
US60/868,120 2006-12-01

Publications (3)

Publication Number Publication Date
WO2008070635A2 WO2008070635A2 (en) 2008-06-12
WO2008070635A3 true WO2008070635A3 (en) 2008-07-31
WO2008070635A9 WO2008070635A9 (en) 2008-09-12

Family

ID=39493027

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/086310 WO2008070635A2 (en) 2006-12-01 2007-12-03 Method and system for determining a critical dimension of an object

Country Status (1)

Country Link
WO (1) WO2008070635A2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6633831B2 (en) * 2000-09-20 2003-10-14 Kla Tencor Technologies Methods and systems for determining a critical dimension and a thin film characteristic of a specimen
US6822745B2 (en) * 2000-01-25 2004-11-23 Zygo Corporation Optical systems for measuring form and geometric dimensions of precision engineered parts

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6822745B2 (en) * 2000-01-25 2004-11-23 Zygo Corporation Optical systems for measuring form and geometric dimensions of precision engineered parts
US6633831B2 (en) * 2000-09-20 2003-10-14 Kla Tencor Technologies Methods and systems for determining a critical dimension and a thin film characteristic of a specimen

Also Published As

Publication number Publication date
WO2008070635A2 (en) 2008-06-12
WO2008070635A9 (en) 2008-09-12

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