WO2008106141A3 - Micromirror device with a single address electrode - Google Patents

Micromirror device with a single address electrode Download PDF

Info

Publication number
WO2008106141A3
WO2008106141A3 PCT/US2008/002544 US2008002544W WO2008106141A3 WO 2008106141 A3 WO2008106141 A3 WO 2008106141A3 US 2008002544 W US2008002544 W US 2008002544W WO 2008106141 A3 WO2008106141 A3 WO 2008106141A3
Authority
WO
WIPO (PCT)
Prior art keywords
micromirror device
mirror
address electrode
single address
mirrors
Prior art date
Application number
PCT/US2008/002544
Other languages
French (fr)
Other versions
WO2008106141A2 (en
Inventor
Fusao Ishii
Yoshihiro Maeda
Hirokazu Nishino
Kazuma Arai
Original Assignee
Olympus Corp
Silicon Quest Kk
Fusao Ishii
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp, Silicon Quest Kk, Fusao Ishii filed Critical Olympus Corp
Publication of WO2008106141A2 publication Critical patent/WO2008106141A2/en
Publication of WO2008106141A3 publication Critical patent/WO2008106141A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Abstract

A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting any each of the mirrors to be deflectable in a plurality of directions, an electrode arranged to face the mirror, and a driving circuit, which is connected to the mirror via the elastic hinge, for applying to the mirror an address voltage for independently controlling the deflection of the mirror.
PCT/US2008/002544 2007-02-26 2008-02-26 Micromirror device with a single address electrode WO2008106141A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US90346707P 2007-02-26 2007-02-26
US60/903,467 2007-02-26

Publications (2)

Publication Number Publication Date
WO2008106141A2 WO2008106141A2 (en) 2008-09-04
WO2008106141A3 true WO2008106141A3 (en) 2008-11-06

Family

ID=39715555

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/US2008/002608 WO2008106180A1 (en) 2007-02-26 2008-02-26 Control methods for micromirror devices implemented with a single address electrode
PCT/US2008/002544 WO2008106141A2 (en) 2007-02-26 2008-02-26 Micromirror device with a single address electrode

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/US2008/002608 WO2008106180A1 (en) 2007-02-26 2008-02-26 Control methods for micromirror devices implemented with a single address electrode

Country Status (2)

Country Link
US (4) US7839561B2 (en)
WO (2) WO2008106180A1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7839561B2 (en) * 2007-02-26 2010-11-23 Silicon Quest Kabushiki-Kaisha Micromirror device with a single address electrode
US8081371B2 (en) * 2003-11-01 2011-12-20 Silicon Quest Kabushiki-Kaisha Spatial light modulator and display apparatus
US8064123B2 (en) * 2003-11-01 2011-11-22 Silicon Quest Kabushiki-Kaisha Mirror device and MEMS device comprising layered electrode
DE102009038033A1 (en) 2009-08-19 2011-02-24 Wobben, Aloys Electric charging device
WO2016067154A1 (en) * 2014-10-29 2016-05-06 株式会社半導体エネルギー研究所 Display element, display device, or electronic device
DE102017108562A1 (en) 2017-04-21 2018-10-25 Wobben Properties Gmbh Charging station for charging a plurality of electric vehicles, in particular electric automobiles

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Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6469821B2 (en) * 1999-12-28 2002-10-22 Texas Instruments Incorporated Micromirror structures for orthogonal illumination
US6914871B2 (en) * 1999-12-28 2005-07-05 Sony Corporation Micro mirror unit, optical disc drive using same, and method for producing micro mirror unit
US6867897B2 (en) * 2003-01-29 2005-03-15 Reflectivity, Inc Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays

Also Published As

Publication number Publication date
WO2008106141A2 (en) 2008-09-04
WO2008106180A1 (en) 2008-09-04
US7907325B2 (en) 2011-03-15
US7839561B2 (en) 2010-11-23
US20080218830A1 (en) 2008-09-11
US7649673B2 (en) 2010-01-19
US20090174926A1 (en) 2009-07-09
US20080218831A1 (en) 2008-09-11
US20080204845A1 (en) 2008-08-28
US7907320B2 (en) 2011-03-15

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