WO2012055133A1

WO2012055133A1 - Method for configuring recipe editor of integrated circuit (ic) equipments

Info

Publication number: WO2012055133A1
Application number: PCT/CN2010/080086
Authority: WO
Inventors: 康凯; 王宏; 张彦武; 林跃; 姜军; 张萌; 周建辉; 唐达鼎; 张锐
Original assignee: 沈阳中科博微自动化技术有限公司
Priority date: 2010-10-27
Filing date: 2010-12-22
Publication date: 2012-05-03
Also published as: CN102456084A

Abstract

A method for configuring a recipe editor of integrated circuit (IC) equipments includes the following steps: the configuration window of the recipe editor is started; the configuration information of the IC equipment recipes is configured in the configuration window and saved as a configuration file; the recipe editor is restarted, and the information in the configuration file is read automatically; and according to the read information in the configuration file, the recipe editor resets the structure of the recipe editor, and generates the recipe edit interface of the recipe editor. The method allows the user to configure the recipe editor effectively without modifying the code, can accomplish the configuration of the table structure of the recipe editor, such as accomplishing the parent-child relation of the parameters and the flexible split of the cells, and also can associate the recipe editor with different configuration files according to different recipe types, so as to accomplish multiple configurations of the recipe editor.

Description

IC equipment recipe editor configuration method

The present invention relates to an editor configuration technique, and more particularly to a method of configuring an IC equipment recipe editor. Background technique

The IC (integrated circuit) industry is a highly specialized industry. The production process of general IC equipment is very complicated, and its formulation is more complicated than other industries. When designing a recipe editor, it is often necessary to change the content and structure of the recipe according to different applicable environments, so the flexibility of the recipe editor design becomes a problem for IC software developers.

The conventional recipe editor is a fixed form of editor whose flexibility is greatly limited. Some recipe editors can configure their contents through configuration files in the IC software, but they are not flexible enough to configure the specific structure of the recipe editor, such as the table structure. If you need to make major changes to the recipe structure, you need to modify the program code of the recipe editor in the IC software, which is very cumbersome. This not only increases the complexity of the customer's modified recipe structure, but sometimes requires the designer to modify the program and increase development costs. At the same time, the complexity of the secondary development is increased by redesigning the structure of the recipe editor for each development. Summary of the invention

In view of the insufficiency of the complexity of the recipe editor of the IC equipment existing in the prior art, such as lack of flexibility, the technical problem to be solved by the present invention is to provide a flexible configuration of the recipe editor, saving The configuration method of the IC equipment recipe editor that configures the time and improves the efficiency of production and maintenance.

In order to solve the above technical problems, the technical solution adopted by the present invention is:

The method for configuring an IC equipment recipe editor of the present invention comprises the following steps:

Start the configuration form in the recipe editor;

Configure the configuration information in the IC equipment recipe in the configuration form and save it as a configuration file; restart the recipe editor to automatically read the information in the above configuration file;

The recipe editor resets the recipe editor's recipe editing interface based on the read profile information and the structure of the recipe editor.

The configuration information includes: a data type, file information, parameter information, nested relationship information, and recipe editor structure information.

The Recipe Editor reads configuration file information and resets the structure of the Recipe Editor, including the following steps:

Write configuration file information to memory;

Determine whether the configuration information is valid, and if valid, re-allocate the structure of the recipe editor according to the configuration information in the memory;

If it is invalid, the allocation of the recipe editor structure is stopped.

The method further includes reading the recipe file in the IC equipment software and filling the recipe editor data, specifically: reading the recipe file in the IC equipment software and writing the information in the recipe file into the memory;

Compare the in-memory recipe file information with the recipe editor structure. If it matches, use the recipe. The editor edits the recipe file;

If it does not match, exit the recipe editor.

The determining whether the configuration information is valid includes the following steps:

Read the configuration file to obtain each child node under the total node of the configuration file;

Determine whether each type of information corresponding to each child node in the configuration file exists. If it exists, it traverses its child nodes and writes various types of information into the memory. Otherwise, it stops reading and sends an error report.

The configuration file is saved in an XML format; the internal structure of the configuration file includes a plurality of nodes, and the name and attribute of each node in the configuration file are set according to a customized series of rules, thereby configuring the configuration file information.

The structure of the recipe editor is in the form of a table, and the structure of the table is configured using the information of the configuration file. Configure the configuration information in the IC equipment recipe in the configuration form as follows: Edit the various types of information in the configuration information in the configuration form, and obtain the edited various configuration information and store it in the memory.

1. Easy to use. The configuration file of the present invention uses the defined format as the identifier of the node, and uses different levels of nodes to describe the configuration of different recipe information, and the data type can be customized through the configuration file, so that the user can formulate the recipe without modifying the code. The editor is configured efficiently.

2. Powerful. Although the configuration function has been used in many fields, the conventional configuration simply configures some parameters and cannot configure the structure of the editor. The invention can realize the configuration of the structure of the form of the recipe editor, such as the father-child relationship of the realization parameters, and the flexible splitting of the cells.

3. Strong scalability. A configuration file can be modified to become a new configuration file. It is also possible to associate the recipe editor to different profiles for different recipe types, enabling multiple configurations of the recipe editor. DRAWINGS

1 is a flow chart of restarting a recipe editor and automatically reading the above configuration file in the method of the present invention; FIG. 2 is a flow chart for determining whether configuration information is valid in the method of the present invention;

3 is a flow chart of a configuration form program in the method of the present invention;

Figure 4 is a schematic diagram of the parameter parent-child relationship when the parameter name is the head of the list;

FIG. 5 is a schematic diagram of defining a configuration file in an embodiment of the present invention;

Figure 6 is an editing interface of the recipe editor obtained by applying the method of the present invention. detailed description

In order to solve the problem that the flexibility of the recipe editor is not strong, the present invention provides a method for configuring the recipe editor, that is, a configuration method of the IC equipment recipe editor, which can realize flexible configuration of the recipe editor.

The main steps used in the method of the invention are as follows:

Start the configuration form in the recipe editor;

The configuration information includes data type, file information, parameter information, nested relationship information, and recipe editing. Device structure information.

As shown in Figure 1, the process of restarting the Recipe Editor and automatically reading the above configuration file information is as follows: Write the configuration file information into the memory;

If it is invalid, the recipe editor structure is stopped and a prompt pops up.

As shown in FIG. 2, whether the above configuration information is valid is:

Read the configuration file to obtain each child node under the profile node Recipe;

Restarting the Recipe Editor and automatically reading the above configuration file information also includes the steps of reading the recipe file and filling the Recipe Editor data in the IC equipment software, 艮卩:

Reading the recipe file in the IC equipment software and writing the information in the recipe file into the memory;

Compare the in-memory recipe file information with the recipe editor structure. If it matches, use the recipe editor to edit the recipe file; otherwise, report the error message and exit the recipe editor.

The configuration file is saved in XML format, and XML (extensible Markup Language) can be used to extend the markup language. It is HTML-like and is in SGML, the standard common language. Xml is a cross-platform, content-dependent technology in the Internet environment that is a powerful tool for processing structured document information. Extended Markup Language XML is a simple data storage language that uses a series of simple tags to describe data that can be built in a convenient way. Although XML takes up more space than binary data, XML is extremely Simple and easy to master and use.

The structure of the recipe editor is in the form of a table, and the structure of the table is configured using the information of the configuration file. As shown in Figure 3, the configuration information in the IC equipment recipe is configured in the configuration form and saved as a configuration file. The process is as follows:

Load configuration information from the configuration file into memory;

Determine whether the above configuration information is valid. If it is valid, the data in the configuration information is filled into the configuration form; the user edits the configuration form, and saves the configuration information into the configuration file to complete the configuration process of the configuration form.

If the operation of saving the configuration information to the configuration file is not performed, the configuration process is exited; if the configuration information is invalid, an error message is displayed.

The configuration file configures the Recipe Editor structure as follows:

Set the parent-child relationship of each parameter of the recipe, that is, a total parameter contains several sub-parameters, which are displayed in a nested form in the formula editor table, as shown in Figure 4.

:

</DocumentInfo>

<Step>

</Step>

</Recipe>

The nested relationship information is defined in the configuration file as follows:

The parameter parent-child relationship is set by setting the "name" and "type" attributes of the parameter node. If you want to set a parameter as a parent parameter, you must first set its "type" attribute to "GROUP". Simultaneously Set its "subitem" attribute to a constant indicating the number of sub-parameters under the parent parameter;

After setting the parent parameter, you need to set its child parameter after the parent node. The setting of the child parameter only needs to modify the "name" attribute of its node. The naming rule is the parent parameter name + space + sub-parameter name. The rest of the properties of the node are unchanged.

The data type is defined in the configuration file as follows:

Data types such as enumerated (ENUM) can be customized in the configuration file. As shown in the XML data, if you define a parameter as an enumeration type, you need to define the "list" attribute of the node corresponding to the parameter, and add each enumeration data in the attribute, separated by a semicolon (;). When the configuration information is read by the Recipe Editor, if the data type of a parameter is found to be an enumerated type, the "list" attribute is also read to obtain each data in the enumeration.

The Recipe Editor is in tabular form and can be configured by setting up a configuration file. Such as

As shown in the XML data, if you need to split a parameter of a cell, you need to divide a parameter into 2 parameters, and change the names of the 2 new parameters to the original parameter name + ": A" and the original parameter name + ": B ". These two parameters are independent of each other, and each attribute such as the data type of the two parameters can be set separately, so that they become two different parameters. When the formula editor reads the configuration information, if it finds the parameter name with ": A" and ": B", and the name before ":" is the same, the two parameters will be placed in the same cell. The cell is split into 2 cells, and the data of these 2 parameters are filled separately.

The definition of the configuration file in this embodiment is as shown in FIG. 5:

The configuration file is in XML format and the root node is Recipe.

The root node contains the following two sub-nodes: a file information node (DocumentInfo) and a recipe step information node (Step). These two nodes respectively contain several PARAM nodes, and the PARAM node is the bottom node of the recipe file, which is used to store the details. Configuration information.

Depending on the functions implemented in the recipe, the configuration information in the configuration file can be divided into two parts, namely the file information part and the Step information part, each of which contains several PARAM nodes. The PARAM node in the file information section is the underlying node of the recipe file, and each node contains configuration information of its corresponding file, including creation time, modification time, creator, modifier, and description; each PARAM node in the Step information part Corresponds to the configuration information of each parameter in the recipe file.

The process of applying a new recipe by applying the method of the present invention is implemented in an editor, and the steps are as follows:

After the recipe editor interface is generated, the recipe is edited on the editor interface;

The recipe information is saved as a recipe file after editing is completed.

The process of modifying the recipe using the method of the present invention is also implemented in the editor, the steps are as follows:

After generating the recipe editor interface, the recipe editor reads the recipe file to obtain recipe information; Determine whether the recipe file information matches the structure of the recipe editor. If it matches, enter the recipe editing interface for editing;

After the modification is completed, the recipe information is saved to the recipe file;

If it does not match, an error message is reported and the recipe editor is exited.

As shown in FIG. 6, the editing interface of the recipe editor obtained by applying the method of the present invention includes the following parts: The leftmost row header portion is a parameter name, and the row header can be implemented by using a nested relationship between the parent parameter and the child parameter. Nested displays, such as "End_Condition" and "Pin_Position", which contain "Mode" and

"Value" sub-parameter;

The top column header is the serial number of each Step, such as "Stepl" and "Step2";

The middle part is the parameter information corresponding to each step;

The cell of each parameter corresponds to its data type. When the parameter type is enumerated (ENUM), it will be displayed as a drop-down menu format. The option of the drop-down menu is the enumeration value in the enumeration;

You can set the split of a parameter's cells, such as "Gap", "RF_time", and "HF_power".

Claims

Claim

1. A method for configuring an ic equipment recipe editor, comprising the steps of:

Start the configuration form in the recipe editor;

2. The method of configuring an IC equipment recipe editor according to claim 1, wherein: the configuration information comprises: a data type, file information, parameter information, nesting relationship information, and recipe editor structure information.

3. The method of configuring an IC equipment recipe editor according to claim 1, wherein the recipe editor reads the configuration file information and resets the structure of the recipe editor, comprising the steps of:

Write configuration file information to memory;

Determines whether the configuration information is valid. If it is valid, the structure of the recipe editor is reassigned according to the configuration information in the memory.

4. The method of configuring an IC equipment recipe editor according to claim 3, wherein if it is invalid, the allocation of the recipe editor structure is stopped.

5. The method of configuring an IC equipment recipe editor according to claim 3, further comprising the steps of: reading a recipe file in the IC equipment software and filling the recipe editor data, specifically:

Compares the recipe file information in the memory with the structure of the recipe editor. If it matches, the recipe file is edited using the recipe editor.

6. The method of configuring an IC equipment recipe editor according to claim 5, wherein: if not, the recipe editor is exited.

7. The method of configuring an IC equipment recipe editor according to claim 3, wherein: determining whether the configuration information is valid comprises the following steps:

8. The method of configuring an IC equipment recipe editor according to claim 1, wherein: said configuration file is saved in an XML format; an internal structure of the configuration file includes a plurality of nodes, and is set according to a customized series of rules. The name and attribute of each node in the configuration file, and then the configuration file information is set.

9. The method of configuring an IC equipment recipe editor according to claim 1, wherein: the structure of the recipe editor is in the form of a table, and the table structure is configured by using information of the configuration file.

10. The method of configuring an IC equipment recipe editor according to claim 1, wherein: configuring configuration information in the IC equipment recipe in the configuration form is: editing the configuration information in the configuration form separately Various types of information, and various types of configuration information after editing are stored and stored in the memory.