WO2012089059A1

WO2012089059A1 - Mems display

Info

Publication number: WO2012089059A1
Application number: PCT/CN2011/084431
Authority: WO
Inventors: 毛剑宏; 唐德明
Original assignee: 上海丽恒光微电子科技有限公司
Priority date: 2010-12-27
Filing date: 2011-12-22
Publication date: 2012-07-05
Also published as: CN102566040B; CN102566040A

Abstract

A MEMS display comprising a pixel array area (I) and a light source (II) being mutually independent from each other. The pixel array area comprises pixel units arranged in an array. When light generated by the light source is introduced onto the pixel array and routed via a multistage optical path switch, an image is projected from the pixel units. The MEMS display employs a dual-option optical path switch as an optical path routing node, and is characterized by sensitive response and rapid imaging.

Description

MEMS display

Technical field

The present invention relates to the field of micromechanical electromechanical systems (MEMS), and in particular to an optical path switching switch based on MEMS technology and a MEMS display device for realizing image display using the optical path switching switch. Background technique

LCD TVs and other flat panel displays have become common electronic consumer products in social life. How to further reduce the size of the flat panel display and reduce the thickness of the panel is one of the development directions of the flat panel display. Since the light source of the liquid crystal display device must be disposed on the back surface of the panel or embedded in the panel, good brightness and uniformity of gradation can be obtained. Therefore, the arrangement of the above light source brings great difficulty to the thickness of the thinned panel.

The use of mechanically structured optical path switches to make flat panel displays is an alternative to liquid crystal displays. The mechanical light path switch can quickly route the light source's beam to display in the desired pixel area, resulting in a good viewing angle and a wide range of color, grayscale display image content. The light source can be disposed at any position of the panel independently of the pixel array area, thereby facilitating reduction of the panel thickness of the display. For more information on the use of mechanically structured optical path switches, the contents of a MEMS display can be found in U.S. Patent No. US2006006448.

Although optical path switching switches using MEMS technology have achieved success in projection display applications, there has been no substantial breakthrough in flat panel display devices. Making sensitive and reliable optical switchers and applying them to MEMS displays has become the main research direction of MEMS displays. Summary of the invention

The problem to be solved by the present invention is to provide a MEMS display using an optical path switching switch, which has the characteristics of simple control mechanism and easy manufacture and manufacture.

A MEMS display provided by the present invention. Including a pixel array area and a light source that are independent of each other, the pixel array area includes a pixel unit arranged in an array, and the light generated by the light source After the beam is incident on the pixel array area, it is routed through the multi-level optical path switching switch, and the imaging is emitted from the pixel unit.

The optical path switching switch includes an input optical path, two output optical paths, and an optical path switching element, the optical path conversion element selectively routing the light beam from the input optical path to one of the output optical paths, the optical path conversion element comprising:

a semiconductor substrate and an interlayer dielectric layer on the surface thereof; a cavity located in the interlayer dielectric layer, one end of the cavity being connected to the input optical path, and the other end being separated by the isolation layer into an upper cavity and a lower cavity, the upper cavity And the lower cavity is respectively connected to the two output optical paths; the elastic light guide plate located in the cavity, the elastic light guide plate is a reflective material, comprising a fixed end connected to the isolation layer and suspended toward the input optical path a free end within the cavity; the free end being moved between the top of the cavity and the bottom of the cavity by a force field applied within the cavity.

The optical path conversion element further includes an upper induction plate and a lower induction plate respectively located at the top and the bottom of the cavity, and a force field perpendicular to the optical path transmission path is formed in the cavity by energizing the upper induction plate and the lower induction plate; The free end of the elastic light guide is located in the force field.

Optionally, the upper and lower induction plates are located on or as part of the cavity wall, and the upper and lower induction plates are insulated from the remainder of the cavity wall.

Optionally, the upper induction plate and the lower induction plate are located in an interlayer dielectric layer outside the cavity, and are separated from the cavity cavity wall by the interlayer dielectric layer.

Optionally, the inner surface of the cavity wall is coated with a reflective coating.

Optionally, the free end width of the elastic light guide sheet is greater than the fixed end width. The cross section of the cavity is rectangular, and the width of the section gradually decreases along the free end of the elastic light guide toward the fixed end, and the gap between the sidewall of the cavity and the elastic light guide is kept uniform.

Optionally, the upper cavity and the lower cavity are filled with a light transmissive medium.

Optionally, the pixel array area includes a row light path switching switch, a column light path switching switch, and a thin film transistor that controls the optical path switching switch; the incident light beam is first routed through the column optical path switching switch, and then routed through the optical path switching switch, Exit in the pixel unit.

Optionally, the light source type of the MEMS display is a three-color light source, including RGB three primary colors or CMY three primary colors. Optionally, the pixel array area includes an incident optical path, and the three primary colors are time-divisionally input, and are routed through the multi-stage optical path switching switch to be emitted from the pixel unit.

Optionally, the pixel array region includes a first sub-pixel column, a second sub-pixel column, and a third sub-pixel column, wherein the three sub-pixel columns are repeatedly arranged in a cycle; each of the first sub-pixel columns has a first incident light path Each of the second sub-pixel columns has a second incident optical path, and each of the third sub-pixel columns has a third incident optical path; the three primary color lights are respectively incident from the three incident optical paths, and are routed through the multi-stage optical path switching switch. Exits from the pixel unit of the corresponding sub-pixel column.

Optionally, the light source type is polarized 3D light, including P polarized light and S polarized light. Optionally, the pixel array region includes a first polarization pixel column and a second polarization pixel column that are alternately disposed; each of the first polarization pixel columns has a first polarization incident light path, and each of the second polarization pixel columns has a first The two polarization incident light paths are respectively incident on the two polarization incident optical paths, and are routed through the multi-stage optical path switching switches, and are emitted from the pixel units of the corresponding polarization pixel columns.

Optionally, the light source type is white light. Optionally, the pixel array area includes a first sub-pixel unit, a second sub-pixel unit, and a third sub-pixel unit arranged in an array, wherein the different kinds of sub-pixel units have color films of different colors; The pixel array region includes an incident optical path, the white light is incident from the incident optical path, and is routed through the multi-stage optical path switching switch, and is emitted from the sub-pixel unit through the color film. The color film is formed on a surface of the pixel array region and covers an output optical path of the row light path switching switch corresponding to each sub-pixel unit.

Optionally, in the pixel array area, the first sub-pixel unit, the second sub-pixel unit, and the third sub-pixel unit are periodically arranged, and the same type of sub-pixel units are not adjacent.

Optionally, the color type of the color film comprises three primary colors of RGB or three primary colors of CMY.

The MEMS display of the invention adopts an alternative optical path switching switch as a routing node of the optical path, and adopts multi-level routing to realize pixel display, and has the characteristics of sensitive response and fast imaging. The optical path switching switch has a simple structure, convenient control, and is easy to manufacture and manufacture. DRAWINGS

Through the more detailed description of the preferred embodiment of the invention shown in the drawings, the invention These and other objectives, features and advantages will be more apparent. Components in the drawings that are identical to the prior art use the same reference numerals. The drawings are not to scale, the emphasis of the drawings The dimensions of the layers and regions are exaggerated for clarity in the drawings.

1 is a schematic structural view of an optical path switching switch according to the present invention;

1 is a schematic structural view of an optical path switching switch according to the present invention. The optical path switching switch includes an input optical path 100, an output optical path 201, an output optical path 202, and an optical path conversion element 300. The optical path conversion element 300 selectively routes the optical beam from the input optical path 100 to one of the output optical paths, that is, the optical path. The switch 300 has only two routing states.

2 is a cross-sectional view taken along line AA' of FIG. 1. As shown in FIG. 2, the optical path conversion element 300 includes: a semiconductor substrate 301 and an interlayer dielectric layer 307 (ILD) thereof. a cavity 302 in the interlayer dielectric layer 307, one end of the cavity 302 is connected to the input optical path 100, and the other end is separated by an isolation layer 303 into an upper cavity 304 and a lower cavity 305, the upper cavity 304 and the lower space The cavity 305 is respectively connected to two output optical paths; an elastic light guide 306, the elastic light guide 306 includes a fixed end connected to the isolation layer 303 and a free end suspended in the cavity toward the input optical path 100. The free end can be moved between the top and bottom of the cavity 302 under the influence of a force field applied within the cavity 302 such that the resilient light guide sheet 306 is curved. In order to form the above-mentioned force field for bending the elastic light guide sheet 306, the optical path conversion element 300 of the embodiment further includes an upper induction plate 308 located at the top and bottom of the cavity, respectively. Guide plate 309. By energizing the upper induction plate 308 and the lower induction plate 309, a force field perpendicular to the optical path transmission path can be formed in the cavity 302, and the free end is located in the force field. The upper induction plate 308 and the lower induction plate 309 may be made of metal, such as copper, aluminum, tungsten, etc.; may be disposed on the cavity wall or directly as part of the cavity wall, or may be disposed on the outer layer of the cavity. In the dielectric layer 307. As an optional embodiment, when the optical path switching switch is in operation, the upper induction plate 308 and the lower induction plate 309 are energized to form an electric field in the cavity 302; then the charge is injected into the elastic light guide plate 306 through the connection electrode. According to the tip aggregation effect of the charge, the free end of the elastic light guide sheet 306 will accumulate charges and move to the top or bottom of the cavity 302 under the influence of the electric field in the cavity 302 to control the bending of the elastic light guide sheet 306. Direction and degree of bending. As another alternative embodiment, the elastic light guide sheet 306 can also be made of a magnetic material, and the upper induction plate 308 and the lower induction plate 309 are energized to form an electromagnetic field in the cavity to control the bending direction of the elastic light guide piece 306. And the degree of bending. In addition, if the upper induction plate 308 and the lower induction plate 309 are disposed on the cavity cavity wall or as part of the cavity cavity wall, the cavity cavity wall needs to be insulated from the rest of the cavity cavity wall. In order to prevent the upper induction plate 308 and the lower induction plate 309 from being short-circuited or leaked through the cavity wall.

Further, the elastic light guide sheet 306 is a sheet-like body, so that the elastic bending has a directionality, so that the bending direction of the elastic light guiding sheet 306 coincides with the position of the upper guiding plate 308 and the lower guiding plate 309, and is curved. The cross section of the upper cavity 304 or the lower cavity 305 can be closed later, such that the elastic surface of the elastic light guide sheet 306 is perpendicular to the projection surface between the upper induction plate 308 and the lower induction plate 309. It should be noted that, in the MEMS system, the structure of the optical path conversion element 300 is compatible with the semiconductor process, and the upper induction plate 308, the lower induction plate 309, and the elastic light guide 306 are all connected to the electrodes. Alternatively, the fixed end of the elastic light guide sheet 306 may extend from the isolation layer into the interlayer dielectric layer 307 to form a contact hole connection electrode. In this embodiment, although the above specific metal interconnection structure is not shown, as a known technique, those skilled in the art should be able to make contact holes according to the requirements of the metal interconnection, and details are not described herein again.

The semiconductor substrate 301 is a silicon substrate or a silicon-on-insulator SOI. The cavity 302 The interlayer dielectric layer 307 is formed in the interlayer dielectric layer 307 on the surface of the semiconductor substrate 301. The interlayer dielectric layer 307 is used for insulating the isolation cavity 302, and the material thereof may be silicon dioxide, silicon nitride or the like.

The inner surface of the cavity 302 must be capable of reflecting a light beam. As an alternative, a reflective coating can be formed on the inner surface of the cavity 302. Alternatively, the cavity cavity wall can be high. A metal material having a reflectance, such as a metal such as aluminum, titanium, zinc, silver, or a combination thereof. In this embodiment, in order to reduce the cost and be compatible with the semiconductor manufacturing process, the cavity cavity wall is made of aluminum.

The elastic light guide sheet 306 must be capable of reflecting the light beam and being bendable within the cavity. Alternatively, a high reflectivity metal material such as aluminum, titanium, zinc, silver or the like or a combination thereof may be used. Further, in order to improve the metal fatigue phenomenon caused by frequent bending during use of the elastic light guide sheet 306, a thin layer of silicon oxide or silicon nitride coating may be formed on the surface of the elastic light guide sheet 306 to improve elasticity. The tension of the surface of the light guide sheet 306. In this embodiment, also in order to reduce the cost and be compatible with the semiconductor manufacturing process, the elastic light guide sheet 306 is made of aluminum, and the surface is plated with a silicon nitride film. In addition, since the aluminum is a conductive metal, in order to prevent the free end of the elastic light guide sheet 306 from moving to the top or bottom of the cavity, contact with the upper induction plate 308 or the lower induction plate 309 causes a contact short circuit, and the upper induction plate 308 is used. And the lower induction plate 309 is disposed in the interlayer dielectric layer 307 outside the cavity, and is spaced apart from the cavity cavity wall by the interlayer dielectric layer 307.

According to the foregoing principle, the free end of the elastic light guide sheet 306 must be movable to the top or bottom of the cavity 302 such that the flexible catheter piece 306 is bent to prevent the light beam entering the cavity from the input optical path from entering the upper cavity 304 or the lower cavity 305. . In order to improve the bending ability of the elastic light guide sheet 306, the free end width of the elastic light guide sheet 306 may be made larger than the fixed end width. 3 is a cross-sectional view taken along line BB' of FIG. 1. As shown in FIG. 3, in order to simplify the manufacturing process, the cross section of the cavity 302 may be selected as a rectangle; on the other hand, to reduce the bending of the elastic light guide sheet 306 Thereafter, light is leaked from the gap between the wall of the cavity, and the cross-sectional width D of the cavity gradually decreases along the free end of the elastic light guide sheet 306 toward the fixed end, and the elastic light guide sheet 306 and the cavity wall are maintained. The gap size is the same. In addition to the preferred embodiment described above, the shape of the cavity cross section may also be an elliptical shape, a trapezoidal shape, etc., only to satisfy that the elastic light guide sheet 306 can freely bend within the cavity 302 and prevent the light beam from entering the upper cavity 304 or the lower cavity. The light path of 305 can be.

As shown in FIG. 2, since the fixed end of the elastic light guide sheet 306 is connected to the isolation layer 303, In order to support the isolation layer 303 to avoid the longitudinal displacement of the elastic light guide sheet 306, as an alternative, the upper cavity 304 and the lower cavity 305 may also be filled with a light transmissive medium, such as quartz containing a silica component. Glass, etc.

4 is a cross-sectional view taken along line CC' of FIG. 1. Referring to FIG. 1 and FIG. 4, as an alternative, in the embodiment, the upper cavity 308 and the lower cavity 309 are adjacent to the elastic light guide. One end of the 306 is formed along the AA' line (ie, in the vertical direction in FIG. 2), and one end away from the elastic light guide is extended and separated, and the output light path 201 and the output light path 202 are respectively connected. FIG. 5 is a schematic diagram showing the working state of the optical path switching switch according to the present invention. The working mechanism of the optical path switching switch according to the present invention will be described below with reference to FIG. 5. When it is desired to cause the light beam to enter the cavity 302 from the input optical path 100 and output from the output optical path 201 via the upper cavity 304. First, the upper induction plate 308 and the lower induction plate 309 are energized, the upper induction plate 308 is connected to the negative end of the power source, and the lower induction plate 309 is connected to the positive end of the power source, and a bottom-up electric field is formed in the cavity 302. The strength of the electric field is determined by the potential difference between the upper inducer 308 and the lower inducer 309. Electrons are then injected into the elastic light guide sheet 306, which will be concentrated at the free end of the elastic light guide sheet 306, which is subjected to an electric field force to move the lower guide plate 309. It is only necessary to form a sufficiently large electric field strength in the cavity 302 to overcome the self-elastic action of the elastic light guide 306, so that the free end of the elastic light guide 306 is in contact with the bottom of the cavity 302. At this time, the lower cavity 305 is closed by the elastic light guiding sheet 306 as viewed in the cross-sectional direction of the cavity 302. When the light beam enters the cavity 302 from the input optical path 100, it is reflected multiple times on the inner surface of the cavity 302 and the surface of the elastic light guide sheet 306, and finally can only be emitted through the upper cavity 304, and is selectively routed to the output optical path 201. On the other hand, when it is necessary to make the light beam enter the cavity 302 from the input optical path 100 and output from the output optical path 202 via the lower cavity 305, it is only necessary to reversely connect the induction plate 308 and the lower induction plate 309 during the energization, in the cavity 302. A reverse electric field is formed such that the free end of the elastic light guide sheet 306 moves upwardly toward the plate 308 until it contacts the top of the cavity 302, thereby closing the cross section of the upper cavity 304. The beam can only be ejected through the lower cavity 305 and selectively routed to the output optical path 202.

The optical path switch is an alternative switch structure that implements selective routing from one input optical path to two output optical paths, but in a router, it is usually required to have multiple paths. The ability to input multiple outputs, so that the above-mentioned optical path switching switches of multiple stages can be used in series to realize the routing of the light beams.

Based on the above optical path switching switch, the present invention further provides a MEMS display comprising mutually independent pixel array regions and a light source, wherein the pixel array region comprises an array of pixel units, and the light beam generated by the light source is incident on the pixel array region. After multi-level optical path switching switch routing, the imaging is emitted from the pixel unit.

The pixel array area includes a row light path switching switch, a column light path switching switch, and a thin film transistor that controls the optical path switching switch. Specifically, one of the optical path switching switches and the column optical path switching switches may be grounded, and another induction plate is connected to the power source through the thin film transistor, and the optical path is controlled by controlling the conduction or the closing of the thin film transistor. An electric field that drives the bending of the elastic light guide is formed in the switch, and then the switching of the optical path by the optical path switching switch is controlled.

The incident beam is first routed through the column optical path switching switch, enters a row of pixel units, and then routes through the row optical path switching switch, and exits from a row of pixel units of the row. The above method is similar to the mechanism in which the pixel unit is selected for image display by the row scan line and the column data line in the liquid crystal display.

The working mechanism of the MEMS display is also different according to the type of the light source. The MEMS display of the present invention will be further described below in conjunction with specific embodiments.

First embodiment

In the MEMS display according to the first embodiment of the present invention, the light source uses three primary color light sources, such as RGB three-color (red, green, and blue) light sources or CMY three primary colors (cyan, magenta, and yellow). Figure 6 is a schematic diagram of the MEMS display of the first embodiment, including a pixel array region I and a light source Π, the pixel array region I only illustrating a 4x3 array of pixel cells.

As shown in Fig. 6, the MEMS display of the present embodiment includes only one input optical path L. When the light beam enters the pixel array area I from the input optical path L, it is first necessary to pass the column optical path switching switch. Wherein, each column of pixel units corresponds to one column of optical path switching switches. After the light beam enters a certain column of pixel units through the route, it needs to pass through the row light path switching switch in order to exit from the corresponding pixel unit. Each of the pixel units corresponds to one row of optical path switching switches.

Figure 7 is a cross-sectional view taken along line DD' of Figure 6, showing a cross-sectional view of the row light path switching switch, in which the two output light paths are perpendicular to each other, The output optical path 02 perpendicular to the pixel array area, that is, perpendicular to the MEMS display panel, serves as the outgoing direction of the light beam from the pixel unit, and the other output optical path 01 is connected to the input optical path of the next horizontal optical path switching unit.

In addition, when the elastic light guide plate in the optical path switching switch is not bent, the optical path switching switch cannot function as a route, and the light beam will be simultaneously outputted from the two output optical paths of the optical path switching switch, thereby One-two function of the beam. For example, when the beam incident pixel array first reaches the column light path switching switch K1, if the elastic light guide plate is kept in the original position without guiding light, the light beam is split into branches that continue to be transmitted along the input light path L to the next column light path switching switch K2 and enter the first A branch of a column of pixel cells. The purpose of the above-described one-two mechanism is to simultaneously realize imaging display of a plurality of pixel units during the incident of one light beam.

According to the above principle, if a certain pixel unit needs to be image-displayed when the MEMS display is in operation, only the corresponding column light path switching switch and the row light path switching switch need to be controlled, and the incident light beam is routed, so that the light beam is from the pixel unit. Can be emitted.

In the MEMS display of the embodiment, the three primary color lights of the three primary color light sources may be input with time division, and the interval time of the time division input may be smaller than the visual retention time of the human eye. When the MEMS display is observed by a human eye, a plurality of pixels can be formed to display superimposed images, and primary light of different light intensities are superimposed to visually form different colors, so that the MEMS display of the embodiment displays Colored graphics.

Second embodiment

In the above embodiment, although the light source of the MEMS display can utilize the visual retention time of the human eye to input the three primary colors in a time-sharing manner, the optical path structure of the display is simplified. However, the application range is limited, and there are limitations in the dynamic display of high-speed images.

FIG. 8 is a schematic diagram of a MEMS display according to a second embodiment of the present invention, including a pixel array region I and a light source Π, wherein the pixel array region 1 only indicates a pixel unit of a 4×3 array. The light source uses RGB or CMY three primary color sources.

As shown in FIG. 8 and FIG. 6, the difference between the present embodiment and the first embodiment is that the pixel array area I has three input optical paths, including a first incident optical path L1, a second incident optical path L2, and a third incident optical path L3. Used to input three primary colors of light.

Correspondingly, the pixel unit in the pixel array region is divided into a first sub-pixel column C1, a second sub-pixel column C2, and a third sub-pixel column C3. The above three sub-pixel columns are periodically arranged in the pixel array region. The above setting is such that a pixel unit in a sub-pixel column can only be outputted A primary color light is emitted, and three pixel units of adjacent three sub-pixel columns can be regarded as one pixel group.

The three primary color lights of the light source may be incident from the three incident optical paths while not interfering with each other, and are respectively routed through the multi-stage optical path switching switches, and are emitted from the pixel units of the corresponding sub-pixel columns. The specific routing process is similar to the first embodiment.

In the same pixel group, the light of different kinds of primary color lights emitted by the three pixel units is different in intensity, so that different colors can be visually formed, so that the MEMS display of the present invention displays a colored figure.

Third embodiment

The MEMS display of the present invention can also be applied to the display of 3D images.

FIG. 9 is a schematic diagram of a MEMS display according to a third embodiment of the present invention, including a pixel array region I and a light source Π, wherein the pixel array region 1 only indicates a pixel unit of a 4×3 array. The light source is 3D polarized light. Specifically, the 3D polarized light includes P-polarized light and S-polarized light.

As shown in Fig. 9 and Fig. 8, the present embodiment differs from the second embodiment only in the number of input optical paths. Specifically, the pixel array area has two input optical paths, and includes a first polarization incident light path J1 and a second polarization incident light path J2 for inputting the P-polarized light and the S-polarized light, respectively.

Correspondingly, the pixel unit in the pixel array region is divided into a first polarization pixel column D1 and a second polarization pixel column D2. The two types of polarized pixels are periodically arranged in the pixel array region, that is, alternately arranged. The above arrangement is such that a pixel unit in a column of polarized pixels can emit only one type of polarized light, and two pixel units of two adjacent columns of polarized pixels can be regarded as one pixel group.

In the same pixel group, different kinds of polarized light emitted by the two pixel units can visually form a 3D pattern, thereby enabling the MEMS display of the present invention to perform three-dimensional stereoscopic display.

Fourth embodiment

In the above embodiments, the light sources are relatively complex, and respectively need to provide corresponding primary colors or Polarized light. In order to simplify the light source, a color film may be disposed on the beam exit path of the pixel unit to generate an outgoing beam of a different color. The pixel array area I only exemplifies a 4x3 array of pixel cells. The light source can be a white light source.

As shown in Fig. 10 and Fig. 6, the difference between this embodiment and the first embodiment is that the light source II produces a single white light beam, and the pixel units in the pixel array region have different color color films. The color film may be an organic film or an inorganic film layer covering the surface of the pixel unit.

Specifically, the pixel array area has only one input optical path J. After the white light is incident from the input optical path J, it is routed through the multi-level optical path switching switch, and is emitted from the pixel unit through the color film.

The color film color type may include RGB three primary colors or CMY three primary colors. The pixel unit is divided into a first sub-pixel unit El, a second sub-pixel unit E2, and a third sub-pixel unit E3 according to the color of the color film.

Preferably, the three sub-pixel units are periodically arranged in the pixel array area, and the same type of sub-pixel units are not adjacent (neither adjacent or adjacent). Thus, three adjacent and different kinds of sub-pixel units can be regarded as one pixel group. From a macroscopic angle, the above pixel groups are arranged in dots in the pixel array region, and an optimum imaging effect can be obtained.

When white light is emitted from a certain pixel unit through the color film, the color of the emitted light is the color of the pixel unit color film.

In the same pixel group, the three sub-pixel units emit different colors of light of different color beams, and can visually form different colors, so that the MEMS display of the present invention displays a color pattern.

In the above three embodiments, the light source only functions to generate an incident light beam, and the MEMS display determines the image to be emitted from each pixel unit after being routed through the optical switch. Each of the thin film transistors can control the corresponding optical switching switch to optically switch the incident light beam, thereby further controlling the outgoing light beams of the respective pixel units. In the pixel array region, each pixel unit arranged in the array emits light beams of different light intensities and colors, and the visual effects can be superimposed to form an image to be displayed.

The present invention has been disclosed in the above preferred embodiments, but it is not intended to limit the present invention, and the present invention may be utilized to the present invention without departing from the spirit and scope of the invention. Possible changes and repairs to the technical solution Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments in accordance with the technical scope of the present invention are within the scope of the present invention.

Claims

Claims:

A MEMS display, comprising: a pixel array region and a light source that are independent of each other, wherein the pixel array region comprises a pixel unit arranged in an array, and the light beam generated by the light source enters the pixel array region and passes through a multi-level optical path. Switching the switch route to exit imaging from the pixel unit; the optical switch comprises: an input optical path, two output optical paths, and an optical path conversion element, the optical path conversion element selectively routing the light beam from the input optical path to one of the output optical paths The optical path conversion component includes:

a semiconductor substrate and an interlayer dielectric layer on the surface thereof; a cavity located in the interlayer dielectric layer, one end of the cavity being connected to the input optical path, and the other end being separated by the isolation layer into an upper cavity and a lower cavity, the upper cavity And the lower cavity is respectively connected to the two output light paths;

An elastic light guide sheet located in the cavity, the elastic light guide sheet adopting a reflective material, comprising a fixed end connected to the isolation layer and a free end suspended in the cavity toward the input optical path; the free end When moved by the force field applied to the cavity, it moves between the top of the cavity and the bottom of the cavity.

2. The MEMS display according to claim 1, wherein the optical path conversion element further comprises an upper induction plate and a lower induction plate respectively located at the top and the bottom of the cavity, and the upper induction plate and the lower induction plate are passed through When energized, a force field perpendicular to the optical path of the optical path is formed in the cavity; the free end of the elastic light guide is located in the force field.

3. The MEMS display of claim 2, wherein the upper and lower induction plates are disposed on or as part of a cavity wall.

4. The MEMS display of claim 3, wherein the cavity wall portion provided with the upper and lower induction plates is insulated from the remainder of the cavity wall.

5. The MEMS display of claim 2, wherein the upper and lower induction plates are located in an interlayer dielectric layer outside the cavity and are spaced apart from the cavity cavity wall by the interlayer dielectric layer.

6. The MEMS display of claim 1 wherein the inner surface of the cavity wall is coated with a reflective coating.

7. The MEMS display of claim 1, wherein the elastic light guide has a free end width greater than a fixed end width.

8. The MEMS display according to claim 7, wherein the cavity has a rectangular cross section, and the cross-sectional width gradually decreases along the free end of the elastic light guide toward the fixed end to maintain the sidewall and elasticity of the cavity. The gap size of the light guide sheet is the same.

9. The MEMS display of claim 1, wherein the upper cavity and the lower cavity are filled with a light transmissive medium.

The MEMS display according to claim 1, wherein the pixel array area comprises a row light path switching switch, a column light path switching switch, and a thin film transistor that controls the optical path switching switch; the incident light beam is first switched via a column optical path. The switch route is routed through the optical path switch and exits from the pixel unit.

The MEMS display according to claim 10, wherein the light source type is a three-color light source, including RGB three primary colors or CMY three primary colors.

The MEMS display according to claim 11, wherein the pixel array region comprises an incident optical path, the three primary color lights are incident from the incident optical path, and are routed through a multi-stage optical path switching switch, from the pixel unit. Exit.

The MEMS display of claim 11, wherein the pixel array region comprises a first sub-pixel column, a second sub-pixel column, and a third sub-pixel column, wherein the three sub-pixels are arranged in the pixel array region. Arranging periodically; each of the first sub-pixel columns has a first incident optical path, each of the second sub-pixel columns has a second incident optical path, and each of the third sub-pixel columns has a third incident optical path; The light is incident from the three incident optical paths, and is routed through the multi-stage optical path switching switch, and is emitted from the pixel unit of the corresponding sub-pixel column.

14. The MEMS display of claim 10, wherein the light source type is 3D polarized light, including P polarized light and S polarized light.

The MEMS display according to claim 14, wherein the pixel array region comprises a first array of polarized pixels and a second column of polarized pixels arranged alternately; each of the columns of polarized pixels has a first polarization incident An optical path, each of the second polarized pixel columns has a second polarized incident optical path; the P-polarized light and the S-polarized light are respectively incident from the two polarized incident optical paths, and are routed through the multi-stage optical path switching switch, from the corresponding polarized pixels The column is emitted from the pixel unit.

16. The MEMS display of claim 10, wherein the light source type is white light.

The MEMS display according to claim 16, wherein the pixel array area comprises a first sub-pixel unit, a second sub-pixel unit and a third sub-pixel unit arranged in an array, the different kinds of sub-pixels The pixel unit has a color film of different colors; the pixel array area includes an incident light path, the white light is incident from the incident light path, and is routed through the multi-stage optical path switching switch, and is emitted from the sub-pixel unit through the color film.

The MEMS display according to claim 17, wherein the color film is formed on a surface of the pixel array region and covers an output optical path of the row light path switching switch corresponding to each sub-pixel unit.

The MEMS display according to claim 17, wherein in the pixel array region, the first sub-pixel unit, the second sub-pixel unit, and the third sub-pixel unit are periodically arranged, and the same type of sub-pixels Units are not adjacent.

The MEMS display according to claim 17, wherein the color type of the color film comprises RGB three primary colors or CMY three primary colors.