WO2009063473A3 - Accelerometer - Google Patents

Accelerometer Download PDF

Info

Publication number
WO2009063473A3
WO2009063473A3 PCT/IL2008/001507 IL2008001507W WO2009063473A3 WO 2009063473 A3 WO2009063473 A3 WO 2009063473A3 IL 2008001507 W IL2008001507 W IL 2008001507W WO 2009063473 A3 WO2009063473 A3 WO 2009063473A3
Authority
WO
WIPO (PCT)
Prior art keywords
electrode plate
capacitive
plates
dynamic electrode
planar substrate
Prior art date
Application number
PCT/IL2008/001507
Other languages
French (fr)
Other versions
WO2009063473A2 (en
Inventor
Noel Axelrod
Eran Ofek
Original Assignee
Physical Logic Ag
Noel Axelrod
Eran Ofek
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Physical Logic Ag, Noel Axelrod, Eran Ofek filed Critical Physical Logic Ag
Publication of WO2009063473A2 publication Critical patent/WO2009063473A2/en
Publication of WO2009063473A3 publication Critical patent/WO2009063473A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0834—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass constituting a pendulum having the pivot axis disposed symmetrically between the longitudinal ends, the center of mass being shifted away from the plane of the pendulum which includes the pivot axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0837—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being suspended so as to only allow movement perpendicular to the plane of the substrate, i.e. z-axis sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0848—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a plurality of mechanically coupled spring-mass systems, the sensitive direction of each system being different

Abstract

A 3-dimensional MEMS accelerometer fabricated on a single planar substrate deploys three co-planar sensor elements. Each sensor element is a capacitive device deploying a static electrode plate and a parallel dynamic electrode plate supported by a torsion beam. The dynamic electrode plate also includes a proof mass portion that displaces the center of gravity to below the plane of the plate. Two of the sensor elements are identical and rotated by 90 degrees on the planar substrate. The third capacitive sensor has two pairs of adjacent capacitive plates, each one having a dynamic electrode plate is suspended by a torsion beam. The proof mass on each dynamic electrode plates however is offset laterally from the torsion axis in opposite directions from the other plates to cancel the their respective capacitance charges induced by in-plane acceleration. However, this arrangement also adds the capacitive change induced by acceleration orthogonal to the planar substrate.
PCT/IL2008/001507 2007-11-15 2008-11-16 Accelerometer WO2009063473A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US98811407P 2007-11-15 2007-11-15
US60/988,114 2007-11-15
US12/267,734 US8136400B2 (en) 2007-11-15 2008-11-10 Accelerometer
US12/267,734 2008-11-10

Publications (2)

Publication Number Publication Date
WO2009063473A2 WO2009063473A2 (en) 2009-05-22
WO2009063473A3 true WO2009063473A3 (en) 2009-07-30

Family

ID=40351724

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2008/001507 WO2009063473A2 (en) 2007-11-15 2008-11-16 Accelerometer

Country Status (2)

Country Link
US (1) US8136400B2 (en)
WO (1) WO2009063473A2 (en)

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US8322216B2 (en) * 2009-09-22 2012-12-04 Duli Yu Micromachined accelerometer with monolithic electrodes and method of making the same
US9709509B1 (en) * 2009-11-13 2017-07-18 MCube Inc. System configured for integrated communication, MEMS, Processor, and applications using a foundry compatible semiconductor process
EP2363717B1 (en) * 2010-02-12 2012-11-14 Nxp B.V. Accelerometer and production method
US8779534B2 (en) 2010-11-04 2014-07-15 Meggitt (Orange County), Inc. Low-G MEMS acceleration switch
US8539836B2 (en) 2011-01-24 2013-09-24 Freescale Semiconductor, Inc. MEMS sensor with dual proof masses
TWI591343B (en) * 2011-05-09 2017-07-11 立積電子股份有限公司 Sensing apparatus
US9212051B1 (en) 2011-08-04 2015-12-15 Western Digital (Fremont), Llc Systems and methods for forming MEMS assemblies incorporating getters
US9470709B2 (en) 2013-01-28 2016-10-18 Analog Devices, Inc. Teeter totter accelerometer with unbalanced mass
US9297825B2 (en) 2013-03-05 2016-03-29 Analog Devices, Inc. Tilt mode accelerometer with improved offset and noise performance
US10073113B2 (en) 2014-12-22 2018-09-11 Analog Devices, Inc. Silicon-based MEMS devices including wells embedded with high density metal
US9874459B2 (en) * 2015-02-24 2018-01-23 The Regents Of The University Of Michigan Actuation and sensing platform for sensor calibration and vibration isolation
US10078098B2 (en) 2015-06-23 2018-09-18 Analog Devices, Inc. Z axis accelerometer design with offset compensation
KR101915954B1 (en) * 2016-06-29 2018-11-08 주식회사 신성씨앤티 MEMS based 3-axis accelerometer
US10816568B2 (en) 2017-12-26 2020-10-27 Physical Logic Ltd. Closed loop accelerometer
JP2020030067A (en) * 2018-08-21 2020-02-27 セイコーエプソン株式会社 Physical quantity sensor, sensor device, electronic device, and movable body
CN110531112A (en) * 2019-09-17 2019-12-03 东南大学 Graphene resonance type accelerometer device based on the double-deck electrostatic the feebleness coupling effects
EP4116718A1 (en) * 2021-07-05 2023-01-11 Murata Manufacturing Co., Ltd. Seesaw accelerometer
CN115389782B (en) * 2022-08-26 2024-03-08 南京高华科技股份有限公司 MEMS capacitive accelerometer and preparation method thereof

Citations (4)

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DE10111149A1 (en) * 2001-03-08 2002-09-26 Eads Deutschland Gmbh Micro-mechanical capacitive acceleration sensor for measuring the acceleration of an object in one or more directions is made from a monolithic silicon crystal and is smaller and less sensitive to interference than existing art
US20030209075A1 (en) * 2002-05-13 2003-11-13 Wacoh Corporation Acceleration sensor and manufacturing method for the same
WO2006134232A1 (en) * 2005-06-17 2006-12-21 Vti Technologies Oy Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor
WO2007031569A2 (en) * 2005-09-15 2007-03-22 Stmicroelectronics S.R.L. Image stabilizing device of the mems type, in particular for image acquisition using a digital-image sensor

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US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
US5659195A (en) * 1995-06-08 1997-08-19 The Regents Of The University Of California CMOS integrated microsensor with a precision measurement circuit
EP0997920B1 (en) * 1998-10-29 2002-06-12 Sensonor A.S. Micromechanical acceleration switch
US6765160B1 (en) * 2002-08-21 2004-07-20 The United States Of America As Represented By The Secetary Of The Army Omnidirectional microscale impact switch
US6910379B2 (en) * 2003-10-29 2005-06-28 Honeywell International, Inc. Out-of-plane compensation suspension for an accelerometer
US20050132803A1 (en) * 2003-12-23 2005-06-23 Baldwin David J. Low cost integrated MEMS hybrid
US7617729B2 (en) * 2006-02-21 2009-11-17 Physical Logic Ag Accelerometer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10111149A1 (en) * 2001-03-08 2002-09-26 Eads Deutschland Gmbh Micro-mechanical capacitive acceleration sensor for measuring the acceleration of an object in one or more directions is made from a monolithic silicon crystal and is smaller and less sensitive to interference than existing art
US20030209075A1 (en) * 2002-05-13 2003-11-13 Wacoh Corporation Acceleration sensor and manufacturing method for the same
WO2006134232A1 (en) * 2005-06-17 2006-12-21 Vti Technologies Oy Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor
WO2007031569A2 (en) * 2005-09-15 2007-03-22 Stmicroelectronics S.R.L. Image stabilizing device of the mems type, in particular for image acquisition using a digital-image sensor

Also Published As

Publication number Publication date
WO2009063473A2 (en) 2009-05-22
US20090139331A1 (en) 2009-06-04
US8136400B2 (en) 2012-03-20

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