WO2014086458A1 - Vakuumventil - Google Patents
Vakuumventil Download PDFInfo
- Publication number
- WO2014086458A1 WO2014086458A1 PCT/EP2013/003412 EP2013003412W WO2014086458A1 WO 2014086458 A1 WO2014086458 A1 WO 2014086458A1 EP 2013003412 W EP2013003412 W EP 2013003412W WO 2014086458 A1 WO2014086458 A1 WO 2014086458A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- valve
- flange
- vacuum
- housing wall
- housing
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/04—Construction of housing; Use of materials therefor of sliding valves
- F16K27/044—Construction of housing; Use of materials therefor of sliding valves slide valves with flat obturating members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0227—Packings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0272—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor permitting easy assembly or disassembly
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0281—Guillotine or blade-type valves, e.g. no passage through the valve member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/598—With repair, tapping, assembly, or disassembly means
- Y10T137/6065—Assembling or disassembling reciprocating valve
- Y10T137/6072—Gate valve
Definitions
- the invention relates to a vacuum valve comprising a closure member and a valve housing with a valve opening and with an interior in which the closure member is arranged, which in the closed state of
- Vacuum valve rests against a valve seat surrounding the valve opening, wherein the valve housing has a housing wall bounding the interior of the housing, which is provided to form the valve opening with a window recess, and wherein the valve opening is surrounded by a flange, the over
- a vacuum valve of the aforementioned type is apparent from WO 201 1/088482 A1 and US Pat. No. 7,011,294 B1.
- the vacuum valve has housing halves made of sheet metal, which form opposite first and second housing walls, which are each provided with a window recess for forming a valve opening.
- a respective side wall of the valve housing is formed by bent portions of the two housing halves, wherein the two housing halves are welded together in the region of the side walls.
- On the outsides of the opposite housing walls are the
- Connection flange of another vacuum unit such as a
- Vacuum chamber or a pipe to be screwed To the
- Valve housing to give the necessary stability, further action is required, in particular must run between the two flange rings and these mutually supporting support members are provided, which are welded to the two flange rings.
- the production of the vacuum valve is thereby made more expensive.
- Another, consisting entirely of sheet metal valve is known from DE 29 27 369 A1.
- Valve body is sealed, has the valve seat, to which the closure member is applied in the closed state of the vacuum valve.
- a vacuum valve is disclosed, for example, in JP 2012-72888 A.
- the closure member is here between its open position and its closed position, which it occupies in the closed state of the vacuum valve, movable in a straight line, wherein the am
- Closing member arranged seal and arranged on the valve seat
- Sealing surface have a three-dimensional contour.
- Other such vacuum valves with replaceable valve seat are known through prior use.
- the valve seat is in this case from the interior of the valve housing forth with the valve opening
- valve seat having screwed housing wall by screwing connecting screws through through holes in the valve seat in blind hole threaded holes in the housing wall. The seal between the valve seat and the housing wall is thereby pressed. Due to the removability of the valve seat, even if the valve housing of the vacuum valve remains connected to a further vacuum unit, the valve seat can be replaced when the valve seat becomes worn, for example due to aggressive process gases. It is also possible to use valve seats with different surfaces, which are resistant, for example, to different process gases used in different vacuum processes.
- Another vacuum valve with exchangeable valve seat is shown in US 8,272,825 B2 (see Fig. 4A, right side). That the
- Valve seat having insert extends here through the window recess in the solid housing wall to the outside of the valve housing and has there a seal to shield the process gas from the flange seal of the valve housing, which is arranged in a groove of the solid housing wall.
- the object of the invention is to provide an advantageous and inexpensive formable vacuum valve of the type mentioned. According to the invention, this is achieved by a vacuum valve having the features of claim 1.
- the flange on the valve seat, to which the closure member is applied in the closed state of the vacuum valve thus has a double function. On the one hand takes place via him the screw of the vacuum valve with the flange of a
- Vacuum unit to which the vacuum valve is to be connected on the other hand, the flange also forms the valve seat of the vacuum valve. This allows an advantageous transmission of force in the closed state from the closure member to the valve seat force or at least a portion thereof, to the vacuum unit to which the vacuum valve is connected.
- Valve housing of the vacuum valve stiffness requirements are thereby significantly reduced, which allows a reduction in design effort and thus a cost savings.
- This power transmission advantageously takes place via the housing wall, which is clamped in a region adjoining the window recess, in particular an annular region, between the flange ring and the connection flange.
- these are in the form of blind holes, which are introduced into the surface of the flange, which is directed away from the valve seat, that is facing away from the inside of the valve housing.
- the flange with threaded holes of the connecting flange may conveniently be formed with through holes through which the
- the connecting screws are conveniently pushed through from the interior of the valve housing through the through holes in the flange ring and screwed into threaded bores in the connecting flange.
- These threaded bores are formed for example in the form of blind holes, which emanate from the valve housing facing surface of the connecting flange.
- the flange in the assembled state is supported on its side opposite the valve seat, ie with its surface directed away from the valve seat, on the housing wall in a manner adjacent to the window recess
- Vacuum unit connected state the housing wall, at least over a portion of the support area, preferably at least over the entire support area, optionally also via a support area supported
- connection flange At least over a part of the support region, preferably over the entire support region, the housing wall is thus clamped between the flange ring and the connection flange, possibly via a connection between the housing wall and the housing
- the flange is preferably connected via mounting screws with the housing wall.
- Connection with the vacuum unit via the connecting screws can in this case be designed so that the mounting screws are vacuum-tight in the vacuum unit connected state of the vacuum valve, the mounting screws are inoperative. It can here in the connected state of the vacuum valve on the vacuum unit play a game in the screw connection between the flange and the housing wall.
- Threaded holes are screwed in the flange ring.
- the heads of the threaded holes are screwed in the flange ring.
- Connecting screws are outside the valve housing, ie on the side facing away from the valve seat side of the housing wall.
- a sealing ring is arranged between the flange ring and the housing wall.
- a sealing ring between the housing wall and the connection flange may be arranged.
- Connection flange of the vacuum unit can be arranged on the flange an annular seal, which is arranged for example in a groove of the flange or vulcanized to the flange. This is intended to cooperate with an annular sealing surface provided on the connection flange.
- the flange ring could also have an annular sealing surface which is provided for cooperation with an annular seal arranged on the connecting flange. The above measures could also be combined.
- valve housing in addition to the previously described first housing wall made of sheet metal, a second housing wall made of sheet metal, which is for forming a second valve opening of the
- Valve housing is provided with a window recess.
- a second flange ring is provided here, which surrounds the second valve opening and which can be connected via screw connections to a connection flange of a further vacuum unit, to which the vacuum valve can be connected.
- the second flange does not form a valve seat for a closure member.
- the second flange also forms a second valve seat on which the closure member or a further closure member can be applied.
- the closure member and correspondingly the geometric shape of the valve seat may be formed in very different ways. The same applies to the valve drive.
- Vacuum valve to be substantially L-shaped.
- Such valves with L-movement are, for example, from US Pat. No. 6,431, 518 B1, WO 2010/065976 A1 or WO
- valve drive and the shape of the closure member of a vacuum valve according to the invention may be formed, for example, as described in these documents.
- the individual components of movement of the L movement can here be caused by the same or different actuators.
- An inventive vacuum valve may for example also be designed such that the entire closing movement between the open position and the closed position of the closure member is generally rectilinear.
- Vacuum valves in which there is no spreading of the closure member are known for example from US 4,809,950 A, US 6,685,163 B2, US 4,921, 213 A or the aforementioned US 7.01 1, 294 B1.
- the valve drive, the shape of the closure member and the valve seat of a vacuum valve according to the invention For example, they may be formed as described in these documents.
- Closure member of a vacuum valve according to the invention may for example be formed as described in these documents.
- US Pat. No. 7,011,294 B1 and WO 201 1/088482 A1 disclose vacuum valves with wedge-shaped, expandable closure members.
- the shape of the closure member, the valve seat and the valve drive of a vacuum valve according to the invention can be designed, for example, as described in these documents.
- Vacuum valves with closure members which are pivotable about an axis between the open position and a position opposite to the valve seat, but lifted from the valve seat, which is perpendicular to the plane in which the valve seat is located, are also known as
- Pendulum valves called.
- the valve drive and the shape of the closure member and the valve seat of a vacuum valve according to the invention can also be designed in the manner of a shuttle valve.
- the invention advantageously makes it possible to use different flange rings in an otherwise identically designed valve housing. It can thus be provided a modular system in which the valve housing in a simple manner by using a corresponding flange to
- Different closure members and / or valve actuators can be adjusted, even according to different sealing principles, for example in the manner of L-valves or valve spools.
- FIG. 1 is a view of an embodiment of a vacuum valve according to the invention
- Fig. 2 is a section along the line AA of Fig. 1;
- Fig. 3 is a section along the line BB of Fig. 1 (without representation of the
- Fig. 4 is an enlarged detail X of Fig. 2;
- Fig. 5 is an enlarged detail Y of Fig. 3;
- FIG. 6 and 7 are sections analogous to FIG. 2 and FIG. 3 (without representation of the valve drive) in the state of the vacuum valve connected to vacuum units in the form of vacuum chambers;
- Figs. 8 and 9 are enlarged details V and W of Figs. 6 and 7;
- FIG. 10 is an oblique view of the vacuum valve with exploded parts of the vacuum valve shown;
- FIGS. 11 and 12 show sections analogous to FIG. 6 and FIG. 7, the vacuum valve being attached to modified vacuum units in the form of vacuum chambers
- Figures 13 and 14 are enlarged details T and U of Figures 1 1 and 12;
- FIGS. 15 and 16 are sections analogous to FIGS. 6 and 7 of a second embodiment of a vacuum valve according to the invention.
- Figures 17 and 18 are views similar to Figures 6 and 7 of a third embodiment of a vacuum valve according to the invention.
- FIGS. 1 to 14 are schematic representation analogous to FIG. 9 of a fourth embodiment of a vacuum valve according to the invention.
- a first embodiment of a vacuum valve according to the invention is shown in FIGS. 1 to 14.
- the vacuum valve has a valve housing 1, which has an interior space 2, in which a plate-shaped closure member 3 in the exemplary embodiment is arranged.
- a valve opening 4 of the valve housing which has an axis 5, from the closure member. 3 locked.
- the closure member 3 is pressed against a valve seat 6 surrounding the valve opening 4.
- an elastomeric seal 7 is arranged on the closure member 6, which on a
- Sealing surface of the valve seat 6 is present.
- the seal could also be arranged on the valve seat 6 and the sealing surface on the closure member 3.
- the closure member 3 preferably does not overlap with the valve opening 4 in the direction of the axis 5 of the valve opening 4 when the vacuum valve is open.
- the closure member 3 is attached to valve rods 8. Im shown
- Embodiment is attached to the valve rods 8, a cross member 9, which in turn is attached to the closure member 3.
- a torsion of the cross member By a torsion of the cross member, a certain tilting of the closure member 3 about an axis perpendicular to the valve rods 8 axis is possible to achieve at least substantially uniform compression of the seal 7 in the closed state of the vacuum valve in a simple manner.
- the opening and closing of the vacuum valve takes place by an adjustment of the valve rods 8 by means of a valve drive 10.
- the valve drive 10 may be designed in different ways and have one or more actuators, which are operated, for example pneumatically or electrically. Only in Fig. 2 is an example of a possible embodiment of a valve actuator 10 is shown schematically.
- the valve drive comprises a first actuator 1 1 in the form of a piston-cylinder unit and a second actuator 12 in the form of a piston-cylinder unit. Cylinder unit.
- the cylinders of these actuators 1 1, 12 are rigidly connected to each other and about a perpendicular to the valve rods 8 and the axis 5 of the valve opening 4 standing pivot axis 13 pivotally, which is indicated only schematically.
- the piston 14 of the second actuator 12 which is supported on a drive housing 15, the interconnected cylinder of the actuators 1 1, 12 are pivoted against the force of a return spring 16 about the pivot axis 13.
- the attached to the piston 17 of the first actuator 1 1 piston rod is connected to the valve rods or forms one of
- Valve rods 8 For example, for both valve rods 8 in the
- actuators 1 1, 12 may be provided, which are operated synchronously.
- the valve rods could, for example, also be connected to the piston rod of a common actuator 1 1 via a yoke extending in the direction of the pivot axis 13.
- the valve rods 8 are each connected via a bellows 18 vacuum-tight with the valve housing 1.
- a valve that is closed and opened in such a manner may also be referred to as an L-valve.
- an L-movement in the form of two mutually perpendicular rectilinear movements as is known.
- An inventive valve can also be operated with a different opening and closing movement.
- the valve housing 1 has a first housing wall 19 with a window recess 20 (see FIG.
- the valve opening 4 is in the region of the window recess 20, but is smaller than this.
- Housing wall is made of sheet metal.
- the thickness of the sheet is less than 5mm, preferably less than 4mm, with a value of less than 3mm being particularly preferred.
- the thickness of the sheet is more than 1 mm. It is in particular a steel sheet.
- the valve opening 4 is formed by the annular opening of a first flange ring 21, i. the flange ring limits the valve opening 4 over its entire circumference.
- the flange ring projects into the region of the window recess 20 of the housing wall 19, specifically over the entire circumference of the flange ring 21.
- the flange 21 Seen in the direction of the axis 5 of the valve opening 4 on the outside of the housing wall 19, the flange 21 is located with a subsequent to its outer periphery portion over its entire circumference behind the housing wall 19. The relative to the axis 5 radial extent of the flange 21 to the outside is thus greater than the corresponding extent of the window recess 20 over the entire circumference of the flange ring 21.
- the flange ring is supported on its side facing away from the closure member 3, i. the valve seat 6 opposite side on the
- the flange 21 has on its housing wall 19 side facing a recess in which the support region of the housing wall 19 is located.
- Depression connects to the outer periphery of the flange 21. in the
- Embodiment corresponds to the depth of the recess measured in the direction of the axis 5 at least substantially the thickness of the sheet of the housing wall 19. Conveniently, the deviation of the depth of the recess of the thickness of the sheet of the housing wall 19 is less than 30% of the thickness of the sheet
- the thickness of the flange ring 21 is more than three times, preferably more than five times the thickness of the housing wall 19. The reference to the radial direction to the axis 5 of the valve opening 4
- the flange 21 has formed in the form of blind holes
- Threaded Holes 22 The threaded bores start from the surface of the flange ring 21 directed towards the outside of the valve housing 1 (ie lie on the the valve seat 6 opposite side of the flange 21).
- the threaded holes 22 are in this case in a region of the flange ring 21, seen in the direction of the axis 5 of the valve opening 4 in the region of
- Window recess 20 is located.
- the threaded holes 22 could also be located radially outside the window recess 20, wherein the housing wall 19 would then have corresponding holes through which the threaded holes 22 would be accessible.
- valve seat 6 At its directed to the interior 2 of the valve housing 1 axial surface of the flange 21 forms the valve seat 6. In the exemplary embodiment, it has for this purpose a sealing surface on which the seal 7 rests in the closed state of the vacuum valve.
- the seal could also be arranged on the flange ring, for example in a groove or vulcanized, and the closure member 3 could have a sealing surface cooperating with the seal.
- the flange 21 is connected via mounting screws 23 with the housing wall 19.
- the flange 21 has at its the valve seat. 6
- blind holes are formed and aligned with holes 25 in the housing wall 19.
- the mounting screws 23 are through the holes 25 in the
- an elastomeric sealing ring 26 is disposed between the housing wall 19 and the flange 21, which is relative to the axis 5 radially outside of the mounting screws 23.
- the sealing ring 26 can in this case be arranged as shown in a groove of the flange ring.
- the sealing ring 26 may also be omitted (see below).
- the vacuum unit 27 communicates, via the flange 21.
- the vacuum unit 27 is, for example, a vacuum chamber. It could also be, for example, a pipeline.
- the vacuum unit 27 has a connection flange 28 for connection to the flange ring 21.
- the connection flange 28 is formed by the side wall of the vacuum unit 27 having the opening 29.
- this side wall has through holes 30 for the passage of
- the head of a respective connecting bolt 31 is supported on an inner side surface of the connecting flange 28.
- the longitudinal extent of the connecting screws 31 are parallel to the axis 5 of the valve opening. 4
- annular seal 32 is disposed of an elastomeric material.
- the seal 32 is located radially relative to the axis 5 within the connecting bolts 31 and seals the flange 21 relative to the connecting flange 28 from.
- the seal 32 is disposed in a groove of the flange ring 21 and is located on a
- the seal 32 could also be arranged in a groove of the connection flange 28 or on the flange ring 21 or on
- Flange 28 be vulcanized. Also on both parts 21, 28 seals could be arranged, which rest in each case on a sealing surface of the other part. Furthermore, an elastomeric sealing ring 33 is arranged between the housing wall 19 and the connecting flange 28, which is connected to the vacuum unit 27
- the sealing ring 33 is located relative to the axis 5 radially outside of the connecting bolts 31 and radially outside the
- Connecting flange 28 is arranged. It could also be vulcanized to the connection flange or the housing wall 19. In connected to the vacuum unit 27 state of the vacuum valve, the housing wall 19 against the flange 21 by the sealing ring 26th
- Housing wall 19 can be applied by the connecting screws 31.
- the mounting screws 23 alone would not lead to sufficient compression of the sealing ring 26 in this case. 4 and 5 it can be seen that between the flange 21 and the housing wall 19 in the region around the sealing ring 26, a gap 34 is present when the vacuum valve is not connected via the flange 21 to the vacuum unit 27. It can be seen from FIGS. 8 and 9 that this gap 34 is closed by the connecting screws 31 in the state connected to the vacuum unit 27. There is then a corresponding gap 35 between the head of the respective mounting screw 23 and the housing wall 19. That the mounting screws 23 are in the connected to the vacuum unit 27 via the flange 21 and the connecting screws 31 state of the vacuum valve without function.
- the vacuum valve is connected via the flange ring 21 to a vacuum unit 27, which has a connection flange 28 projecting radially outward in the manner of a collar.
- the connecting screws 31, which in turn pass through holes 30 through the connecting flange 28 and into the threaded holes 22 of the
- Flange rings 21 are screwed here lie outside the vacuum range (while they are in the example of the connection shown in FIGS. 6 to 9 within the vacuum range). Accordingly, no sealing between the connecting flange 28 and the housing wall 19 is required and the sealing ring 33 shown in FIGS. 6 to 9 can be omitted.
- the connection between the vacuum valve and the vacuum unit 27 is the same as described above.
- the valve housing 1 has in addition to the first housing wall 19 one of the first housing wall 19 opposite, planar in the embodiment second
- Housing wall 36 made of sheet metal.
- the housing wall 36 has a
- the second valve opening 38 is bounded by a solid second flange 39 over its entire circumference.
- the second flange 39 serves for the vacuum-tight connection of the vacuum valve to another
- Vacuum unit 40 wherein the interior 2 of the valve housing 1 communicates via the second valve opening 38 with the interior of the vacuum unit 40.
- the axis 41 of the second valve opening 38 is in the illustrated embodiment with the axis 5 of the first valve opening 4 match. In other words,
- these axes could also be aligned parallel to each other, but offset from each other, or be aligned at an angle to each other.
- the shape and size of the second valve opening 38 corresponds to the shape and size of the first valve opening 4. Also
- Valve seat for the closure member 3 is formed. Apart from this difference correspond to the formation of the second flange 39, the second housing wall 36, their mutual connection via mounting screws 23 and the
- first and second housing walls 19, 36 which could also be referred to as the front and rear housing wall of the valve housing 1, extending side walls 42, 43 of the valve housing 1, which the interior 2
- Embodiment also formed of sheet metal.
- sheets which form the housing walls 19, 36 may have bent ends which each form part of the respective side wall 42, 43. The together
- abutting edges of the bent portions are welded together.
- upper and lower flange 44, 45 of sheet metal with which a solid bottom part 46 and a solid cover part 47 of the valve housing. 1 be screwed.
- the flange parts 44, 45 have screw sleeves for this purpose.
- Interior 2 of the valve housing 1 each have an elastomeric sealing ring 48, 49 are arranged.
- valve rods 8 are led out sealed, for example by means of elastomeric sealing rings or means
- Valve housing 1 and the other valve opening is intended by a
- FIGS. 15 and 16 show a second embodiment of a vacuum valve according to the invention.
- the vacuum valve corresponds to the vacuum valve shown in FIGS. 1 to 14, except for the following differences:
- the closure member 3 is moved straight from its open position in the open state of the vacuum valve into its closed position in the closed state of the vacuum valve.
- the at least one valve rod 8, to which the closure member 3 is attached is displaced in a straight line in the direction of its longitudinal axis by the valve drive 10.
- the valve drive 10 may for example be formed by a single piston-cylinder unit whose piston rod is connected to the at least one valve rod 8 or forms the valve rod 8.
- the seal arranged on the closure member 3 and the sealing surface arranged on the valve seat 6 have a three-dimensional shape here. The seal could too be arranged on the valve seat 6 and the sealing surface on the closure member 3.
- Vacuum valves formed in this form closure members and valve seats are known, for example from the aforementioned prior art.
- the connections to the vacuum units 27, 40 are the same as described with reference to the first embodiment of the vacuum valve according to the invention.
- Figs. 17 and 18 show a third embodiment of a vacuum valve according to the invention. Apart from the differences described below, the training is the same as described with reference to the first embodiment. Analogously to the second embodiment, the adjustment of the closure member 3 between its open position and its closed position is rectilinear by the at least one valve rod 8 is displaced by the valve drive 10 in the axial direction.
- the closure member 3 here has a wedge-shaped in cross section training.
- first flange 21 limits a first valve opening 4 and cooperating with the second housing wall 36 second flange 39 defines a second valve opening 38.
- the first flange 21 has a first valve seat 6, to which the
- the second flange ring 39 has a second valve seat 52, to which the closure member 3 is applied in the closed state of the vacuum valve on its second side opposite the first side.
- the first and second valve seats 6, 52 are formed by a sealing surface of the respective flange ring 21, 39 and the closure member 3 is in the closed state of the vacuum valve with first and second arranged on him elastomeric seals 7, 53 at the respective sealing surface.
- a reverse embodiment is again possible, in which the closure member 3, the first and second sealing surface and the respective valve seat 6, 52 has a respective valve opening 4, 38 surrounding elastomeric seal.
- Valve seat 6, 52 are inclined to the axes 5, 41 of the valve openings 4, 38, wherein they are inclined relative to a plane perpendicular to the axes 5, 41 plane in opposite directions.
- FIG. 19 shows a detail of a fourth embodiment of a vacuum valve according to the invention. This may be a modification of the first embodiment described above.
- the modification consists in that the flange ring 21 has through bores 54 for producing a screw connection with a vacuum unit 27.
- the connection flange 28 of the vacuum unit 27, to which the vacuum valve is connected with its valve opening 4, has threaded bores 55. These are designed in the form of blind holes and go from the
- Inner space 2 of the valve housing 1 forth connecting bolts 31 through the through holes 54 in the threaded holes 55 of the connecting flange 28th screwed. Heads of the connecting screws 31 are supported on a surface 2 of the flange ring 21 facing the interior 2.
- At least one seal 32 This can be on the connection flange 28 or on
- Flange ring 21 can be arranged and seals these two parts in the over
- the at least one seal 32 lies radially inside the connecting screws 31.
- the flange 21 is connected via mounting screws 23 with the housing wall 19, which is shown only schematically in Fig. 19.
- a sealing ring between the housing wall 19 and the flange 21 may be omitted in this embodiment.
- the connecting flange 28 In connected to the vacuum unit 27 state of the vacuum valve, the connecting flange 28 relative to the housing wall 19 via at least one
- Sealing ring 33 sealed. This is located radially outside the mounting screws 23.
- the sealing ring 33 may be disposed on the connection flange 28 or on the housing wall 19.
- the connecting screws 31 are thus in this embodiment in the interior of the valve housing 1 associated vacuum area.
- the vacuum valve may be the same as shown in FIGS. 1 to 12 formed.
- the region of the second housing wall 36 with the second flange 39 and the connection with the second vacuum unit 40 may according to the
- FIG. 19 Representation of FIG. 19 may be formed. Also, in such a configuration of these components, the vacuum valve in the region of the first housing wall and the first flange 21 and the connection to the first vacuum unit 27 in the manner shown in Figs. 1 to 14 may be formed.
- the sealing ring 33 could also be omitted and instead could between the flange 21 and the
- Connecting screws 31 is located, and arranged between the flange 21 and the housing wall 19 sealing ring, the radially outside the
- Bracket screws 23 is located, be provided.
- connection flange 28 protruding outwardly in the manner of an annular collar.
- the seal between the flange, the housing wall, with which the flange cooperates, and the connecting flange to which the flange is connected can be done by modified arrangements of seals, for example, when the connecting bolts and through holes through the
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Details Of Valves (AREA)
- Valve Housings (AREA)
- Sliding Valves (AREA)
- Lift Valve (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/649,033 US9581262B2 (en) | 2012-12-05 | 2013-11-13 | Vacuum valve |
KR1020157014434A KR20150091315A (ko) | 2012-12-05 | 2013-11-13 | 진공밸브 |
JP2015545686A JP2016504540A (ja) | 2012-12-05 | 2013-11-13 | 真空バルブおよび真空装置 |
CN201380063792.0A CN104838189A (zh) | 2012-12-05 | 2013-11-13 | 真空阀 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP12008151.8 | 2012-12-05 | ||
EP12008151.8A EP2740979A1 (de) | 2012-12-05 | 2012-12-05 | Vakuumventil |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2014086458A1 true WO2014086458A1 (de) | 2014-06-12 |
Family
ID=47429517
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2013/003412 WO2014086458A1 (de) | 2012-12-05 | 2013-11-13 | Vakuumventil |
Country Status (6)
Country | Link |
---|---|
US (1) | US9581262B2 (de) |
EP (1) | EP2740979A1 (de) |
JP (1) | JP2016504540A (de) |
KR (1) | KR20150091315A (de) |
CN (1) | CN104838189A (de) |
WO (1) | WO2014086458A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102019133555A1 (de) * | 2019-12-09 | 2021-06-10 | Vat Holding Ag | Vakuumventil oder Vakuumtür |
US11971118B2 (en) | 2019-12-09 | 2024-04-30 | Vat Holding Ag | Vacuum valve or vacuum door |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9638335B2 (en) | 2015-01-08 | 2017-05-02 | King Lai Hygienic Materials Co., Ltd. | Double sealing valve |
US10100936B2 (en) * | 2015-04-24 | 2018-10-16 | Flowserve Management Company | Parallel slide gate valves and related methods |
EP3088127A1 (de) * | 2015-04-29 | 2016-11-02 | King Lai Hygienic Materials Co., Ltd. | Schweissstruktur für ein vakuumventil mit einer inneren schweissnaht und verfahren und vorrichtung dafür |
JP6745953B1 (ja) * | 2019-07-23 | 2020-08-26 | 株式会社アルバック | 仕切りバルブ |
DE102021108429A1 (de) * | 2021-04-01 | 2022-10-06 | Vat Holding Ag | Dichtungsträgerring für ein Ventil |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB990624A (en) * | 1960-09-06 | 1965-04-28 | Vacuum Res Cambridge Ltd | Improvements in and relating to fluid control valve structures |
US3198484A (en) * | 1962-12-20 | 1965-08-03 | Standard Fittings Company | Sheet metal valve construction |
DE1286360B (de) * | 1965-01-15 | 1969-01-02 | Grove Valve & Regulator Co | Flachdrehschieber |
DE3724465A1 (de) * | 1986-07-23 | 1988-01-28 | Boc Group Inc | Absperrschieber mit magnetverschluss zur verwendung bei vakuumgeraet |
DE3720001A1 (de) * | 1987-06-15 | 1989-01-05 | Hubert Boesch | Vakuumventil |
US20110006236A1 (en) * | 2009-07-08 | 2011-01-13 | Confluence Solar, Incorporated | Retractable and expandable water cooled valve gate useful for sealing a hot processing chamber |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3198384A (en) | 1962-09-18 | 1965-08-03 | Anderson George Willard | Inflating means for life saving devices |
US3647178A (en) * | 1970-09-24 | 1972-03-07 | Balon Corp | High-pressure low-torque valve assembly |
US3844531A (en) * | 1973-05-29 | 1974-10-29 | N Grengs | Slide valve |
CH582842A5 (de) | 1974-07-15 | 1976-12-15 | Vat Ag | |
US4238111A (en) * | 1978-08-04 | 1980-12-09 | Torr Vacuum Products, Inc. | Gate valve for use with vacuum equipment |
DE2927369C2 (de) | 1979-07-06 | 1986-08-07 | Martin Lohse GmbH & Co KG, 7920 Heidenheim | Flachschieber für Werkstoffverschleiß verursachende Stoffströme |
US4543981A (en) * | 1981-11-26 | 1985-10-01 | Uss Engineers & Consultants, Inc. | Sliding gate valves |
DE3209217C2 (de) | 1982-03-13 | 1985-10-03 | Siegfried Haag Schertler | Schiebeventil |
DE3717724A1 (de) | 1987-05-26 | 1988-12-08 | Schertler Siegfried | Ventilschieber mit einem schiebergehaeuse |
DE3831249A1 (de) | 1988-09-14 | 1990-03-22 | Schertler Siegfried | Ventilschieber |
CN2421463Y (zh) * | 1999-12-08 | 2001-02-28 | 张恒祥 | 组合式耐磨排渣闸阀 |
US6431518B1 (en) | 2001-01-11 | 2002-08-13 | Vat Holding Ag | Vacuum valve |
US6685163B2 (en) | 2002-02-26 | 2004-02-03 | Vat Holding Ag | Vacuum valve |
US7011294B1 (en) | 2004-09-08 | 2006-03-14 | Vat Holding Ag | Vacuum valve |
KR101522324B1 (ko) | 2007-05-18 | 2015-05-21 | 브룩스 오토메이션 인코퍼레이티드 | 로드 락 빠른 펌프 벤트 |
DE102007034927A1 (de) * | 2007-07-24 | 2009-02-05 | Vat Holding Ag | Verfahren zur Steuerung oder Regelung eines Vakuumventils |
DE102008049353A1 (de) | 2008-09-29 | 2010-04-08 | Vat Holding Ag | Vakuumventil |
DE102008051349B3 (de) * | 2008-10-15 | 2009-11-12 | Vat Holding Ag | Vakuumventil |
JP4803541B2 (ja) * | 2008-11-18 | 2011-10-26 | Smc株式会社 | ゲートバルブ |
DE102008061315B4 (de) | 2008-12-11 | 2012-11-15 | Vat Holding Ag | Aufhängung einer Ventilplatte an einer Ventilstange |
DE102010053411B4 (de) * | 2009-12-15 | 2023-07-06 | Vat Holding Ag | Vakuumventil |
KR101762986B1 (ko) | 2010-01-25 | 2017-07-28 | 배트 홀딩 아게 | 진공 밸브 |
JP5725783B2 (ja) | 2010-09-30 | 2015-05-27 | 株式会社ブイテックス | バルブ装置 |
-
2012
- 2012-12-05 EP EP12008151.8A patent/EP2740979A1/de not_active Withdrawn
-
2013
- 2013-11-13 KR KR1020157014434A patent/KR20150091315A/ko not_active Application Discontinuation
- 2013-11-13 US US14/649,033 patent/US9581262B2/en not_active Expired - Fee Related
- 2013-11-13 WO PCT/EP2013/003412 patent/WO2014086458A1/de active Application Filing
- 2013-11-13 CN CN201380063792.0A patent/CN104838189A/zh active Pending
- 2013-11-13 JP JP2015545686A patent/JP2016504540A/ja not_active Ceased
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB990624A (en) * | 1960-09-06 | 1965-04-28 | Vacuum Res Cambridge Ltd | Improvements in and relating to fluid control valve structures |
US3198484A (en) * | 1962-12-20 | 1965-08-03 | Standard Fittings Company | Sheet metal valve construction |
DE1286360B (de) * | 1965-01-15 | 1969-01-02 | Grove Valve & Regulator Co | Flachdrehschieber |
DE3724465A1 (de) * | 1986-07-23 | 1988-01-28 | Boc Group Inc | Absperrschieber mit magnetverschluss zur verwendung bei vakuumgeraet |
DE3720001A1 (de) * | 1987-06-15 | 1989-01-05 | Hubert Boesch | Vakuumventil |
US20110006236A1 (en) * | 2009-07-08 | 2011-01-13 | Confluence Solar, Incorporated | Retractable and expandable water cooled valve gate useful for sealing a hot processing chamber |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102019133555A1 (de) * | 2019-12-09 | 2021-06-10 | Vat Holding Ag | Vakuumventil oder Vakuumtür |
WO2021115924A1 (de) | 2019-12-09 | 2021-06-17 | Vat Holding Ag | Vakuumventil oder vakuumtür |
US20240102581A1 (en) * | 2019-12-09 | 2024-03-28 | Vat Holding Ag | Vacuum valve or vacuum door |
US11971118B2 (en) | 2019-12-09 | 2024-04-30 | Vat Holding Ag | Vacuum valve or vacuum door |
Also Published As
Publication number | Publication date |
---|---|
US9581262B2 (en) | 2017-02-28 |
CN104838189A (zh) | 2015-08-12 |
KR20150091315A (ko) | 2015-08-10 |
US20150345662A1 (en) | 2015-12-03 |
JP2016504540A (ja) | 2016-02-12 |
EP2740979A1 (de) | 2014-06-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP2215387B1 (de) | Vakuumventil | |
WO2014086458A1 (de) | Vakuumventil | |
DE102008061315B4 (de) | Aufhängung einer Ventilplatte an einer Ventilstange | |
DE102007030006B4 (de) | Vakuumventil | |
DE3224387C2 (de) | ||
WO2011091455A1 (de) | TÜR ZUM VERSCHLIEßEN EINER ÖFFNUNG | |
DE102007025974A1 (de) | Vakuumventil | |
DE4004094A1 (de) | Verschlussvorrichtung fuer eine rohrleitung zum transport von losen produkten | |
AT407431B (de) | Wippenventil | |
WO2017045991A1 (de) | Kolben für eine brennkraftmaschine | |
DE1550268B1 (de) | Membranventil zur steuerung eines druckmittelstromes | |
WO2004023009A1 (de) | Vorrichtung zum antrieb für doppelsitzventile | |
DE2633443A1 (de) | Schieberventil | |
DE2523667C2 (de) | ||
DE2945585A1 (de) | Hydraulische kippvorrichtung | |
DE2365565A1 (de) | Stroemungsmittel-steuervorrichtung | |
DE10358519A1 (de) | Dichtungselement für Schwenkmotor | |
WO2016206966A1 (de) | Steuerungsvorrichtung für eine pneumatische kolben-zylinder-einheit zum verstellen eines verschlussgliedes eines vakuumventils | |
EP1910721B1 (de) | 3-wegeventil | |
DE3326797A1 (de) | Schiebereinrichtung | |
DE10139772A1 (de) | Pneumatische Funktionseinheit für Druckluftbremsen | |
EP0305549B1 (de) | Kammer zum entzundern von flachstahl mit schleifpulver | |
EP1674770B1 (de) | Metallische Flachdichtung | |
AT511372A1 (de) | Vakuumventil | |
EP1982090A1 (de) | Scheibenbremse, insbesondere für nutzfahrzeuge |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 13795688 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2015545686 Country of ref document: JP Kind code of ref document: A |
|
ENP | Entry into the national phase |
Ref document number: 20157014434 Country of ref document: KR Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 14649033 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 13795688 Country of ref document: EP Kind code of ref document: A1 |