WO2010132591A3 - Pecvd coating using an organosilicon precursor - Google Patents

Pecvd coating using an organosilicon precursor Download PDF

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Publication number
WO2010132591A3
WO2010132591A3 PCT/US2010/034586 US2010034586W WO2010132591A3 WO 2010132591 A3 WO2010132591 A3 WO 2010132591A3 US 2010034586 W US2010034586 W US 2010034586W WO 2010132591 A3 WO2010132591 A3 WO 2010132591A3
Authority
WO
WIPO (PCT)
Prior art keywords
organosilicon precursor
coating
plasma
generating
setting
Prior art date
Application number
PCT/US2010/034586
Other languages
French (fr)
Other versions
WO2010132591A2 (en
Inventor
John T. Felts
Thomas E. Fisk
Robert S. Abrams
Robert J. Pangborn
Peter J. Sagona
Original Assignee
Cv Holdings, Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to KR1020117028718A priority Critical patent/KR101823159B1/en
Priority to NZ596239A priority patent/NZ596239A/en
Priority to CN201080029199.0A priority patent/CN102459693B/en
Priority to AU2010249033A priority patent/AU2010249033B2/en
Priority to KR1020187001918A priority patent/KR102003651B1/en
Priority to MX2011012038A priority patent/MX345403B/en
Priority to SG2011083086A priority patent/SG176008A1/en
Priority to CA2761872A priority patent/CA2761872C/en
Priority claimed from EP10162760.2A external-priority patent/EP2251454B1/en
Priority to RU2011150499/02A priority patent/RU2550452C2/en
Priority to BRPI1012173-0A priority patent/BRPI1012173B1/en
Priority to JP2012510983A priority patent/JP2012526922A/en
Application filed by Cv Holdings, Llc filed Critical Cv Holdings, Llc
Publication of WO2010132591A2 publication Critical patent/WO2010132591A2/en
Publication of WO2010132591A3 publication Critical patent/WO2010132591A3/en
Priority to CA2799213A priority patent/CA2799213C/en
Priority to US13/697,048 priority patent/US20130209766A1/en
Priority to CN201180023474.2A priority patent/CN102917805B/en
Priority to PCT/US2011/036097 priority patent/WO2011143329A2/en
Priority to JP2013510276A priority patent/JP6196152B2/en
Priority to EP11731554.9A priority patent/EP2579996B1/en
Priority to IL215914A priority patent/IL215914A/en
Priority to ZA2011/07835A priority patent/ZA201107835B/en
Priority to HK12110441.0A priority patent/HK1169840A1/en
Priority to IL254215A priority patent/IL254215B/en
Priority to US16/518,480 priority patent/US11624115B2/en
Priority to US18/298,127 priority patent/US20230383409A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/178—Syringes
    • A61M5/31—Details
    • A61M5/3129—Syringe barrels
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/178—Syringes
    • A61M5/31—Details
    • A61M5/3129—Syringe barrels
    • A61M2005/3131—Syringe barrels specially adapted for improving sealing or sliding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/90—Investigating the presence of flaws or contamination in a container or its contents
    • G01N21/9072—Investigating the presence of flaws or contamination in a container or its contents with illumination or detection from inside the container
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/90—Investigating the presence of flaws or contamination in a container or its contents
    • G01N21/9081—Inspection especially designed for plastic containers, e.g. preforms

Abstract

A method for coating a substrate surface by PECVD is provided, the method comprising generating a plasma from a gaseous reactant comprising an organosilicon precursor and optionally O2. The lubricity, hydrophobicity and/or barrier properties of the coating are set by setting the ratio of the O2 to the organosilicon precursor in the gaseous reactant, and/or by setting the electric power used for generating the plasma. In particular, a lubricity coating made by said method is provided. Vessels coated by said method and the use of such vessels protecting a compound or composition contained or received in said coated vessel against mechanical and/or chemical effects of the surface of the uncoated vessel material are also provided.
PCT/US2010/034586 2009-05-13 2010-05-12 Pecvd coating using an organosilicon precursor WO2010132591A2 (en)

Priority Applications (23)

Application Number Priority Date Filing Date Title
SG2011083086A SG176008A1 (en) 2009-05-13 2010-05-12 Pecvd coating using an organosilicon precursor
CN201080029199.0A CN102459693B (en) 2009-05-13 2010-05-12 Use the PECVD coating of organosilicon precursor
AU2010249033A AU2010249033B2 (en) 2009-05-13 2010-05-12 PECVD coating using an organosilicon precursor
KR1020187001918A KR102003651B1 (en) 2009-05-13 2010-05-12 Pecvd coating using an organosilicon precursor
MX2011012038A MX345403B (en) 2009-05-13 2010-05-12 Pecvd coating using an organosilicon precursor.
KR1020117028718A KR101823159B1 (en) 2009-05-13 2010-05-12 Pecvd coating using an organosilicon precursor
CA2761872A CA2761872C (en) 2009-05-13 2010-05-12 Pecvd coating using an organosilicon precursor
NZ596239A NZ596239A (en) 2009-05-13 2010-05-12 Pecvd coating using an organosilicon precursor
RU2011150499/02A RU2550452C2 (en) 2009-05-13 2010-05-12 Pecvd-coating with application of organosilicon precursor
BRPI1012173-0A BRPI1012173B1 (en) 2009-05-13 2010-05-12 methods for preparing a lubricity coating on a plastic substrate surface, lubricity coating and coated vessel
JP2012510983A JP2012526922A (en) 2009-05-13 2010-05-12 PECVD coating using organosilicon precursor
CA2799213A CA2799213C (en) 2010-05-12 2011-05-11 Method and apparatus for preparing a lubricity vessel coating
EP11731554.9A EP2579996B1 (en) 2010-05-12 2011-05-11 Lubricity vessel coating process
JP2013510276A JP6196152B2 (en) 2010-05-12 2011-05-11 Lubricating container covering, covering treatment and equipment
PCT/US2011/036097 WO2011143329A2 (en) 2010-05-12 2011-05-11 Lubricity vessel coating, coating process and apparatus
US13/697,048 US20130209766A1 (en) 2009-05-13 2011-05-11 Lubricity vessel coating, coating process and apparatus
CN201180023474.2A CN102917805B (en) 2010-05-12 2011-05-11 Lubricity container coating, painting method and equipment
IL215914A IL215914A (en) 2009-05-13 2011-10-25 Pecvd coating using an organosilicon precursor
ZA2011/07835A ZA201107835B (en) 2009-05-13 2011-10-26 Pecvd coating using an organosilicon precursor
HK12110441.0A HK1169840A1 (en) 2009-05-13 2012-10-19 Pecvd coating using an organosilicon precursor pecvd
IL254215A IL254215B (en) 2009-05-13 2017-08-29 Syringe with a coated pevcd lubricity layer
US16/518,480 US11624115B2 (en) 2010-05-12 2019-07-22 Syringe with PECVD lubrication
US18/298,127 US20230383409A1 (en) 2010-05-12 2023-04-10 Syringe with pecvd lubrication

Applications Claiming Priority (34)

Application Number Priority Date Filing Date Title
US17798409P 2009-05-13 2009-05-13
US61/177,984 2009-05-13
US22272709P 2009-07-02 2009-07-02
US61/222,727 2009-07-02
US21390409P 2009-07-24 2009-07-24
US61/213,904 2009-07-24
US23450509P 2009-08-17 2009-08-17
US61/234,505 2009-08-17
US26132109P 2009-11-14 2009-11-14
US61/261,321 2009-11-14
US26328909P 2009-11-20 2009-11-20
US61/263,289 2009-11-20
US28581309P 2009-12-11 2009-12-11
US61/285,813 2009-12-11
US29815910P 2010-01-25 2010-01-25
US61/298,159 2010-01-25
US29988810P 2010-01-29 2010-01-29
US61/299,888 2010-01-29
US31819710P 2010-03-26 2010-03-26
US61/318,197 2010-03-26
US33362510P 2010-05-11 2010-05-11
US61/333,625 2010-05-11
EP10162760.2 2010-05-12
EP10162755.2 2010-05-12
EP10162756.0 2010-05-12
EP10162760.2A EP2251454B1 (en) 2009-05-13 2010-05-12 Vessel coating and inspection
EP10162757.8 2010-05-12
EP10162756.0A EP2251452B1 (en) 2009-05-13 2010-05-12 Pecvd apparatus for vessel coating
EP10162757.8A EP2251453B1 (en) 2009-05-13 2010-05-12 Vessel holder
EP10162758.6 2010-05-12
EP10162761.0 2010-05-12
EP10162761.0A EP2251455B1 (en) 2009-05-13 2010-05-12 PECVD coating using an organosilicon precursor
EP10162755.2A EP2253735B1 (en) 2009-05-13 2010-05-12 Vessel processing
EP10162758.6A EP2251671B1 (en) 2009-05-13 2010-05-12 Outgassing method for inspecting a coated surface

Related Child Applications (4)

Application Number Title Priority Date Filing Date
US12/779,007 Continuation-In-Part US7985188B2 (en) 2009-05-13 2010-05-12 Vessel, coating, inspection and processing apparatus
US12/779,007 Continuation US7985188B2 (en) 2009-05-13 2010-05-12 Vessel, coating, inspection and processing apparatus
PCT/US2011/036097 Continuation-In-Part WO2011143329A2 (en) 2009-05-13 2011-05-11 Lubricity vessel coating, coating process and apparatus
US13/697,048 Continuation-In-Part US20130209766A1 (en) 2009-05-13 2011-05-11 Lubricity vessel coating, coating process and apparatus

Publications (2)

Publication Number Publication Date
WO2010132591A2 WO2010132591A2 (en) 2010-11-18
WO2010132591A3 true WO2010132591A3 (en) 2011-05-05

Family

ID=43085958

Family Applications (6)

Application Number Title Priority Date Filing Date
PCT/US2010/034576 WO2010132584A2 (en) 2009-05-13 2010-05-12 Vessel holder
PCT/US2010/034568 WO2010132579A2 (en) 2009-05-13 2010-05-12 Vessel processing
PCT/US2010/034571 WO2010132581A2 (en) 2009-05-13 2010-05-12 Vessel coating and inspection
PCT/US2010/034582 WO2010132589A2 (en) 2009-01-25 2010-05-12 Outgassing method for inspecting a coated surface
PCT/US2010/034586 WO2010132591A2 (en) 2009-05-13 2010-05-12 Pecvd coating using an organosilicon precursor
PCT/US2010/034577 WO2010132585A2 (en) 2009-05-13 2010-05-12 Vessel processing

Family Applications Before (4)

Application Number Title Priority Date Filing Date
PCT/US2010/034576 WO2010132584A2 (en) 2009-05-13 2010-05-12 Vessel holder
PCT/US2010/034568 WO2010132579A2 (en) 2009-05-13 2010-05-12 Vessel processing
PCT/US2010/034571 WO2010132581A2 (en) 2009-05-13 2010-05-12 Vessel coating and inspection
PCT/US2010/034582 WO2010132589A2 (en) 2009-01-25 2010-05-12 Outgassing method for inspecting a coated surface

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/US2010/034577 WO2010132585A2 (en) 2009-05-13 2010-05-12 Vessel processing

Country Status (3)

Country Link
KR (2) KR102003651B1 (en)
SG (2) SG176011A1 (en)
WO (6) WO2010132584A2 (en)

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US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US9572526B2 (en) 2009-05-13 2017-02-21 Sio2 Medical Products, Inc. Apparatus and method for transporting a vessel to and from a PECVD processing station

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CA2805668C (en) * 2010-07-16 2020-01-28 Cv Holdings, Llc Injection molding process and product produced using the same
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
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US10325773B2 (en) 2012-06-12 2019-06-18 Novellus Systems, Inc. Conformal deposition of silicon carbide films
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WO2014078666A1 (en) 2012-11-16 2014-05-22 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
JP6382830B2 (en) 2012-11-30 2018-08-29 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド Uniformity control of PECVD deposition on medical syringes, cartridges, etc.
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US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
KR102167557B1 (en) * 2013-03-11 2020-10-20 에스아이오2 메디컬 프로덕츠, 인크. Coated Packaging
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WO2015132444A1 (en) 2014-03-03 2015-09-11 Picosun Oy Protecting an interior of a hollow body with an ald coating
SG11201605837TA (en) 2014-03-03 2016-08-30 Picosun Oy Protecting an interior of a gas container with an ald coating
US11066745B2 (en) 2014-03-28 2021-07-20 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
US9327079B2 (en) * 2014-10-06 2016-05-03 ZebraSci, Inc Syringe barrel lubricant coverage quality control
US10569028B2 (en) * 2014-11-05 2020-02-25 Insuline Medical Ltd. Drug tracking device
KR101639378B1 (en) * 2015-06-19 2016-07-13 성균관대학교산학협력단 Hydrophobic thin film for bacteria-repelling, and preparing method of the same
CA3204930A1 (en) 2015-08-18 2017-02-23 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate
EP3377565B1 (en) * 2015-11-16 2020-12-23 SiO2 Medical Products, Inc. Polymeric substrate with a surface having reduced biomolecule adhesion, and thermoplastic articles of such substrate
US11833333B2 (en) 2017-07-12 2023-12-05 Insuline Medical Ltd Drug tracking device
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US11848199B2 (en) 2018-10-19 2023-12-19 Lam Research Corporation Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill
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