WO2008149944A1 - 分光モジュール - Google Patents

分光モジュール Download PDF

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Publication number
WO2008149944A1
WO2008149944A1 PCT/JP2008/060384 JP2008060384W WO2008149944A1 WO 2008149944 A1 WO2008149944 A1 WO 2008149944A1 JP 2008060384 W JP2008060384 W JP 2008060384W WO 2008149944 A1 WO2008149944 A1 WO 2008149944A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
body section
passing opening
spectroscopic module
entering
Prior art date
Application number
PCT/JP2008/060384
Other languages
English (en)
French (fr)
Inventor
Katsumi Shibayama
Helmut Teichmann
Tomofumi Suzuki
Dietmar Hiller
Ulrich Starker
Original Assignee
Hamamatsu Photonics K.K.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics K.K. filed Critical Hamamatsu Photonics K.K.
Priority to US12/377,300 priority Critical patent/US8368885B2/en
Priority to CN2008800005065A priority patent/CN101542248B/zh
Priority to EP08765197.2A priority patent/EP2157414A4/en
Publication of WO2008149944A1 publication Critical patent/WO2008149944A1/ja
Priority to US13/545,445 priority patent/US8411269B2/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0202Mechanical elements; Supports for optical elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0243Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0256Compact construction
    • G01J3/0259Monolithic
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0262Constructional arrangements for removing stray light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0291Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/04Slit arrangements slit adjustment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector

Abstract

 この分光モジュール1では、本体部2に入射する光が通過する光通過開口4bを光検出素子4が有している。そのため、光通過開口4bと光検出素子4の光検出部4aとの相対的な位置関係にずれが生じるのを防止することができる。しかも、本体部2に入射する光を導光する光学素子7が光通過開口4bに配置されている。そのため、本体部2に入射すべき光の一部が光通過開口4bの光入射側縁部で遮られるようなことなく、本体部2に入射すべき光を確実に導光することができる。従って、この分光モジュール1によれば、信頼性を向上させることが可能となる。
PCT/JP2008/060384 2007-06-08 2008-06-05 分光モジュール WO2008149944A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US12/377,300 US8368885B2 (en) 2007-06-08 2008-06-05 Spectroscopic module
CN2008800005065A CN101542248B (zh) 2007-06-08 2008-06-05 分光模块
EP08765197.2A EP2157414A4 (en) 2007-06-08 2008-06-05 SPECTROSCOPIC MODULE
US13/545,445 US8411269B2 (en) 2007-06-08 2012-07-10 Spectroscopic module

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-153019 2007-06-08
JP2007153019A JP4891841B2 (ja) 2007-06-08 2007-06-08 分光モジュール

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US12/377,300 A-371-Of-International US8368885B2 (en) 2007-06-08 2008-06-05 Spectroscopic module
US13/545,445 Continuation US8411269B2 (en) 2007-06-08 2012-07-10 Spectroscopic module

Publications (1)

Publication Number Publication Date
WO2008149944A1 true WO2008149944A1 (ja) 2008-12-11

Family

ID=40093754

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060384 WO2008149944A1 (ja) 2007-06-08 2008-06-05 分光モジュール

Country Status (7)

Country Link
US (2) US8368885B2 (ja)
EP (1) EP2157414A4 (ja)
JP (1) JP4891841B2 (ja)
KR (1) KR20100017081A (ja)
CN (2) CN101542250B (ja)
TW (1) TWI445930B (ja)
WO (1) WO2008149944A1 (ja)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009139316A1 (ja) * 2008-05-15 2009-11-19 浜松ホトニクス株式会社 分光モジュールの製造方法及び分光モジュール
JP2009300418A (ja) * 2008-05-15 2009-12-24 Hamamatsu Photonics Kk 分光モジュール
JP2009300413A (ja) * 2008-05-15 2009-12-24 Hamamatsu Photonics Kk 分光モジュール
JP2009300416A (ja) * 2008-05-15 2009-12-24 Hamamatsu Photonics Kk 分光モジュールの製造方法及び分光モジュール
JP2009300415A (ja) * 2008-05-15 2009-12-24 Hamamatsu Photonics Kk 分光モジュール
US8040507B2 (en) 2008-05-15 2011-10-18 Hamamatsu Photonics K.K. Spectrometer
US8139214B2 (en) 2008-05-15 2012-03-20 Hamamatsu Photonics K.K. Spectroscopy module, and method for manufacturing the same
US8604412B2 (en) 2008-05-15 2013-12-10 Hamamatsu Photonics K.K. Spectral module and method for manufacturing spectral module
US8804118B2 (en) 2008-05-15 2014-08-12 Hamamatsu Photonics K.K. Spectral module

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KR20100017082A (ko) * 2007-06-08 2010-02-16 하마마츠 포토닉스 가부시키가이샤 분광 모듈
WO2008149939A1 (ja) 2007-06-08 2008-12-11 Hamamatsu Photonics K.K. 分光器
US8045155B2 (en) * 2007-06-08 2011-10-25 Hamamatsu Photonics K.K. Spectroscopic module
JP4891840B2 (ja) * 2007-06-08 2012-03-07 浜松ホトニクス株式会社 分光モジュール
JP4891841B2 (ja) 2007-06-08 2012-03-07 浜松ホトニクス株式会社 分光モジュール
KR20100017083A (ko) * 2007-06-08 2010-02-16 하마마츠 포토닉스 가부시키가이샤 분광 모듈
JP4887221B2 (ja) * 2007-06-08 2012-02-29 浜松ホトニクス株式会社 分光モジュール
JP5113947B2 (ja) * 2012-04-18 2013-01-09 浜松ホトニクス株式会社 分光モジュール
EP2857810A1 (en) * 2013-10-02 2015-04-08 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Monolith spectrometer
JP6255992B2 (ja) * 2013-12-27 2018-01-10 セイコーエプソン株式会社 分光測定システム、分光モジュール、及び、位置ズレ検出方法
JP6251073B2 (ja) * 2014-02-05 2017-12-20 浜松ホトニクス株式会社 分光器、及び分光器の製造方法
JP2016011932A (ja) 2014-06-30 2016-01-21 セイコーエプソン株式会社 分光画像撮像装置、分光画像撮像方法
US9923007B2 (en) 2015-12-29 2018-03-20 Viavi Solutions Inc. Metal mirror based multispectral filter array
US9960199B2 (en) 2015-12-29 2018-05-01 Viavi Solutions Inc. Dielectric mirror based multispectral filter array
EP3372966B1 (en) * 2017-03-10 2021-09-01 Hitachi High-Tech Analytical Science Limited A portable analyzer using optical emission spectoscopy
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Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009139316A1 (ja) * 2008-05-15 2009-11-19 浜松ホトニクス株式会社 分光モジュールの製造方法及び分光モジュール
JP2009300418A (ja) * 2008-05-15 2009-12-24 Hamamatsu Photonics Kk 分光モジュール
JP2009300413A (ja) * 2008-05-15 2009-12-24 Hamamatsu Photonics Kk 分光モジュール
JP2009300416A (ja) * 2008-05-15 2009-12-24 Hamamatsu Photonics Kk 分光モジュールの製造方法及び分光モジュール
JP2009300415A (ja) * 2008-05-15 2009-12-24 Hamamatsu Photonics Kk 分光モジュール
JP2009300417A (ja) * 2008-05-15 2009-12-24 Hamamatsu Photonics Kk 分光モジュールの製造方法及び分光モジュール
US8013993B2 (en) 2008-05-15 2011-09-06 Hamamatsu Photonics K.K. Spectroscopy module
US8018591B2 (en) 2008-05-15 2011-09-13 Hamamatsu Photonics K.K. Spectroscopy module
US8027034B2 (en) 2008-05-15 2011-09-27 Hamamatsu Photonics K.K. Method for manufacturing spectroscopy module, and spectroscopy module
US8035814B2 (en) 2008-05-15 2011-10-11 Hamamatsu Photonics K.K. Spectroscopy module
US8040507B2 (en) 2008-05-15 2011-10-18 Hamamatsu Photonics K.K. Spectrometer
US8139214B2 (en) 2008-05-15 2012-03-20 Hamamatsu Photonics K.K. Spectroscopy module, and method for manufacturing the same
US8564773B2 (en) 2008-05-15 2013-10-22 Hamamatsu Photonics K.K. Spectroscopy module
US8604412B2 (en) 2008-05-15 2013-12-10 Hamamatsu Photonics K.K. Spectral module and method for manufacturing spectral module
US8742320B2 (en) 2008-05-15 2014-06-03 Hamamatsu Photonics K.K. Spectral module and method for manufacturing spectral module
US8804118B2 (en) 2008-05-15 2014-08-12 Hamamatsu Photonics K.K. Spectral module

Also Published As

Publication number Publication date
US20100208257A1 (en) 2010-08-19
US20120276287A1 (en) 2012-11-01
US8411269B2 (en) 2013-04-02
JP2008304387A (ja) 2008-12-18
US8368885B2 (en) 2013-02-05
EP2157414A4 (en) 2013-12-18
CN101542250B (zh) 2011-09-07
JP4891841B2 (ja) 2012-03-07
KR20100017081A (ko) 2010-02-16
TWI445930B (zh) 2014-07-21
EP2157414A1 (en) 2010-02-24
CN101542250A (zh) 2009-09-23
TW200914806A (en) 2009-04-01
CN101542248B (zh) 2012-08-08
CN101542248A (zh) 2009-09-23

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