WO2012018783A3 - System and method for fabricating thin-film photovoltaic devices - Google Patents

System and method for fabricating thin-film photovoltaic devices Download PDF

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Publication number
WO2012018783A3
WO2012018783A3 PCT/US2011/046224 US2011046224W WO2012018783A3 WO 2012018783 A3 WO2012018783 A3 WO 2012018783A3 US 2011046224 W US2011046224 W US 2011046224W WO 2012018783 A3 WO2012018783 A3 WO 2012018783A3
Authority
WO
WIPO (PCT)
Prior art keywords
film
content
indium
photovoltaic devices
film photovoltaic
Prior art date
Application number
PCT/US2011/046224
Other languages
French (fr)
Other versions
WO2012018783A2 (en
Inventor
Piero Sferlazzo
Thomas Michael Lampros
Michael R. Mitrano
Original Assignee
Aventa Technologies Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US12/850,939 external-priority patent/US20120034764A1/en
Priority claimed from US13/101,538 external-priority patent/US20120034733A1/en
Application filed by Aventa Technologies Llc filed Critical Aventa Technologies Llc
Publication of WO2012018783A2 publication Critical patent/WO2012018783A2/en
Publication of WO2012018783A3 publication Critical patent/WO2012018783A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264—Inorganic materials
    • H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
    • H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
    • H01L31/206—Particular processes or apparatus for continuous treatment of the devices, e.g. roll-to roll processes, multi-chamber deposition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/60—Heavy metals or heavy metal compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/541—CuInSe2 material PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Abstract

Described are embodiments of methods and systems for depositing a film on a web substrate or a discrete substrate. The deposition of the film may be part of a fabrication process for a photovoltaic device. Also disclosed are embodiments of vapor traps that can be used in such deposition systems and of depositing a copper indium gallium diselenide film. In some embodiments, the content of indium and the content of gallium along the thickness of the deposited film are varied to achieve desired content gradients. In various embodiments, the incremental layers within the film are deposited in a manner to reduce or eliminate indium depletion.
PCT/US2011/046224 2010-08-05 2011-08-02 System and method for fabricating thin-film photovoltaic devices WO2012018783A2 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US12/850,939 2010-08-05
US12/850,939 US20120034764A1 (en) 2010-08-05 2010-08-05 System and method for fabricating thin-film photovoltaic devices
US13/101,538 2011-05-05
US13/101,538 US20120034733A1 (en) 2010-08-05 2011-05-05 System and method for fabricating thin-film photovoltaic devices
US13/173,100 2011-06-30
US13/173,100 US20120031604A1 (en) 2010-08-05 2011-06-30 System and method for fabricating thin-film photovoltaic devices

Publications (2)

Publication Number Publication Date
WO2012018783A2 WO2012018783A2 (en) 2012-02-09
WO2012018783A3 true WO2012018783A3 (en) 2012-05-03

Family

ID=45555230

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2011/046224 WO2012018783A2 (en) 2010-08-05 2011-08-02 System and method for fabricating thin-film photovoltaic devices

Country Status (2)

Country Link
US (1) US20120031604A1 (en)
WO (1) WO2012018783A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9303316B1 (en) * 2010-01-15 2016-04-05 Apollo Precision Kunming Yuanhong Limited Continuous web apparatus and method using an air to vacuum seal and accumulator
US9112095B2 (en) 2012-12-14 2015-08-18 Intermolecular, Inc. CIGS absorber formed by co-sputtered indium
CN103451615B (en) * 2013-05-13 2015-12-02 辽宁北宇真空科技有限公司 A kind of continuous reeling vaccum ion coater preparing thin-film type capacitance negative pole carbon paper tinsel
US20170167028A1 (en) * 2014-06-17 2017-06-15 NuvoSun, Inc. Selenization or sulfurization method of roll to roll metal substrates
CN107142452B (en) * 2017-04-27 2019-07-23 柳州豪祥特科技有限公司 The magnetron sputtering that can be improved quality of forming film prepares the system of ito thin film

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6048442A (en) * 1996-10-25 2000-04-11 Showa Shell Sekiyu K.K. Method for producing thin-film solar cell and equipment for producing the same
US20090258476A1 (en) * 2008-04-15 2009-10-15 Global Solar Energy, Inc. Apparatus and methods for manufacturing thin-film solar cells
US20100186812A1 (en) * 2008-11-25 2010-07-29 First Solar, Inc. Photovoltaic devices including copper indium gallium selenide

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6488745B2 (en) * 2001-03-23 2002-12-03 Mks Instruments, Inc. Trap apparatus and method for condensable by-products of deposition reactions

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6048442A (en) * 1996-10-25 2000-04-11 Showa Shell Sekiyu K.K. Method for producing thin-film solar cell and equipment for producing the same
US20090258476A1 (en) * 2008-04-15 2009-10-15 Global Solar Energy, Inc. Apparatus and methods for manufacturing thin-film solar cells
US20100186812A1 (en) * 2008-11-25 2010-07-29 First Solar, Inc. Photovoltaic devices including copper indium gallium selenide

Also Published As

Publication number Publication date
US20120031604A1 (en) 2012-02-09
WO2012018783A2 (en) 2012-02-09

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