WO2014201794A1

WO2014201794A1 - Array substrate line detection device and detection method

Info

Publication number: WO2014201794A1
Application number: PCT/CN2013/086455
Authority: WO
Inventors: 王洪惠
Original assignee: 京东方科技集团股份有限公司; 北京京东方显示技术有限公司
Priority date: 2013-06-20
Filing date: 2013-11-01
Publication date: 2014-12-24
Also published as: CN103308817A; US9891264B2; CN103308817B; US20140375347A1

Abstract

An array substrate line detection device and detection method, relating to the technical field of line detection. The detection method comprises: arranging an input end sensor (30) at a signal input end of a wiring to be detected, arranging one of output end sensors (40, 41, 42, 43) at a signal output end of the wiring to be detected, and arranging the remaining of the output end sensors (40, 41, 42, 43) at a signal output end of a wiring adjacent to the wiring to be detected; measuring an output voltage of the wiring to be detected through a voltage detector; and according to the measured output voltage, judging the line conduction situation of the wiring to be detected. When a sensor conducts line scanning, for short circuit or broken circuit, a specific position coordinate can be directly found without scanning by means of a PDS or an AOI, thereby reducing processes, saving detection time, and saving production costs of devices.

Description

Array line detection device and detection method

The present invention relates to the field of line detection technology, and in particular to a line detection device and a detection method suitable for an array substrate. Background technique

The array substrate of the thin film transistor liquid crystal display (tube: TFT-LCD) is manufactured through a complicated process, and the circuit on the substrate is easily broken and short-circuited, and the circuit breaker and short circuit on the substrate are detected and repaired to improve the yield of the product. Accelerating the detection speed of the detection device and reducing the hardware structure of the detection device can achieve the purpose of improving detection efficiency and saving cost.

There are a large number of parallel wires in the array substrate of the TFT-LCD. The parallel wires generally include gate lines and data lines. When such parallel wires are broken and short-circuited due to particles or metal residues, the existing detection methods need to be The line detection sensor (English name Line Detect Sensor, the tube is called LDS) performs line scan to find out the position of the whole bad line, as shown in Figure 1, taking the gate line 1 as an example, and setting the signal input end of the gate line 1 The voltage input terminal 2 and the input terminal sensor 3 connected to the voltage input terminal 2 are provided with an output terminal sensor 4 at the signal output end of the gate line 1, and the output terminal sensor 4 is connected to the equivalent resistor 5; FIG. 2 is the LDS. The equivalent circuit diagram of the detection device, the direction of the arrow in the figure is the signal transmission direction, and V _in is the input voltage, V. _Ut is the output voltage, C _{1 ()} is the capacitance of the input sensor, C ₂ . For the capacitance of the output sensor, . For the equivalent resistance of the wiring to be tested, R ₂ . Is the resistance of the equivalent resistor 5. After the LDS is detected, the position detection sensor (English name Position Detect Sensor, PDS) or the automatic optical detector (English name Auto Optical Inspection, AOI) is used to scan the defective line to find the defective line. Bad specific location coordinates. The above-mentioned conventional detection methods have many processes, the detection speed is slow, and the cost is high. Summary of the invention

(1) Technical problems to be solved

The technical problem to be solved by the present invention is how to reduce the process of detecting the line of the array substrate to save cost.

(2) Technical plan

In order to solve the above technical problem, the present invention provides an array substrate line detecting device, which Includes:

Voltage input terminal;

An input sensor, wherein the input sensor is connected to the voltage input end;

Equivalent resistor

a voltage detector, the voltage detector is connected in parallel with the equivalent resistor;

At least two output sensors are respectively connected to the equivalent resistor.

Further, the wiring to be tested is a gate line, and the at least two output end sensors include a first output end sensor, a second output end sensor, and a third output end sensor, wherein the first output end sensor is disposed on the gate line The signal output terminals, the second and third output terminals are respectively disposed at signal output ends of the two common electrodes adjacent to the gate lines.

Further, the wire to be tested is a data line, and the at least two output sensors include a first output sensor and a second output sensor, wherein the first output sensor is disposed at a signal output end of the data line, The two output sensors are disposed at a signal output end of the data line adjacent to the data line.

The present invention also provides a detection method based on the above array substrate line detecting device, which comprises the following steps:

The input end sensor is disposed at a signal input end of the wire to be tested, and the first output end sensor of the at least two output end sensors is disposed at a signal output end of the wire to be tested, and the remaining output end sensors are provided a signal output end of the wiring adjacent to the wiring to be tested;

Measuring an output voltage of the wiring to be tested by a voltage detector;

The measured output voltage is compared with a normal output voltage value to determine the line conduction of the wiring to be tested.

Further, the wiring to be tested is a gate line, and the at least two output end sensors include a first output end sensor, a second output end sensor, and a third output end sensor, wherein the first output end sensor is disposed on the The signal output ends of the gate lines, the second and third output terminals are respectively disposed at signal output ends of the two common electrodes adjacent to the gate lines.

Further, the wire to be tested is a data line, and the at least two output sensors include a first output sensor and a second output sensor, wherein the first output sensor is disposed at a signal output end of the data line The second output sensor is disposed at a signal output end of the data line adjacent to the data line.

Further, when the wiring to be tested has a signal output but is inconsistent with a normal value, it is determined to be A short circuit occurs in the measurement wiring, and the length of the position zero distance of the position where the short circuit occurs is calculated according to the output voltage value of the wiring to be tested measured by the voltage detector.

Further, when the wiring to be tested has no signal output, it is determined that the wiring to be tested is disconnected, and the input end sensor is moved toward the output end of the wiring to be tested until the output end sensor detects the signal.

Further, when the input end sensor moves to the output end sensor to detect a signal, the length of the positional deviation coordinate zero point at which the disconnection occurs is calculated according to the output voltage value of the wiring to be tested measured by the voltage detector.

Further, after the step of determining the line conduction condition of the to-be-tested wiring according to the measured output voltage of the to-be-measured wiring, the method further comprises the steps of: locating all the output end sensors perpendicular to the to-be-tested The length of the wiring is moved by the position of one detecting unit to measure the line conduction of the next detecting unit.

(3) Beneficial effects

The array substrate line detecting device and the detecting method provided by the above technical solution can directly find the specific position coordinates when the sensor performs line scanning, and can directly find the specific position coordinates by using the PDS or the AOI, thereby reducing the number of operations. , saving inspection time, thereby saving equipment production costs. DRAWINGS

1 is a schematic diagram of a conventional LDS detecting device;

Figure 2 is an equivalent circuit diagram of the existing LDS detection method;

3 is a schematic diagram of a line detecting device under a normal circuit according to an embodiment of the present invention; FIG. 4 is an equivalent circuit diagram of a line detecting device under a normal circuit according to an embodiment of the present invention; FIG. 5 is a line according to an embodiment of the present invention. a schematic diagram of the detecting device under a short circuit;

6 is a schematic diagram of a line detecting device under a short circuit according to an embodiment of the present invention;

7 is a schematic diagram of a line detecting device under an open circuit according to an embodiment of the present invention;

Figure 8 is a schematic illustration of a line detecting device under open circuit in accordance with an embodiment of the present invention.

Among them, 1, the gate line; 2, the voltage input terminal; 3, the input sensor; 4, the output sensor; 5, the equivalent resistor; 6, the common electrode; 7, the pixel area; 10, the gate line; 20, the voltage Input; 30, input sensor; 41, first output sensor; 42, second output sensor; 43, third output sensor; 50, equivalent resistor; 60, common electrode; 70, pixel area; 80. Voltage detector. detailed description

The specific embodiments of the present invention are further described in detail below with reference to the drawings and embodiments. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention. Embodiment 1

As shown in FIG. 3, an array substrate line detecting device according to an embodiment of the present invention is shown, which includes: a voltage input terminal 20; an input terminal sensor 30, which is connected to a voltage input terminal 20; The resistor 50, the equivalent resistor 50 may be an equivalent resistance of a wire connected to the output sensor of the line detecting device, or may be a separately connected resistor; a voltage detector 80, the voltage detector 80 and the equivalent The resistors 50 are connected in parallel for measuring the output voltage of the wiring to be tested; at least two output terminals are respectively connected to the equivalent resistor 50. Among them, the input sensor 30 and the output sensor are line detection sensors.

The wiring to be tested in this embodiment is a gate line 10, and the at least two output terminals include a first output end sensor 41, a second output end sensor 42, and a third output end sensor 43, wherein the first output end sensor 41 The second output end sensor 42 and the third output end sensor 43 are respectively disposed at the signal output end of the two common electrodes 60 adjacent to the gate line 10, adjacent to the gate line 10, at the signal output end of the gate line 10. The two common electrodes are: one common electrode is located on one side of the gate line 10 (as shown in FIG. 3, the upper side of the gate line 10), and the other common electrode is located on the other side of the gate line 10 (as shown in FIG. 3, The lower side of the gate line 10) is specifically located on the side of the pixel region on the other side of the gate line 10 (as shown in FIG. 3, the lower side of the pixel region on the lower side of the gate line 10).

In this embodiment, the gate line 10 and the common electrode adjacent to both sides of the gate line are used as a detecting unit, and each time a line detecting operation of the detecting unit is performed, when the detecting unit is completed, the moving detecting unit is integer multiples. The position is detected by the line of the next detecting unit, whereby the detection position can be moved along the grid lines one by one, thereby realizing line detection for each gate line.

During the detection process, the input terminal sensor 30 is placed at the signal input end of the gate line, the voltage input terminal 20 inputs the voltage, the input terminal sensor 30 detects the input voltage signal, and transmits the voltage signal through the gate line, when the first output end sensor 41 When a normal output voltage signal is detected, it indicates that the detected gate line is normally turned on, and there is no short circuit or open circuit, as shown in FIGS. 3 and 4, at this time, the second output end sensor 42 and the third output end. Sensor 43 has no signal. When the output voltage signal detected by the first output end sensor 41 does not coincide with the normal output voltage, it indicates that the detected gate line has a short circuit phenomenon. At this time, if the second output end sensor 42 has a signal transmission, the A short circuit occurs between the common electrode 60 corresponding to the second output end sensor 42 and the gate line, as shown in FIG. 5 and FIG. 6; if the third output end sensor 43 has signal transmission, the third output end sensor 43 is illustrated. A short circuit occurs between the second output terminal sensor 42 and the third output terminal sensor 43. Therefore, a short circuit occurs between the two common electrodes and the gate line.

When the first output terminal sensor 41 does not receive a signal, it indicates that the gate line 10 is broken. Embodiment 2

The array substrate line detecting device of this embodiment differs from the first embodiment only in that: the wire to be tested is a data line, and the at least two output sensors include a first output sensor and a second output sensor, wherein the first The output end sensor is disposed at a signal output end of the data line, and the second output end sensor is disposed at a signal output end of the data line adjacent to the data line.

In this embodiment, each set of two adjacent data lines serves as a detecting unit, and each time a line detecting operation of one detecting unit is performed, when the detecting unit of the one detecting unit completes the position of the integer multiple of the moving detecting unit, the next one is performed. The line detection of the detecting unit makes it possible to move the detection position along every two data lines, thereby realizing line detection for each data line. The two output sensors in each detection unit are set as a first output sensor and a second output sensor.

During the detection process, the input sensor is placed at the signal input end of one of the data lines, the voltage input terminal inputs the voltage, the input terminal sensor detects the input voltage signal, and transmits the voltage signal via the data line, wherein the first output The end sensor and the input sensor are connected to the same data line. When the first output end sensor detects a normal output voltage signal, it indicates that the detected data line is normally turned on, and there is no short circuit or open circuit. At this time, the second output The end sensor has no signal; when the output voltage signal detected by the first output sensor is inconsistent with the normal output voltage, it indicates that the detected data line is short-circuited. At this time, if the second output sensor has signal transmission , indicating that the detected data line is short-circuited with the data line corresponding to the second output end sensor; when the first output end sensor does not receive the signal, the data line corresponding to the first output end sensor is indicated An open circuit has occurred. Embodiment 3 The embodiment is based on the detection method of the array substrate line detecting device according to the first embodiment, which includes the following steps:

51. The input end sensor is disposed at a signal input end of the wiring to be tested, and the first output end sensor of the at least two output end sensors is disposed at a signal output end of the wiring to be tested, and the remaining output end sensors are provided. a signal output end of the wiring adjacent to the wiring to be tested;

52. Measure the output voltage of the wire to be tested by using a voltage detector;

53. Determine, according to the measured output voltage, a line conduction condition of the wiring to be tested;

54. Move all the output sensors perpendicular to the length of the wire to be tested to move the position of one detecting unit to measure the line conduction of the next detecting unit.

As shown in FIG. 3, the wiring to be tested in this embodiment is a gate line 10, and the at least two output terminals include a first output end sensor 41, a second output end sensor 42, and a third output end sensor 43, wherein The first output end sensor 41 is disposed at the signal output end of the gate line 10, and the second output end sensor 42 and the third output end sensor 43 are respectively disposed at the signal output ends of the two common electrodes 60 adjacent to the gate lines, and the gate The two common electrodes adjacent to the line are respectively: one common electrode is located on one side of the gate line 10, and the other common electrode is located on the side of the pixel area on the other side of the gate line 10.

In this embodiment, the gate line 10 and the common electrode 60 adjacent to both sides of the gate line are used as a detecting unit, and each time a line detecting operation of the detecting unit is performed, when the detecting unit is completed, the moving detecting unit is integer multiples. The position is taken for line detection of the next detection unit.

During the detection process, the input sensor is placed at the signal input end of the gate line, the voltage input terminal inputs the voltage, the input terminal sensor detects the input voltage signal, and transmits the voltage signal through the gate line.

As shown in FIG. 3 and FIG. 4, when the first output terminal sensor detects a normal output voltage signal, it indicates that the detected gate line is normally turned on, and there is no short circuit or open circuit. At this time, the second output terminal sensor There is no signal to the third output sensor. The normal output voltage signal at the signal output end of the gate line is a normal output voltage V calculated by the following formula 1 when the gate line is turned on normally,

Wherein, the equivalent resistance value of the gate line 10 can be detected by an instrument such as a multimeter, R ₂ is the resistance value of the equivalent resistor 50, and ν is the input voltage of the voltage input terminal 20, ω. For the angular frequency of the input sensor 30, C. For the capacitance of the input sensor 30, _ωι is the first output sensor 41 The angular frequency is the capacitance of the first output sensor 41.

The output voltage signal V detected by the first output terminal sensor 41 measured by the voltage detector 80. _Ut with normal output voltage V. _{When ut} 'inconsistent, it indicates that the detected gate line has a short circuit. At this time, if the second output end sensor 42 has a signal transmission, the common electrode 60 and the gate line 10 corresponding to the second output end sensor 42 are illustrated. A short circuit occurs between the common electrode 60 and the gate line 10 corresponding to the third output end sensor 43 as shown in FIG. 5 and FIG. If both the second output terminal sensor 42 and the third output terminal sensor 43 have signals, it is indicated that a short circuit occurs between the two common electrodes and the gate line. The current gate line 10 and the two common electrodes 60 adjacent thereto When one of the common electrodes is short-circuited, the length of the short-circuited position from the coordinate zero point can be obtained by the following formula 2:

( 2 )

R^V

V out

(6)

Wherein, the signal input end of the gate line 10 is the coordinate zero point, and L is the total length of the gate line 10, X! The distance from the position zero point of the position where the short circuit occurs; V _in is the input voltage of the voltage input terminal 20, V. _Ut is the output voltage of the gate line 10 measured by the voltage detector 80; Zj is the impedance from the position where the short circuit occurs to the output sensor (including the output sensor), and Z ₂ is from the signal input terminal to the output The position of the short circuit and the impedance of the equivalent resistor 50.

R is an equivalent resistance value of the gate line 10 unit length, wherein

R,

L

It is the equivalent resistance value of the gate line 10.

r is the common resistance value of the common electrode 60 short-circuited to the gate line 10, r = ―

L,

^ is the equivalent resistance value of the common electrode 60 which is short-circuited with the gate line 10.

R ₂ is the resistance of the equivalent resistor 50;

ω. For the angular frequency of the input sensor 30, C. For the capacitance of the input terminal sensor 30, _ωι is the angular frequency of the first output end sensor 41, which is the capacitance of the first output end sensor 41, and _coi is the output end of the signal output end of the wiring short-circuited with the wiring to be tested. The angular frequency, Q is the capacitance of the output sensor of the signal output end of the wiring short-circuited with the wiring to be tested, where i is a natural number greater than 2, i is 2 or 3 in this embodiment, and ω ₂ is the second output The angular frequency of the end sensor 42, C ₂ is the capacitance of the second output sensor 42, ω ₃ is the angular frequency of the third output sensor 43, and C ₃ is the capacitance of the third output sensor 43.

As shown in FIG. 7 and FIG. 8, when the voltage detector 80 does not detect the output signal of the gate line, it can be determined that the gate line is broken, and the first output terminal sensor 41 does not receive the signal. At this time, the input terminal sensor 30 is Moving to the output end of the gate line 10 until the first output end sensor 41 detects a signal, the voltage detector 80 can detect a signal, and the position of the broken line of the gate line 10 from the coordinate zero point x ₂ can be obtained by the following formula 7 Find:

The f-port formula 9 is derived:

Wherein, the signal input end of the gate line 10 is the coordinate zero point, and the x ₂ is the position where the disconnection occurs. The length of the zero point, L is the total length of the grid line.

R is an equivalent resistance value of the gate line 10 unit length, where R is.

L

V _in is the voltage at the voltage input 20, V. _Ut is the output voltage of the gate line measured by the voltage detector 80, and R ₂ is the resistance of the equivalent resistor 50.

ω. For the angular frequency of the input sensor 30, C. For the capacitance of the input sensor 30, _ωι is the angular frequency of the first output sensor 41, which is the capacitance of the first output sensor 41. Embodiment 4

The embodiment is a detection method of the array substrate line detecting device based on the second embodiment. The fourth embodiment differs from the third embodiment only in that the wire to be tested is a data line, and correspondingly, the at least two output sensors are The first output end sensor and the second output end sensor are disposed, wherein the first output end sensor is disposed at a signal output end of the data line, and the second output end sensor is disposed at a signal output of the data line adjacent to the data line In the end, the detection process and the calculation process are the same as those in the third embodiment. It is only necessary to change the gate line into one of the data lines, and the two common electrodes that are short-circuited or disconnected from the gate line become another data line.

In this embodiment, each set of two adjacent data lines serves as a detecting unit, and each time a line detecting operation of one detecting unit is performed, when the detecting unit of the one detecting unit completes the position of the integer multiple of the moving detecting unit, the next one is performed. Line detection of the detection unit. The two output sensors in each detection unit are set as a first output sensor and a second output sensor.

The array substrate line detecting device and the detecting method provided by the above technical method can directly find the specific position coordinates when the sensor performs line scanning, and can directly find the specific position coordinates by using the PDS or the ΑΟΙ, thereby reducing the process and saving. The inspection time saves the production cost of the equipment.

The above description is only a preferred embodiment of the present invention, and it should be noted that those skilled in the art can make several improvements and substitutions without departing from the technical principles of the present invention. It should also be considered as the scope of protection of the present invention.

Claims

claims

1. An array substrate circuit detection device, including:

voltage input terminal;

An input sensor, the input sensor is connected to the voltage input terminal;

equivalent resistor;

At least two output sensors are respectively connected to the equivalent resistors.

2. The array substrate line detection device according to claim 1, wherein the wiring to be tested is a gate line, and the at least two output sensors include a first output sensor, a second output sensor and a third output sensor. Sensor, wherein the first output terminal sensor is provided at the signal output terminal of the gate line, and the second and third output terminal sensors are respectively provided at the signal output terminals of two common electrodes adjacent to the gate line.

3. The array substrate line detection device according to claim 1, wherein the wiring to be tested is a data line, and the at least two output sensors include a first output sensor and a second output sensor, wherein the first output The end sensor is provided at the signal output end of the data line, and the second output end sensor is provided at the signal output end of the data line adjacent to the data line.

4. A detection method based on the array substrate line detection device according to any one of claims 1-3, including the following steps:

The input sensor is set at the signal input end of the wiring to be tested, the first output sensor among the at least two output sensors is set to the signal output end of the wiring to be tested, and the remaining output sensors are set to At the signal output end of the wiring adjacent to the wiring under test;

Measure the output voltage of the wiring under test with a voltage detector;

Compare the measured output voltage with the normal output voltage value to determine the conductivity of the wiring under test.

5. The detection method according to claim 4, wherein the wiring to be tested is a gate line, and the at least two output sensors include a first output sensor, a second output sensor and a third output sensor. , wherein the first output terminal sensor is provided at the signal output terminal of the gate line, and the second and third output terminal sensors are respectively provided at the signal output terminals of the two common electrodes adjacent to the gate line.

6. The detection method according to claim 5, wherein the wiring to be tested is a data line, and the at least two output sensors include a first output sensor and a second output sensor, wherein the An output sensor is provided at the signal output end of the data line, and a second output sensor is provided at the signal output end of the data line adjacent to the data line.

7. The detection method according to any one of claims 4 to 6, wherein when the wiring to be tested has a signal output but is inconsistent with the normal value, it is judged that the wiring to be tested is short-circuited, and the voltage is detected according to the The instrument measures the output voltage value of the wiring under test and calculates the distance between the position where the short circuit occurs and the zero point of the coordinates.

8. The detection method according to any one of claims 4 to 6, wherein when the wiring to be tested has no signal output, it is determined that the wiring to be tested is open circuited, and the input sensor is moved to the wiring to be tested. The output end of the test wiring moves in the direction until the output end sensor detects a signal.

9. The detection method as claimed in claim 8, wherein when the input sensor moves to the output sensor and detects a signal, the occurrence of the signal is calculated based on the output voltage value of the wiring to be tested measured by the voltage detector. The length of the break position from the coordinate zero point.

10. The detection method according to claim 4, further comprising the following steps after completing the step of determining the line conduction status of the wiring to be tested based on the measured output voltage of the wiring to be tested. : Move all the output sensors perpendicular to the length direction of the wiring to be tested to the position of one detection unit to measure the line continuity of the next detection unit.