WO2008089406A3 - Apparatus and method for simultaneous inspection at different depths based on the principle of frequency domain optical coherence tomography - Google Patents

Apparatus and method for simultaneous inspection at different depths based on the principle of frequency domain optical coherence tomography Download PDF

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Publication number
WO2008089406A3
WO2008089406A3 PCT/US2008/051432 US2008051432W WO2008089406A3 WO 2008089406 A3 WO2008089406 A3 WO 2008089406A3 US 2008051432 W US2008051432 W US 2008051432W WO 2008089406 A3 WO2008089406 A3 WO 2008089406A3
Authority
WO
WIPO (PCT)
Prior art keywords
electro
principle
frequency domain
magnetic radiation
different depths
Prior art date
Application number
PCT/US2008/051432
Other languages
French (fr)
Other versions
WO2008089406A2 (en
Inventor
Reza Motaghian Nezam
Guillermo J Tearney
Brett Eugene Bouma
Original Assignee
Gen Hospital Corp
Reza Motaghian Nezam
Guillermo J Tearney
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Hospital Corp, Reza Motaghian Nezam, Guillermo J Tearney filed Critical Gen Hospital Corp
Priority to EP08727913A priority Critical patent/EP2102583A2/en
Priority to JP2009546534A priority patent/JP5507258B2/en
Publication of WO2008089406A2 publication Critical patent/WO2008089406A2/en
Publication of WO2008089406A3 publication Critical patent/WO2008089406A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G01B9/02028—Two or more reference or object arms in one interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Abstract

Exemplary embodiments of an apparatus are provided. For example, the exemplary apparatus can include at least one first arrangement providing at least one first electro- magnetic radiation to a sample, at least one second electro-magnetic radiation to a first reference and at least one third electro-magnetic radiation to a second reference. A frequency of radiation provided by the first arrangement generally varies over time. The exemplary apparatus may also include at least one second arrangement which is configured to detect a first interference between at least one fourth electro-magnetic radiation associated with the first electro-magnetic radiation and at least one fifth electro-magnetic radiation associated with the second radiation. The second arrangement is also configured to detect a second interference between at least one sixth electro-magnetic radiation associated with the first electro-magnetic radiation and at least one seventh electro-magnetic radiation associated with the third radiation.
PCT/US2008/051432 2007-01-19 2008-01-18 Apparatus and method for simultaneous inspection at different depths based on the principle of frequency domain optical coherence tomography WO2008089406A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP08727913A EP2102583A2 (en) 2007-01-19 2008-01-18 Apparatus and method for controlling ranging depth in optical frequency domain imaging
JP2009546534A JP5507258B2 (en) 2007-01-19 2008-01-18 Apparatus and method for controlling measurement depth in optical frequency domain imaging

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US88565207P 2007-01-19 2007-01-19
US60/885,652 2007-01-19

Publications (2)

Publication Number Publication Date
WO2008089406A2 WO2008089406A2 (en) 2008-07-24
WO2008089406A3 true WO2008089406A3 (en) 2008-09-18

Family

ID=39466312

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/051432 WO2008089406A2 (en) 2007-01-19 2008-01-18 Apparatus and method for simultaneous inspection at different depths based on the principle of frequency domain optical coherence tomography

Country Status (4)

Country Link
US (1) US7911621B2 (en)
EP (1) EP2102583A2 (en)
JP (1) JP5507258B2 (en)
WO (1) WO2008089406A2 (en)

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