A polishing apparatus includes a cleaning device for critical cleaning of a top ring or a dressing tool to obtain high quality polishing by minimizing surface damage caused by contaminants originating from the top ring and/or dressing tool. The polishing apparatus includes a polishing table; a workpiece...http://www.google.es/patents/US6319105?utm_source=gb-gplus-sharePatente US6319105 - Polishing apparatus
