An improved atomic layer doping apparatus is disclosed as having multiple doping regions in which individual monolayer species are first deposited and then dopant atoms contained therein are diffused into the substrate. Each doping region is chemically separated from adjacent doping regions. A loading...http://www.google.es/patents/US20020046705?utm_source=gb-gplus-sharePatente US20020046705 - Atomic layer doping apparatus and method
