WO2012039817A3 - Sealed substrate carrier for electroplating - Google Patents

Sealed substrate carrier for electroplating Download PDF

Info

Publication number
WO2012039817A3
WO2012039817A3 PCT/US2011/043573 US2011043573W WO2012039817A3 WO 2012039817 A3 WO2012039817 A3 WO 2012039817A3 US 2011043573 W US2011043573 W US 2011043573W WO 2012039817 A3 WO2012039817 A3 WO 2012039817A3
Authority
WO
WIPO (PCT)
Prior art keywords
electroplating
substrate carrier
conductive
carrier body
sealed substrate
Prior art date
Application number
PCT/US2011/043573
Other languages
French (fr)
Other versions
WO2012039817A2 (en
Inventor
Kalyana Bhargava Ganti
Original Assignee
Sunpower Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US12/889,232 external-priority patent/US8221601B2/en
Priority claimed from US12/889,228 external-priority patent/US8221600B2/en
Priority claimed from US12/889,219 external-priority patent/US8317987B2/en
Application filed by Sunpower Corporation filed Critical Sunpower Corporation
Publication of WO2012039817A2 publication Critical patent/WO2012039817A2/en
Publication of WO2012039817A3 publication Critical patent/WO2012039817A3/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/06—Suspending or supporting devices for articles to be coated
    • C25D17/08—Supporting racks, i.e. not for suspending
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/005—Contacting devices
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/007—Current directing devices

Abstract

One embodiment relates to a substrate carrier for use in electroplating a plurality of substrates. The substrate carrier includes a non-conductive carrier body (102 and 202) on which the substrates are held, and conductive lines (128) are embedded within the carrier body. A conductive bus bar (120) is embedded into a top side of the carrier body and is conductively coupled to the conductive lines. A thermoplastic overmold (602) covers a portion of the bus bar, and there is a plastic-to-plastic bond (see 732) between the thermoplastic overmold and the non-conductive carrier body. Other embodiments, aspects and features are also disclosed.
PCT/US2011/043573 2010-09-23 2011-07-11 Sealed substrate carrier for electroplating WO2012039817A2 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US12/889,232 2010-09-23
US12/889,232 US8221601B2 (en) 2010-09-23 2010-09-23 Maintainable substrate carrier for electroplating
US12/889,219 2010-09-23
US12/889,228 2010-09-23
US12/889,228 US8221600B2 (en) 2010-09-23 2010-09-23 Sealed substrate carrier for electroplating
US12/889,219 US8317987B2 (en) 2010-09-23 2010-09-23 Non-permeable substrate carrier for electroplating

Publications (2)

Publication Number Publication Date
WO2012039817A2 WO2012039817A2 (en) 2012-03-29
WO2012039817A3 true WO2012039817A3 (en) 2014-03-20

Family

ID=45874099

Family Applications (3)

Application Number Title Priority Date Filing Date
PCT/US2011/043576 WO2012039818A1 (en) 2010-09-23 2011-07-11 Maintainable substrate carrier for electroplating
PCT/US2011/043573 WO2012039817A2 (en) 2010-09-23 2011-07-11 Sealed substrate carrier for electroplating
PCT/US2011/043571 WO2012039816A1 (en) 2010-09-23 2011-07-11 Non-permeable substrate carrier for electroplating

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/US2011/043576 WO2012039818A1 (en) 2010-09-23 2011-07-11 Maintainable substrate carrier for electroplating

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/US2011/043571 WO2012039816A1 (en) 2010-09-23 2011-07-11 Non-permeable substrate carrier for electroplating

Country Status (6)

Country Link
EP (2) EP2619349B1 (en)
JP (2) JP5792820B2 (en)
KR (2) KR101828394B1 (en)
CN (2) CN203307439U (en)
ES (1) ES2605805T3 (en)
WO (3) WO2012039818A1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4297197A (en) * 1980-11-13 1981-10-27 International Telephone And Telegraph Corp. Electroplating rack
US20050061665A1 (en) * 2003-08-06 2005-03-24 Sunpower Corporation Substrate carrier for electroplating solar cells
US20060272951A1 (en) * 2005-04-27 2006-12-07 Enthone Inc. Electroplating process and composition
USRE40218E1 (en) * 1998-04-21 2008-04-08 Uziel Landau Electro-chemical deposition system and method of electroplating on substrates

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4796157A (en) * 1988-01-04 1989-01-03 Motorola, Inc. Substrate mounting assembly
US5078852A (en) * 1990-10-12 1992-01-07 Microelectronics And Computer Technology Corporation Plating rack
JP2001234397A (en) * 2000-02-24 2001-08-31 Matsushita Electric Works Ltd Electroplating jig
JP3413185B2 (en) * 2000-11-15 2003-06-03 古河電気工業株式会社 Jig for plating
US7930006B2 (en) * 2004-09-08 2011-04-19 Belkin International, Inc. Holder, electrical supply, and RF transmitter unit for electronic devices
US20080248596A1 (en) * 2007-04-04 2008-10-09 Endicott Interconnect Technologies, Inc. Method of making a circuitized substrate having at least one capacitor therein
DE102005039100A1 (en) * 2005-08-09 2007-02-15 Gebr. Schmid Gmbh & Co. Device for holding or holding a plurality of substrates and electroplating device
US7718888B2 (en) * 2005-12-30 2010-05-18 Sunpower Corporation Solar cell having polymer heterojunction contacts
WO2009042669A1 (en) * 2007-09-24 2009-04-02 Chemical Specialties Manufacturing Corp. Cleaning device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4297197A (en) * 1980-11-13 1981-10-27 International Telephone And Telegraph Corp. Electroplating rack
USRE40218E1 (en) * 1998-04-21 2008-04-08 Uziel Landau Electro-chemical deposition system and method of electroplating on substrates
US20050061665A1 (en) * 2003-08-06 2005-03-24 Sunpower Corporation Substrate carrier for electroplating solar cells
US20060272951A1 (en) * 2005-04-27 2006-12-07 Enthone Inc. Electroplating process and composition

Also Published As

Publication number Publication date
ES2605805T3 (en) 2017-03-16
WO2012039817A2 (en) 2012-03-29
WO2012039818A1 (en) 2012-03-29
EP2619349A4 (en) 2016-01-27
CN203795007U (en) 2014-08-27
JP6080320B2 (en) 2017-02-15
KR20130121704A (en) 2013-11-06
CN203307439U (en) 2013-11-27
EP3150748B1 (en) 2018-05-09
KR101764275B1 (en) 2017-08-03
EP2619349B1 (en) 2016-11-09
JP2013537941A (en) 2013-10-07
KR20170091755A (en) 2017-08-09
JP5792820B2 (en) 2015-10-14
EP3150748A1 (en) 2017-04-05
EP2619349A1 (en) 2013-07-31
JP2016014192A (en) 2016-01-28
WO2012039816A1 (en) 2012-03-29
KR101828394B1 (en) 2018-02-12

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