WO2012078876A1 - Interconnect structure - Google Patents

Interconnect structure Download PDF

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Publication number
WO2012078876A1
WO2012078876A1 PCT/US2011/063953 US2011063953W WO2012078876A1 WO 2012078876 A1 WO2012078876 A1 WO 2012078876A1 US 2011063953 W US2011063953 W US 2011063953W WO 2012078876 A1 WO2012078876 A1 WO 2012078876A1
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WO
WIPO (PCT)
Prior art keywords
conductive
face
microelectronic assembly
dielectric material
projection
Prior art date
Application number
PCT/US2011/063953
Other languages
French (fr)
Inventor
Debabrata Gupta
Yukio Hashimoto
Ilyas Mohammed
Laura Mirkarimi
Rajesh Katkar
Original Assignee
Tessera, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tessera, Inc. filed Critical Tessera, Inc.
Priority to KR1020137017540A priority Critical patent/KR101901793B1/en
Priority to CN201180067223.4A priority patent/CN103354951B/en
Priority to EP11810921.4A priority patent/EP2649644B1/en
Priority to JP2013543342A priority patent/JP2014502057A/en
Publication of WO2012078876A1 publication Critical patent/WO2012078876A1/en

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    • H01L24/10—Bump connectors ; Manufacturing methods related thereto
    • H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/153—Connection portion
    • H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/153—Connection portion
    • H01L2924/1532—Connection portion the connection portion being formed on the die mounting surface of the substrate
    • H01L2924/15321—Connection portion the connection portion being formed on the die mounting surface of the substrate being a ball array, e.g. BGA
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/153—Connection portion
    • H01L2924/1532—Connection portion the connection portion being formed on the die mounting surface of the substrate
    • H01L2924/1533—Connection portion the connection portion being formed on the die mounting surface of the substrate the connection portion being formed both on the die mounting surface of the substrate and outside the die mounting surface of the substrate
    • H01L2924/15331—Connection portion the connection portion being formed on the die mounting surface of the substrate the connection portion being formed both on the die mounting surface of the substrate and outside the die mounting surface of the substrate being a ball array, e.g. BGA

Definitions

  • the present disclosure relates to interconnect structures used in packaged microelectronic assemblies.
  • interconnect structures used in the connection of microelectronic chips and dies to substrates, such as in flip-chip bonding, or between substrates, such as in the formation of stacked packages .
  • the structures described herein can be used to reduce failure of interconnect bonds due to void formation caused by electromigration between components of prior structures .
  • Electromigration is a main cause of interconnect failure, especially in high-performance devices where the current density in the interconnect and the device operating temperatures are high.
  • electromigration is caused by the different diffusion rates of materials used in interconnect assemblies.
  • an interconnect assembly can include a contact pad made of copper formed on each of two substrates and a solder mass bonded between the contact pads. The solder mechanically secures the two contact pads, and thus, the substrates on which they are formed, and also electronically connects the two pads so that a signal carried by an electric current can pass between the two pads through the solder mass.
  • the diffusion rates between the solder and the copper of the pads can be different. The diffusion rates are the rates of molecular movement within the metallic structures over time, and in particular, when subjected to a current or to the heat caused by operation of the devices .
  • Voids formed in interconnect structures can decrease the reliability of the microelectronic assemblies in which they are used. Further, the presence of voids increases the current density within the materials in the areas surrounding the voids. This can, in turn, further exacerbate the difference in diffusion rate, leading to acceleration of void formation, leading eventually, to both electrical and mechanical failure of the interconnect element.
  • the microelectronic assembly includes a first surface and a first thin conductive element exposed at the first surface and having a face comprising first and second regions.
  • a first conductive projection having a base connected to and covering the first region of the face extends to an end remote from the base.
  • a first dielectric material layer covers the second region of the first thin element and contacts at least the base of the first conductive projection.
  • the assembly further includes a second substrate having a second face and a second conductive projection extending away from the second face.
  • a first fusible metal mass connects the first projection to the second projection such that the first surface of the first face is oriented toward the second surface. The first mass extends along an edge of the first projection towards the first dielectric material layer. In a further embodiment, the first fusible metal mass can contact the first dielectric material layer .
  • the microelectronic assembly can be configured such that the first surface is formed on a substrate and the second surface is formed on a microelectronic element. Additionally or alternatively, the first surface can be formed on a substrate further having a microelectronic element affixed thereon, and the second surface can be formed on a second substrate.
  • the microelectronic assembly includes a plurality of interconnect structures each including a first conductive element, a first conductive projections, a second conductive projection, and a first metal mass. Each interconnect structure is connected between the first region of the first face and the second face and has a structure similar to that described above wherein the first dielectric material layer covers the second regions of the thin elements .
  • the first opening in the first dielectric material layer can define an inside surface such that the inside surface extends along a portion of the first projection in substantial contact therewith. Accordingly, the first dielectric material layer can have a thickness extending in a direction perpendicular to the first face of the first thin element. The thickness can be about 20% to 50% of a height of the first conductive projection.
  • the base of the first conductive projection can have a periphery such that the second region of the first face is exposed outside of the periphery of the base of the first projection.
  • This arrangement can further form a corner between the first face of the first thin element and the side wall of the first conductive element.
  • the corner can be located along the outer periphery of the base of the first conductive element, and the first dielectric material layer can substantially cover the corner.
  • a second thin conductive element can be exposed on the second surface and can have a second face consisting of first and second regions.
  • the second projection can further have a base that is connected to and covers the first region of the second thin element and defines a periphery and an end portion remote from the base.
  • a second dielectric material layer can cover the second region of the second thin element.
  • the first mass can extend over a portion of the second conductive projection toward the second dielectric material layer.
  • a further embodiment of the present invention relates to a microelectronic assembly that includes a first surface and a first thin conductive element that is exposed on the first surface and has a face consisting of first and second regions.
  • a first conductive projection is connected to and covers the first region of the first face and extends to an end remote therefrom.
  • the conductive projection has a barrier formed along a portion thereof that has a first edge remote from the first thin conductive element.
  • the assembly further includes a second face having a second conductive projection extending away therefrom.
  • a first fusible metal mass connects the first conductive projection to the second conductive projection such that the first surface of the first face is oriented toward the second surface of the second substrate.
  • the first mass extends along a portion of the first conductive projection to a location toward the first edge of the barrier, the barrier being disposed between the first thin element and the first metal mass.
  • the barrier can be a surface-treatment layer formed in the first conductive projection.
  • the surface-treatment layer can be formed by oxidation or can be a coating applied on a surface of the first conductive projection.
  • the microelectronic assembly includes a first substrate having a first surface and a first thin conductive element exposed on the first surface and having a first face.
  • a first conductive projection having a base connected to the first face extends to an end remote from the first face and defines a side wall between the base and the end.
  • a dielectric material layer extends along the first surface of the first substrate and has a second surface and a third surface remote from the second surface. The dielectric material layer further has a first opening defining a periphery formed therein.
  • a metal plating layer having a first portion extends along the end and at least a portion of the side wall of the first conductive projection.
  • a second portion of the metal plating layer extends outwardly along a portion of the dielectric material layer and away from the first conductive projection.
  • a first solder mass is formed over at least the first portion of the plating layer and extends toward the third surface.
  • a still further embodiment relates to microelectronic assembly including a substrate having a first surface, a plurality of first conductive pads exposed on the first surface and defining a face, and a plurality of first metal posts .
  • Each metal post defines a base having an outer periphery and is connected to a respective one of the first conductive pads.
  • Each metal post extends along a side wall from the base to ends remote from the first conductive pad.
  • the assembly further includes a dielectric material layer having an inner surface, an outer surface, and a plurality of openings. The inner surface extends along the first surface of the substrate, the outer surface being remote from the substrate.
  • Respective ones of the first metal posts project through the openings such that the dielectric material layer contacts at least the outside peripheries of the first metal posts.
  • a plurality of fusible metal masses contact the ends of at least some of first metal posts and extend along side walls of the first metal posts towards the outer surface of the dielectric material layer.
  • a microelectronic element is carried on the substrate and is electronically connected to at least some of the first conductive pads .
  • a still further embodiment relates to a microelectronic assembly including a first substrate having a first surface and a first thin conductive element having a first face and being exposed on the first surface.
  • a first conductive projection having a base is connected to the first face and extends to an end remote from the first face.
  • a side wall is defined between the base and the end.
  • the assembly further includes a dielectric material layer having a second surface and a third surface remote from the second surface. The second surface extends along the first surface of the first substrate, and the dielectric material layer has a first opening with a periphery formed therein.
  • a first solder mass is formed on the first conductive projection that extends along the end and a portion of the side wall to a location disposed between the base and the end.
  • the first conductive projection extends through the first opening such that the periphery thereof contacts a portion of the side wall.
  • the solder mass extends towards the third surface of the dielectric material layer.
  • FIG. 1 shows a stacked assembly of packaged microelectronic elements including an interconnect structure according to an embodiment of the present invention
  • FIG. 2 shows a stacked assembly of packaged microelectronic elements including an interconnect structure according to another embodiment of the present invention
  • FIG. 3 shows a chart illustrating characteristics of an interconnect structure according to the embodiment of Fig. 1 under a first condition
  • Fig. 4 shows a chart illustrating characteristics of an interconnect structure according to the embodiment of Fig. 1 under a second condition
  • Fig. 5 shows a chart illustrating characteristics of a prior-art interconnect structure under a first condition
  • Fig. 6 shows a chart illustrating characteristics of the prior-art interconnect structure of Fig. 5 under a second condition ;
  • FIG. 7 shows a component of an interconnect structure according to an alternative embodiment
  • FIG. 8 shows a component of an interconnect structure according to a further alternative embodiment
  • FIG. 9 shows a component of an interconnect structure according to an alternative embodiment
  • Fig. 10 shows a component of an interconnect structure according to a further alternative; and [ 0025 ] Fig. 11 shows a component of an interconnect structure including a deposited metal layer.
  • FIG. 1 and 2 show stacked packages 10 of microelectronic subassemblies 12, 14.
  • the microelectronic subassemblies are electronically and mechanically joined to each other by one or more interconnect structures 50 that include components that will be discussed further herein.
  • the stacked package 10 of Fig. 1 includes a lower assembly 12 and an upper assembly 14.
  • the terms upper and lower along with any other terms that refer to direction or position such as horizontal or vertical, left or right, and the like, are made with reference to the Figures and to an exemplary mode of use. These terms are used for purposes of clarity in this description and are not limiting, as other positions and orientations would be understood by a person of ordinary skill in the art.
  • Each of the lower 16 and upper 18 substrates have respective lower 20,24 and upper 22,26 surfaces.
  • the upper surfaces 22,26 are generally parallel to their respective lower surfaces 20,24, and all surfaces 20,22,24,26 are generally planar.
  • a thickness for each of the upper 14 and lower 12 substrates is defined between the respective upper 22,26 and lower 20,24 surfaces. This thickness can be substantially equal between upper 14 and lower 12 substrates or can vary. The thickness is generally less than the length and width of the substrates 12,14 by a factor sufficient to give the substrates 12,14 a substantially thin, wafer-like structure and falls within a range that is generally understood by those of ordinary skill in the art.
  • Each assembly 12,14 also includes a respective microelectronic element 30,32.
  • Microelectronic element 30 is shown affixed to lower substrate 16 by flip-chip bonding, in which microelectronic element 30 is inverted such that its conductive contacts (not shown) face toward upper surface 22.
  • the microelectronic element is then affixed to substrate 16 using conductive projections 34 that extend from its contacts and are bonded using solder masses 36 or another conductive bonding material to second conductive projections 38 formed on substrate 16.
  • microelectronic element 30 may be connected to substrate 16 including face-up mounting, in which the contacts on microelectronic element 30 face away from upper surface 26, adhesive is used to bond microelectronic element 30 to upper surface 26, and wire leads are used to electronically connect the contacts of microelectronic element 30 to conductive features, such as traces or pads, formed on substrate 16.
  • Microelectronic element 32 is shown affixed to substrate 18 in a similar fashion, and can alternatively be attached as described above.
  • the interconnect structure 50 shown in Fig. 1 includes a conductive pad 52 having a face 54 exposed on upper surface 22 of substrate 16.
  • the term "exposed at”, as used herein does not refer to any specific means of attachment for pad 52 onto substrate 16 or any relative position therebetween. Rather, it indicates that the electrically conductive structure is available for contact with a theoretical point moving in a direction perpendicular to the surface of the dielectric structure toward the surface of the dielectric structure from outside the dielectric structure.
  • a terminal or other conductive structure which is exposed at a surface of a dielectric structure may project from such surface; may be flush with such surface; or may be recessed relative to such surface and exposed through a hole or depression in the dielectric.
  • Pad 52 can be affixed to substrate 16 by forming pad by deposition or the like directly on surface 22, or it can be embedded within substrate 16 such that face 54 is flush with surface 22 or disposed at a height above or below the surface 22 so long as face 54 remains exposed on surface 22.
  • interconnect structure 50 can include a conductive trace or a portion of a conductive trace in addition to or substitution for a conductive pad 52.
  • a conductive pillar 56 is formed over a portion of face 54 of conductive pad 52.
  • the base 58 of pillar 56 covers a portion of face 54 and leaves another portion thereof, extending from the periphery of base 58, exposed on surface 22. Pillar 56 also defines an edge surface 60 extending away from base 58 to end 62 of pillar 56.
  • a conductive pillar is shown in Fig. 1, alternative structures forming a conductive projection can be used, including a pin, a post or the like, as would be understood by a person of ordinary skill in the art.
  • Interconnect structure 50 further includes a contact pad 64 having a face 66 exposed on lower surface 24 of substrate 18.
  • pad 64 can be embedded in substrate 18 such that face 66 is flush with, above or beneath lower surface 24 so long as face 66 remains exposed thereon.
  • Pad 64 can be connected to conductive features, such as traces or wires, formed on upper surface 26 of substrate 18 using a conductive via 68 formed through substrate 18.
  • interconnect structure 50 can include a trace or a part of a trace exposed on lower surface 24 in place of pad 64.
  • solder mass 70 is used to mechanically and electronically bond pillar 56 to pad 64.
  • solder mass 70 can be formed initially on either pillar 56 or pad 64 and then reflowed when the assemblies 12, 14 are aligned together to allow solder mass 70 to affix to the other of pillar 56 or pad 64.
  • solder mass 70 forms an upper edge 72 and a lower edge 74.
  • Each of upper edge 72 and lower edge 74 can form into a single line or point or a surface.
  • upper edge 72 is a surface that extends along a portion of surface 24 surrounding pad 64.
  • Upper edge 72 can also form a surface that contacts pad 64 or a circular line that surrounds pad either in contact with surface 24 or remote therefrom, depending on the geometry of pad 64.
  • Electromigration can pose problems in areas where two or more metallic elements that are in contact with each other exhibit different diffusion rates. In such case, voids formation can occur in the bonding interface. That is, one metal can pull away from the other, forming a gap or opening therebetween.
  • pillar 56 or another conductive projection, in interconnect structure 50 reduces the distance between the end 62 of pillar 56 and pad 64 along a line of electronic current traveling therebetween when compared to a structure including a solder mass connecting two opposite pads. Accordingly, the structure of Fig. 1, in which pillar 56 and pad 64 are both formed from copper, has been shown to be effective in reducing electromigration leading to void formation in a copper-solder-copper interconnect structure.
  • an inner-metallic compound including the like metal, forms within the second metal. This inner-metallic compound will extend from one like metal structure toward the other like metal structure.
  • Inner-metallic compound formation is a factor in reducing void formation due to electromigration because inter-metallic compounds have a slower rate of electromigration than solder.
  • the inter-metallic compound can be formed extending from one like metal structure to the other like metal structure.
  • the inter-metallic compound can vary in ratio from, for example Cu 3 Sn to Cu 3 Sn 5 .
  • the interconnect structures shown herein can reduce the concentration gradient of the like metal throughout the interconnect structure, which has been shown to be a driving factor for reducing electromigration.
  • the concentration gradient within a structure is the rate at which the concentration of, for example, the like metal changes spatially within a structure.
  • the extension of post 56 into solder mass 70 increases the surface area of copper within the structure, which further increases the presence of inter- metallic compounds within the solder mass 70. The extension of this increased amount of inter-metallic compound can lower the rate of change in presence of copper within the structure, further reducing electromigration.
  • Figs. 3 and 4 show the varying concentration of copper at a horizontal location in an interconnect structure similar to that of Fig. 1 throughout its vertical distance.
  • the graph shown corresponds to an interconnect structure 50 in which pads 52,64 and pillar 56 are made from copper and solder mass 70 is made from a solder compound containing tin.
  • Fig. 3 shows the concentration of copper when the structure is at a temperature (T 0 ) that occurs in absence of a current passing therethrough, which indicates an absence of copper within solder mass 70 under that temperature condition.
  • Fig. 4 shows the concentration of copper throughout the same structure at an equilibrium temperature of the structure in presence of an electronic current.
  • T 0 a temperature
  • Fig. 4 shows the concentration of copper throughout the same structure at an equilibrium temperature of the structure in presence of an electronic current.
  • FIG. 4 shows the presence of a copper concentration within the solder mass 70 that is present due to inter-metallic compound formation.
  • the inter-metallic compound is shown to extend from end 62 of pillar 56 to face 54 of pad 52.
  • the concentration of copper along both the end 62 and the face 54 also shows a substantial lack of void formation therealong.
  • the graph of Fig. 4 shows that the presence of pillar 56 can lower the rate of change in concentration of copper through the interconnect 50.
  • the line representing concentration of copper changes direction abruptly, for example, in the area immediately within solder mass 70 just adjacent pad 64. Conversely, the change in direction of the line representing concentration of copper is much less drastic in the area of solder mass 70 adjacent pillar 56.
  • the graphs are merely exemplary of and, while illustrative of the behavior discussed herein, may not be to scale or exactly representative of the behavior of the specific structures shown in the Figures .
  • FIGs. 5 and 6 show the concentration of copper through a prior interconnect structure having a solder mass 170 disposed between two contact pads 152 and 164, in which the distance 190 between the pads 152,164 is substantially the same as the distance 90 between the pads 52, 64 of Figs. 3 and 4.
  • Fig. 5 shows the concentration of copper within the structure at T 0 , indicating an absence of copper within solder mass 170 at that condition.
  • Fig. 6 shows the concentration of copper within the structure at the equilibrium temperature and shows some copper concentration within solder mass 170 due to inter-metallic compound formation, but the concentration does not extend through solder mass 170. This results in formation of voids 186 resulting in facture.
  • the presence of a pillar 56 having an end 62 that extends into the solder mass 70 toward a like- metal structure on the other side of the solder mass, such as pad 64 can decrease the likelihood of void formation due to electromigration . This is particularly true in structures that extend through an overall distance 90 that is greater than the distance through which an inter-metallic compound can be expected to extend.
  • the distance 92 between end 62 and face 66 can be between about 10% and 50% of the distance 90. It is noted that while in Fig.
  • lower edge 74 forms a circular line or annular surface around a portion of the edge surface 60 of pillar 56, which extends into solder mass 70. Further, lower edge 74 is spaced apart from pad 52 such that solder mass 70 does not directly contact any portion of pad 52, including the portion that remains exposed around base 58 of pillar 56.
  • a treatment can be applied to pillar 56, specifically to edge surface 60, near base 58 that can prevent solder mass 70 from wicking along edge surface 60 into contact with face 54 or pad 52. Such treatments can include oxidation or the like. Similarly a layer of material can be applied around edge surface 60 that is resistant to solder flow.
  • lower edge 74 of solder mass 70 is held away from face 54 of pad 52 by a dielectric layer 40 that extends over face 54 and into contact with at least a portion of edge surface 68 adjacent to base 58.
  • solder mass 70 is allowed to flow into contact with dielectric layer 40, including surface 42, such that lower edge 74 can extend therealong in a spaced-apart relationship with pad 52.
  • solder mass 70 By keeping solder mass 70 away from pad 52, the likelihood of void formation due to electromigration can also be reduced.
  • An interconnect structure of this type reduced electromigration by lowering the concentration of electronic current within solder mass 70.
  • a current traveling through interconnect structure 50 moves diagonally along lines from a point on one end of the structure to a point on the other end of the structure that is substantially laterally opposite the point of origin. This means that current traveling from pad 252 in Fig. 7 will move along a path represented by line 296 that passes through solder mass 270 and back into pillar 256. The current then leaves pillar 256 and re-enters solder mass 270 before reaching pad 264. This path results in a current concentration in the portion of solder mass 270 near base 258 of pillar 256. Current concentration is another driving force behind electromigration that can cause void formation resulting in interconnect failure.
  • solder mass 70 extends outwardly along a portion of dielectric layer 40 so long as solder mass 70 is held away from pad 52 by dielectric layer 40.
  • Dielectric layer 40 is shown in Fig. 1 as extending along a major portion of upper surface 22 of substrate 16. This portion includes all of upper surface 22 that is not penetrated by other contact elements.
  • dielectric layer 40 can be formed in portions surrounding any pillars 56 used in interconnect structure 50, extending away therefrom through a distance sufficient to keep solder masses 70 away from associated contact pads 52.
  • dielectric layer portions can be substantially the same size and shape as the contact pads or slightly larger, so as to reliably cover any otherwise exposed portions of the pads .
  • dielectric layer 40 has a thickness 42 in the areas covering pads 52 such that the lower end 74 of solder mass 70 is kept spaced apart at a distance therefrom. This distance can include compensation for any tolerance in overall material thickness to ensure that no holes or gaps are present that lead to unintended exposure of face 54 of pad 52.
  • the thickness 42 can be between about ⁇ and 30 ⁇ .
  • dielectric layer 40 will have a hole 44 or a plurality of holes 44 through which any interconnect pillars 56 extend. Holes 44 form an inner surface 46 that can contact a portion of edge surface 60 extending upwardly from base 58.
  • a plating layer 488 can be applied over pillar 456 including end 462 and a portion of edge surface 460 exposed over dielectric layer 440.
  • Plating layer 488 can help ensure a reliable interconnection between pillar 456 and solder mass 470.
  • Fig. 2 shows a stacked assembly 10 including a plurality of microelectronic subassemblies 12,14 having interconnect structures 50.
  • the package 10 shown in Fig. 2 is substantially similar to that shown in Fig. 1, except that the interconnect structure 50 in the package 10 of Fig. 2 includes a conductive post 76 extending from face 66 of pad 64.
  • Post includes base 78, affixed on face 66, and an edge surface 80 extending to an end 82 remote from face 66.
  • a second dielectric layer 41 can be formed along lower surface 24 of substrate 18 covering any portion of face 66 and pad 64 exposed outside the periphery of base 78.
  • dielectric layer 41 keeps upper edge 72 of solder mass 70 from contacting pad 64, which reduces the current concentration of solder mass 70 near upper edge 72. This further reduces the likelihood of void formation within interconnect structure 50, as described above with respect to dielectric layer 40.
  • Figs. 9 and 10 illustrate the reduction in current concentration within a solder mass included in an interconnect structure that results by keeping the solder mass out of contact with an associated conductive pad.
  • Fig. 9 shows an interconnect structure 350 that includes a pad 352 with a pillar 356 formed thereon.
  • a solder mass 370 attaches pillar 356 and pad 552 to an upper pad 364 and a post 376 formed thereon.
  • Current flow represented by line 396, passes out of contact pad 352 and into solder mass 370, then passes back into pillar 356 and then back out into solder mass 370.
  • the current flow (line 396) then passes into post 376 before passing back into solder mass 370 and, finally, into pad 364.
  • This current path 396 results in increased current concentration within the solder mass 370 in the area of the upper edge 372 and lower edge 374 of solder mass 570.
  • inclusion of dielectric layers 40,41 prevents the current (line 96) from passing through solder mass 70 near the upper 72 or lower 74 edges thereof, reducing the current concentration gradient in each area by a factor of between about 1.25 and 1.75. This can lead to a reduced likelihood of interconnect failure due to void formation in the interface on each end of solder mass 70.
  • the 14 can further decrease the like-metal to like-metal distance within the interconnect structure 70, as described above with respect to Fig. 1. In the structure of Fig. 2, this distance is represented by the end-to-end distance 94. Distance 94 can lead to formation of an inter-metallic compound that extends from end 62 to end 82 when distance 94 is between about 10% and 30% of distance 90.
  • Post 76 can, alternatively, be any conductive projection, such as a pillar, a pin, or the like. By including conductive projections on both assemblies 12,14, it is possible to achieve a connection that produces a reliable inter-metallic compound while achieving a finer pitch between adjacent interconnect structure 50 than would be possible using a pillar-to-pad arrangement, as shown in Fig.
  • interconnect structure 50 By including post 76 in interconnect structure 50, the contribution of concentration gradient to electromigration can also be reduced further. In such a structure, the reduction in the rate of change of copper concentration interconnect 50 in the area of pillar 56 can also be achieved in the area of post 76, thereby removing any abrupt changes in copper concentration at both ends of solder mass 70.
  • dielectric layers 40,41 and their related structures can be used for other connection types beyond the stacked subassembly arrangement shown in Figs. 1 and 2.
  • they can be used in flip-chip bonding (such as shown between microelectronic element 30 and substrate 16 in Figs. 1 and 2), and in connecting a microelectronic subassembly, such as microelectronic subassembly 12, to another substrate, either in face-up or flip-chip bonding.
  • an assembly such as assembly 14 can further include an additional contact pad on upper surface 26 of substrate 18 having a pillar and dielectric layer formed thereon in the manner of pillar 56 and dielectric layer 40 to connect to an additional microelectronic assembly using an interconnect structure such as that shown in Fig. 1 or 2. This arrangement can be continued to attach further assemblies within a stacked package .

Abstract

A microelectronic assembly 10 includes a first surface 22 and a first thin conductive element 52 exposed at the first surface 22 and having a face 54 comprising first and second regions. A first conductive projection 56 having a base 58 connected to and covering the first region of the face 54 extends to an end 62 remote from the base. A first dielectric material layer 40 covers the second region of the first thin element 52 and contacts at least the base 58 of the first conductive projection 56. The assembly 10 further includes a second substrate 18 having a second face 24 and a second conductive projection 76 extending away from the second face 24. A first fusible metal mass 70 connects the first projection 56 to the second projection 76 and extends along an edge of the first projection 56 towards the first dielectric material layer 40.

Description

INTERCONNECT STRUCTURE
CROSS-REFERENCE TO RELATED APPLICATIONS
[ 0001 ] The present application claims the benefit of the filing date of U.S. Patent Application No. 12/965,192, filed December 10, 2010, the disclosure of which is hereby incorporated herein by reference .
BACKGROUND OF THE INVENTION
[ 0002 ] The present disclosure relates to interconnect structures used in packaged microelectronic assemblies. In particular it relates to interconnect structures used in the connection of microelectronic chips and dies to substrates, such as in flip-chip bonding, or between substrates, such as in the formation of stacked packages . The structures described herein can be used to reduce failure of interconnect bonds due to void formation caused by electromigration between components of prior structures .
[ 0003 ] Electromigration is a main cause of interconnect failure, especially in high-performance devices where the current density in the interconnect and the device operating temperatures are high. In general, electromigration is caused by the different diffusion rates of materials used in interconnect assemblies. For example, an interconnect assembly can include a contact pad made of copper formed on each of two substrates and a solder mass bonded between the contact pads. The solder mechanically secures the two contact pads, and thus, the substrates on which they are formed, and also electronically connects the two pads so that a signal carried by an electric current can pass between the two pads through the solder mass. In this example, the diffusion rates between the solder and the copper of the pads can be different. The diffusion rates are the rates of molecular movement within the metallic structures over time, and in particular, when subjected to a current or to the heat caused by operation of the devices .
[ 0004 ] Voids formed in interconnect structures can decrease the reliability of the microelectronic assemblies in which they are used. Further, the presence of voids increases the current density within the materials in the areas surrounding the voids. This can, in turn, further exacerbate the difference in diffusion rate, leading to acceleration of void formation, leading eventually, to both electrical and mechanical failure of the interconnect element.
[ 0005 ] Present means of decreasing electromigration include using barrier metals or dopants in the solder. These means, however, present their own reliability issues and can lead to cost increases that outweigh their effectiveness. Accordingly, further means for reducing electromigration are needed .
BRIEF SUMMARY OF THE INVENTION
[ 0006 ] An embodiment of the present invention relates to a microelectronic assembly. The microelectronic assembly includes a first surface and a first thin conductive element exposed at the first surface and having a face comprising first and second regions. A first conductive projection having a base connected to and covering the first region of the face extends to an end remote from the base. A first dielectric material layer covers the second region of the first thin element and contacts at least the base of the first conductive projection. The assembly further includes a second substrate having a second face and a second conductive projection extending away from the second face. A first fusible metal mass connects the first projection to the second projection such that the first surface of the first face is oriented toward the second surface. The first mass extends along an edge of the first projection towards the first dielectric material layer. In a further embodiment, the first fusible metal mass can contact the first dielectric material layer .
[ 0007 ] The microelectronic assembly can be configured such that the first surface is formed on a substrate and the second surface is formed on a microelectronic element. Additionally or alternatively, the first surface can be formed on a substrate further having a microelectronic element affixed thereon, and the second surface can be formed on a second substrate. In a further embodiment, the microelectronic assembly includes a plurality of interconnect structures each including a first conductive element, a first conductive projections, a second conductive projection, and a first metal mass. Each interconnect structure is connected between the first region of the first face and the second face and has a structure similar to that described above wherein the first dielectric material layer covers the second regions of the thin elements .
[ 0008 ] The first opening in the first dielectric material layer can define an inside surface such that the inside surface extends along a portion of the first projection in substantial contact therewith. Accordingly, the first dielectric material layer can have a thickness extending in a direction perpendicular to the first face of the first thin element. The thickness can be about 20% to 50% of a height of the first conductive projection.
[ 0009 ] The base of the first conductive projection can have a periphery such that the second region of the first face is exposed outside of the periphery of the base of the first projection. This arrangement can further form a corner between the first face of the first thin element and the side wall of the first conductive element. The corner can be located along the outer periphery of the base of the first conductive element, and the first dielectric material layer can substantially cover the corner.
[ 0010 ] In a further embodiment, a second thin conductive element can be exposed on the second surface and can have a second face consisting of first and second regions. The second projection can further have a base that is connected to and covers the first region of the second thin element and defines a periphery and an end portion remote from the base. A second dielectric material layer can cover the second region of the second thin element. Further, the first mass can extend over a portion of the second conductive projection toward the second dielectric material layer.
[ 0011 ] A further embodiment of the present invention relates to a microelectronic assembly that includes a first surface and a first thin conductive element that is exposed on the first surface and has a face consisting of first and second regions. A first conductive projection is connected to and covers the first region of the first face and extends to an end remote therefrom. The conductive projection has a barrier formed along a portion thereof that has a first edge remote from the first thin conductive element. The assembly further includes a second face having a second conductive projection extending away therefrom. A first fusible metal mass connects the first conductive projection to the second conductive projection such that the first surface of the first face is oriented toward the second surface of the second substrate. The first mass extends along a portion of the first conductive projection to a location toward the first edge of the barrier, the barrier being disposed between the first thin element and the first metal mass. The barrier can be a surface-treatment layer formed in the first conductive projection. The surface-treatment layer can be formed by oxidation or can be a coating applied on a surface of the first conductive projection.
[ 0012 ] In a still further embodiment, the microelectronic assembly includes a first substrate having a first surface and a first thin conductive element exposed on the first surface and having a first face. A first conductive projection having a base connected to the first face extends to an end remote from the first face and defines a side wall between the base and the end. A dielectric material layer extends along the first surface of the first substrate and has a second surface and a third surface remote from the second surface. The dielectric material layer further has a first opening defining a periphery formed therein. A metal plating layer having a first portion extends along the end and at least a portion of the side wall of the first conductive projection. A second portion of the metal plating layer extends outwardly along a portion of the dielectric material layer and away from the first conductive projection. A first solder mass is formed over at least the first portion of the plating layer and extends toward the third surface.
[ 0013 ] A still further embodiment relates to microelectronic assembly including a substrate having a first surface, a plurality of first conductive pads exposed on the first surface and defining a face, and a plurality of first metal posts . Each metal post defines a base having an outer periphery and is connected to a respective one of the first conductive pads. Each metal post extends along a side wall from the base to ends remote from the first conductive pad. The assembly further includes a dielectric material layer having an inner surface, an outer surface, and a plurality of openings. The inner surface extends along the first surface of the substrate, the outer surface being remote from the substrate. Respective ones of the first metal posts project through the openings such that the dielectric material layer contacts at least the outside peripheries of the first metal posts. A plurality of fusible metal masses contact the ends of at least some of first metal posts and extend along side walls of the first metal posts towards the outer surface of the dielectric material layer. A microelectronic element is carried on the substrate and is electronically connected to at least some of the first conductive pads .
[ 0014 ] A still further embodiment relates to a microelectronic assembly including a first substrate having a first surface and a first thin conductive element having a first face and being exposed on the first surface. A first conductive projection having a base is connected to the first face and extends to an end remote from the first face. A side wall is defined between the base and the end. The assembly further includes a dielectric material layer having a second surface and a third surface remote from the second surface. The second surface extends along the first surface of the first substrate, and the dielectric material layer has a first opening with a periphery formed therein. A first solder mass is formed on the first conductive projection that extends along the end and a portion of the side wall to a location disposed between the base and the end. The first conductive projection extends through the first opening such that the periphery thereof contacts a portion of the side wall. The solder mass extends towards the third surface of the dielectric material layer.
BRIEF DESCRIPTION OF THE DRAWINGS
[ 0015 ] Fig. 1 shows a stacked assembly of packaged microelectronic elements including an interconnect structure according to an embodiment of the present invention;
[ 0016 ] Fig. 2 shows a stacked assembly of packaged microelectronic elements including an interconnect structure according to another embodiment of the present invention;
[ 0017 ] Fig. 3 shows a chart illustrating characteristics of an interconnect structure according to the embodiment of Fig. 1 under a first condition;
[ 0018 ] Fig. 4 shows a chart illustrating characteristics of an interconnect structure according to the embodiment of Fig. 1 under a second condition;
[ 0019 ] Fig. 5 shows a chart illustrating characteristics of a prior-art interconnect structure under a first condition;
[ 0020 ] Fig. 6 shows a chart illustrating characteristics of the prior-art interconnect structure of Fig. 5 under a second condition ;
[ 0021 ] Fig. 7 shows a component of an interconnect structure according to an alternative embodiment;
[ 0022 ] Fig. 8 shows a component of an interconnect structure according to a further alternative embodiment;
[ 0023 ] Fig. 9 shows a component of an interconnect structure according to an alternative embodiment;
[ 0024 ] Fig. 10 shows a component of an interconnect structure according to a further alternative; and [ 0025 ] Fig. 11 shows a component of an interconnect structure including a deposited metal layer.
DETAILED DESCRIPTION
[ 0026 ] Turning now to the figures, where like numeric references are used for similar features, Figs. 1 and 2 show stacked packages 10 of microelectronic subassemblies 12, 14. The microelectronic subassemblies are electronically and mechanically joined to each other by one or more interconnect structures 50 that include components that will be discussed further herein.
[ 0027 ] The stacked package 10 of Fig. 1 includes a lower assembly 12 and an upper assembly 14. It is noted that, as used herein, the terms upper and lower, along with any other terms that refer to direction or position such as horizontal or vertical, left or right, and the like, are made with reference to the Figures and to an exemplary mode of use. These terms are used for purposes of clarity in this description and are not limiting, as other positions and orientations would be understood by a person of ordinary skill in the art. Each of the lower 16 and upper 18 substrates have respective lower 20,24 and upper 22,26 surfaces. The upper surfaces 22,26 are generally parallel to their respective lower surfaces 20,24, and all surfaces 20,22,24,26 are generally planar. A thickness for each of the upper 14 and lower 12 substrates is defined between the respective upper 22,26 and lower 20,24 surfaces. This thickness can be substantially equal between upper 14 and lower 12 substrates or can vary. The thickness is generally less than the length and width of the substrates 12,14 by a factor sufficient to give the substrates 12,14 a substantially thin, wafer-like structure and falls within a range that is generally understood by those of ordinary skill in the art.
[ 0028 ] Each assembly 12,14 also includes a respective microelectronic element 30,32. Microelectronic element 30 is shown affixed to lower substrate 16 by flip-chip bonding, in which microelectronic element 30 is inverted such that its conductive contacts (not shown) face toward upper surface 22. The microelectronic element is then affixed to substrate 16 using conductive projections 34 that extend from its contacts and are bonded using solder masses 36 or another conductive bonding material to second conductive projections 38 formed on substrate 16. Other arrangements are possible for connecting microelectronic element 30 to substrate 16 including face-up mounting, in which the contacts on microelectronic element 30 face away from upper surface 26, adhesive is used to bond microelectronic element 30 to upper surface 26, and wire leads are used to electronically connect the contacts of microelectronic element 30 to conductive features, such as traces or pads, formed on substrate 16. Microelectronic element 32 is shown affixed to substrate 18 in a similar fashion, and can alternatively be attached as described above.
[ 0029 ] The interconnect structure 50 shown in Fig. 1 includes a conductive pad 52 having a face 54 exposed on upper surface 22 of substrate 16. The term "exposed at", as used herein does not refer to any specific means of attachment for pad 52 onto substrate 16 or any relative position therebetween. Rather, it indicates that the electrically conductive structure is available for contact with a theoretical point moving in a direction perpendicular to the surface of the dielectric structure toward the surface of the dielectric structure from outside the dielectric structure. Thus, a terminal or other conductive structure which is exposed at a surface of a dielectric structure may project from such surface; may be flush with such surface; or may be recessed relative to such surface and exposed through a hole or depression in the dielectric. Pad 52 can be affixed to substrate 16 by forming pad by deposition or the like directly on surface 22, or it can be embedded within substrate 16 such that face 54 is flush with surface 22 or disposed at a height above or below the surface 22 so long as face 54 remains exposed on surface 22. In alternative embodiments, interconnect structure 50 can include a conductive trace or a portion of a conductive trace in addition to or substitution for a conductive pad 52.
[ 0030 ] A conductive pillar 56 is formed over a portion of face 54 of conductive pad 52. As can be seen in Fig. 1, the base 58 of pillar 56 covers a portion of face 54 and leaves another portion thereof, extending from the periphery of base 58, exposed on surface 22. Pillar 56 also defines an edge surface 60 extending away from base 58 to end 62 of pillar 56. Although a conductive pillar is shown in Fig. 1, alternative structures forming a conductive projection can be used, including a pin, a post or the like, as would be understood by a person of ordinary skill in the art.
[ 0031 ] Interconnect structure 50 further includes a contact pad 64 having a face 66 exposed on lower surface 24 of substrate 18. As with contact pad 52, pad 64 can be embedded in substrate 18 such that face 66 is flush with, above or beneath lower surface 24 so long as face 66 remains exposed thereon. Pad 64 can be connected to conductive features, such as traces or wires, formed on upper surface 26 of substrate 18 using a conductive via 68 formed through substrate 18. In an alternative embodiment, interconnect structure 50 can include a trace or a part of a trace exposed on lower surface 24 in place of pad 64.
[ 0032 ] A solder mass 70 is used to mechanically and electronically bond pillar 56 to pad 64. During formation and assembly of package 10 solder mass 70 can be formed initially on either pillar 56 or pad 64 and then reflowed when the assemblies 12, 14 are aligned together to allow solder mass 70 to affix to the other of pillar 56 or pad 64. Once in place in package 10, solder mass 70 forms an upper edge 72 and a lower edge 74. Each of upper edge 72 and lower edge 74 can form into a single line or point or a surface. As shown in Fig. 1, upper edge 72 is a surface that extends along a portion of surface 24 surrounding pad 64. Upper edge 72 can also form a surface that contacts pad 64 or a circular line that surrounds pad either in contact with surface 24 or remote therefrom, depending on the geometry of pad 64.
[ 0033 ] The structures and techniques disclosed herein can help reduce electromigration at an interface between pads and a solder mass connecting the pads. Electromigration can pose problems in areas where two or more metallic elements that are in contact with each other exhibit different diffusion rates. In such case, voids formation can occur in the bonding interface. That is, one metal can pull away from the other, forming a gap or opening therebetween.
[ 0034 ] The use of pillar 56, or another conductive projection, in interconnect structure 50 reduces the distance between the end 62 of pillar 56 and pad 64 along a line of electronic current traveling therebetween when compared to a structure including a solder mass connecting two opposite pads. Accordingly, the structure of Fig. 1, in which pillar 56 and pad 64 are both formed from copper, has been shown to be effective in reducing electromigration leading to void formation in a copper-solder-copper interconnect structure. When like metals are used in an electronic interconnect structure in which they are separated by a second metal, an inner-metallic compound, including the like metal, forms within the second metal. This inner-metallic compound will extend from one like metal structure toward the other like metal structure. Inner-metallic compound formation is a factor in reducing void formation due to electromigration because inter-metallic compounds have a slower rate of electromigration than solder. By decreasing the like-metal to like-metal distance within the structure, the inter-metallic compound can be formed extending from one like metal structure to the other like metal structure. In the example of Fig. 1, where pad 64 and pillar 56 are formed from copper and solder mass 70 includes tin, the inter-metallic compound can vary in ratio from, for example Cu3Sn to Cu3Sn5. Further, the interconnect structures shown herein can reduce the concentration gradient of the like metal throughout the interconnect structure, which has been shown to be a driving factor for reducing electromigration. The concentration gradient within a structure is the rate at which the concentration of, for example, the like metal changes spatially within a structure. The extension of post 56 into solder mass 70 increases the surface area of copper within the structure, which further increases the presence of inter- metallic compounds within the solder mass 70. The extension of this increased amount of inter-metallic compound can lower the rate of change in presence of copper within the structure, further reducing electromigration.
[ 0035 ] The graphs shown in Figs. 3-6 illustrate the phenomenon described above. Figs. 3 and 4 show the varying concentration of copper at a horizontal location in an interconnect structure similar to that of Fig. 1 throughout its vertical distance. The graph shown corresponds to an interconnect structure 50 in which pads 52,64 and pillar 56 are made from copper and solder mass 70 is made from a solder compound containing tin. Fig. 3 shows the concentration of copper when the structure is at a temperature (T0) that occurs in absence of a current passing therethrough, which indicates an absence of copper within solder mass 70 under that temperature condition. Fig. 4 shows the concentration of copper throughout the same structure at an equilibrium temperature of the structure in presence of an electronic current. The graph of Fig. 4 shows the presence of a copper concentration within the solder mass 70 that is present due to inter-metallic compound formation. The inter-metallic compound is shown to extend from end 62 of pillar 56 to face 54 of pad 52. The concentration of copper along both the end 62 and the face 54 also shows a substantial lack of void formation therealong. Further, the graph of Fig. 4 shows that the presence of pillar 56 can lower the rate of change in concentration of copper through the interconnect 50. The line representing concentration of copper changes direction abruptly, for example, in the area immediately within solder mass 70 just adjacent pad 64. Conversely, the change in direction of the line representing concentration of copper is much less drastic in the area of solder mass 70 adjacent pillar 56. It is noted that the graphs are merely exemplary of and, while illustrative of the behavior discussed herein, may not be to scale or exactly representative of the behavior of the specific structures shown in the Figures .
[ 0036 ] The graphs shown in Figs. 5 and 6 show the concentration of copper through a prior interconnect structure having a solder mass 170 disposed between two contact pads 152 and 164, in which the distance 190 between the pads 152,164 is substantially the same as the distance 90 between the pads 52, 64 of Figs. 3 and 4. Fig. 5 shows the concentration of copper within the structure at T0, indicating an absence of copper within solder mass 170 at that condition. Fig. 6 shows the concentration of copper within the structure at the equilibrium temperature and shows some copper concentration within solder mass 170 due to inter-metallic compound formation, but the concentration does not extend through solder mass 170. This results in formation of voids 186 resulting in facture.
[ 0037 ] Accordingly, the presence of a pillar 56 having an end 62 that extends into the solder mass 70 toward a like- metal structure on the other side of the solder mass, such as pad 64 can decrease the likelihood of void formation due to electromigration . This is particularly true in structures that extend through an overall distance 90 that is greater than the distance through which an inter-metallic compound can be expected to extend. In an embodiment where pillar 56 and pad 64 are formed from copper and the solder mass 70 includes tin, the distance 92 between end 62 and face 66 can be between about 10% and 50% of the distance 90. It is noted that while in Fig. 3, distance 90 is defined between lower surface 24 of substrate 18 and outer surface of dielectric layer 40, distance 90 is defined between the major surface of whatever type of structure surrounds pads 52,64. [ 0038 ] In an embodiment, lower edge 74 forms a circular line or annular surface around a portion of the edge surface 60 of pillar 56, which extends into solder mass 70. Further, lower edge 74 is spaced apart from pad 52 such that solder mass 70 does not directly contact any portion of pad 52, including the portion that remains exposed around base 58 of pillar 56. A treatment can be applied to pillar 56, specifically to edge surface 60, near base 58 that can prevent solder mass 70 from wicking along edge surface 60 into contact with face 54 or pad 52. Such treatments can include oxidation or the like. Similarly a layer of material can be applied around edge surface 60 that is resistant to solder flow.
[ 0039 ] In a further embodiment, lower edge 74 of solder mass 70 is held away from face 54 of pad 52 by a dielectric layer 40 that extends over face 54 and into contact with at least a portion of edge surface 68 adjacent to base 58. In this embodiment, solder mass 70 is allowed to flow into contact with dielectric layer 40, including surface 42, such that lower edge 74 can extend therealong in a spaced-apart relationship with pad 52.
[ 0040 ] By keeping solder mass 70 away from pad 52, the likelihood of void formation due to electromigration can also be reduced. An interconnect structure of this type reduced electromigration by lowering the concentration of electronic current within solder mass 70. As shown in Figs. 7 and 8, a current traveling through interconnect structure 50 moves diagonally along lines from a point on one end of the structure to a point on the other end of the structure that is substantially laterally opposite the point of origin. This means that current traveling from pad 252 in Fig. 7 will move along a path represented by line 296 that passes through solder mass 270 and back into pillar 256. The current then leaves pillar 256 and re-enters solder mass 270 before reaching pad 264. This path results in a current concentration in the portion of solder mass 270 near base 258 of pillar 256. Current concentration is another driving force behind electromigration that can cause void formation resulting in interconnect failure.
[ 0041 ] As shown in Fig. 8, by interposing dielectric layer
40 between lower edge 74 of solder mass 70 and the exposed pad 52, no current will travel out of pad 52. Rather the current will travel along a line 96 that only enters solder mass 70 once, shown in the interface between end 62 and solder mass 70. This can reduce the current concentration gradient by a factor of between about 1.25 and 1.75, which can, in turn reduce the likelihood of void formation. A similar path would be observed in a structure wherein solder mass 70 extends outwardly along a portion of dielectric layer 40 so long as solder mass 70 is held away from pad 52 by dielectric layer 40.
[ 0042 ] Dielectric layer 40 is shown in Fig. 1 as extending along a major portion of upper surface 22 of substrate 16. This portion includes all of upper surface 22 that is not penetrated by other contact elements. Alternatively, dielectric layer 40 can be formed in portions surrounding any pillars 56 used in interconnect structure 50, extending away therefrom through a distance sufficient to keep solder masses 70 away from associated contact pads 52. In such an embodiment dielectric layer portions can be substantially the same size and shape as the contact pads or slightly larger, so as to reliably cover any otherwise exposed portions of the pads .
[ 0043 ] In an embodiment, dielectric layer 40 has a thickness 42 in the areas covering pads 52 such that the lower end 74 of solder mass 70 is kept spaced apart at a distance therefrom. This distance can include compensation for any tolerance in overall material thickness to ensure that no holes or gaps are present that lead to unintended exposure of face 54 of pad 52. The thickness 42 can be between about ΙΟμηι and 30μηι. In such an embodiment, dielectric layer 40 will have a hole 44 or a plurality of holes 44 through which any interconnect pillars 56 extend. Holes 44 form an inner surface 46 that can contact a portion of edge surface 60 extending upwardly from base 58.
[0044] As shown in Fig. 11, a plating layer 488 can be applied over pillar 456 including end 462 and a portion of edge surface 460 exposed over dielectric layer 440. Plating layer 488 can help ensure a reliable interconnection between pillar 456 and solder mass 470.
[0045] Fig. 2 shows a stacked assembly 10 including a plurality of microelectronic subassemblies 12,14 having interconnect structures 50. The package 10 shown in Fig. 2 is substantially similar to that shown in Fig. 1, except that the interconnect structure 50 in the package 10 of Fig. 2 includes a conductive post 76 extending from face 66 of pad 64. Post includes base 78, affixed on face 66, and an edge surface 80 extending to an end 82 remote from face 66. A second dielectric layer 41 can be formed along lower surface 24 of substrate 18 covering any portion of face 66 and pad 64 exposed outside the periphery of base 78. As with dielectric layer 40, dielectric layer 41 keeps upper edge 72 of solder mass 70 from contacting pad 64, which reduces the current concentration of solder mass 70 near upper edge 72. This further reduces the likelihood of void formation within interconnect structure 50, as described above with respect to dielectric layer 40.
[0046] Figs. 9 and 10 illustrate the reduction in current concentration within a solder mass included in an interconnect structure that results by keeping the solder mass out of contact with an associated conductive pad. Fig. 9 shows an interconnect structure 350 that includes a pad 352 with a pillar 356 formed thereon. A solder mass 370 attaches pillar 356 and pad 552 to an upper pad 364 and a post 376 formed thereon. Current flow, represented by line 396, passes out of contact pad 352 and into solder mass 370, then passes back into pillar 356 and then back out into solder mass 370. The current flow (line 396) then passes into post 376 before passing back into solder mass 370 and, finally, into pad 364. This current path 396 results in increased current concentration within the solder mass 370 in the area of the upper edge 372 and lower edge 374 of solder mass 570. As shown in Fig. 10, inclusion of dielectric layers 40,41, prevents the current (line 96) from passing through solder mass 70 near the upper 72 or lower 74 edges thereof, reducing the current concentration gradient in each area by a factor of between about 1.25 and 1.75. This can lead to a reduced likelihood of interconnect failure due to void formation in the interface on each end of solder mass 70.
[0047] Additionally, the inclusion of post 76 in assembly
14 can further decrease the like-metal to like-metal distance within the interconnect structure 70, as described above with respect to Fig. 1. In the structure of Fig. 2, this distance is represented by the end-to-end distance 94. Distance 94 can lead to formation of an inter-metallic compound that extends from end 62 to end 82 when distance 94 is between about 10% and 30% of distance 90. Post 76 can, alternatively, be any conductive projection, such as a pillar, a pin, or the like. By including conductive projections on both assemblies 12,14, it is possible to achieve a connection that produces a reliable inter-metallic compound while achieving a finer pitch between adjacent interconnect structure 50 than would be possible using a pillar-to-pad arrangement, as shown in Fig. 1, while covering a greater overall distance 90. Further, by forming a dielectric layer 41 over pad 64, a lower current concentration is possible than with simply a pad 64 to which solder mass 70 is formed. By including post 76 in interconnect structure 50, the contribution of concentration gradient to electromigration can also be reduced further. In such a structure, the reduction in the rate of change of copper concentration interconnect 50 in the area of pillar 56 can also be achieved in the area of post 76, thereby removing any abrupt changes in copper concentration at both ends of solder mass 70. [ 0048 ] The interconnect structures 50 shown in Figs. 1 and
2, including dielectric layers 40,41 and their related structures can be used for other connection types beyond the stacked subassembly arrangement shown in Figs. 1 and 2. For example, they can be used in flip-chip bonding (such as shown between microelectronic element 30 and substrate 16 in Figs. 1 and 2), and in connecting a microelectronic subassembly, such as microelectronic subassembly 12, to another substrate, either in face-up or flip-chip bonding. Further, an assembly such as assembly 14 can further include an additional contact pad on upper surface 26 of substrate 18 having a pillar and dielectric layer formed thereon in the manner of pillar 56 and dielectric layer 40 to connect to an additional microelectronic assembly using an interconnect structure such as that shown in Fig. 1 or 2. This arrangement can be continued to attach further assemblies within a stacked package .
[ 0049 ] Although the invention herein has been described with reference to particular embodiments, it is to be understood that these embodiments are merely illustrative of the principles and applications of the present invention. It is therefore to be understood that numerous modifications may be made to the illustrative embodiments and that other arrangements may be devised without departing from the spirit and scope of the present invention as defined by the appended claims .

Claims

1. A microelectronic assembly comprising:
a first surface;
a first thin conductive element exposed at the first surface and having a face comprising first and second regions; a first conductive projection having a base connected to and covering the first region of the face and extending to an end remote therefrom;
a first dielectric material layer covering the second region of the first thin element and contacting at least the base of the first conductive projection; and
a second substrate having a second face and a second conductive projection extending away from the second face; and a first fusible metal mass connecting the first projection to the second projection such that the first surface of the first face is oriented toward the second surface, wherein the first mass extends along an edge of the first projection towards the first dielectric material layer.
2. The microelectronic assembly of claim 1, wherein the first surface is formed on a substrate and wherein the second surface is formed on a microelectronic element.
3. The microelectronic assembly of claim 1, wherein the first surface is formed on a substrate further having a microelectronic element affixed thereon, and wherein the second surface is formed on a second substrate.
4. The microelectronic assembly of claim 1, wherein the first fusible metal mass contacts the first dielectric material layer .
5. The microelectronic assembly of claim 1, wherein the first dielectric material layer covers at least a portion of the first surface.
6. The microelectronic assembly of claim 1, wherein the second conductive projection includes an end remote from the second surface, and wherein the end of the first conductive projection is spaced apart from the end of the second conductive projection at a first distance defining a gap therebetween, and wherein the metal mass extends within the gap .
7. The microelectronic assembly of claim 6, wherein the first distance is between 10 and 30 μηι.
8. The microelectronic assembly of claim 1, further including a plurality of thin conductive elements exposed on the first surface, each having a face with first and second regions, and a plurality of first conductive projections, each connected to the first region of the first face of a respective one of the plurality of thin elements and extending to an end remote therefrom and a plurality of second conductive projections, each extending away from the second face ;
wherein the first dielectric material layer covers the second regions of the thin elements and a plurality of first fusible metal masses connect respective ones of the first projections to respective ones of the second projections, wherein the respective first mass extends over a portion of the respective first projection toward the first dielectric layer .
9. The microelectronic assembly of claim 1, wherein the first opening in the first dielectric material layer defines an inside surface, and wherein the inside surface extends along a portion of the first projection in substantial contact therewith .
10. The microelectronic assembly of claim 9, wherein the first dielectric material layer has a thickness extending in a direction perpendicular to the first face of the first thin element, and wherein the thickness is between about 10 μηι and 30 μπι.
11. The microelectronic assembly of claim 9, wherein the first dielectric material layer has a thickness extending in a direction perpendicular to the first face of the thin element, and wherein the thickness is about 20% to 50% of a height of the first conductive projection.
12. The microelectronic assembly of claim 1, wherein the base of the first conductive projection has a periphery, wherein the second region of the first face is exposed outside of the periphery of the base of the first projection.
13. The microelectronic assembly of claim 12, wherein the first projections define a side wall, the side wall being substantially straight along a cross-sectional profile thereof .
14. The microelectronic assembly of claim 13, wherein a corner is formed between the first face of the first thin element and the side wall of the first conductive element, the corner being located along the outer periphery of the base of the first conductive element, and wherein the first dielectric material layer substantially covers the corner.
15. The microelectronic assembly of claim 12, wherein the base of the first conductive projection includes a substantially straight portion extending from the end and a transition portion extending from the outer periphery of the base, the transition portion being substantially arcuate along a cross-sectional profile thereof, and wherein the first dielectric material layer substantially covers the transition portion .
16. The microelectronic assembly of claim 12, wherein the base of the first conductive projection is connected to the first thin element by a layer of conductive metal, the layer of conductive metal having an outside surface substantially aligned with the outer periphery of the base of the first conductive projection, and wherein the first dielectric material layer substantially covers the outside surface of the layer of conductive metal.
17. The microelectronic assembly of claim 1, further including :
a second thin conductive element exposed on the second surface and having a second face consisting of first and second regions, and wherein the second projection has a base defining a periphery and connected to and covering the first region of the second thin element and an end portion remote from the base;
a second dielectric material layer covering the second region of the second thin element.
18. The microelectronic assembly of claim 17, wherein the first mass extends over a portion of the second conductive projection toward the second dielectric material layer.
19. The microelectronic assembly of claim 1, wherein the first conductive projection defines a side wall, and wherein a deposited metal layer is formed over the end of the first conductive projection and at least a portion of the side wall thereof .
20. The microelectronic assembly of claim 19, wherein the first dielectric material layer includes an outer surface substantially parallel to the first surface, and the plating layer is further formed with a portion thereof extending outwardly along the outer surface and away from the first conductive projection.
21. The microelectronic assembly of claim 1, wherein the thin element is a substantially circular pad.
22. The microelectronic assembly of claim 21, wherein the first subassembly further includes conductive traces formed on the first substrate and extending from the pad.
23. A microelectronic assembly comprising:
a first surface;
a first thin conductive element exposed on the first surface and having a face consisting of first and second regions ;
a first conductive projection connected to and covering the first region of the first face and extending to an end remote therefrom and having a barrier formed along a portion thereof having a first edge remote from the first thin conductive element;
a second face having a second conductive projection extending away therefrom; and a first fusible metal mass connecting the first conductive projection to the second conductive projection such that the first surface of the first face is oriented toward the second surface of the second substrate, wherein the first mass extends along a portion of the first conductive projection to a location toward the first edge of the barrier, the barrier being disposed between the first thin element and the first metal mass.
24. The microelectronic assembly of claim 23, wherein the barrier is a surface-treatment layer formed in the first conductive projection.
25. The microelectronic assembly of claim 24, wherein the surface-treatment layer is formed by oxidation.
26. The microelectronic assembly of claim 24, wherein the surface-treatment layer is a coating applied on a surface of the first conductive projection.
27. The microelectronic assembly of claim 23, wherein the barrier is a layer of dielectric material.
28. The microelectronic assembly of claim 27, wherein the layer of dielectric material covers the second region of the first thin element.
29. A microelectronic assembly, comprising:
a first subassembly including:
a first substrate having a fist surface;
a plurality of first conductive pads, each having a first face exposed on the first surface;
a plurality of first projections, each defining a base having a periphery and connected to a respective one of the first pads, the first projections extending away from the respective first pads, wherein exposed portions of the first faces are defined outside of the peripheries of the bases of the first projections; and
a first dielectric material layer overlying the exposed portions of the faces of the first pads, and defining a plurality of openings through which respective ones of the first projections pass, the first dielectric material layer contacting at least the peripheries of the first projections and defining a first outer surface;
a second subassembly including a second substrate having a second surface, a plurality of second conductive pads exposed on the second surface and a plurality of second projections, each having a base connected to a respective one of the second pads and extending away therefrom; and
a plurality of fusible metal masses respectively joining the plurality of first connection elements to respective ones of the plurality of second connection elements such that the second face of the second substrate is oriented toward the first face of the first substrate, wherein the fusible metal masses cover at least portions of the first projections extending to the first outer surface of the first dielectric material layer .
30. A microelectronic assembly comprising:
a first substrate having a first surface;
a first thin conductive element exposed on the first surface and having a first face;
a first conductive projection having a base connected to the first face and extending to an end remote from the first face, a side wall being defined between the base and the end; a dielectric material layer having a second surface and a third surface remote from the second surface, the second surface extending along the first surface of the first substrate, the dielectric material layer having a first opening defining a periphery formed therein;
a metal plating layer having a firs portion extending along the end and at least a portion of the side wall of the first conductive projection and a second portion extending outwardly along a portion of the dielectric material layer and away from the first conductive projection; and
a first solder mass formed over at least the first portion of the plating layer and extending toward the third surface .
PCT/US2011/063953 2010-12-10 2011-12-08 Interconnect structure WO2012078876A1 (en)

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EP11810921.4A EP2649644B1 (en) 2010-12-10 2011-12-08 Interconnect structure
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