WO2010092399A3 - Integrated mems transducer and circuitry - Google Patents
Integrated mems transducer and circuitry Download PDFInfo
- Publication number
- WO2010092399A3 WO2010092399A3 PCT/GB2010/050233 GB2010050233W WO2010092399A3 WO 2010092399 A3 WO2010092399 A3 WO 2010092399A3 GB 2010050233 W GB2010050233 W GB 2010050233W WO 2010092399 A3 WO2010092399 A3 WO 2010092399A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- transducer
- circuitry
- layer
- plate
- layers
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00222—Integrating an electronic processing unit with a micromechanical structure
- B81C1/00246—Monolithic integration, i.e. micromechanical structure and electronic processing unit are integrated on the same substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0257—Microphones or microspeakers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/02—Casings; Cabinets ; Supports therefor; Mountings therein
- H04R1/04—Structural association of microphone with electric circuitry therefor
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/005—Electrostatic transducers using semiconductor materials
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
- H04R31/006—Interconnection of transducer parts
Abstract
The invention relates to the integration of MEMS transducers with electronic circuitry on the same substrate. A method of fabricating and integrated MEMS transducer and circuitry is disclosed which is fully compatible with standard CMOS processing and requires no post processing. The transducer is formed by forming at least one membrane layer, a plurality of back-plate layer sand at least one sacrificial structure such that removal of the sacrificial structure leaves the membrane free to move relative to the fixed back-plate. The method also forms circuit layers on the substrate to form the circuit components and involves sharing layers of material such that at least some of the layers which form the back-plate of the transducer also forms one of the circuit layer sand such layer include at least one metal layer and at least one dielectric layer. The method thus reduces the number of processing steps required compared with sequential fabrication of the circuitry and the transducer. Integrated transducer and electronics devices are also taught.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0902479A GB2467776A (en) | 2009-02-13 | 2009-02-13 | Integrated MEMS transducer and circuitry |
GB0902479.5 | 2009-02-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2010092399A2 WO2010092399A2 (en) | 2010-08-19 |
WO2010092399A3 true WO2010092399A3 (en) | 2011-05-05 |
Family
ID=40548201
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/GB2010/050233 WO2010092399A2 (en) | 2009-02-13 | 2010-02-12 | Integrated mems transducer and circuitry |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB2467776A (en) |
WO (1) | WO2010092399A2 (en) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102086019B (en) * | 2010-11-02 | 2013-04-17 | 中国电子科技集团公司第二十四研究所 | Method for manufacturing monolithic polysilicon cantilever structure |
US9540232B2 (en) | 2010-11-12 | 2017-01-10 | MCube Inc. | Method and structure of MEMS WLCSP fabrication |
US9276080B2 (en) | 2012-03-09 | 2016-03-01 | Mcube, Inc. | Methods and structures of integrated MEMS-CMOS devices |
US9181087B2 (en) | 2011-03-02 | 2015-11-10 | Epcos Ag | Flat back plate |
CN103404172B (en) * | 2011-03-04 | 2016-11-09 | 埃普科斯股份有限公司 | The method of the barrier film between microphone and two backboards of positioning |
US9148726B2 (en) | 2011-09-12 | 2015-09-29 | Infineon Technologies Ag | Micro electrical mechanical system with bending deflection of backplate structure |
FR2983189B1 (en) * | 2011-11-30 | 2014-02-07 | Commissariat Energie Atomique | METHOD FOR PRODUCING A STRUCTURE COMPRISING AT LEAST ONE ACTIVE PART HAVING DIFFERENT THICKNESS AREAS |
US10132630B2 (en) | 2013-01-25 | 2018-11-20 | MCube Inc. | Multi-axis integrated MEMS inertial sensing device on single packaged chip |
US10036635B2 (en) | 2013-01-25 | 2018-07-31 | MCube Inc. | Multi-axis MEMS rate sensor device |
US9249012B2 (en) | 2013-01-25 | 2016-02-02 | Mcube, Inc. | Method and device of MEMS process control monitoring and packaged MEMS with different cavity pressures |
US9499392B2 (en) | 2013-02-05 | 2016-11-22 | Butterfly Network, Inc. | CMOS ultrasonic transducers and related apparatus and methods |
US10913653B2 (en) | 2013-03-07 | 2021-02-09 | MCube Inc. | Method of fabricating MEMS devices using plasma etching and device therefor |
US10046964B2 (en) | 2013-03-07 | 2018-08-14 | MCube Inc. | MEMS structure with improved shielding and method |
US9079761B2 (en) * | 2013-03-14 | 2015-07-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Stacked semiconductor device and method of forming the same related cases |
WO2014151525A2 (en) | 2013-03-15 | 2014-09-25 | Butterfly Network, Inc. | Complementary metal oxide semiconductor (cmos) ultrasonic transducers and methods for forming the same |
CN105247890B (en) * | 2013-05-28 | 2019-03-29 | 罗伯特·博世有限公司 | Multi-layer combined backboard for micromachined microphones |
US9510103B2 (en) | 2013-09-09 | 2016-11-29 | Audio Pixels Ltd. | Microelectromechanical apparatus for generating a physical effect |
CA2946133A1 (en) * | 2014-04-18 | 2015-10-22 | Butterfly Network, Inc. | Ultrasonic transducers in complementary metal oxide semiconductor (cmos) wafers and related apparatus and methods |
DE102014106220B4 (en) | 2014-05-05 | 2020-06-18 | Tdk Corporation | Sensor component with two sensor functions |
US9067779B1 (en) | 2014-07-14 | 2015-06-30 | Butterfly Network, Inc. | Microfabricated ultrasonic transducers and related apparatus and methods |
GB2528872B (en) * | 2014-07-31 | 2018-10-31 | Cirrus Logic Int Semiconductor Ltd | Integrated MEMS transducer and circuitry |
GB2549876A (en) * | 2014-12-23 | 2017-11-01 | Cirrus Logic Int Semiconductor Ltd | Mems transducer package |
US9862600B2 (en) | 2015-05-21 | 2018-01-09 | Ams International Ag | Chip structure |
US10433067B2 (en) | 2015-07-22 | 2019-10-01 | Audio Pixels Ltd. | DSR speaker elements and methods of manufacturing thereof |
US10567883B2 (en) | 2015-07-22 | 2020-02-18 | Audio Pixels Ltd. | Piezo-electric actuators |
US9987661B2 (en) | 2015-12-02 | 2018-06-05 | Butterfly Network, Inc. | Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods |
GB2547729B (en) * | 2016-02-29 | 2020-01-22 | Cirrus Logic Int Semiconductor Ltd | Integrated MEMS transducer and circuitry |
US10358340B2 (en) * | 2016-04-28 | 2019-07-23 | Globalfoundries Singapore Pte. Ltd. | Integrated circuits having shielded MEMS devices and methods for fabricating shielded MEMS devices |
DE102016123130B4 (en) | 2016-11-30 | 2020-12-10 | Infineon Technologies Austria Ag | MEMS device and method of making a MEMS device |
US10196261B2 (en) | 2017-03-08 | 2019-02-05 | Butterfly Network, Inc. | Microfabricated ultrasonic transducers and related apparatus and methods |
GB2561403A (en) * | 2017-04-13 | 2018-10-17 | Cirrus Logic Int Semiconductor Ltd | MEMS Device |
WO2018236956A1 (en) | 2017-06-21 | 2018-12-27 | Butterfly Network, Inc. | Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections |
CN108666412A (en) * | 2018-05-31 | 2018-10-16 | 歌尔股份有限公司 | A kind of MEMS microphone and baroceptor integrated morphology and preparation method thereof |
CN110248288A (en) * | 2019-06-11 | 2019-09-17 | 东莞泉声电子有限公司 | Compound horn diaphragm and preparation method thereof |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6012336A (en) * | 1995-09-06 | 2000-01-11 | Sandia Corporation | Capacitance pressure sensor |
US6140689A (en) * | 1996-11-22 | 2000-10-31 | Siemens Aktiengesellschaft | Micromechanical sensor |
US20020135708A1 (en) * | 2001-03-23 | 2002-09-26 | Koninklijke Philips Electronics N.V. | Display substrate and display device |
US20030210799A1 (en) * | 2002-05-10 | 2003-11-13 | Gabriel Kaigham J. | Multiple membrane structure and method of manufacture |
US20060205106A1 (en) * | 2005-02-25 | 2006-09-14 | Hiroshi Fukuda | Integrated micro electro-mechanical system and manufacturing method thereof |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5717631A (en) | 1995-07-21 | 1998-02-10 | Carnegie Mellon University | Microelectromechanical structure and process of making same |
KR20010072390A (en) * | 1998-08-11 | 2001-07-31 | 추후제출 | Micromechanical sensor and corresponding production method |
US6829131B1 (en) | 1999-09-13 | 2004-12-07 | Carnegie Mellon University | MEMS digital-to-acoustic transducer with error cancellation |
US6987859B2 (en) * | 2001-07-20 | 2006-01-17 | Knowles Electronics, Llc. | Raised microstructure of silicon based device |
JP2002131161A (en) * | 2000-10-27 | 2002-05-09 | Denso Corp | Semiconductor pressure sensor |
US6472243B2 (en) * | 2000-12-11 | 2002-10-29 | Motorola, Inc. | Method of forming an integrated CMOS capacitive pressure sensor |
GB2443756B (en) | 2006-02-24 | 2010-03-17 | Wolfson Microelectronics Plc | MEMS device |
GB0605576D0 (en) | 2006-03-20 | 2006-04-26 | Oligon Ltd | MEMS device |
DE102006022378A1 (en) * | 2006-05-12 | 2007-11-22 | Robert Bosch Gmbh | Method for producing a micromechanical component and micromechanical component |
-
2009
- 2009-02-13 GB GB0902479A patent/GB2467776A/en not_active Withdrawn
-
2010
- 2010-02-12 WO PCT/GB2010/050233 patent/WO2010092399A2/en active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6012336A (en) * | 1995-09-06 | 2000-01-11 | Sandia Corporation | Capacitance pressure sensor |
US6140689A (en) * | 1996-11-22 | 2000-10-31 | Siemens Aktiengesellschaft | Micromechanical sensor |
US20020135708A1 (en) * | 2001-03-23 | 2002-09-26 | Koninklijke Philips Electronics N.V. | Display substrate and display device |
US20030210799A1 (en) * | 2002-05-10 | 2003-11-13 | Gabriel Kaigham J. | Multiple membrane structure and method of manufacture |
US20060205106A1 (en) * | 2005-02-25 | 2006-09-14 | Hiroshi Fukuda | Integrated micro electro-mechanical system and manufacturing method thereof |
Also Published As
Publication number | Publication date |
---|---|
GB0902479D0 (en) | 2009-04-01 |
GB2467776A8 (en) | 2010-09-01 |
GB2467776A (en) | 2010-08-18 |
WO2010092399A2 (en) | 2010-08-19 |
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